JP2013524001A5 - - Google Patents
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- Publication number
- JP2013524001A5 JP2013524001A5 JP2013500492A JP2013500492A JP2013524001A5 JP 2013524001 A5 JP2013524001 A5 JP 2013524001A5 JP 2013500492 A JP2013500492 A JP 2013500492A JP 2013500492 A JP2013500492 A JP 2013500492A JP 2013524001 A5 JP2013524001 A5 JP 2013524001A5
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- connection channel
- vacuum
- chamber
- liquid material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 description 6
- 239000011344 liquid material Substances 0.000 description 6
- 238000001816 cooling Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000013021 overheating Methods 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP10157912.6 | 2010-03-26 | ||
| EP20100157912 EP2369033A1 (de) | 2010-03-26 | 2010-03-26 | Verfahren zum Nachfüllen einer Verdampferkammer |
| PCT/EP2011/054433 WO2011117291A1 (de) | 2010-03-26 | 2011-03-23 | Verfahren und vorrichtung zum nachfüllen einer verdampferkammer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013524001A JP2013524001A (ja) | 2013-06-17 |
| JP2013524001A5 true JP2013524001A5 (https=) | 2014-11-27 |
Family
ID=42232778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013500492A Pending JP2013524001A (ja) | 2010-03-26 | 2011-03-23 | 蒸発器チャンバを補充する方法および装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US20130098453A1 (https=) |
| EP (2) | EP2369033A1 (https=) |
| JP (1) | JP2013524001A (https=) |
| KR (1) | KR20130008024A (https=) |
| CN (1) | CN102812151A (https=) |
| ES (1) | ES2614944T3 (https=) |
| WO (1) | WO2011117291A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101461738B1 (ko) | 2012-12-21 | 2014-11-14 | 주식회사 포스코 | 가열장치 및 이를 포함하는 코팅 시스템 |
| KR101778441B1 (ko) * | 2016-05-16 | 2017-09-14 | 주식회사 포스코 | 건식코팅장치 |
| GB2574400B (en) * | 2018-06-04 | 2022-11-23 | Dyson Technology Ltd | A Device |
| CN113564534B (zh) * | 2020-04-28 | 2023-05-09 | 宝山钢铁股份有限公司 | 一种真空镀机组镀液连续供给装置及其供给方法 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4366721A (en) * | 1981-02-10 | 1983-01-04 | Union Carbide Corporation | Molten metal sampling device |
| JPS57137463A (en) * | 1981-02-20 | 1982-08-25 | Canon Inc | Vapor depositing method |
| FR2611746B1 (fr) | 1987-03-06 | 1989-06-30 | Centre Nat Etd Spatiales | Dispositif d'evaporation sous vide d'un metal en continu |
| JPH02118064A (ja) * | 1988-10-27 | 1990-05-02 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
| US5526867A (en) * | 1988-11-10 | 1996-06-18 | Lanxide Technology Company, Lp | Methods of forming electronic packages |
| JPH0521578A (ja) * | 1991-07-15 | 1993-01-29 | Fujitsu Ltd | 半導体製造装置 |
| US5407000A (en) * | 1992-02-13 | 1995-04-18 | The Dow Chemical Company | Method and apparatus for handling molten metals |
| DE4442824C1 (de) | 1994-12-01 | 1996-01-25 | Siemens Ag | Solarzelle mit Chalkopyrit-Absorberschicht |
| US6251233B1 (en) * | 1998-08-03 | 2001-06-26 | The Coca-Cola Company | Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation |
| JP3823591B2 (ja) * | 1999-03-25 | 2006-09-20 | 三菱電機株式会社 | Ｃｖｄ原料用気化装置およびこれを用いたｃｖｄ装置 |
| JP2004244485A (ja) * | 2003-02-13 | 2004-09-02 | Sumitomo Electric Ind Ltd | 熱媒体 |
| US6909839B2 (en) * | 2003-07-23 | 2005-06-21 | Advanced Technology Materials, Inc. | Delivery systems for efficient vaporization of precursor source material |
| WO2005061756A1 (en) * | 2003-12-09 | 2005-07-07 | Osemi, Inc. | High temperature vacuum evaporation apparatus |
| LV13383B (en) * | 2004-05-27 | 2006-02-20 | Sidrabe As | Method and device for vacuum vaporization metals or alloys |
| DE102005062977B3 (de) | 2005-12-28 | 2007-09-13 | Sulfurcell Solartechnik Gmbh | Verfahren und Vorrichtung zur Umsetzung metallischer Vorläuferschichten zu Chalkopyritschichten von CIGSS-solarzellen |
| DE112007002897A5 (de) * | 2006-09-29 | 2009-09-03 | Von Ardenne Anlagentechnik Gmbh | Vakuumbeschichtungsverfahren und Anordnung zur Durchführung des Verfahrens |
| JP2008248362A (ja) * | 2007-03-30 | 2008-10-16 | Fujifilm Corp | セレン蒸着装置 |
| EP2025773A1 (en) * | 2007-07-19 | 2009-02-18 | Applied Materials, Inc. | Vacuum evaporation apparatus for solid materials |
| US20090020070A1 (en) * | 2007-07-19 | 2009-01-22 | Michael Schafer | Vacuum evaporation apparatus for solid materials |
| AU2008297944A1 (en) | 2007-09-11 | 2009-03-19 | Centrotherm Photovoltaics Ag | Method and apparatus for thermally converting metallic precursor layers into semiconducting layers, and also solar module |
| EP2048261A1 (fr) * | 2007-10-12 | 2009-04-15 | ArcelorMittal France | Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique |
-
2010
- 2010-03-26 EP EP20100157912 patent/EP2369033A1/de not_active Withdrawn
-
2011
- 2011-03-23 CN CN2011800162797A patent/CN102812151A/zh active Pending
- 2011-03-23 WO PCT/EP2011/054433 patent/WO2011117291A1/de not_active Ceased
- 2011-03-23 EP EP11709945.7A patent/EP2553136B1/de active Active
- 2011-03-23 US US13/576,388 patent/US20130098453A1/en not_active Abandoned
- 2011-03-23 ES ES11709945.7T patent/ES2614944T3/es active Active
- 2011-03-23 KR KR1020127024316A patent/KR20130008024A/ko not_active Ceased
- 2011-03-23 JP JP2013500492A patent/JP2013524001A/ja active Pending
-
2014
- 2014-10-07 US US14/508,802 patent/US20150020896A1/en not_active Abandoned
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