JP2013192228A5 - - Google Patents
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- Publication number
- JP2013192228A5 JP2013192228A5 JP2013049912A JP2013049912A JP2013192228A5 JP 2013192228 A5 JP2013192228 A5 JP 2013192228A5 JP 2013049912 A JP2013049912 A JP 2013049912A JP 2013049912 A JP2013049912 A JP 2013049912A JP 2013192228 A5 JP2013192228 A5 JP 2013192228A5
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic probe
- substrate
- providing
- array ultrasonic
- placement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 21
- 239000000523 sample Substances 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000000853 adhesive Substances 0.000 claims description 9
- 230000001070 adhesive effect Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims 2
- 239000011159 matrix material Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 229920000642 polymer Polymers 0.000 claims 1
- 239000002861 polymer material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020120026098A KR101378012B1 (ko) | 2012-03-14 | 2012-03-14 | 멀티 어레이형 초음파 프로브 장치 및 멀티 어레이형 초음파 프로브 장치의 제조 방법 |
| KR10-2012-0026098 | 2012-03-14 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013192228A JP2013192228A (ja) | 2013-09-26 |
| JP2013192228A5 true JP2013192228A5 (https=) | 2014-04-10 |
| JP5666640B2 JP5666640B2 (ja) | 2015-02-12 |
Family
ID=47913010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013049912A Active JP5666640B2 (ja) | 2012-03-14 | 2013-03-13 | マルチアレイ超音波プローブ装置及びその製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9071893B2 (https=) |
| EP (1) | EP2639789B1 (https=) |
| JP (1) | JP5666640B2 (https=) |
| KR (1) | KR101378012B1 (https=) |
| CN (1) | CN103300882B (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11084062B2 (en) * | 2015-11-02 | 2021-08-10 | Koninklijke Philips N.V. | Ultrasound transducer array, probe and system |
| WO2017211754A1 (en) * | 2016-06-09 | 2017-12-14 | Koninklijke Philips N.V. | Coolable ultrasound probe |
| JP6712917B2 (ja) * | 2016-07-14 | 2020-06-24 | 株式会社日立製作所 | 半導体センサチップアレイ、および超音波診断装置 |
| US11744553B2 (en) * | 2016-09-29 | 2023-09-05 | Koninklijke Philips N.V. | Ultrasound system, method and computer program product |
| KR101915255B1 (ko) * | 2017-01-11 | 2018-11-05 | 삼성메디슨 주식회사 | 초음파 프로브의 제조 방법 및 그 초음파 프로브 |
| CN115398183A (zh) * | 2020-01-17 | 2022-11-25 | 大不列颠哥伦比亚大学 | 柔性电容式微加工超声换能器阵列 |
| KR102492901B1 (ko) * | 2021-03-31 | 2023-01-30 | 국방과학연구소 | 압전단결정 복합체 음향센서 및 이를 포함하는 배열 음향센서 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0427052B1 (de) * | 1989-11-09 | 1993-03-31 | Oerlikon-Contraves AG | Verfahren zur Herstellung von Hybridschaltungen mit einem Array aus gleichen elektronischen Elementen |
| JP3131485B2 (ja) | 1992-02-04 | 2001-01-31 | オリンパス光学工業株式会社 | 超音波プローブ |
| JP3535204B2 (ja) | 1994-02-28 | 2004-06-07 | 株式会社東芝 | 超音波プローブ及びその製造方法 |
| US5655276A (en) | 1995-02-06 | 1997-08-12 | General Electric Company | Method of manufacturing two-dimensional array ultrasonic transducers |
| US6043590A (en) | 1997-04-18 | 2000-03-28 | Atl Ultrasound | Composite transducer with connective backing block |
| JP4723732B2 (ja) * | 2000-07-12 | 2011-07-13 | セイコーインスツル株式会社 | 脈検出装置及び超音波診断装置 |
| JP3449345B2 (ja) | 2000-08-11 | 2003-09-22 | 株式会社村田製作所 | センサアレイおよび送受信装置 |
| JP4562106B2 (ja) * | 2000-11-27 | 2010-10-13 | セイコーインスツル株式会社 | 超音波診断装置 |
| KR100684677B1 (ko) | 2002-06-05 | 2007-02-23 | 야마이치덴키 가부시키가이샤 | 프로브 유닛 및 그 제조 방법 |
| US7280435B2 (en) | 2003-03-06 | 2007-10-09 | General Electric Company | Switching circuitry for reconfigurable arrays of sensor elements |
| JP4261298B2 (ja) | 2003-09-19 | 2009-04-30 | 富士フイルム株式会社 | 積層構造体アレイ及びその製造方法、並びに、超音波トランスデューサアレイの製造方法 |
| GB2430259B (en) | 2004-01-08 | 2007-07-25 | Schlumberger Holdings | Integrated Acoustic Transducer Assembly |
| JP2005342337A (ja) * | 2004-06-04 | 2005-12-15 | Matsushita Electric Ind Co Ltd | 超音波探触子 |
| EP1774583A2 (en) | 2004-07-28 | 2007-04-18 | Sv Probe Pte Ltd. | Method and apparatus for producing co-planar bonding pads on a substrate |
| US7459795B2 (en) | 2004-08-19 | 2008-12-02 | Formfactor, Inc. | Method to build a wirebond probe card in a many at a time fashion |
| US20070152685A1 (en) | 2006-01-03 | 2007-07-05 | Formfactor, Inc. | A probe array structure and a method of making a probe array structure |
| JP5038808B2 (ja) * | 2007-08-02 | 2012-10-03 | 株式会社東芝 | 超音波トランスデューサおよび超音波トランスデューサを備えた超音波プローブ |
| JP5611830B2 (ja) * | 2007-12-03 | 2014-10-22 | コロ テクノロジーズ インコーポレイテッド | 静電型変換器アレイのパッケージングおよび接続 |
| KR100967024B1 (ko) | 2008-04-14 | 2010-06-30 | 삼성전기주식회사 | 프로브 기판 제조 방법 |
| KR100996150B1 (ko) | 2008-05-23 | 2010-11-24 | 주식회사 엠아이티 | 프로브핀의 정열판과 통전판 및 그의 기판 제조방법 |
| JP2010022931A (ja) | 2008-07-18 | 2010-02-04 | Fujifilm Corp | 接着剤はみ出し防止構造を有する超音波探触子 |
| KR101137262B1 (ko) | 2009-03-18 | 2012-04-20 | 삼성메디슨 주식회사 | 초음파 진단장치용 프로브 및 그 제조방법 |
| US8345508B2 (en) | 2009-09-20 | 2013-01-01 | General Electric Company | Large area modular sensor array assembly and method for making the same |
| JP5462735B2 (ja) | 2010-07-01 | 2014-04-02 | 日立アロカメディカル株式会社 | 超音波探触子の製造方法、および、超音波探触子 |
| US20120029393A1 (en) * | 2010-07-30 | 2012-02-02 | General Electric Company | Compact ultrasound transducer assembly and methods of making and using the same |
| US8776335B2 (en) | 2010-11-17 | 2014-07-15 | General Electric Company | Methods of fabricating ultrasonic transducer assemblies |
| KR101354603B1 (ko) | 2012-01-02 | 2014-01-23 | 삼성메디슨 주식회사 | 초음파 프로브 및 그 제조방법 |
-
2012
- 2012-03-14 KR KR1020120026098A patent/KR101378012B1/ko active Active
-
2013
- 2013-01-15 US US13/741,907 patent/US9071893B2/en active Active
- 2013-03-12 CN CN201310077389.5A patent/CN103300882B/zh active Active
- 2013-03-13 JP JP2013049912A patent/JP5666640B2/ja active Active
- 2013-03-14 EP EP13159231.3A patent/EP2639789B1/en active Active
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