JP2013543127A - 小型で集積化されたマイクロエレクトロメカニカルシステム（メムス）の光学センサアレイ - Google Patents
小型で集積化されたマイクロエレクトロメカニカルシステム（メムス）の光学センサアレイ Download PDFInfo
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- JP2013543127A JP2013543127A JP2013537224A JP2013537224A JP2013543127A JP 2013543127 A JP2013543127 A JP 2013543127A JP 2013537224 A JP2013537224 A JP 2013537224A JP 2013537224 A JP2013537224 A JP 2013537224A JP 2013543127 A JP2013543127 A JP 2013543127A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
- G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
- G01N33/54366—Apparatus specially adapted for solid-phase testing
- G01N33/54373—Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/01—Indexing codes associated with the measuring variable
- G01N2291/014—Resonance or resonant frequency
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
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- G—PHYSICS
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- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
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- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
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- Analytical Chemistry (AREA)
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- Engineering & Computer Science (AREA)
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- Molecular Biology (AREA)
- Biomedical Technology (AREA)
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- Cell Biology (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Micromachines (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Gyroscopes (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US40911110P | 2010-11-01 | 2010-11-01 | |
| US61/409,111 | 2010-11-01 | ||
| US201161430871P | 2011-01-07 | 2011-01-07 | |
| US61/430,871 | 2011-01-07 | ||
| PCT/IB2011/054000 WO2012059828A2 (en) | 2010-11-01 | 2011-09-13 | Miniaturized integrated micro electo-mechanical systems (mems) optical sensor array |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013543127A true JP2013543127A (ja) | 2013-11-28 |
| JP2013543127A5 JP2013543127A5 (enExample) | 2014-10-16 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013537224A Pending JP2013543127A (ja) | 2010-11-01 | 2011-09-13 | 小型で集積化されたマイクロエレクトロメカニカルシステム（メムス）の光学センサアレイ |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9267923B2 (enExample) |
| EP (1) | EP2635900A2 (enExample) |
| JP (1) | JP2013543127A (enExample) |
| KR (1) | KR101838476B1 (enExample) |
| CN (1) | CN103430018B (enExample) |
| BR (1) | BR112013010927A2 (enExample) |
| CA (1) | CA2816374A1 (enExample) |
| RU (1) | RU2565351C2 (enExample) |
| WO (1) | WO2012059828A2 (enExample) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017194453A (ja) * | 2016-04-21 | 2017-10-26 | ザ・ボーイング・カンパニーＴｈｅ Ｂｏｅｉｎｇ Ｃｏｍｐａｎｙ | コンフォーマル超音波走査用のカーボンナノチューブを用いてフレキシブル基板に結合されたフェーズドアレイのｍｅｍｓトランスデューサ |
| JP2017538921A (ja) * | 2014-10-28 | 2017-12-28 | マサチューセッツ インスティテュート オブ テクノロジー | デジタル的に実装された位相ロックループアレイを用いる多数の共振の同時振動および周波数追跡 |
| US11162886B2 (en) | 2017-03-31 | 2021-11-02 | Massachusetts Institute Of Technology | Systems, articles, and methods for flowing particles |
| US11346755B2 (en) | 2019-01-10 | 2022-05-31 | Travera, Inc. | Calibration of a functional biomarker instrument |
| US11754486B2 (en) | 2017-06-19 | 2023-09-12 | Massachusetts Institute Of Technology | Systems and methods for measuring properties of particles |
| US12362038B2 (en) | 2019-01-10 | 2025-07-15 | Travera, Inc. | Identifying cancer therapies |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2491806B (en) * | 2011-05-25 | 2013-07-10 | Microvisk Ltd | Apparatus and method for measuring properties of a fluid |
| US9664500B2 (en) | 2012-03-08 | 2017-05-30 | Cornell University | Tunable optofluidic apparatus, method, and applications |
| WO2014003557A1 (en) * | 2012-06-28 | 2014-01-03 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | High throughput microscopy device |
| GB201215546D0 (en) * | 2012-08-31 | 2012-10-17 | Infinitesima Ltd | Multiple probe detection and actuation |
| ITTO20120789A1 (it) * | 2012-09-14 | 2012-12-14 | Fond Istituto Italiano Di Tec Nologia Iit | Dispositivo automatico di misura, procedimento di misura mediante tale dispositivo e sistema dotato di tale dispositivo. |
| US9352256B2 (en) * | 2013-03-14 | 2016-05-31 | The Boeing Company | Filtration systems and methods for filtering particles of a predetermined substance |
| US9290219B2 (en) | 2013-03-14 | 2016-03-22 | The Boeing Company | Locomotion system and method of controlling a robotic device |
| US20140260688A1 (en) * | 2013-03-14 | 2014-09-18 | The Boeing Company | Sensor assembly using micropillars and method of use |
| CN105659079A (zh) * | 2013-09-09 | 2016-06-08 | Koc 大学 | 用于粘度和质量检测的小型化集成微机电系统（mems）光学传感器阵列 |
| US9557306B2 (en) * | 2013-12-20 | 2017-01-31 | Honeywell International Inc. | Magnetically controlled gas detectors |
| EP3108283B1 (en) | 2014-02-17 | 2022-05-25 | Universität Basel | Atomic force microscope measuring device |
| WO2017058121A1 (en) * | 2015-09-30 | 2017-04-06 | Koc Universitesi | A sensing device using fiber based cantilevers embedded in a cartridge |
| US20200018773A1 (en) * | 2016-10-10 | 2020-01-16 | Hewlett-Packard Development Company, L.P. | Fluid operation cell with on-chip electrical fluid operation components |
| US10514584B2 (en) * | 2017-08-10 | 2019-12-24 | Sicoya Gmbh | Optical signal generator comprising a phase shifter |
| JP7410935B2 (ja) | 2018-05-24 | 2024-01-10 | ザ リサーチ ファウンデーション フォー ザ ステイト ユニバーシティー オブ ニューヨーク | 容量性センサ |
| CN109650328B (zh) * | 2018-12-17 | 2020-05-19 | 大连理工大学 | 一种动态特性测试的激波底座激励装置及其工作方法 |
| DE102020203910B3 (de) * | 2020-03-26 | 2021-06-17 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verfahren zum Detektieren einer Verunreinigung eines MEMS-Sensorelements |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04191639A (ja) * | 1990-11-26 | 1992-07-09 | Shibata Kagaku Kikai Kogyo Kk | 塵埃粒子の質量濃度の計測方法 |
| JPH06269186A (ja) * | 1993-03-12 | 1994-09-22 | Agency Of Ind Science & Technol | ２自由度振動型マイクロアクチュエータ |
| JP2005537496A (ja) * | 2002-08-29 | 2005-12-08 | バイオスケール，インク． | 共鳴センサーおよび感知システム |
| JP2006220546A (ja) * | 2005-02-10 | 2006-08-24 | Seiko Instruments Inc | ケミカルセンサ |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2148259C1 (ru) * | 1998-04-17 | 2000-04-27 | Ставропольский научно-исследовательский противочумный институт | Способ детекции макромолекул биосенсорным устройством |
| US7148017B1 (en) * | 2000-07-12 | 2006-12-12 | Cornell Research Foundation, Inc. | High sensitivity mechanical resonant sensor |
| ATE346297T1 (de) * | 2002-09-24 | 2006-12-15 | Intel Corp | Nachweis von molecularbindung durch überwachung von rückkopplung kontrollierten auslegerablenkungen |
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- 2011-09-13 KR KR1020137012998A patent/KR101838476B1/ko not_active Expired - Fee Related
- 2011-09-13 CA CA2816374A patent/CA2816374A1/en not_active Abandoned
- 2011-09-13 BR BR112013010927A patent/BR112013010927A2/pt not_active IP Right Cessation
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- 2011-09-13 JP JP2013537224A patent/JP2013543127A/ja active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017538921A (ja) * | 2014-10-28 | 2017-12-28 | マサチューセッツ インスティテュート オブ テクノロジー | デジタル的に実装された位相ロックループアレイを用いる多数の共振の同時振動および周波数追跡 |
| US11143548B2 (en) | 2014-10-28 | 2021-10-12 | Massachusetts Institute Of Technology | Simultaneous oscillation and frequency tracking of multiple resonances via digitally implemented phase-locked loop array |
| JP2017194453A (ja) * | 2016-04-21 | 2017-10-26 | ザ・ボーイング・カンパニーＴｈｅ Ｂｏｅｉｎｇ Ｃｏｍｐａｎｙ | コンフォーマル超音波走査用のカーボンナノチューブを用いてフレキシブル基板に結合されたフェーズドアレイのｍｅｍｓトランスデューサ |
| US11162886B2 (en) | 2017-03-31 | 2021-11-02 | Massachusetts Institute Of Technology | Systems, articles, and methods for flowing particles |
| US11754486B2 (en) | 2017-06-19 | 2023-09-12 | Massachusetts Institute Of Technology | Systems and methods for measuring properties of particles |
| US11346755B2 (en) | 2019-01-10 | 2022-05-31 | Travera, Inc. | Calibration of a functional biomarker instrument |
| US12362038B2 (en) | 2019-01-10 | 2025-07-15 | Travera, Inc. | Identifying cancer therapies |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012059828A3 (en) | 2012-07-26 |
| WO2012059828A2 (en) | 2012-05-10 |
| CN103430018B (zh) | 2016-05-04 |
| CN103430018A (zh) | 2013-12-04 |
| KR20140022768A (ko) | 2014-02-25 |
| RU2565351C2 (ru) | 2015-10-20 |
| BR112013010927A2 (pt) | 2016-09-13 |
| US20140147337A1 (en) | 2014-05-29 |
| KR101838476B1 (ko) | 2018-04-26 |
| CA2816374A1 (en) | 2012-05-10 |
| RU2013125463A (ru) | 2014-12-10 |
| EP2635900A2 (en) | 2013-09-11 |
| US9267923B2 (en) | 2016-02-23 |
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