JP2013524524A5 - - Google Patents
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- Publication number
- JP2013524524A5 JP2013524524A5 JP2013503046A JP2013503046A JP2013524524A5 JP 2013524524 A5 JP2013524524 A5 JP 2013524524A5 JP 2013503046 A JP2013503046 A JP 2013503046A JP 2013503046 A JP2013503046 A JP 2013503046A JP 2013524524 A5 JP2013524524 A5 JP 2013524524A5
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- main surface
- layer
- silicon substrate
- method characterized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 35
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 16
- 229910052710 silicon Inorganic materials 0.000 claims 16
- 239000010703 silicon Substances 0.000 claims 16
- 239000000758 substrate Substances 0.000 claims 16
- 238000000151 deposition Methods 0.000 claims 7
- 238000010438 heat treatment Methods 0.000 claims 7
- 239000000463 material Substances 0.000 claims 7
- 238000005530 etching Methods 0.000 claims 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 5
- 229910052760 oxygen Inorganic materials 0.000 claims 5
- 239000001301 oxygen Substances 0.000 claims 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 3
- 229910052796 boron Inorganic materials 0.000 claims 3
- 230000000873 masking effect Effects 0.000 claims 3
- 229910052698 phosphorus Inorganic materials 0.000 claims 3
- 239000011574 phosphorus Substances 0.000 claims 3
- 238000009792 diffusion process Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 230000003647 oxidation Effects 0.000 claims 2
- 238000007254 oxidation reaction Methods 0.000 claims 2
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 claims 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims 1
- ILAHWRKJUDSMFH-UHFFFAOYSA-N boron tribromide Chemical compound BrB(Br)Br ILAHWRKJUDSMFH-UHFFFAOYSA-N 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 238000002513 implantation Methods 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 238000002161 passivation Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102010003784.2 | 2010-04-09 | ||
| DE102010003784A DE102010003784A1 (de) | 2010-04-09 | 2010-04-09 | Verfahren zur Herstellung einer Solarzelle |
| PCT/EP2011/052257 WO2011124409A2 (de) | 2010-04-09 | 2011-02-16 | Verfahren zur herstellung einer solarzelle |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013524524A JP2013524524A (ja) | 2013-06-17 |
| JP2013524524A5 true JP2013524524A5 (https=) | 2013-07-25 |
| JP5656095B2 JP5656095B2 (ja) | 2015-01-21 |
Family
ID=44625123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013503046A Expired - Fee Related JP5656095B2 (ja) | 2010-04-09 | 2011-02-16 | 太陽電池の製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20130089942A1 (https=) |
| EP (1) | EP2556545A2 (https=) |
| JP (1) | JP5656095B2 (https=) |
| KR (1) | KR20130050301A (https=) |
| CN (1) | CN102822988B (https=) |
| DE (1) | DE102010003784A1 (https=) |
| WO (1) | WO2011124409A2 (https=) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013106019A (ja) * | 2011-11-17 | 2013-05-30 | Toyota Central R&D Labs Inc | 半導体装置とその製造方法 |
| US8969130B2 (en) * | 2011-11-18 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Insulating film, formation method thereof, semiconductor device, and manufacturing method thereof |
| JP5737204B2 (ja) * | 2012-02-02 | 2015-06-17 | 信越化学工業株式会社 | 太陽電池及びその製造方法 |
| US9224906B2 (en) | 2012-03-20 | 2015-12-29 | Tempress Ip B.V. | Method for manufacturing a solar cell |
| KR101430054B1 (ko) | 2012-09-20 | 2014-08-18 | 한국기술교육대학교 산학협력단 | 결정질 실리콘 태양전지의 제조 방법 |
| DE102013218351A1 (de) * | 2013-09-13 | 2015-03-19 | Robert Bosch Gmbh | Verfahren zur Herstellung einer Solarzelle |
| DE102013219603A1 (de) * | 2013-09-27 | 2015-04-02 | International Solar Energy Research Center Konstanz E.V. | Verfahren zur Herstellung einer Solarzelle |
| CN103700723B (zh) * | 2013-12-20 | 2016-06-01 | 浙江正泰太阳能科技有限公司 | 一种硼背场太阳能电池的制备方法 |
| CN103681971B (zh) * | 2013-12-23 | 2016-01-20 | 苏州阿特斯阳光电力科技有限公司 | 一种n型背结太阳能电池的制备方法 |
| KR102320551B1 (ko) * | 2015-01-16 | 2021-11-01 | 엘지전자 주식회사 | 태양 전지의 제조 방법 |
| TWI568012B (zh) * | 2015-06-11 | 2017-01-21 | 太極能源科技股份有限公司 | 雙面太陽能電池製造方法 |
| KR20170090989A (ko) * | 2016-01-29 | 2017-08-08 | 엘지전자 주식회사 | 태양전지의 제조 방법 |
| US10367115B2 (en) | 2016-01-29 | 2019-07-30 | Lg Electronics Inc. | Method of manufacturing solar cell |
| CN110061096B (zh) | 2016-01-29 | 2023-02-28 | 上饶市晶科绿能科技发展有限公司 | 制造太阳能电池的方法 |
| KR102053912B1 (ko) * | 2017-09-01 | 2019-12-09 | 주식회사 한화 | 계면 특성이 향상된 perc 솔라셀, 솔라셀 제조 방법 및 제조 장치 |
| CN113113510A (zh) * | 2021-04-09 | 2021-07-13 | 通威太阳能（成都）有限公司 | 一种p型双面perc太阳电池及其制备方法和应用 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6388285B1 (en) * | 1999-06-04 | 2002-05-14 | International Business Machines Corporation | Feram cell with internal oxygen source and method of oxygen release |
| JP2006073617A (ja) * | 2004-08-31 | 2006-03-16 | Sharp Corp | 太陽電池およびその製造方法 |
| DE102007041392A1 (de) * | 2007-08-31 | 2009-03-05 | Q-Cells Ag | Verfahren zum Fertigen einer Solarzelle mit einer doppellagigen Dielektrikumschicht |
| KR100997113B1 (ko) * | 2008-08-01 | 2010-11-30 | 엘지전자 주식회사 | 태양전지 및 그의 제조방법 |
-
2010
- 2010-04-09 DE DE102010003784A patent/DE102010003784A1/de not_active Withdrawn
-
2011
- 2011-02-16 JP JP2013503046A patent/JP5656095B2/ja not_active Expired - Fee Related
- 2011-02-16 EP EP11703234A patent/EP2556545A2/de not_active Withdrawn
- 2011-02-16 CN CN201180017924.7A patent/CN102822988B/zh not_active Expired - Fee Related
- 2011-02-16 KR KR1020127029330A patent/KR20130050301A/ko not_active Withdrawn
- 2011-02-16 US US13/640,165 patent/US20130089942A1/en not_active Abandoned
- 2011-02-16 WO PCT/EP2011/052257 patent/WO2011124409A2/de not_active Ceased
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