JP2013232513A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 106
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 238000005530 etching Methods 0.000 claims abstract description 123
- 238000000034 method Methods 0.000 claims abstract description 86
- 239000000758 substrate Substances 0.000 claims abstract description 75
- 150000004767 nitrides Chemical class 0.000 claims abstract description 23
- 229910052751 metal Inorganic materials 0.000 claims description 24
- 239000002184 metal Substances 0.000 claims description 24
- 229910052715 tantalum Inorganic materials 0.000 claims description 7
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 229910052720 vanadium Inorganic materials 0.000 claims description 4
- 238000007747 plating Methods 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 description 31
- 230000015572 biosynthetic process Effects 0.000 description 24
- 230000001681 protective effect Effects 0.000 description 14
- 238000001312 dry etching Methods 0.000 description 11
- 229910002601 GaN Inorganic materials 0.000 description 9
- 238000009713 electroplating Methods 0.000 description 9
- 239000000460 chlorine Substances 0.000 description 8
- 238000009616 inductively coupled plasma Methods 0.000 description 8
- 238000001020 plasma etching Methods 0.000 description 8
- 238000007689 inspection Methods 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 6
- 230000000149 penetrating effect Effects 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000011179 visual inspection Methods 0.000 description 6
- 229910002704 AlGaN Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 5
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 4
- 229910052801 chlorine Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910008599 TiW Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/4175—Source or drain electrodes for field effect devices for lateral devices where the connection to the source or drain region is done through at least one part of the semiconductor substrate thickness, e.g. with connecting sink or with via-hole
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- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
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- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
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Abstract
【解決手段】本発明は、基板10の第1主面側に設けられた透明な半導体層18(窒化物半導体層)上に、Auからなるモニタ層50とNiからなるNi層24をこの順に形成する工程と、基板10の第2主面側に開口を有する選択エッチングのためのマスク層39を形成する工程と、基板10の第2主面側から、マスク層39の開口内に露出した基板10および透明な半導体層18をエッチングする工程と、マスク層39の開口内におけるNi層24の露出を確認することにより、エッチングの完了を判定する工程と、を有する半導体装置の製造方法である。
【選択図】図2
Description
1.RIEのエッチング条件
エッチングガス及びガス流量:Cl2=1.0sccm、又は、Cl2/Ar=1.0/0.5〜3.0sccm
圧力:0.5〜4.0Pa
RFパワー密度:1.0〜4.0W/cm2
バイアスパワー密度:0.3〜2.0W/cm2
2.ICPエッチングのエッチング条件
エッチングガス及びガス流量:Cl2=1.0sccm、又はCl2/Ar=1.0/0.5〜3.0sccm
圧力:0.2〜4.0Pa
ICPパワー密度:1.0〜4.0W/cm2
バイアスパワー密度:0.1〜2.0W/cm2
12 チャネル層
14 電子供給層
16 キャップ層
18 透明な半導体層
20 ドレイン電極
22 ソース電極
24 Ni層
26 Au層
28 ゲート電極
30 ソースパッド
32 第1保護膜
34 ドレイン配線
36 ソース配線
38 第2保護膜
39 マスク層
50、60、70 モニタ層
52、62、72 第1開口
54、64、74 第2開口
56 シード層
58 金属層
59 裏面配線
76 第3開口
78 ダミー配線
80 スクライブライン
Claims (7)
- 基板の第1主面側に設けられた窒化物半導体層上に、Au、V、及びTaの何れかからなる第1の層とNiからなる第2の層、又は、Ti、TiW、Al、W、Mo、Nb、Pt、Ta、及びVの何れかからなる第1の層とAuからなる第2の層をこの順に形成する工程と、
前記基板の第2主面側に開口を有する選択エッチングのためのマスクを形成する工程と、
前記基板の第2主面側から、前記マスクの開口内に露出した前記基板および前記窒化物半導体層をエッチングする工程と、
前記マスクの開口内における前記第2の層の露出を確認することにより、エッチングの完了を判定する工程と、を有することを特徴とする半導体装置の製造方法。 - 前記第1の層の膜厚は、2nm以上30nm以下であることを特徴とする請求項1記載の半導体装置の製造方法。
- 前記エッチングの完了を判定する工程は、可視光によってなすことを特徴とする請求項1または2記載の半導体装置の製造方法。
- 前記エッチングの完了を判定する工程において、前記マスクの開口内に前記第1の層が確認された場合には、前記エッチングを再度実施することを特徴とする請求項1から3のいずれか一項記載の半導体装置の製造方法。
- 前記エッチングの完了が判断された後、前記基板の第2主面側に前記第2の層に電気的に接続される金属層を形成する工程を有することを特徴とする請求項1から4のいずれか一項記載の半導体装置の製造方法。
- 前記窒化物半導体層には半導体デバイスが形成され、前記第2の層に電気的に接続される前記金属層を介して、前記基板の第2主面側に電極が引き出されてなることを特徴とする請求項5記載の半導体装置の製造方法。
- 前記第2の層は、前記第1の層をシード層としためっき法によって形成されることを特徴とする請求項1から6のいずれか一項記載の半導体装置の製造方法。
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JP2012103529A JP5970736B2 (ja) | 2012-04-27 | 2012-04-27 | 半導体装置の製造方法 |
US13/872,347 US20130288401A1 (en) | 2012-04-27 | 2013-04-29 | Method for fabricating semiconductor device |
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WO2021182524A1 (ja) * | 2020-03-12 | 2021-09-16 | 住友電工デバイス・イノベーション株式会社 | 半導体デバイス及び半導体デバイスを製造する方法 |
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JP2013243173A (ja) * | 2012-05-17 | 2013-12-05 | Sumitomo Electric Ind Ltd | 半導体装置の製造方法 |
JP2016046306A (ja) * | 2014-08-20 | 2016-04-04 | 株式会社東芝 | 半導体装置および半導体装置の製造方法 |
US9991349B2 (en) | 2014-08-20 | 2018-06-05 | Kabushiki Kaisha Toshiba | Semiconductor device and method for manufacturing semiconductor device |
JP2020136459A (ja) * | 2019-02-19 | 2020-08-31 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法および半導体装置 |
JP7215800B2 (ja) | 2019-02-19 | 2023-01-31 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法および半導体装置 |
WO2021182524A1 (ja) * | 2020-03-12 | 2021-09-16 | 住友電工デバイス・イノベーション株式会社 | 半導体デバイス及び半導体デバイスを製造する方法 |
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US20130288401A1 (en) | 2013-10-31 |
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