Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B81—MICROSTRUCTURAL TECHNOLOGY
  • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
  • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
  • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
  • G01N29/02—Analysing fluids
  • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
  • G01N29/02—Analysing fluids
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
  • G01N29/22—Details, e.g. general constructional or apparatus details
  • G01N29/24—Probes
  • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
  • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
  • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
  • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
  • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
  • G01N33/54366—Apparatus specially adapted for solid-phase testing
  • G01N33/54373—Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N2291/00—Indexing codes associated with group G01N29/00
  • G01N2291/01—Indexing codes associated with the measuring variable
  • G01N2291/014—Resonance or resonant frequency
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N2291/00—Indexing codes associated with group G01N29/00
  • G01N2291/02—Indexing codes associated with the analysed material
  • G01N2291/024—Mixtures
  • G01N2291/02466—Biological material, e.g. blood
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N2291/00—Indexing codes associated with group G01N29/00
  • G01N2291/04—Wave modes and trajectories
  • G01N2291/042—Wave modes
  • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

Definitions

• the present invention relates to a Miniaturized Integrated Micro Electo- Mechanical Systems Optical Sensor Array (MIMOSA) including micro electromechanical systems (also called “MEMS”) and more preferably to sensor arrays using moving mechanical surfaces and most preferably to label-free biological sensing.
• MIMOSA Micro Electo- Mechanical Systems Optical Sensor Array
• MEMS micro electromechanical systems
• FIG. 1 is a diagrammatic view of a preferred embodiment of a system concept for integrated readout illustrating operation for liquid-phase or gas-phase sensing.
• FIG. 2 is a top view diagram of one preferred embodiment of one microcantilever array including embedded diffraction gratings and including an enlarged view thereof.
• FIG. 3 is a diagrammatic side view of one preferred embodiment of the invention including details of the optical readout.
• FIG. 12 is a diagrammatic view of a preferred embodiment showing the details of layers for the integrated readout including AA' cross-sectional view of layers.
• VCSEL and optoelectronic layers are integrated using flipchip bonding.
• MEMS layer has no electrical interconnects and located on the disposable chip and aligned using by using mechanical guides in the structure.
• Explosive agent detection and DNA mutation detection are exemplary demonstrators of possible use.
• the sensing surface of individual cantilevers should be appropriately activated (self-assembled monolayer, hydrophilic polymer coating) for covalent immobilization of recognition molecules.
• precise addressing of reagent solutions can be achieved using ink-jet deposition system, dip coating, micro spotting, or using microfluidic channels for each analyte; alternatively, photoactivation-based chemical reactions will be employed providing reactive groups only in the light-activated surface zones.
• Figure 1 show a preferable disposable package 10 concepts and illustrates that there may be no electrical conductors (also called electrical connections) to the disposable cartridge 100. Likewise, microfluidics handling can be integrated (e.g., simple filtration can be used) with the disposable package 10 to separate serum from a drop of blood and then drive the serum onto the cantilevers for measurement.
• the preferable disposable package 10 shown in Fig. 1 includes a detector apparatus 11 having a detector chip 20 (also called " a reusable sensor head 20") having an actuating means 30 preferably an electromagnet used for AC (alternating current) actuation and, preferably, a permanent magnet 40 for magnetic field enhancement.
• FIG. 1-14 show a preferred embodiment hybrid staking where the MEMS sensor array 110 and the optoelectronics readout 15 are coupled to a device.
• the MEMS sensor array 1 10 includes a substrate 1 18, preferably made of Si, having a via 119 aligning with each grating 116 of a cantilever 115 coupled to the substrate 118 and, at least one photodetector 17 coupled to substrate 118 such that refracted orders, preferably the 0 th refracted order 304 and l st refracted order 306 shown here, of laser 300 light can be detected (hereinafter called a "MEMS optoelectronics chip” (also sometimes called a " MEMS Chip and Optoelectronics chip).
• the activating means may include both a permanent magnet and an electromagnet fields to enhance the deflection of cantilevers at resonance. More preferably, the permanent magnet is generated by direct current (DC) and electromagnet is generated an alternating current (AC) to produce activating means. Preferably the orientation of the external magnet effects the magnetization of the cantilevers. Most preferably it is possible to use permanent or electromagnets premagnetized cantilevers to make the sensor more sensitive and more efficient (work with less energy).

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• Health & Medical Sciences (AREA)
• Physics & Mathematics (AREA)
• Immunology (AREA)
• Life Sciences & Earth Sciences (AREA)
• Chemical & Material Sciences (AREA)
• General Physics & Mathematics (AREA)
• Biochemistry (AREA)
• General Health & Medical Sciences (AREA)
• Analytical Chemistry (AREA)
• Pathology (AREA)
• Engineering & Computer Science (AREA)
• Acoustics & Sound (AREA)
• Molecular Biology (AREA)
• Biomedical Technology (AREA)
• Urology & Nephrology (AREA)
• Hematology (AREA)
• Optics & Photonics (AREA)
• Biotechnology (AREA)
• Microbiology (AREA)
• Cell Biology (AREA)
• Food Science & Technology (AREA)
• Medicinal Chemistry (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Investigating Or Analysing Materials By Optical Means (AREA)
• Micromachines (AREA)
• Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
• Gyroscopes (AREA)
• Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Priority Applications (8)

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Publications (2)

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Cited By (13)

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• 2011
  • 2011-09-13 EP EP11767475.4A patent/EP2635900A2/en not_active Withdrawn
  • 2011-09-13 US US13/882,987 patent/US9267923B2/en not_active Expired - Fee Related
  • 2011-09-13 KR KR1020137012998A patent/KR101838476B1/ko not_active Expired - Fee Related
  • 2011-09-13 CA CA2816374A patent/CA2816374A1/en not_active Abandoned
  • 2011-09-13 BR BR112013010927A patent/BR112013010927A2/pt not_active IP Right Cessation
  • 2011-09-13 RU RU2013125463/28A patent/RU2565351C2/ru not_active IP Right Cessation
  • 2011-09-13 JP JP2013537224A patent/JP2013543127A/ja active Pending
  • 2011-09-13 WO PCT/IB2011/054000 patent/WO2012059828A2/en not_active Ceased
  • 2011-09-13 CN CN201180063358.3A patent/CN103430018B/zh not_active Expired - Fee Related

Non-Patent Citations (2)

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