JP2013254841A5 - - Google Patents

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Publication number
JP2013254841A5
JP2013254841A5 JP2012129457A JP2012129457A JP2013254841A5 JP 2013254841 A5 JP2013254841 A5 JP 2013254841A5 JP 2012129457 A JP2012129457 A JP 2012129457A JP 2012129457 A JP2012129457 A JP 2012129457A JP 2013254841 A5 JP2013254841 A5 JP 2013254841A5
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JP
Japan
Prior art keywords
substrate
light emitting
stretched portion
altered
altered region
Prior art date
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Application number
JP2012129457A
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English (en)
Japanese (ja)
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JP2013254841A (ja
JP6128758B2 (ja
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Priority to JP2012129457A priority Critical patent/JP6128758B2/ja
Priority claimed from JP2012129457A external-priority patent/JP6128758B2/ja
Publication of JP2013254841A publication Critical patent/JP2013254841A/ja
Publication of JP2013254841A5 publication Critical patent/JP2013254841A5/ja
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Publication of JP6128758B2 publication Critical patent/JP6128758B2/ja
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JP2012129457A 2012-06-07 2012-06-07 発光素子の製造方法 Active JP6128758B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012129457A JP6128758B2 (ja) 2012-06-07 2012-06-07 発光素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012129457A JP6128758B2 (ja) 2012-06-07 2012-06-07 発光素子の製造方法

Publications (3)

Publication Number Publication Date
JP2013254841A JP2013254841A (ja) 2013-12-19
JP2013254841A5 true JP2013254841A5 (enExample) 2015-07-02
JP6128758B2 JP6128758B2 (ja) 2017-05-17

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ID=49952127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012129457A Active JP6128758B2 (ja) 2012-06-07 2012-06-07 発光素子の製造方法

Country Status (1)

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JP (1) JP6128758B2 (enExample)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003338468A (ja) * 2002-03-12 2003-11-28 Hamamatsu Photonics Kk 発光素子の製造方法、発光ダイオード、及び半導体レーザ素子
JP5232375B2 (ja) * 2006-10-13 2013-07-10 アイシン精機株式会社 半導体発光素子の分離方法
WO2010098186A1 (ja) * 2009-02-25 2010-09-02 日亜化学工業株式会社 半導体素子の製造方法
JP2011243875A (ja) * 2010-05-20 2011-12-01 Disco Abrasive Syst Ltd サファイアウェーハの分割方法
JP5528904B2 (ja) * 2010-05-20 2014-06-25 株式会社ディスコ サファイアウェーハの分割方法

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