JP2013246320A - 半導体光素子、及び光モジュール - Google Patents
半導体光素子、及び光モジュール Download PDFInfo
- Publication number
- JP2013246320A JP2013246320A JP2012120078A JP2012120078A JP2013246320A JP 2013246320 A JP2013246320 A JP 2013246320A JP 2012120078 A JP2012120078 A JP 2012120078A JP 2012120078 A JP2012120078 A JP 2012120078A JP 2013246320 A JP2013246320 A JP 2013246320A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- optical device
- semiconductor optical
- conductive film
- pyroelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 171
- 239000004065 semiconductor Substances 0.000 title claims abstract description 95
- 239000000758 substrate Substances 0.000 claims abstract description 218
- 230000000694 effects Effects 0.000 claims abstract description 29
- 239000012790 adhesive layer Substances 0.000 claims abstract description 17
- 239000000463 material Substances 0.000 claims description 24
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 14
- 239000010410 layer Substances 0.000 claims description 11
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 11
- 239000000853 adhesive Substances 0.000 claims description 9
- 230000001070 adhesive effect Effects 0.000 claims description 9
- 229910052744 lithium Inorganic materials 0.000 claims description 6
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 5
- 230000005616 pyroelectricity Effects 0.000 abstract description 5
- 230000003014 reinforcing effect Effects 0.000 description 48
- 239000013078 crystal Substances 0.000 description 19
- 230000005684 electric field Effects 0.000 description 11
- 230000002787 reinforcement Effects 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 230000001902 propagating effect Effects 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 239000010931 gold Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- PSVBHJWAIYBPRO-UHFFFAOYSA-N lithium;niobium(5+);oxygen(2-) Chemical compound [Li+].[O-2].[O-2].[O-2].[Nb+5] PSVBHJWAIYBPRO-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/50—Protective arrangements
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012120078A JP2013246320A (ja) | 2012-05-25 | 2012-05-25 | 半導体光素子、及び光モジュール |
| US13/900,819 US20130315531A1 (en) | 2012-05-25 | 2013-05-23 | Optical semiconductor and optical module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012120078A JP2013246320A (ja) | 2012-05-25 | 2012-05-25 | 半導体光素子、及び光モジュール |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013246320A true JP2013246320A (ja) | 2013-12-09 |
| JP2013246320A5 JP2013246320A5 (enExample) | 2015-06-18 |
Family
ID=49621659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012120078A Pending JP2013246320A (ja) | 2012-05-25 | 2012-05-25 | 半導体光素子、及び光モジュール |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20130315531A1 (enExample) |
| JP (1) | JP2013246320A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022123249A (ja) * | 2021-02-12 | 2022-08-24 | 富士通オプティカルコンポーネンツ株式会社 | 光デバイス、及びこれを用いた光送受信機 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108624961B (zh) * | 2018-05-29 | 2020-06-30 | 中国电子科技集团公司第二十六研究所 | 一种钽酸锂黑片的回收再利用方法 |
| US11841562B1 (en) * | 2018-08-29 | 2023-12-12 | Eospace Inc. | Electro-optic modulation of multiple phase modulator waveguides with a single electrode |
| CN113741066A (zh) * | 2021-09-09 | 2021-12-03 | 景卫 | 一种铌酸锂衬底的波长可调谐的调制器及其制造方法 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5153930A (en) * | 1990-01-04 | 1992-10-06 | Smiths Industries Aerospace & Defense Systems, Inc. | Device employing a substrate of a material that exhibits the pyroelectric effect |
| JP2001154164A (ja) * | 1999-11-25 | 2001-06-08 | Nec Corp | 光変調器および光変調方法 |
| JP2004245991A (ja) * | 2003-02-13 | 2004-09-02 | Ngk Insulators Ltd | 光導波路デバイスおよび光導波路デバイスと光伝送部材との結合構造 |
| JP2006284963A (ja) * | 2005-03-31 | 2006-10-19 | Sumitomo Osaka Cement Co Ltd | 光変調器 |
| JP2008089936A (ja) * | 2006-09-30 | 2008-04-17 | Sumitomo Osaka Cement Co Ltd | 光制御素子 |
| JP2011081362A (ja) * | 2009-09-14 | 2011-04-21 | Ricoh Co Ltd | 導波路型電気光学素子及びその製造方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2002097521A1 (ja) * | 2001-05-25 | 2004-09-16 | アンリツ株式会社 | 熱ドリフトを効果的に抑圧して優れた電気的特性を有する光変調デバイス及びその製造方法 |
| JP2007322599A (ja) * | 2006-05-31 | 2007-12-13 | Fujitsu Ltd | 光デバイス |
| US8873895B2 (en) * | 2010-03-05 | 2014-10-28 | Nec Corporation | Optical modulator |
-
2012
- 2012-05-25 JP JP2012120078A patent/JP2013246320A/ja active Pending
-
2013
- 2013-05-23 US US13/900,819 patent/US20130315531A1/en not_active Abandoned
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5153930A (en) * | 1990-01-04 | 1992-10-06 | Smiths Industries Aerospace & Defense Systems, Inc. | Device employing a substrate of a material that exhibits the pyroelectric effect |
| JP2001154164A (ja) * | 1999-11-25 | 2001-06-08 | Nec Corp | 光変調器および光変調方法 |
| JP2004245991A (ja) * | 2003-02-13 | 2004-09-02 | Ngk Insulators Ltd | 光導波路デバイスおよび光導波路デバイスと光伝送部材との結合構造 |
| JP2006284963A (ja) * | 2005-03-31 | 2006-10-19 | Sumitomo Osaka Cement Co Ltd | 光変調器 |
| JP2008089936A (ja) * | 2006-09-30 | 2008-04-17 | Sumitomo Osaka Cement Co Ltd | 光制御素子 |
| JP2011081362A (ja) * | 2009-09-14 | 2011-04-21 | Ricoh Co Ltd | 導波路型電気光学素子及びその製造方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022123249A (ja) * | 2021-02-12 | 2022-08-24 | 富士通オプティカルコンポーネンツ株式会社 | 光デバイス、及びこれを用いた光送受信機 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20130315531A1 (en) | 2013-11-28 |
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| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150427 |
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