CA2816374A1 - Miniaturized integrated micro electro-mechanical systems (mems) optical sensor array - Google Patents
Miniaturized integrated micro electro-mechanical systems (mems) optical sensor array Download PDFInfo
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- CA2816374A1 CA2816374A1 CA2816374A CA2816374A CA2816374A1 CA 2816374 A1 CA2816374 A1 CA 2816374A1 CA 2816374 A CA2816374 A CA 2816374A CA 2816374 A CA2816374 A CA 2816374A CA 2816374 A1 CA2816374 A1 CA 2816374A1
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- vibrating mechanical
- coupled
- light source
- vibrating
- photodetector
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
- G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
- G01N33/54366—Apparatus specially adapted for solid-phase testing
- G01N33/54373—Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/01—Indexing codes associated with the measuring variable
- G01N2291/014—Resonance or resonant frequency
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/024—Mixtures
- G01N2291/02466—Biological material, e.g. blood
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
Landscapes
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Molecular Biology (AREA)
- Biomedical Technology (AREA)
- Urology & Nephrology (AREA)
- Hematology (AREA)
- Optics & Photonics (AREA)
- Biotechnology (AREA)
- Microbiology (AREA)
- Cell Biology (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Micromachines (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Gyroscopes (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US40911110P | 2010-11-01 | 2010-11-01 | |
| US61/409,111 | 2010-11-01 | ||
| US201161430871P | 2011-01-07 | 2011-01-07 | |
| US61/430,871 | 2011-01-07 | ||
| PCT/IB2011/054000 WO2012059828A2 (en) | 2010-11-01 | 2011-09-13 | Miniaturized integrated micro electo-mechanical systems (mems) optical sensor array |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2816374A1 true CA2816374A1 (en) | 2012-05-10 |
Family
ID=44774090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2816374A Abandoned CA2816374A1 (en) | 2010-11-01 | 2011-09-13 | Miniaturized integrated micro electro-mechanical systems (mems) optical sensor array |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9267923B2 (enExample) |
| EP (1) | EP2635900A2 (enExample) |
| JP (1) | JP2013543127A (enExample) |
| KR (1) | KR101838476B1 (enExample) |
| CN (1) | CN103430018B (enExample) |
| BR (1) | BR112013010927A2 (enExample) |
| CA (1) | CA2816374A1 (enExample) |
| RU (1) | RU2565351C2 (enExample) |
| WO (1) | WO2012059828A2 (enExample) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2491806B (en) * | 2011-05-25 | 2013-07-10 | Microvisk Ltd | Apparatus and method for measuring properties of a fluid |
| US9664500B2 (en) | 2012-03-08 | 2017-05-30 | Cornell University | Tunable optofluidic apparatus, method, and applications |
| WO2014003557A1 (en) * | 2012-06-28 | 2014-01-03 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | High throughput microscopy device |
| GB201215546D0 (en) * | 2012-08-31 | 2012-10-17 | Infinitesima Ltd | Multiple probe detection and actuation |
| ITTO20120789A1 (it) * | 2012-09-14 | 2012-12-14 | Fond Istituto Italiano Di Tec Nologia Iit | Dispositivo automatico di misura, procedimento di misura mediante tale dispositivo e sistema dotato di tale dispositivo. |
| US9352256B2 (en) * | 2013-03-14 | 2016-05-31 | The Boeing Company | Filtration systems and methods for filtering particles of a predetermined substance |
| US9290219B2 (en) | 2013-03-14 | 2016-03-22 | The Boeing Company | Locomotion system and method of controlling a robotic device |
| US20140260688A1 (en) * | 2013-03-14 | 2014-09-18 | The Boeing Company | Sensor assembly using micropillars and method of use |
| CN105659079A (zh) * | 2013-09-09 | 2016-06-08 | Koc 大学 | 用于粘度和质量检测的小型化集成微机电系统（mems）光学传感器阵列 |
| US9557306B2 (en) * | 2013-12-20 | 2017-01-31 | Honeywell International Inc. | Magnetically controlled gas detectors |
| EP3108283B1 (en) | 2014-02-17 | 2022-05-25 | Universität Basel | Atomic force microscope measuring device |
| JP6727198B2 (ja) * | 2014-10-28 | 2020-07-22 | マサチューセッツ インスティテュート オブ テクノロジー | デジタル的に実装された位相ロックループアレイを用いる多数の共振の同時振動および周波数追跡 |
| WO2017058121A1 (en) * | 2015-09-30 | 2017-04-06 | Koc Universitesi | A sensing device using fiber based cantilevers embedded in a cartridge |
| US10006888B2 (en) * | 2016-04-21 | 2018-06-26 | The Boeing Company | MEMS transducers in a phased array coupled to a flexible substrate using carbon nanotubes for conformal ultrasound scanning |
| US20200018773A1 (en) * | 2016-10-10 | 2020-01-16 | Hewlett-Packard Development Company, L.P. | Fluid operation cell with on-chip electrical fluid operation components |
| US11162886B2 (en) | 2017-03-31 | 2021-11-02 | Massachusetts Institute Of Technology | Systems, articles, and methods for flowing particles |
| US11754486B2 (en) | 2017-06-19 | 2023-09-12 | Massachusetts Institute Of Technology | Systems and methods for measuring properties of particles |
| US10514584B2 (en) * | 2017-08-10 | 2019-12-24 | Sicoya Gmbh | Optical signal generator comprising a phase shifter |
| JP7410935B2 (ja) | 2018-05-24 | 2024-01-10 | ザ リサーチ ファウンデーション フォー ザ ステイト ユニバーシティー オブ ニューヨーク | 容量性センサ |
| CN109650328B (zh) * | 2018-12-17 | 2020-05-19 | 大连理工大学 | 一种动态特性测试的激波底座激励装置及其工作方法 |
| US11346755B2 (en) | 2019-01-10 | 2022-05-31 | Travera, Inc. | Calibration of a functional biomarker instrument |
| WO2020146727A1 (en) | 2019-01-10 | 2020-07-16 | Selim Olcum | Identifying cancer therapies |
| DE102020203910B3 (de) * | 2020-03-26 | 2021-06-17 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verfahren zum Detektieren einer Verunreinigung eines MEMS-Sensorelements |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0830673B2 (ja) * | 1990-11-26 | 1996-03-27 | 柴田科学器械工業株式会社 | 塵埃粒子の質量濃度の計測方法 |
| JP2849697B2 (ja) * | 1993-03-12 | 1999-01-20 | 工業技術院長 | ２自由度振動型マイクロアクチュエータ |
| RU2148259C1 (ru) * | 1998-04-17 | 2000-04-27 | Ставропольский научно-исследовательский противочумный институт | Способ детекции макромолекул биосенсорным устройством |
| US7148017B1 (en) * | 2000-07-12 | 2006-12-12 | Cornell Research Foundation, Inc. | High sensitivity mechanical resonant sensor |
| EP1540677A2 (en) * | 2002-08-29 | 2005-06-15 | Bioscale Inc. | Resonant sensor and sensing system |
| ATE346297T1 (de) * | 2002-09-24 | 2006-12-15 | Intel Corp | Nachweis von molecularbindung durch überwachung von rückkopplung kontrollierten auslegerablenkungen |
| US8346482B2 (en) * | 2003-08-22 | 2013-01-01 | Fernandez Dennis S | Integrated biosensor and simulation system for diagnosis and therapy |
| US20060257286A1 (en) * | 2003-10-17 | 2006-11-16 | Adams Jesse D | Self-sensing array of microcantilevers for chemical detection |
| WO2005043126A2 (en) * | 2003-10-27 | 2005-05-12 | Drexel University | Piezoelectric cantilever sensors |
| KR100552696B1 (ko) * | 2003-11-12 | 2006-02-20 | 삼성전자주식회사 | 발진회로가 적용된 미세 질량 측정 장치 및 방법 |
| US7207206B2 (en) | 2004-02-19 | 2007-04-24 | Ut-Battelle, Llc | Chemically-functionalized microcantilevers for detection of chemical, biological and explosive material |
| US20050262943A1 (en) | 2004-05-27 | 2005-12-01 | Glenn Claydon | Apparatus, methods, and systems to detect an analyte based on changes in a resonant frequency of a spring element |
| KR100583233B1 (ko) * | 2004-09-16 | 2006-05-26 | 한국과학기술연구원 | 생체물질 측정 시스템 및 방법 |
| JP4484061B2 (ja) * | 2005-02-10 | 2010-06-16 | セイコーインスツル株式会社 | ケミカルセンサ |
| US7584649B2 (en) * | 2006-06-02 | 2009-09-08 | Board Of Trustees Of Michigan State University | Sensor with microelectro-mechanical oscillators |
| US8652040B2 (en) * | 2006-12-19 | 2014-02-18 | Valencell, Inc. | Telemetric apparatus for health and environmental monitoring |
| RU2327984C1 (ru) * | 2007-02-19 | 2008-06-27 | Государственное образовательное учреждение высшего профессионального образования Воронежская государственная технологическая академия | Многоканальный "электронный нос" на пьезосенсорах |
| CN101135624A (zh) * | 2007-04-03 | 2008-03-05 | 中国科学技术大学 | 监测分子构象转变和生化反应的方法及装置 |
| CN101373175A (zh) * | 2008-06-28 | 2009-02-25 | 张青川 | 监测大分子构象转变和靶与探针分子生化反应方法和装置 |
| EP3357419A1 (en) * | 2009-02-25 | 2018-08-08 | Valencell, Inc. | Light-guiding devices and monitoring devices incorporating same |
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2011
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- 2011-09-13 US US13/882,987 patent/US9267923B2/en not_active Expired - Fee Related
- 2011-09-13 KR KR1020137012998A patent/KR101838476B1/ko not_active Expired - Fee Related
- 2011-09-13 CA CA2816374A patent/CA2816374A1/en not_active Abandoned
- 2011-09-13 BR BR112013010927A patent/BR112013010927A2/pt not_active IP Right Cessation
- 2011-09-13 RU RU2013125463/28A patent/RU2565351C2/ru not_active IP Right Cessation
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- 2011-09-13 WO PCT/IB2011/054000 patent/WO2012059828A2/en not_active Ceased
- 2011-09-13 CN CN201180063358.3A patent/CN103430018B/zh not_active Expired - Fee Related
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| WO2012059828A3 (en) | 2012-07-26 |
| WO2012059828A2 (en) | 2012-05-10 |
| CN103430018B (zh) | 2016-05-04 |
| CN103430018A (zh) | 2013-12-04 |
| KR20140022768A (ko) | 2014-02-25 |
| RU2565351C2 (ru) | 2015-10-20 |
| BR112013010927A2 (pt) | 2016-09-13 |
| US20140147337A1 (en) | 2014-05-29 |
| KR101838476B1 (ko) | 2018-04-26 |
| RU2013125463A (ru) | 2014-12-10 |
| EP2635900A2 (en) | 2013-09-11 |
| US9267923B2 (en) | 2016-02-23 |
| JP2013543127A (ja) | 2013-11-28 |
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