KR101838476B1 - 소형화된 집적 마이크로 전자기계 시스템 (mems) 광학 센서 어레이 - Google Patents

소형화된 집적 마이크로 전자기계 시스템 (mems) 광학 센서 어레이 Download PDF

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KR101838476B1
KR101838476B1 KR1020137012998A KR20137012998A KR101838476B1 KR 101838476 B1 KR101838476 B1 KR 101838476B1 KR 1020137012998 A KR1020137012998 A KR 1020137012998A KR 20137012998 A KR20137012998 A KR 20137012998A KR 101838476 B1 KR101838476 B1 KR 101838476B1
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South Korea
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mems
cantilevers
array
light source
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Korean (ko)
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KR20140022768A (ko
Inventor
하칸 유리
버하네틴 에르뎀 알라카
에르만 티무르도간
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코치 유니버시티
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366—Apparatus specially adapted for solid-phase testing
    • G01N33/54373—Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/024—Mixtures
    • G01N2291/02466—Biological material, e.g. blood
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

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  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Urology & Nephrology (AREA)
  • Hematology (AREA)
  • Optics & Photonics (AREA)
  • Biotechnology (AREA)
  • Microbiology (AREA)
  • Cell Biology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Micromachines (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Gyroscopes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
KR1020137012998A 2010-11-01 2011-09-13 소형화된 집적 마이크로 전자기계 시스템 (mems) 광학 센서 어레이 Expired - Fee Related KR101838476B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US40911110P 2010-11-01 2010-11-01
US61/409,111 2010-11-01
US201161430871P 2011-01-07 2011-01-07
US61/430,871 2011-01-07
PCT/IB2011/054000 WO2012059828A2 (en) 2010-11-01 2011-09-13 Miniaturized integrated micro electo-mechanical systems (mems) optical sensor array

Publications (2)

Publication Number Publication Date
KR20140022768A KR20140022768A (ko) 2014-02-25
KR101838476B1 true KR101838476B1 (ko) 2018-04-26

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KR1020137012998A Expired - Fee Related KR101838476B1 (ko) 2010-11-01 2011-09-13 소형화된 집적 마이크로 전자기계 시스템 (mems) 광학 센서 어레이

Country Status (9)

Country Link
US (1) US9267923B2 (enExample)
EP (1) EP2635900A2 (enExample)
JP (1) JP2013543127A (enExample)
KR (1) KR101838476B1 (enExample)
CN (1) CN103430018B (enExample)
BR (1) BR112013010927A2 (enExample)
CA (1) CA2816374A1 (enExample)
RU (1) RU2565351C2 (enExample)
WO (1) WO2012059828A2 (enExample)

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US9664500B2 (en) 2012-03-08 2017-05-30 Cornell University Tunable optofluidic apparatus, method, and applications
EP2867683B1 (en) * 2012-06-28 2021-09-01 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO High throughput microscopy device
GB201215546D0 (en) * 2012-08-31 2012-10-17 Infinitesima Ltd Multiple probe detection and actuation
ITTO20120789A1 (it) * 2012-09-14 2012-12-14 Fond Istituto Italiano Di Tec Nologia Iit Dispositivo automatico di misura, procedimento di misura mediante tale dispositivo e sistema dotato di tale dispositivo.
US9352256B2 (en) 2013-03-14 2016-05-31 The Boeing Company Filtration systems and methods for filtering particles of a predetermined substance
US20140260688A1 (en) * 2013-03-14 2014-09-18 The Boeing Company Sensor assembly using micropillars and method of use
US9290219B2 (en) 2013-03-14 2016-03-22 The Boeing Company Locomotion system and method of controlling a robotic device
WO2015033190A1 (en) * 2013-09-09 2015-03-12 Koc Universitesi Miniaturized integrated micro electo-mechanical systems (mems) optical sensor array for viscosity and mass detection
US9557306B2 (en) * 2013-12-20 2017-01-31 Honeywell International Inc. Magnetically controlled gas detectors
US10564182B2 (en) 2014-02-17 2020-02-18 Universität Basel Measuring device and method for determining mass and/or mechanical properties of a biological system
WO2016069634A1 (en) 2014-10-28 2016-05-06 Massachusetts Institute Of Technology Simultaneous oscillation and frequency tracking of multiple resonances via digitally implemented phase-locked loop array
EP3356788B1 (en) * 2015-09-30 2021-07-21 Tarabios Saglik Teknolojileri Anonim Sirketi A sensing device using fiber based cantilevers embedded in a cartridge
US10006888B2 (en) * 2016-04-21 2018-06-26 The Boeing Company MEMS transducers in a phased array coupled to a flexible substrate using carbon nanotubes for conformal ultrasound scanning
US20200018773A1 (en) * 2016-10-10 2020-01-16 Hewlett-Packard Development Company, L.P. Fluid operation cell with on-chip electrical fluid operation components
CN110475849B (zh) 2017-03-31 2023-03-28 麻省理工学院 用于使颗粒流动的系统、制品和方法
WO2018236708A1 (en) 2017-06-19 2018-12-27 Massachusetts Institute Of Technology Systems and methods for measuring properties of particles
US10514584B2 (en) * 2017-08-10 2019-12-24 Sicoya Gmbh Optical signal generator comprising a phase shifter
WO2019226958A1 (en) 2018-05-24 2019-11-28 The Research Foundation For The State University Of New York Capacitive sensor
CN109650328B (zh) * 2018-12-17 2020-05-19 大连理工大学 一种动态特性测试的激波底座激励装置及其工作方法
CA3126146A1 (en) 2019-01-10 2020-07-16 Travera LLC Identifying cancer therapies
US11346755B2 (en) 2019-01-10 2022-05-31 Travera, Inc. Calibration of a functional biomarker instrument
DE102020203910B3 (de) * 2020-03-26 2021-06-17 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Detektieren einer Verunreinigung eines MEMS-Sensorelements

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US20060257286A1 (en) * 2003-10-17 2006-11-16 Adams Jesse D Self-sensing array of microcantilevers for chemical detection
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JP2006220546A (ja) 2005-02-10 2006-08-24 Seiko Instruments Inc ケミカルセンサ

Also Published As

Publication number Publication date
WO2012059828A2 (en) 2012-05-10
KR20140022768A (ko) 2014-02-25
US20140147337A1 (en) 2014-05-29
CA2816374A1 (en) 2012-05-10
CN103430018B (zh) 2016-05-04
EP2635900A2 (en) 2013-09-11
WO2012059828A3 (en) 2012-07-26
RU2013125463A (ru) 2014-12-10
CN103430018A (zh) 2013-12-04
RU2565351C2 (ru) 2015-10-20
JP2013543127A (ja) 2013-11-28
BR112013010927A2 (pt) 2016-09-13
US9267923B2 (en) 2016-02-23

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