DE102010003784A1 - Verfahren zur Herstellung einer Solarzelle - Google Patents

Verfahren zur Herstellung einer Solarzelle Download PDF

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Publication number
DE102010003784A1
DE102010003784A1 DE102010003784A DE102010003784A DE102010003784A1 DE 102010003784 A1 DE102010003784 A1 DE 102010003784A1 DE 102010003784 A DE102010003784 A DE 102010003784A DE 102010003784 A DE102010003784 A DE 102010003784A DE 102010003784 A1 DE102010003784 A1 DE 102010003784A1
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DE
Germany
Prior art keywords
main surface
oxide
silicon substrate
layer
containing layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102010003784A
Other languages
German (de)
English (en)
Inventor
Tim Boescke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Solarworld Industries Thueringen De GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE102010003784A priority Critical patent/DE102010003784A1/de
Priority to US13/640,165 priority patent/US20130089942A1/en
Priority to CN201180017924.7A priority patent/CN102822988B/zh
Priority to JP2013503046A priority patent/JP5656095B2/ja
Priority to EP11703234A priority patent/EP2556545A2/de
Priority to KR1020127029330A priority patent/KR20130050301A/ko
Priority to PCT/EP2011/052257 priority patent/WO2011124409A2/de
Publication of DE102010003784A1 publication Critical patent/DE102010003784A1/de
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/121—The active layers comprising only Group IV materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • H10F77/311—Coatings for devices having potential barriers for photovoltaic cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Photovoltaic Devices (AREA)
  • Formation Of Insulating Films (AREA)
  • Weting (AREA)
DE102010003784A 2010-04-09 2010-04-09 Verfahren zur Herstellung einer Solarzelle Withdrawn DE102010003784A1 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE102010003784A DE102010003784A1 (de) 2010-04-09 2010-04-09 Verfahren zur Herstellung einer Solarzelle
US13/640,165 US20130089942A1 (en) 2010-04-09 2011-02-16 Method for producing a solar cell
CN201180017924.7A CN102822988B (zh) 2010-04-09 2011-02-16 用于制造太阳能的电池的方法
JP2013503046A JP5656095B2 (ja) 2010-04-09 2011-02-16 太陽電池の製造方法
EP11703234A EP2556545A2 (de) 2010-04-09 2011-02-16 Verfahren zur herstellung einer solarzelle
KR1020127029330A KR20130050301A (ko) 2010-04-09 2011-02-16 태양 전지 제조 방법
PCT/EP2011/052257 WO2011124409A2 (de) 2010-04-09 2011-02-16 Verfahren zur herstellung einer solarzelle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010003784A DE102010003784A1 (de) 2010-04-09 2010-04-09 Verfahren zur Herstellung einer Solarzelle

Publications (1)

Publication Number Publication Date
DE102010003784A1 true DE102010003784A1 (de) 2011-10-13

Family

ID=44625123

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102010003784A Withdrawn DE102010003784A1 (de) 2010-04-09 2010-04-09 Verfahren zur Herstellung einer Solarzelle

Country Status (7)

Country Link
US (1) US20130089942A1 (https=)
EP (1) EP2556545A2 (https=)
JP (1) JP5656095B2 (https=)
KR (1) KR20130050301A (https=)
CN (1) CN102822988B (https=)
DE (1) DE102010003784A1 (https=)
WO (1) WO2011124409A2 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013141700A3 (en) * 2012-03-20 2014-01-16 Tempress Ip B.V. Method for manufacturing a solar cell
WO2015044342A1 (de) * 2013-09-27 2015-04-02 International Solar Energy Research Center Konstanz E.V. Verfahren zur herstellung einer solarzelle

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013106019A (ja) * 2011-11-17 2013-05-30 Toyota Central R&D Labs Inc 半導体装置とその製造方法
US8969130B2 (en) * 2011-11-18 2015-03-03 Semiconductor Energy Laboratory Co., Ltd. Insulating film, formation method thereof, semiconductor device, and manufacturing method thereof
JP5737204B2 (ja) * 2012-02-02 2015-06-17 信越化学工業株式会社 太陽電池及びその製造方法
KR101430054B1 (ko) 2012-09-20 2014-08-18 한국기술교육대학교 산학협력단 결정질 실리콘 태양전지의 제조 방법
DE102013218351A1 (de) * 2013-09-13 2015-03-19 Robert Bosch Gmbh Verfahren zur Herstellung einer Solarzelle
CN103700723B (zh) * 2013-12-20 2016-06-01 浙江正泰太阳能科技有限公司 一种硼背场太阳能电池的制备方法
CN103681971B (zh) * 2013-12-23 2016-01-20 苏州阿特斯阳光电力科技有限公司 一种n型背结太阳能电池的制备方法
KR102320551B1 (ko) * 2015-01-16 2021-11-01 엘지전자 주식회사 태양 전지의 제조 방법
TWI568012B (zh) * 2015-06-11 2017-01-21 太極能源科技股份有限公司 雙面太陽能電池製造方法
KR20170090989A (ko) * 2016-01-29 2017-08-08 엘지전자 주식회사 태양전지의 제조 방법
US10367115B2 (en) 2016-01-29 2019-07-30 Lg Electronics Inc. Method of manufacturing solar cell
CN110061096B (zh) 2016-01-29 2023-02-28 上饶市晶科绿能科技发展有限公司 制造太阳能电池的方法
KR102053912B1 (ko) * 2017-09-01 2019-12-09 주식회사 한화 계면 특성이 향상된 perc 솔라셀, 솔라셀 제조 방법 및 제조 장치
CN113113510A (zh) * 2021-04-09 2021-07-13 通威太阳能（成都）有限公司 一种p型双面perc太阳电池及其制备方法和应用

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6388285B1 (en) * 1999-06-04 2002-05-14 International Business Machines Corporation Feram cell with internal oxygen source and method of oxygen release
JP2006073617A (ja) * 2004-08-31 2006-03-16 Sharp Corp 太陽電池およびその製造方法
DE102007041392A1 (de) * 2007-08-31 2009-03-05 Q-Cells Ag Verfahren zum Fertigen einer Solarzelle mit einer doppellagigen Dielektrikumschicht
KR100997113B1 (ko) * 2008-08-01 2010-11-30 엘지전자 주식회사 태양전지 및 그의 제조방법

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"All-Screen-Printed 120-mum-Thin Large-Area Silicon Solar Cells Applying Dielectric Rear Passivation and Laser-Fired Contacts Reaching 18% Efficiency", L. Gautero et al., 24th EU-PVSEC 2009, Hamburg, Session 2DO.2.5

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013141700A3 (en) * 2012-03-20 2014-01-16 Tempress Ip B.V. Method for manufacturing a solar cell
CN104205361A (zh) * 2012-03-20 2014-12-10 泰姆普雷斯艾普公司 制造太阳能电池的方法
US9224906B2 (en) 2012-03-20 2015-12-29 Tempress Ip B.V. Method for manufacturing a solar cell
CN104205361B (zh) * 2012-03-20 2017-07-04 泰姆普雷斯艾普公司 制造太阳能电池的方法
WO2015044342A1 (de) * 2013-09-27 2015-04-02 International Solar Energy Research Center Konstanz E.V. Verfahren zur herstellung einer solarzelle

Also Published As

Publication number Publication date
CN102822988A (zh) 2012-12-12
US20130089942A1 (en) 2013-04-11
CN102822988B (zh) 2016-11-16
KR20130050301A (ko) 2013-05-15
WO2011124409A3 (de) 2012-05-10
WO2011124409A2 (de) 2011-10-13
EP2556545A2 (de) 2013-02-13
JP5656095B2 (ja) 2015-01-21
JP2013524524A (ja) 2013-06-17

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Legal Events

Date Code Title Description
R081 Change of applicant/patentee

Owner name: SOLARWORLD INDUSTRIES THUERINGEN GMBH, DE

Free format text: FORMER OWNER: ROBERT BOSCH GMBH, 70469 STUTTGART, DE

Effective date: 20140724

R082 Change of representative

Representative=s name: ISARPATENT PATENT- UND RECHTSANWAELTE, DE

Effective date: 20140724

R005 Application deemed withdrawn due to failure to request examination