JP2013204097A - Film deposition apparatus and film deposition method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a film deposition apparatus in which a mask and a substrate are closely attached to each other while eliminating any gap between the mask and the substrate so that an unnecessary slope film is not formed when forming a vapor deposition film.SOLUTION: A film deposition apparatus performing film deposition of a vapor deposition substance to be sprayed from an evaporation source on a substrate 6 via a mask, includes a turning mechanism for changing the posture of the substrate from the horizontal direction to the vertical direction, a means 36 which is held by the turning mechanism and holds the substrate from its back side, and a plurality of pressing means (magnets) 31-33, 37 for pressing the substrate at a plurality of portions thereof in a direction substantially orthogonal to the substrate.

Description

  The present invention relates to a film forming apparatus and a film forming method for forming a film in a vacuum chamber, and more particularly to a film forming apparatus and a film forming method suitable for forming an organic EL device.

  A conventional method for manufacturing an organic EL device is described in Patent Document 1. In the method of manufacturing an organic EL device described in this publication, in order to produce an organic EL device economically with little material loss, N substrates (N is 2 or more) are accommodated in a vacuum chamber. During deposition of the first substrate, the Nth substrate is carried in, and during deposition of the second substrate, the first substrate is carried out of the vacuum chamber. Hereinafter, the efficiency of film formation is improved by repeating this procedure. Therefore, the vacuum chamber is divided into a plurality of parts.

JP 2010-86956 A

  In the conventional organic EL manufacturing method described in Patent Document 1, since the vacuum chamber is divided into a plurality of parts and the operations in the divided chambers are different, one substrate is subjected to the other substrate during vapor deposition. Can be carried in or out, and the film forming efficiency is improved. However, in the method described in this publication, for alignment between the substrate and the mask, after the substrate is upright, the alignment camera is used to image the alignment mark provided on the mask and the substrate, and the alignment mechanism is used to move the mask for alignment. However, the degree of adhesion between the mask and the substrate in actual alignment is not sufficiently considered.

  Generally, a mask has a mask sheet having a thickness of several tens of μm with a minute hole in a film forming portion, and a strong metal frame (mask frame) for holding the mask sheet on the outer periphery of the mask sheet. Is provided. The metal frame and the mask sheet are joined by welding and are collectively referred to as a mask.

  By the way, in forming the organic EL film or the like, it is important how faithfully the deposited film is formed in the hole of the mask arranged on the front surface of the substrate. Although the mask and the substrate are mechanically in close contact with each other, in reality, the substrate support plate and the mask frame for holding the substrate are distorted during component processing, and the entire surface of the substrate and the mask cannot be in close contact with each other. . In such a case, when the substrate surface after vacuum deposition is observed, a film having a substantially uniform thickness is formed by tracing the hole formed in the mask, while the film thickness formed in the hole portion around the hole. Although it is very thin compared to the above, a sloped film is formed. The sloped film may have a maximum width of several tens of μm or more.

  Since organic molecules are ejected from the evaporation source with a certain spray angle, the larger the distance (gap) between the mask and the substrate, the wider the film is formed, and the inclined film is formed in a wide range. Become. In recent years, a high-definition display with a small screen has been demanded, and the density of pixel arrangement (PPI: pixel per inch) has increased, and is expected to increase to about 300 PPI. On the other hand, since the area of the film to be formed tends to be large and high luminance tends to be ensured, for example, the interval between the R light emitting film and the G light emitting film is narrowed, and it is required to make the sloped film as small as possible. Has been.

  In the case of a display, when a current is controlled to emit light of each color, if there is a film having a noticeable slope shape, the luminance becomes nonuniform and the deterioration is rapid, so that it cannot be used as an effective film. Therefore, there is a strong demand to make the formation of the sloped film as small as possible by bringing the mask and the substrate into close contact with each other.

  SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and an object of the present invention is to form a mask and a substrate so that an unnecessary inclined film is not formed when forming a vapor deposition film in a film forming apparatus and film forming method. The mask and the substrate are brought into close contact with each other. Another object of the present invention is to bring a mask and a substrate into close contact in an organic EL film forming apparatus and film forming method.

  The present invention that achieves the above object is characterized in that, in a film forming apparatus for forming a deposition material sprayed from an evaporation source through a mask onto a substrate carried into a vacuum chamber, the posture of the substrate is vertical from the horizontal direction. A rotating mechanism for changing the direction, means for holding the substrate held by the rotating mechanism, and a plurality of pressing means for pressing a plurality of portions of the substrate to the mask side.

  In this feature, the pressing means drives a plurality of magnets arranged at positions corresponding to the mask frame and mask sheet of the mask on the back side of the substrate, and the magnets in a direction perpendicular to the substrate. It may have a drive means. The plurality of magnets are located at positions corresponding to the mask sheet, and upper and lower side fixing magnets, left and right side fixing magnets arranged at positions corresponding to the mask frame at the periphery of the substrate. It is desirable to comprise a mask sheet contact magnet disposed.

  In the above feature, the pressing means may include a pressing body that can move in a direction perpendicular to the substrate, and a coil spring wound around the pressing body. Further, when the substrate is maintained in a horizontal state, for example, when the substrate is transported, the substrate is held by the substrate holding means, and when the substrate is maintained in a vertical state, for example, during film formation, the substrate is It is preferable to provide a fixing mechanism that releases from the holding of the substrate holding means.

  Another feature of the present invention that achieves the above object is that the substrate is held in a horizontal state and carried into a vacuum chamber, and then the substrate is placed in a vertical state using a rotating mechanism disposed below the substrate. A plurality of pressing means disposed between the rotating mechanism and the substrate presses the substrate to bring the mask disposed on the front side of the substrate into close contact with the substrate, and then sprays the deposition material from the deposition source onto the substrate surface. In other words, a vapor deposition film is formed on the substrate surface.

  According to the present invention, means for pressing each part of the substrate from the back side of the substrate to the mask side is provided, and the substrate is pressed from the back side after alignment of the substrate and the mask, so that there is no gap between the mask and the substrate. Thus, the mask and the substrate can be brought into close contact with each other. Further, in the organic EL film forming apparatus and the film forming method, the mask and the substrate can be brought into close contact with each other.

It is a longitudinal cross-sectional view of one Example of the film-forming apparatus which concerns on this invention. It is a perspective view of the principal part of the film-forming apparatus shown in FIG. It is a figure which shows an example of the mask used for the film-forming apparatus which concerns on this invention. 4 is a plan view of a substrate pressing unit shown in Embodiment 1. FIG. FIG. 5 is a partial cross-sectional view of FIG. 4, (a) is an AA cross-sectional view, and (b) is a BB cross-sectional view. It is CC sectional drawing of FIG. It is a disassembled perspective view of the principal part of the board | substrate press means shown in FIG. It is a figure which shows the board | substrate press operation | movement procedure using the board | substrate press means shown in Example 1. FIG. It is a figure which shows the board | substrate press operation | movement procedure using the board | substrate press means shown in Example 1. FIG. It is a figure which shows the board | substrate press operation | movement procedure using the board | substrate press means shown in Example 1. FIG. It is a figure which shows the board | substrate press operation | movement procedure using the board | substrate press means shown in Example 1. FIG. It is a figure which shows the board | substrate press operation | movement procedure using the board | substrate press means shown in Example 1. FIG. It is a figure which shows the board | substrate press operation | movement procedure using the board | substrate press means shown in Example 1. FIG. It is a perspective view of the board | substrate press means shown in Example 2. FIG. It is a longitudinal cross-sectional view of the press means provided in the board | substrate support plate shown in FIG. It is a longitudinal cross-sectional view which shows the state which hold | maintained the board | substrate support plate shown in FIG. 8 vertically.

  Embodiments of a film forming apparatus according to the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view of an embodiment of a film forming apparatus according to the present invention, FIG. 2 is a perspective view of the main part of the film forming apparatus shown in FIG. 1, and FIG. 3 is used in the film forming apparatus. It is a figure which shows an example of a mask.

  First, the outline of the film forming apparatus 100 according to the present invention will be described with reference to FIGS. In the following description, film formation using an organic EL device will be described. However, it goes without saying that the present invention is not limited to an organic EL device but can be applied to a normal EL device or the like. Moreover, the board | substrate 6 demonstrated by a present Example is the 5th-6th generation, and also becomes a magnitude | size of about 1500 mm x 1800 mm.

The film forming apparatus 100 includes a vacuum chamber 1 that is evacuated by a vacuum pump (not shown), and a gate valve 10 that opens and closes the vacuum chamber 1 when the substrate 6 is loaded into and transported to the vacuum chamber 1. During film formation by the film forming apparatus 100, the inside of the vacuum chamber 1 is partitioned by the gate valve 10 and maintained at a pressure on the order of 10 ⁻⁵ Pa.

  The substrate 6 is guided in a horizontal state from the outside of the apparatus to the vacuum chamber 1 using a conveying means (not shown). And it mounts on the board | substrate holding means 90 provided so that a board | substrate can be mounted and it can rotate. The substrate holding means 90 is connected to a rotation mechanism 92 fixed in the vacuum chamber 1 and can be rotated about 90 degrees from a horizontal position to a vertical position by the rotation mechanism 92. The substrate holding means 90 has a substrate support plate 91 that holds the substrate 6 and forms a substrate mounting surface. In order to prevent the temperature of the substrate 6 from excessively rising during the film formation, the substrate support plate 91 has cooling means, for example, a cooling channel formed therein, and is also a CP (cooling plate: cooling plate). be called. An alignment camera 86 is attached in the vicinity of the positions of the upper and lower ends of the substrate support plate 91 when the substrate 6 is rotated and positioned in the vertical direction.

  A mask 81, which will be described in detail later, is held vertically via a holding means fixed to the vacuum chamber 1 so as to face the position where the substrate 6 is rotated to be in a vertical state. That is, the mask 81 is fixedly held by the mask holder 89 at the peripheral portion on the back side (the side opposite to the side facing the substrate 6). The upper part of the mask holder 89 is connected to an alignment driving unit 83 in which a motor is attached to the outside of the vacuum chamber 1.

  An evaporation source 71 extending in the left-right direction (Y direction in the figure) is arranged at a distance from the mask 81. The evaporation source 71 is movable in the vertical direction. The movement of the evaporation source 71 in the vertical direction and the adjustment of the alignment of the mask 81 are executed according to instructions from the controller 200.

  Here, details of the alignment will be described with reference to FIG. Although FIG. 2 shows the case where two substrates 6 can be attached to the left and right, the following description can be similarly applied even when only one substrate 6 can be attached. This is a case where the right substrate 6 is aligned. The substrate 6 transported into the vacuum chamber 1 is initially in a horizontal state. Since it is held by the substrate support plate 91, the substrate 6 is erected vertically without sliding down using the rotation mechanism 92.

  A window (opening) 85 as an alignment mark is formed at the corner of the mask 81. The alignment mark provided on the substrate 6 and the window 85 are imaged by the alignment camera 86 to perform alignment. Based on this imaging, the alignment driving unit 83 adjusts the position of the mask 81, and positioning of the mask 81 and the substrate 6 is executed. When the positioning is completed, the evaporation source 71 is moved to perform vapor deposition.

  In the evaporation mask 81 for producing the substrate 6 having a high PPI, as shown in detail in FIG. 3, a rectangular hole 81c generally called a dot is formed. The size of this dot is about several hundreds of μm in the three color sets of R, G, and B. The many dots 81c are formed by etching or the like.

  The mask sheet 81a on which a large number of dots 81c are formed is welded and fixed to the mask frame 81b by applying tension. The mask frame 81b has a size corresponding to the substrate 6 because the size of the substrate 6 has reached 1500 mm × 1800 mm in the fifth to sixth generations. For this reason, deformation of several hundred μm occurs due to processing errors in the manufacturing process. At the time of vapor deposition, the mask frame 81b is pressed against and held by the mask fixing plate of the apparatus, but it has been difficult to completely correct the deformation generated in the manufacturing process.

  Conventionally, the adhesion between the glass substrate and the thin plate mask has been sufficiently studied. However, when the substrate after film formation is examined, a sloped film is often formed. One of the causes is considered to be that a very fine gap is formed between the glass substrate 6 and the thin mask 81, and the gap is set to zero as much as possible.

  Next, some examples in which the substrate 6 and the mask 81 are brought into close contact with each other to reduce the inclined film will be described below.

  By arranging magnets on the respective parts of the back surface of the substrate 6 and bringing the magnets close to the substrate 6, an attractive force acts between the magnetic material and the mask sheet 81 a of the magnetic material positioned on the front surface of the substrate 6. An example in which these are closely attached will be described with reference to FIGS. 4 to 7D. As a drive mechanism for pressing the magnet against the substrate 6, a cylinder or a motor-driven ball screw is used.

  FIG. 4 shows a plan view of the substrate pressing means. 5A (a), (b), and FIG. 5B show an AA sectional view, a BB sectional view, and a CC sectional view of FIG. 4, respectively. Furthermore, FIG. 6 shows an essential part of the substrate pressing means in an exploded perspective view, and FIGS. 7A to 7F show the procedure of the substrate pressing operation using the substrate pressing means.

  The substrate pressing means 50 has a mechanism part frame 36 in which a rectangular space is formed in the central part. A plurality of upper side clamping mechanisms 34 are provided on the upper side of the mechanism part frame 36 at intervals in the width direction, and the glass substrate 6 is suspended and held by clamping the upper end of the glass substrate 6. It is possible.

  The left and right sides of the mechanism part frame 36 are formed in an inverted L-shaped cross section in the AA arrow view of FIG. 4 shown in FIG. 5A (a), and form the inner peripheral surface of the mechanism part frame 36. A plurality of drive mechanisms 38 are attached to the vertical side of the inverted L shape with a space in the vertical direction. 5A shows a cross section of the left side portion of the mechanism unit frame 36. However, since the right side portion of the mechanism unit frame 36 is also formed symmetrically with the left side portion, the inner peripheral surface thereof is spaced vertically. A plurality of drive mechanisms 38 are attached.

  The drive mechanism 38 is a cylinder or a ball screw with a motor as described above, and displaces the shaft end portion along the guide in the vertical direction in FIG. 5A (a) and in the direction perpendicular to the paper surface in FIG. A rectangular left and right side fixing magnet 31 extending in the vertical direction is attached to the shaft end of the drive mechanism 38. That is, when the drive mechanism 38 is driven, the magnet 31 comes into contact with the back surface of the substrate.

  Similarly, an upper side fixing magnet 32 extending in the width direction substantially the same as the width of the rectangular space is attached to the upper side portion of the mechanism portion frame 36 to which the clamp mechanism 34 is attached and on the front side surface of FIG. It has been. As shown in FIG. 5B, clamp mechanisms 34 are attached to several locations on the upper side (right side in FIG. 5B) of the mechanism unit frame 36, and the magnetic material pressing plate 34b is centered on the rotation center 34a. Can be rotated. Therefore, when the glass substrate 6 is sandwiched between the pressing plate 34b and the magnet 32, the substrate 6 is held by a magnetic force.

  On the lower side of the mechanism frame 36, a rectangular lower side fixing magnet 33 that is long in the width direction is arranged at intervals in the width direction. The magnet 33 is driven in the vertical direction of the figure (in the direction perpendicular to the paper surface in FIG. 4) by the lower side fixing magnet drive mechanism 40 in the BB arrow view of FIG. 4 shown in FIG. 5A (b). In addition, on the lower side of the mechanism frame 36, drop prevention receiving pieces 35, which will be described in detail later, are arranged at a plurality of places in the width direction (two places in FIG. 4). 43 is driven to rotate. This is described in detail in FIG. 5B, which is a CC arrow view of FIG.

  A rectangular mask sheet contact magnet 37 is disposed in a rectangular opening formed at the center of the mechanism frame 36. The magnet 37 is driven in the direction perpendicular to the paper surface of FIG. 4 by the mask sheet contact magnet drive mechanism 41. FIG. 6 is a perspective view showing details of the magnet drive mechanism 41. FIG. 6 is an exploded perspective view, and an attachment corresponding portion is indicated by an arrow and hatching.

  After the substrate 6 is carried into the vacuum chamber 1, the magnet drive mechanism 41 is attached using the rotation mechanism 92 used when the posture of the substrate 6 is changed vertically. In the rotation mechanism 92, two fork-shaped reversing arms 42 are attached to the shaft portion 92a. The reversing arm 42 has a rectangular cross section, and a mechanism frame drive mechanism 39 that drives the mechanism frame 36 in the direction perpendicular to the paper surface of FIG. 6 shows a state in which only one mechanism part frame driving mechanism 39 is attached to one reversing arm 42. As can be seen from FIG. 4, one mechanism arm frame driving mechanism is attached to one reversing arm 42. Two or more 39 are attached.

  A mask sheet contact magnet drive mechanism 41 for driving the mask sheet contact magnet is attached to the surface where the reversing arms 42 face each other. Although only one is shown in FIG. 6, at least two are attached to each reversing arm 42.

  Here, the mechanism part frame drive mechanism 39 is composed of a ball screw and a motor, and the guide slides by the rotation of the motor. The mask sheet adhesion magnet drive mechanism 41 includes a motor and a linear guide. When the motor is driven, the magnet attached to the shaft end moves.

  The operation of the substrate pressing means 50 configured as described above will be described with reference to FIGS. 7A to 7F from when the substrate 6 is carried into the vacuum chamber 1 until immediately before vacuum deposition. FIG. 7A shows a stage in which the substrate 6 is horizontally transported into the vacuum chamber 1 and the substrate 6 is positioned above the reversing arm of the rotation mechanism 92. A state in which the glass substrate 6 is placed on the lift pins 52 provided in the rotation mechanism 92 by a substrate transfer robot (not shown) is shown. The upper side clamp mechanism 34 is in an open state. Further, the disc-shaped drop prevention receiving piece 35 attached eccentrically to the shaft of the fall prevention receiving piece drive motor 43 is controlled so as to be positioned at the left end in FIG. 7A.

  Next, as shown in FIG. 7B (a), the motor included in the mechanism part frame drive mechanism 39 is driven while the substrate 6 is held in a horizontal state, and the part including the mechanism part frame 36 is raised. Thereby, the glass substrate 6 is positioned on each of the magnets 31, 32, 33, and 37. At the same time, the upper side clamp mechanism 34 is operated, and the glass substrate 6 is sandwiched and held by the magnetic force generated between the upper side fixing magnet 32 and the presser plate 34b. At this time, the upper surfaces of the magnets 31, 32, 33, and 37 are the same surface. On the other hand, as shown in an enlarged view in FIG. 7B (b), a slight gap is formed between the disc-shaped drop prevention receiving piece 35 and the glass substrate 6.

  Since the glass substrate 6 can be held by the upper side clamp mechanism 34, the posture of the glass substrate is changed from the horizontal state to the vertical state. The state of the glass substrate 6 after the posture change is shown in FIG. 7C. As a result of rotating the shaft portion 92a of the rotation mechanism 92 counterclockwise by 90 degrees, the whole including the glass substrate 6 is in a vertical state. Driving mechanism 38, 40, 41 that drives the left and right side fixing magnet 31, the lower side fixing magnet 33, and the mask sheet contact magnet 37, respectively, and the magnet 31, 33, 37 is a mechanism unit that holds the glass substrate 6. Keep it about 10-20mm away from the frame 36. That is, the glass substrate 6 is in a suspended state with only the upper end held by the pressing plate 34 b of the upper side clamp mechanism 34 and the upper side fixing magnet 32. Here, as shown in FIG. 7C (b), the fall prevention receiving piece 35 and the glass substrate are not in contact with each other. However, it acts as a prevention of the glass substrate 6 from dropping.

  Next, as shown in FIG. 7D, the mechanism part frame driving mechanism 39 is driven to move the mechanism part frame 36 toward the mask 81, thereby bringing the glass substrate 6 into contact with the mask 81. At this time, the glass substrate 6 is attached to the mask frame 81b with a magnetic force acting between the upper side fixing magnet 32 and the magnetic mask 81 (see FIG. 7D (b)). Here, since the escape portion is formed on the surface of the mask frame 81b facing the upper side clamp mechanism 34 as much as the upper side clamp mechanism 34, the upper side clamp mechanism 34 does not hinder the operation of the substrate.

  In the operation of the mechanism frame driving mechanism 39, the left and right side fixing magnets 31 other than the upper side fixing magnet 32, the lower side fixing magnet 33, and the mask sheet contact magnet 37 are separated from the glass substrate 6. Therefore, as shown in FIG. 7D (c), the mask sheet 81b is not yet attached to the glass substrate 6. However, since the upper part of the glass substrate 6 is held by the mask frame 81b by the clamping force of the upper side clamping mechanism 34 and the magnetic force of the upper side fixing magnet 32, there is no fear of dropping.

  If the glass substrate 6 is placed on the fall prevention receiving piece 35 at the completion of the above operation, the motor 43 that drives the fall prevention receiving piece 35 is driven to rotate, as shown in FIG. 7E (c). Thus, the glass substrate 6 is moved away from the fall prevention receiving piece 35. Here, the center of the fall prevention receiving piece 35 is eccentric from the rotation center of the motor 43 that rotationally drives the fall prevention receiving piece 35.

  After confirming that the glass substrate 6 is moved away from the fall prevention receiving piece 35 (the state of FIG. 7E (b)), as shown in FIG. 7E (a), the drive mechanism 38 of the left and right side fixing magnet 31 is moved. The mask 81 is attached to the glass substrate 6 by driving and the magnetic force acting between the left and right side fixing magnet 31 and the mask frame 81b.

  Here, the left and right side fixing magnet 31 is composed of a plurality of magnets having a rectangular shape that is long in the vertical direction. By arranging the plurality of magnets 31 in the vertical direction and driving them sequentially from the magnet 31 positioned on the upper side, the glass substrate 6 and the mask 81 can be brought into close contact with each other without wrinkling the glass substrate 6.

  Next, the driving mechanism 40 of the lower side fixing magnet 33 is driven, and the lower side fixing magnet 33 is attached to the mask frame 81b. A plurality of lower-side fixing magnets 33 are provided in the width direction of the glass substrate 6, and the magnets 33 arranged on the left and right end sides are driven in order from the magnet 33 arranged at the center in the width direction. Similarly, the glass substrate 6 can be prevented from wrinkling.

  Since the peripheral portion of the glass substrate 6 is attached to the mask frame 81b, as shown in FIG. 7F, the mask sheet adhesion magnet 37 disposed on the rear peripheral portion of the glass substrate 6 is driven. The drive mechanism 41 that drives the mask sheet contact magnet 37 is driven to bring the mask sheet contact magnet 37 into contact with the back surface of the glass substrate 6. Alternatively, the mask sheet adhering magnet 37 is brought close to a state where it is substantially in contact with the back surface of the glass substrate 6, and the glass substrate 6 is brought into close contact with the mask sheet 81a by a magnetic force acting between the magnet 37 and the magnetic mask sheet 81a. Thereby, there is no gap between the glass substrate 6 and the mask 81, and the generation of a sloped film during vapor deposition can be suppressed.

  According to the present embodiment, it is possible to prevent a gap from being formed between the glass substrate and the mask sheet, to suppress generation of a sloped film during vacuum deposition, and to obtain a highly accurate deposited film. Further, since the glass substrate is suspended and held when the glass substrate is brought into close contact with the mask, it is possible to prevent the glass substrate from being bent.

  Next, another embodiment in which the mask 81 and the substrate 6 are brought into close contact with each other will be described with reference to FIGS. FIG. 8 is a perspective view of another embodiment of the substrate pressing means used in the film forming apparatus 100. FIG. 9 is a longitudinal sectional view showing details of the substrate pressing means shown in FIG. 8. FIG. 9 (a) is a view when the substrate support plate is held horizontally, and FIG. 9 (b) is the substrate support. It is a figure in the case of hold | maintaining a board | substrate vertically. FIG. 10 is a longitudinal sectional view showing the substrate support plate when the substrate support plate is held vertically.

  Specifically, FIG. 8 is a perspective view showing a state in which the substrate support plate 91 is placed on the rotation mechanism 92, and FIG. 9 shows a floating mechanism 111 formed on the substrate support plate 91 and a fixing mechanism 101 for the substrate 6. FIG. 9A is a diagram in the case where the substrate 6 is held in a horizontal state when the substrate 6 is transported, and FIG. 9B is a diagram in which the substrate 6 is processed when the deposited film is processed on the substrate 6. It is a figure in the case of hold | maintaining vertically. FIG. 10 is a longitudinal sectional view showing the relationship among the substrate 6, the mask 81, and the substrate support plate 91 when the deposited film is processed on the substrate 6.

  The substrate support plate 91 disposed on the back side of the substrate 6 acts to press the substrate 6 against the mask sheet 81a from the back side after the alignment. Therefore, pressing means 111 for vertically pressing the substrate 6 from the back surface is provided at a plurality of locations on the substrate support plate 91 so as to follow the mask sheet 81a held vertically. Since the substrate 6 is made of glass, it is held vertically while allowing slight deformation.

  The substrate support plate 91 is formed to be slightly larger than the substrate 6, and when the deposition film is formed at the position corresponding to the peripheral edge of the substrate 6 while the substrate 6 is being transported and the substrate 6 is vertically stood. A plurality of fixing mechanisms 101 are provided so that the substrate 6 is not displaced. When the fifth to sixth generation substrates 6 are handled, about four fixing mechanisms 101 are provided at approximately equal intervals in the longitudinal direction (up and down direction) and about 2 to 3 in the left and right direction.

  For example, as shown in FIG. 9, the fixing mechanism 101 is formed by bending a plate-like member 104 into an L shape, and a hole through which the pin 102 is inserted is formed on the bent side, and this hole serves as an axis. The pins 102 are inserted and attached to the substrate support plate 91. Since the fixing mechanism 101 can freely rotate around the shaft 102, a stopper 103 is provided in contact with the fixing mechanism. The stopper is movably attached to the substrate support plate 91, and restricts or releases the rotation of the plate-like member 104 of the fixing mechanism 101 by rotating around a shaft (not shown).

  Next, the floating mechanisms 111 formed at a plurality of locations on the substrate support plate 81, for example, 5 locations in the longitudinal direction and 4 locations in the width direction at substantially equal pitches will be described with reference to FIG. Of course, the number of floating mechanisms 111 is not limited to this number, and can be increased or decreased as necessary. However, it is preferable to arrange them at an equal pitch as much as possible because any deformation of the glass substrate 6 can be handled.

  Since the substrate support plate 91 is also used as a cooling plate, a cooling passage is often formed inside. Therefore, a plurality of through-holes 116 are formed at positions that do not interfere with the cooling passages and at the same pitch as possible. A step 115 is formed in the hole 116. When the step 115 is manufactured, it may be traced according to its shape with an end mill or the like, or a through hole may be formed, and then a ring may be inserted into the hole. Further, the step may be formed by two holes having different diameters. The pressing body 113 is inserted into the hole 116. A coil spring 112 is wound around the outer periphery of the pressing body 113, one end of the coil spring 112 abuts on the stepped portion 115, and the other end of the coil spring 112 abuts on the pressing body 113.

  The pressing body 113 has a hemispherical tip shape on the side in contact with the substrate 6, and a shaft having a smaller diameter than the hemisphere is connected to the lower side of the hemisphere. The end of the shaft has a larger diameter than this shaft, and acts as a stopper when the pressing body 113 is inserted into the hole 116. Accordingly, in the pressing body 113, at least one of the hemispherical portion, the shaft portion, and the large diameter portion is formed of a separate member. Since the pressing body 113 is pressed against the glass substrate 6, it is preferable that the hemispherical portion is made of a soft material that can be used even in a vacuum, such as a tetrafluoroethylene resin, so as not to damage the glass substrate 6.

  As shown in FIG. 9A, since the glass substrate 6 is transported horizontally, the glass substrate 6 is held at a predetermined position on the substrate support plate 91 by using the fixing mechanism 101. When the glass substrate 6 is transported to a predetermined position in the vacuum chamber 1, the glass substrate 6 is held vertically using the rotation mechanism 92. When the glass substrate 6 is held vertically, alignment is performed, the glass substrate 6 is moved horizontally and pressed against the mask 81, and the holding of the glass substrate 6 by the fixing mechanism 101 is released.

  At this time, since the fixing mechanism 101 releases the holding of the glass substrate 6 as shown in FIG. 9B, the floating mechanism 111 is operated, and the pressing body 113 is moved by the spring force of the coil spring 112. From the back side. The glass substrate 6 is pressed from the back side and is brought into close contact with the vertically arranged mask 81. When the deposition is completed, the fixing mechanism 101 is operated again to fix the substrate 6 to a predetermined position of the substrate support plate 91, and the rotating mechanism 92 is used to return to the horizontal state to prepare for the next deposition or the unloading of the substrate 6. .

  According to the present embodiment, since the pressing body is disposed at a plurality of positions on the substrate support plate located on the back side of the glass substrate, the pressing body is made of glass even if there is a slight distortion or distortion during mounting. Since the substrate is pressed from the back surface, the glass substrate is in close contact with the mask while being floated from the substrate support plate, and the degree of adhesion to the mask is improved. Moreover, since a softer material than the glass substrate is used for the tip part (pressing part) of the pressing body, there is no possibility of damaging the glass substrate.

  In the second embodiment, the glass substrate is pressed against the mask by the pressing body. However, in combination with the first embodiment, a magnet is arranged on the back surface (on the opposite side of the substrate) of the substrate support plate, and the magnetic force of the magnet is made of metal. You may make it act on a mask and may make the close_contact | adherence degree of a board | substrate and a mask increase.

  In the above embodiment, the tip of the pressing body is hemispherical, but the shape of the tip is not limited to this, and if the shape is smooth, there is no risk of damaging the glass substrate when contacting the glass substrate. Can be used. The material is not limited to the tetrafluoroethylene resin, and an aluminum material or the like can be used. Further, the fixing mechanism is not limited to the above embodiment, and may be other means as long as it can be easily released in the vacuum chamber.

  Further, the distance (stroke) that can be pressed by the pressing means may be about 1 mm at the maximum in consideration of the distortion of the glass substrate, etc., and if it is about 0.5 mm, the mask and the substrate are practically in close contact with each other. A vapor-deposited film having a small thickness is obtained.

  In the first embodiment, the means for holding the substrate from the back corresponds to the mechanism frame in the first embodiment and the substrate support plate (cooling plate) in the second embodiment. These also hold the substrate pressing means.

  DESCRIPTION OF SYMBOLS 1 ... Vacuum chamber, 6 ... Board | substrate, 10 ... Gate valve, 31 ... Left and right side fixing magnet, 32 ... Upper side fixing magnet, 33 ... Lower side fixing magnet, 34 ... Upper side clamping mechanism, 35 ... Fall prevention receiving piece, 36 ... Mechanical unit frame 37 ... Mask sheet contact magnet drive mechanism 38 ... Left and right side magnet drive mechanism 39 ... Frame drive mechanism 40 ... Lower side fixing magnet drive mechanism 41 ... Mask sheet contact magnet drive mechanism 42 ... Reverse Arm 43. Drop prevention receiving piece drive motor 50. Substrate pressing means 52. Lift pin 71 71 Evaporation source 81 Mask 81 a Mask sheet 81 b Mask frame 81 c Hole (dot) 83 Alignment Drive unit, 84 ... alignment mark, 85 ... window, 86 ... alignment camera, 89 ... mask holder, 9 DESCRIPTION OF SYMBOLS ... Substrate support plate, 92 ... Rotating mechanism, 92a ... Shaft, 100 ... Film forming apparatus, 101 ... Fixing mechanism, 102 ... Shaft (pin), 103 ... Stopper, 104 ... Plate member, 111 ... Floating mechanism (pressing means) , 112 ... coil spring, 113 ... pressing body, 114 ... head, 115 ... stepped portion, 116 ... hole, 200 ... controller.

Claims (6)

In a film forming apparatus for forming a deposition material sprayed from an evaporation source through a mask on a substrate carried into a vacuum chamber,
A rotation mechanism that changes the posture of the substrate from a horizontal direction to a vertical direction; a unit that is held by the rotation mechanism to hold the substrate; and a plurality of pressing units that press a plurality of portions of the substrate toward the mask side. A film forming apparatus characterized by the above.   The pressing means includes a plurality of magnets disposed at positions corresponding to the mask frame and the mask sheet of the mask on the back side of the substrate, and driving means for driving the magnets in a direction perpendicular to the substrate. The film forming apparatus according to claim 1, wherein the film forming apparatus is provided.   The plurality of magnets are arranged at positions corresponding to the mask sheet and an upper side fixing magnet, a lower side fixing magnet, a left and right side fixing magnet arranged at a position corresponding to the mask frame at a peripheral portion of the substrate. The film forming apparatus according to claim 2, comprising a mask sheet adhesion magnet.   The film forming apparatus according to claim 1, wherein the pressing unit includes a pressing body movable in a direction perpendicular to the substrate, and a coil spring wound around the pressing body.   When the substrate is transported, etc., when the substrate is maintained in a horizontal state, the substrate is held by the substrate holding means, and when the substrate is maintained, for example, when the substrate is maintained in a vertical state, the substrate is The film forming apparatus according to claim 4, further comprising a fixing mechanism that releases the substrate holding means.   A substrate is held in a horizontal state and carried into a vacuum chamber, and then the substrate is brought into a vertical state by using a rotation mechanism disposed below the substrate, and a plurality of presses disposed between the rotation mechanism and the substrate. The means presses the substrate to bring the mask disposed on the front side of the substrate into close contact with the substrate, and then deposits a vapor deposition material from the vapor deposition source onto the substrate surface to form a vapor deposition film on the substrate surface. A characteristic film forming method.

Images