RU2565351C2 - Миниатюризированная интегральная схема матрицы оптических датчиков, выполненная по принципам микроэлектромеханических систем (mems) - Google Patents

Миниатюризированная интегральная схема матрицы оптических датчиков, выполненная по принципам микроэлектромеханических систем (mems) Download PDF

Info

Publication number
RU2565351C2
RU2565351C2 RU2013125463/28A RU2013125463A RU2565351C2 RU 2565351 C2 RU2565351 C2 RU 2565351C2 RU 2013125463/28 A RU2013125463/28 A RU 2013125463/28A RU 2013125463 A RU2013125463 A RU 2013125463A RU 2565351 C2 RU2565351 C2 RU 2565351C2
Authority
RU
Russia
Prior art keywords
preferred
mems
photodetector
light source
sensor
Prior art date
Application number
RU2013125463/28A
Other languages
English (en)
Russian (ru)
Other versions
RU2013125463A (ru
Inventor
Хакан УРЕЙ
Бурханеттин Эрдем АЛАДЖА
Эрман ТИМУРДОГАН
Original Assignee
Кодж Университеси
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Кодж Университеси filed Critical Кодж Университеси
Publication of RU2013125463A publication Critical patent/RU2013125463A/ru
Application granted granted Critical
Publication of RU2565351C2 publication Critical patent/RU2565351C2/ru

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems ; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366—Apparatus specially adapted for solid-phase testing
    • G01N33/54373—Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/024—Mixtures
    • G01N2291/02466—Biological material, e.g. blood
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Urology & Nephrology (AREA)
  • Hematology (AREA)
  • Optics & Photonics (AREA)
  • Microbiology (AREA)
  • Cell Biology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Biotechnology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Gyroscopes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
RU2013125463/28A 2010-11-01 2011-09-13 Миниатюризированная интегральная схема матрицы оптических датчиков, выполненная по принципам микроэлектромеханических систем (mems) RU2565351C2 (ru)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US40911110P 2010-11-01 2010-11-01
US61/409,111 2010-11-01
US201161430871P 2011-01-07 2011-01-07
US61/430,871 2011-01-07
PCT/IB2011/054000 WO2012059828A2 (en) 2010-11-01 2011-09-13 Miniaturized integrated micro electo-mechanical systems (mems) optical sensor array

Publications (2)

Publication Number Publication Date
RU2013125463A RU2013125463A (ru) 2014-12-10
RU2565351C2 true RU2565351C2 (ru) 2015-10-20

Family

ID=44774090

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2013125463/28A RU2565351C2 (ru) 2010-11-01 2011-09-13 Миниатюризированная интегральная схема матрицы оптических датчиков, выполненная по принципам микроэлектромеханических систем (mems)

Country Status (9)

Country Link
US (1) US9267923B2 (enExample)
EP (1) EP2635900A2 (enExample)
JP (1) JP2013543127A (enExample)
KR (1) KR101838476B1 (enExample)
CN (1) CN103430018B (enExample)
BR (1) BR112013010927A2 (enExample)
CA (1) CA2816374A1 (enExample)
RU (1) RU2565351C2 (enExample)
WO (1) WO2012059828A2 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2491806B (en) * 2011-05-25 2013-07-10 Microvisk Ltd Apparatus and method for measuring properties of a fluid
US9664500B2 (en) 2012-03-08 2017-05-30 Cornell University Tunable optofluidic apparatus, method, and applications
WO2014003557A1 (en) * 2012-06-28 2014-01-03 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno High throughput microscopy device
GB201215546D0 (en) 2012-08-31 2012-10-17 Infinitesima Ltd Multiple probe detection and actuation
ITTO20120789A1 (it) * 2012-09-14 2012-12-14 Fond Istituto Italiano Di Tec Nologia Iit Dispositivo automatico di misura, procedimento di misura mediante tale dispositivo e sistema dotato di tale dispositivo.
US9352256B2 (en) 2013-03-14 2016-05-31 The Boeing Company Filtration systems and methods for filtering particles of a predetermined substance
US9290219B2 (en) 2013-03-14 2016-03-22 The Boeing Company Locomotion system and method of controlling a robotic device
US20140260688A1 (en) * 2013-03-14 2014-09-18 The Boeing Company Sensor assembly using micropillars and method of use
US9846115B2 (en) 2013-09-09 2017-12-19 Koc Universitesi Miniaturized integrated micro electo-mechanical systems (MEMS) optical sensor array for viscosity and mass detection
US9557306B2 (en) * 2013-12-20 2017-01-31 Honeywell International Inc. Magnetically controlled gas detectors
EP3108230B1 (en) 2014-02-17 2019-08-07 Universität Basel Measuring device and method for determining mass and/or mechanical properties of a biological system
WO2016069634A1 (en) * 2014-10-28 2016-05-06 Massachusetts Institute Of Technology Simultaneous oscillation and frequency tracking of multiple resonances via digitally implemented phase-locked loop array
RU2700013C1 (ru) * 2015-09-30 2019-09-12 Кодж Университеси Измерительное устройство, использующее кантилевер на основе волокон, встроенный в картридж
US10006888B2 (en) * 2016-04-21 2018-06-26 The Boeing Company MEMS transducers in a phased array coupled to a flexible substrate using carbon nanotubes for conformal ultrasound scanning
WO2018070984A1 (en) * 2016-10-10 2018-04-19 Hewlett-Packard Development Company, L.P. Fluid operation cell with on-chip electrical fluid operation components
EP3601522A4 (en) 2017-03-31 2021-04-28 Massachusetts Institute of Technology SYSTEMS, ARTICLES AND PROCEDURES FOR FLOW PARTICLES
US11754486B2 (en) 2017-06-19 2023-09-12 Massachusetts Institute Of Technology Systems and methods for measuring properties of particles
US10514584B2 (en) * 2017-08-10 2019-12-24 Sicoya Gmbh Optical signal generator comprising a phase shifter
US12253391B2 (en) 2018-05-24 2025-03-18 The Research Foundation For The State University Of New York Multielectrode capacitive sensor without pull-in risk
CN109650328B (zh) * 2018-12-17 2020-05-19 大连理工大学 一种动态特性测试的激波底座激励装置及其工作方法
US12362038B2 (en) 2019-01-10 2025-07-15 Travera, Inc. Identifying cancer therapies
US11346755B2 (en) 2019-01-10 2022-05-31 Travera, Inc. Calibration of a functional biomarker instrument
DE102020203910B3 (de) * 2020-03-26 2021-06-17 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Detektieren einer Verunreinigung eines MEMS-Sensorelements

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2148259C1 (ru) * 1998-04-17 2000-04-27 Ставропольский научно-исследовательский противочумный институт Способ детекции макромолекул биосенсорным устройством
WO2005043126A2 (en) * 2003-10-27 2005-05-12 Drexel University Piezoelectric cantilever sensors
US7331231B2 (en) * 2003-11-12 2008-02-19 Samsung Electronics Co., Ltd. Apparatus and method for measuring micro mass using oscillation circuit
RU2327984C1 (ru) * 2007-02-19 2008-06-27 Государственное образовательное учреждение высшего профессионального образования Воронежская государственная технологическая академия Многоканальный "электронный нос" на пьезосенсорах
US20080293148A1 (en) * 2004-09-16 2008-11-27 Korean Institute Of Science And Technology Method and System for Detecting Bio-Element

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0830673B2 (ja) * 1990-11-26 1996-03-27 柴田科学器械工業株式会社 塵埃粒子の質量濃度の計測方法
JP2849697B2 (ja) * 1993-03-12 1999-01-20 工業技術院長 ２自由度振動型マイクロアクチュエータ
US7148017B1 (en) 2000-07-12 2006-12-12 Cornell Research Foundation, Inc. High sensitivity mechanical resonant sensor
WO2004038354A2 (en) * 2002-08-29 2004-05-06 Bioscale, Inc. Resonant sensor and sensing system
ATE346297T1 (de) 2002-09-24 2006-12-15 Intel Corp Nachweis von molecularbindung durch überwachung von rückkopplung kontrollierten auslegerablenkungen
US8346482B2 (en) * 2003-08-22 2013-01-01 Fernandez Dennis S Integrated biosensor and simulation system for diagnosis and therapy
US20060257286A1 (en) 2003-10-17 2006-11-16 Adams Jesse D Self-sensing array of microcantilevers for chemical detection
US7207206B2 (en) 2004-02-19 2007-04-24 Ut-Battelle, Llc Chemically-functionalized microcantilevers for detection of chemical, biological and explosive material
US20050262943A1 (en) 2004-05-27 2005-12-01 Glenn Claydon Apparatus, methods, and systems to detect an analyte based on changes in a resonant frequency of a spring element
JP4484061B2 (ja) 2005-02-10 2010-06-16 セイコーインスツル株式会社 ケミカルセンサ
US7584649B2 (en) * 2006-06-02 2009-09-08 Board Of Trustees Of Michigan State University Sensor with microelectro-mechanical oscillators
US8652040B2 (en) * 2006-12-19 2014-02-18 Valencell, Inc. Telemetric apparatus for health and environmental monitoring
CN101135624A (zh) * 2007-04-03 2008-03-05 中国科学技术大学 监测分子构象转变和生化反应的方法及装置
CN101373175A (zh) * 2008-06-28 2009-02-25 张青川 监测大分子构象转变和靶与探针分子生化反应方法和装置
EP3357419A1 (en) * 2009-02-25 2018-08-08 Valencell, Inc. Light-guiding devices and monitoring devices incorporating same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2148259C1 (ru) * 1998-04-17 2000-04-27 Ставропольский научно-исследовательский противочумный институт Способ детекции макромолекул биосенсорным устройством
WO2005043126A2 (en) * 2003-10-27 2005-05-12 Drexel University Piezoelectric cantilever sensors
US7331231B2 (en) * 2003-11-12 2008-02-19 Samsung Electronics Co., Ltd. Apparatus and method for measuring micro mass using oscillation circuit
US20080293148A1 (en) * 2004-09-16 2008-11-27 Korean Institute Of Science And Technology Method and System for Detecting Bio-Element
RU2327984C1 (ru) * 2007-02-19 2008-06-27 Государственное образовательное учреждение высшего профессионального образования Воронежская государственная технологическая академия Многоканальный "электронный нос" на пьезосенсорах

Also Published As

Publication number Publication date
US9267923B2 (en) 2016-02-23
BR112013010927A2 (pt) 2016-09-13
WO2012059828A3 (en) 2012-07-26
CN103430018A (zh) 2013-12-04
KR20140022768A (ko) 2014-02-25
WO2012059828A2 (en) 2012-05-10
CN103430018B (zh) 2016-05-04
EP2635900A2 (en) 2013-09-11
RU2013125463A (ru) 2014-12-10
KR101838476B1 (ko) 2018-04-26
US20140147337A1 (en) 2014-05-29
CA2816374A1 (en) 2012-05-10
JP2013543127A (ja) 2013-11-28

Similar Documents

Publication Publication Date Title
US9267923B2 (en) Miniaturized integrated micro electro-mechanical systems (MEMS) optical sensor array
US20240053268A1 (en) Fluorescence-detected assays on microfluidic chips
JP4958245B2 (ja) 化学マイクロマシン加工マイクロセンサー
JP5657013B2 (ja) 流体サンプル内の分析物を検出するための方法
US9846115B2 (en) Miniaturized integrated micro electo-mechanical systems (MEMS) optical sensor array for viscosity and mass detection
Timurdogan et al. MEMS biosensor for detection of Hepatitis A and C viruses in serum
US7961329B2 (en) Sub-micron surface plasmon resonance sensor systems
US7445938B2 (en) System and method for detecting presence of analytes using gratings
US20070117217A1 (en) Large scale parallel immuno-based allergy test and device for evanescent field excitation of fluorescence
JP2003507723A (ja) カンチレバーアレイブロックのパレットにより微小力を可視的に識別する装置及び方法
CN114112923A (zh) 一种光声微流控探测系统及探测方法
CN109724952B (zh) 一种光纤探头及其制备方法、光纤传感器及其应用
Daaboul et al. Label-free optical biosensors for virus detection and characterization
CN216926576U (zh) 一种光声微流控探测系统
NL2036088B1 (en) Apparatus and methods for simultaneous readout of nanomotion on suspended sheets with adhered micro- and nanoorganisms
Zinoviev et al. Optical biosensor based on arrays of waveguided microcantilevers
Gökçe Development of a parylene bonding based fabrication method for MEMS gravimetric resonant based mass sensors
HK1135768A (en) Surface mapping by optical manipulation of particles in relation to a functionalized surface

Legal Events

Date Code Title Description
MM4A The patent is invalid due to non-payment of fees

Effective date: 20180914