JP2013543127A5 - - Google Patents

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Publication number
JP2013543127A5
JP2013543127A5 JP2013537224A JP2013537224A JP2013543127A5 JP 2013543127 A5 JP2013543127 A5 JP 2013543127A5 JP 2013537224 A JP2013537224 A JP 2013537224A JP 2013537224 A JP2013537224 A JP 2013537224A JP 2013543127 A5 JP2013543127 A5 JP 2013543127A5
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JP
Japan
Prior art keywords
light source
coupled
mechanical structure
microelectromechanical sensor
photosensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013537224A
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English (en)
Japanese (ja)
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JP2013543127A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/IB2011/054000 external-priority patent/WO2012059828A2/en
Publication of JP2013543127A publication Critical patent/JP2013543127A/ja
Publication of JP2013543127A5 publication Critical patent/JP2013543127A5/ja
Pending legal-status Critical Current

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JP2013537224A 2010-11-01 2011-09-13 小型で集積化されたマイクロエレクトロメカニカルシステム（メムス）の光学センサアレイ Pending JP2013543127A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US40911110P 2010-11-01 2010-11-01
US61/409,111 2010-11-01
US201161430871P 2011-01-07 2011-01-07
US61/430,871 2011-01-07
PCT/IB2011/054000 WO2012059828A2 (en) 2010-11-01 2011-09-13 Miniaturized integrated micro electo-mechanical systems (mems) optical sensor array

Publications (2)

Publication Number Publication Date
JP2013543127A JP2013543127A (ja) 2013-11-28
JP2013543127A5 true JP2013543127A5 (enExample) 2014-10-16

Family

ID=44774090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013537224A Pending JP2013543127A (ja) 2010-11-01 2011-09-13 小型で集積化されたマイクロエレクトロメカニカルシステム（メムス）の光学センサアレイ

Country Status (9)

Country Link
US (1) US9267923B2 (enExample)
EP (1) EP2635900A2 (enExample)
JP (1) JP2013543127A (enExample)
KR (1) KR101838476B1 (enExample)
CN (1) CN103430018B (enExample)
BR (1) BR112013010927A2 (enExample)
CA (1) CA2816374A1 (enExample)
RU (1) RU2565351C2 (enExample)
WO (1) WO2012059828A2 (enExample)

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WO2014003557A1 (en) * 2012-06-28 2014-01-03 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno High throughput microscopy device
GB201215546D0 (en) * 2012-08-31 2012-10-17 Infinitesima Ltd Multiple probe detection and actuation
ITTO20120789A1 (it) * 2012-09-14 2012-12-14 Fond Istituto Italiano Di Tec Nologia Iit Dispositivo automatico di misura, procedimento di misura mediante tale dispositivo e sistema dotato di tale dispositivo.
US9352256B2 (en) * 2013-03-14 2016-05-31 The Boeing Company Filtration systems and methods for filtering particles of a predetermined substance
US9290219B2 (en) 2013-03-14 2016-03-22 The Boeing Company Locomotion system and method of controlling a robotic device
US20140260688A1 (en) * 2013-03-14 2014-09-18 The Boeing Company Sensor assembly using micropillars and method of use
CN105659079A (zh) * 2013-09-09 2016-06-08 Koc 大学 用于粘度和质量检测的小型化集成微机电系统（mems）光学传感器阵列
US9557306B2 (en) * 2013-12-20 2017-01-31 Honeywell International Inc. Magnetically controlled gas detectors
EP3108283B1 (en) 2014-02-17 2022-05-25 Universität Basel Atomic force microscope measuring device
JP6727198B2 (ja) * 2014-10-28 2020-07-22 マサチューセッツ インスティテュート オブ テクノロジー デジタル的に実装された位相ロックループアレイを用いる多数の共振の同時振動および周波数追跡
WO2017058121A1 (en) * 2015-09-30 2017-04-06 Koc Universitesi A sensing device using fiber based cantilevers embedded in a cartridge
US10006888B2 (en) * 2016-04-21 2018-06-26 The Boeing Company MEMS transducers in a phased array coupled to a flexible substrate using carbon nanotubes for conformal ultrasound scanning
US20200018773A1 (en) * 2016-10-10 2020-01-16 Hewlett-Packard Development Company, L.P. Fluid operation cell with on-chip electrical fluid operation components
US11162886B2 (en) 2017-03-31 2021-11-02 Massachusetts Institute Of Technology Systems, articles, and methods for flowing particles
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JP7410935B2 (ja) 2018-05-24 2024-01-10 ザ リサーチ ファウンデーション フォー ザ ステイト ユニバーシティー オブ ニューヨーク 容量性センサ
CN109650328B (zh) * 2018-12-17 2020-05-19 大连理工大学 一种动态特性测试的激波底座激励装置及其工作方法
US11346755B2 (en) 2019-01-10 2022-05-31 Travera, Inc. Calibration of a functional biomarker instrument
WO2020146727A1 (en) 2019-01-10 2020-07-16 Selim Olcum Identifying cancer therapies
DE102020203910B3 (de) * 2020-03-26 2021-06-17 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Detektieren einer Verunreinigung eines MEMS-Sensorelements

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JP2849697B2 (ja) * 1993-03-12 1999-01-20 工業技術院長 ２自由度振動型マイクロアクチュエータ
RU2148259C1 (ru) * 1998-04-17 2000-04-27 Ставропольский научно-исследовательский противочумный институт Способ детекции макромолекул биосенсорным устройством
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