JP2013500173A - 予備処理指標及び持続的指標を有する研磨物品 - Google Patents
予備処理指標及び持続的指標を有する研磨物品 Download PDFInfo
- Publication number
- JP2013500173A JP2013500173A JP2012522849A JP2012522849A JP2013500173A JP 2013500173 A JP2013500173 A JP 2013500173A JP 2012522849 A JP2012522849 A JP 2012522849A JP 2012522849 A JP2012522849 A JP 2012522849A JP 2013500173 A JP2013500173 A JP 2013500173A
- Authority
- JP
- Japan
- Prior art keywords
- abrasive
- abrasive article
- composites
- coating
- article
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002085 persistent effect Effects 0.000 title claims abstract description 22
- 238000002203 pretreatment Methods 0.000 title abstract description 9
- 239000002131 composite material Substances 0.000 claims abstract description 46
- 239000002245 particle Substances 0.000 claims abstract description 16
- 239000011230 binding agent Substances 0.000 claims abstract description 8
- 238000005498 polishing Methods 0.000 claims description 29
- 238000000576 coating method Methods 0.000 claims description 26
- 239000011248 coating agent Substances 0.000 claims description 22
- 238000007639 printing Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000000227 grinding Methods 0.000 description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 5
- 238000007781 pre-processing Methods 0.000 description 5
- 239000002002 slurry Substances 0.000 description 5
- 241000238366 Cephalopoda Species 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 239000003086 colorant Substances 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 239000010687 lubricating oil Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- SVTBMSDMJJWYQN-UHFFFAOYSA-N 2-methylpentane-2,4-diol Chemical compound CC(O)CC(C)(C)O SVTBMSDMJJWYQN-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- SIKJAQJRHWYJAI-UHFFFAOYSA-N Indole Chemical compound C1=CC=C2NC=CC2=C1 SIKJAQJRHWYJAI-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000004327 boric acid Substances 0.000 description 2
- -1 boric acid amine Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000007790 scraping Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- ZGZUKKMFYTUYHA-HNNXBMFYSA-N (2s)-2-amino-3-(4-phenylmethoxyphenyl)propane-1-thiol Chemical class C1=CC(C[C@@H](CS)N)=CC=C1OCC1=CC=CC=C1 ZGZUKKMFYTUYHA-HNNXBMFYSA-N 0.000 description 1
- CWKFSQSYSQVXIW-UHFFFAOYSA-N 1,3,5-triethyltriazinane Chemical compound CCC1CN(CC)NN(CC)C1 CWKFSQSYSQVXIW-UHFFFAOYSA-N 0.000 description 1
- HXKKHQJGJAFBHI-UHFFFAOYSA-N 1-aminopropan-2-ol Chemical compound CC(O)CN HXKKHQJGJAFBHI-UHFFFAOYSA-N 0.000 description 1
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- KRXFTOUYGXMRRU-UHFFFAOYSA-N 3h-1,3-benzothiazole-2-thione;sodium Chemical compound [Na].C1=CC=C2SC(=S)NC2=C1 KRXFTOUYGXMRRU-UHFFFAOYSA-N 0.000 description 1
- 229910017107 AlOx Inorganic materials 0.000 description 1
- MRABAEUHTLLEML-UHFFFAOYSA-N Butyl lactate Chemical compound CCCCOC(=O)C(C)O MRABAEUHTLLEML-UHFFFAOYSA-N 0.000 description 1
- 241000233866 Fungi Species 0.000 description 1
- 229920002873 Polyethylenimine Polymers 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000003995 emulsifying agent Substances 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229940051250 hexylene glycol Drugs 0.000 description 1
- PZOUSPYUWWUPPK-UHFFFAOYSA-N indole Natural products CC1=CC=CC2=C1C=CN2 PZOUSPYUWWUPPK-UHFFFAOYSA-N 0.000 description 1
- RKJUIXBNRJVNHR-UHFFFAOYSA-N indolenine Natural products C1=CC=C2CC=NC2=C1 RKJUIXBNRJVNHR-UHFFFAOYSA-N 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 229940102253 isopropanolamine Drugs 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000002480 mineral oil Substances 0.000 description 1
- 235000010446 mineral oil Nutrition 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229940017144 n-butyl lactate Drugs 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 239000010665 pine oil Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000012925 reference material Substances 0.000 description 1
- XNRNJIIJLOFJEK-UHFFFAOYSA-N sodium;1-oxidopyridine-2-thione Chemical compound [Na+].[O-]N1C=CC=CC1=S XNRNJIIJLOFJEK-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
- B24B37/245—Pads with fixed abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/509,707 | 2009-07-27 | ||
US12/509,707 US20110021114A1 (en) | 2009-07-27 | 2009-07-27 | Abrasive article with preconditioning and persistent indicators |
PCT/US2010/041275 WO2011016941A2 (en) | 2009-07-27 | 2010-07-08 | Abrasive article with preconditioning and persistent indicators |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013500173A true JP2013500173A (ja) | 2013-01-07 |
JP2013500173A5 JP2013500173A5 (enrdf_load_stackoverflow) | 2013-04-18 |
Family
ID=43497737
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012522849A Pending JP2013500173A (ja) | 2009-07-27 | 2010-07-08 | 予備処理指標及び持続的指標を有する研磨物品 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20110021114A1 (enrdf_load_stackoverflow) |
EP (1) | EP2459345A2 (enrdf_load_stackoverflow) |
JP (1) | JP2013500173A (enrdf_load_stackoverflow) |
CN (1) | CN102470515A (enrdf_load_stackoverflow) |
WO (1) | WO2011016941A2 (enrdf_load_stackoverflow) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8118644B2 (en) * | 2008-10-16 | 2012-02-21 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing pad having integral identification feature |
CN103962974B (zh) * | 2013-01-31 | 2017-08-04 | 盖茨优霓塔传动系统(苏州)有限公司 | 磨轮 |
CA2929139A1 (en) | 2013-11-12 | 2015-05-21 | 3M Innovative Properties Company | Structured abrasive articles and methods of using the same |
US9491997B2 (en) * | 2013-12-02 | 2016-11-15 | Soft Lines International, Ltd. | Drum assembly, cosmetic device with drum assembly, and battery compartment for cosmetic device |
KR20160147917A (ko) | 2014-05-02 | 2016-12-23 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 불연속된 구조화된 연마 용품 및 작업편의 연마 방법 |
KR102420782B1 (ko) * | 2014-10-21 | 2022-07-14 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 연마 예비성형품, 연마 용품, 및 접합된 연마 용품을 제조하는 방법 |
EP3215316B1 (en) * | 2014-11-07 | 2018-07-11 | 3M Innovative Properties Company | Printed abrasive article |
CN106853610B (zh) * | 2015-12-08 | 2019-11-01 | 中芯国际集成电路制造(北京)有限公司 | 抛光垫及其监测方法和监测系统 |
US11103117B2 (en) * | 2016-04-29 | 2021-08-31 | 3M Innovative Properties Company | Cleaning articles including scouring bodies that form printed instructions |
JP7379331B2 (ja) * | 2017-10-26 | 2023-11-14 | スリーエム イノベイティブ プロパティズ カンパニー | 画像層を有する可撓性研磨物品 |
EP3898087A1 (en) * | 2018-12-18 | 2021-10-27 | 3M Innovative Properties Company | Patterned abrasive substrate and method |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5537133U (enrdf_load_stackoverflow) * | 1978-08-30 | 1980-03-10 | ||
JPS6376470U (enrdf_load_stackoverflow) * | 1986-06-03 | 1988-05-20 | ||
JP2002264025A (ja) * | 2001-03-14 | 2002-09-18 | Dainippon Printing Co Ltd | 研磨フィルム |
JP2003181768A (ja) * | 2001-12-19 | 2003-07-02 | Dainippon Printing Co Ltd | 識別表示を有する研磨シート |
JP2004208886A (ja) * | 2002-12-27 | 2004-07-29 | Kenji Nakamura | 美容用研磨・艶出しシート |
JP2004535306A (ja) * | 2001-07-20 | 2004-11-25 | スリーエム イノベイティブ プロパティズ カンパニー | 摩耗インジケータを有する固定研磨物品 |
JP2009241196A (ja) * | 2008-03-31 | 2009-10-22 | Asahi Diamond Industrial Co Ltd | 工具及び砥粒層チップ |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5137542A (en) * | 1990-08-08 | 1992-08-11 | Minnesota Mining And Manufacturing Company | Abrasive printed with an electrically conductive ink |
US5709598A (en) * | 1993-06-02 | 1998-01-20 | Dai Nippon Printing Co., Ltd. | Abrasive tape and method of producing the same |
EP0728055A1 (en) * | 1994-09-08 | 1996-08-28 | Struers A/S | Grinding/polishing cover sheet for placing on a rotatable grinding/polishing disc |
US6287184B1 (en) * | 1999-10-01 | 2001-09-11 | 3M Innovative Properties Company | Marked abrasive article |
KR100516142B1 (ko) * | 2003-12-02 | 2005-09-21 | 김기환 | 홀로그램 기능을 가지며 기능성을 향상시킨 연마도구 |
-
2009
- 2009-07-27 US US12/509,707 patent/US20110021114A1/en not_active Abandoned
-
2010
- 2010-07-08 CN CN2010800321360A patent/CN102470515A/zh active Pending
- 2010-07-08 EP EP10806804A patent/EP2459345A2/en not_active Withdrawn
- 2010-07-08 WO PCT/US2010/041275 patent/WO2011016941A2/en active Application Filing
- 2010-07-08 JP JP2012522849A patent/JP2013500173A/ja active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5537133U (enrdf_load_stackoverflow) * | 1978-08-30 | 1980-03-10 | ||
JPS6376470U (enrdf_load_stackoverflow) * | 1986-06-03 | 1988-05-20 | ||
JP2002264025A (ja) * | 2001-03-14 | 2002-09-18 | Dainippon Printing Co Ltd | 研磨フィルム |
JP2004535306A (ja) * | 2001-07-20 | 2004-11-25 | スリーエム イノベイティブ プロパティズ カンパニー | 摩耗インジケータを有する固定研磨物品 |
JP2003181768A (ja) * | 2001-12-19 | 2003-07-02 | Dainippon Printing Co Ltd | 識別表示を有する研磨シート |
JP2004208886A (ja) * | 2002-12-27 | 2004-07-29 | Kenji Nakamura | 美容用研磨・艶出しシート |
JP2009241196A (ja) * | 2008-03-31 | 2009-10-22 | Asahi Diamond Industrial Co Ltd | 工具及び砥粒層チップ |
Also Published As
Publication number | Publication date |
---|---|
WO2011016941A2 (en) | 2011-02-10 |
EP2459345A2 (en) | 2012-06-06 |
US20110021114A1 (en) | 2011-01-27 |
WO2011016941A3 (en) | 2011-04-28 |
CN102470515A (zh) | 2012-05-23 |
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