CN103300882B - 多阵列超声波探头设备及其制造方法和装置 - Google Patents

多阵列超声波探头设备及其制造方法和装置 Download PDF

Info

Publication number
CN103300882B
CN103300882B CN201310077389.5A CN201310077389A CN103300882B CN 103300882 B CN103300882 B CN 103300882B CN 201310077389 A CN201310077389 A CN 201310077389A CN 103300882 B CN103300882 B CN 103300882B
Authority
CN
China
Prior art keywords
substrate
leader
block
adhesion
adhesion section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201310077389.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN103300882A (zh
Inventor
金永一
金东郁
金培滢
宋宗根
李承宪
赵庚一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of CN103300882A publication Critical patent/CN103300882A/zh
Application granted granted Critical
Publication of CN103300882B publication Critical patent/CN103300882B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00Details of transducers, loudspeakers or microphones
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292Electrostatic transducers, e.g. electret-type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/004Mounting transducers, e.g. provided with mechanical moving or orienting device
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49005Acoustic transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Mechanical Engineering (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Biophysics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
CN201310077389.5A 2012-03-14 2013-03-12 多阵列超声波探头设备及其制造方法和装置 Active CN103300882B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020120026098A KR101378012B1 (ko) 2012-03-14 2012-03-14 멀티 어레이형 초음파 프로브 장치 및 멀티 어레이형 초음파 프로브 장치의 제조 방법
KR10-2012-0026098 2012-03-14

Publications (2)

Publication Number Publication Date
CN103300882A CN103300882A (zh) 2013-09-18
CN103300882B true CN103300882B (zh) 2016-03-30

Family

ID=47913010

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310077389.5A Active CN103300882B (zh) 2012-03-14 2013-03-12 多阵列超声波探头设备及其制造方法和装置

Country Status (5)

Country Link
US (1) US9071893B2 (https=)
EP (1) EP2639789B1 (https=)
JP (1) JP5666640B2 (https=)
KR (1) KR101378012B1 (https=)
CN (1) CN103300882B (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11084062B2 (en) * 2015-11-02 2021-08-10 Koninklijke Philips N.V. Ultrasound transducer array, probe and system
WO2017211754A1 (en) * 2016-06-09 2017-12-14 Koninklijke Philips N.V. Coolable ultrasound probe
JP6712917B2 (ja) * 2016-07-14 2020-06-24 株式会社日立製作所 半導体センサチップアレイ、および超音波診断装置
US11744553B2 (en) * 2016-09-29 2023-09-05 Koninklijke Philips N.V. Ultrasound system, method and computer program product
KR101915255B1 (ko) * 2017-01-11 2018-11-05 삼성메디슨 주식회사 초음파 프로브의 제조 방법 및 그 초음파 프로브
CN115398183A (zh) * 2020-01-17 2022-11-25 大不列颠哥伦比亚大学 柔性电容式微加工超声换能器阵列
KR102492901B1 (ko) * 2021-03-31 2023-01-30 국방과학연구소 압전단결정 복합체 음향센서 및 이를 포함하는 배열 음향센서

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0427052B1 (de) * 1989-11-09 1993-03-31 Oerlikon-Contraves AG Verfahren zur Herstellung von Hybridschaltungen mit einem Array aus gleichen elektronischen Elementen
JP3131485B2 (ja) 1992-02-04 2001-01-31 オリンパス光学工業株式会社 超音波プローブ
JP3535204B2 (ja) 1994-02-28 2004-06-07 株式会社東芝 超音波プローブ及びその製造方法
US5655276A (en) 1995-02-06 1997-08-12 General Electric Company Method of manufacturing two-dimensional array ultrasonic transducers
US6043590A (en) 1997-04-18 2000-03-28 Atl Ultrasound Composite transducer with connective backing block
JP4723732B2 (ja) * 2000-07-12 2011-07-13 セイコーインスツル株式会社 脈検出装置及び超音波診断装置
JP3449345B2 (ja) 2000-08-11 2003-09-22 株式会社村田製作所 センサアレイおよび送受信装置
JP4562106B2 (ja) * 2000-11-27 2010-10-13 セイコーインスツル株式会社 超音波診断装置
KR100684677B1 (ko) 2002-06-05 2007-02-23 야마이치덴키 가부시키가이샤 프로브 유닛 및 그 제조 방법
US7280435B2 (en) 2003-03-06 2007-10-09 General Electric Company Switching circuitry for reconfigurable arrays of sensor elements
JP4261298B2 (ja) 2003-09-19 2009-04-30 富士フイルム株式会社 積層構造体アレイ及びその製造方法、並びに、超音波トランスデューサアレイの製造方法
GB2430259B (en) 2004-01-08 2007-07-25 Schlumberger Holdings Integrated Acoustic Transducer Assembly
JP2005342337A (ja) * 2004-06-04 2005-12-15 Matsushita Electric Ind Co Ltd 超音波探触子
EP1774583A2 (en) 2004-07-28 2007-04-18 Sv Probe Pte Ltd. Method and apparatus for producing co-planar bonding pads on a substrate
US7459795B2 (en) 2004-08-19 2008-12-02 Formfactor, Inc. Method to build a wirebond probe card in a many at a time fashion
US20070152685A1 (en) 2006-01-03 2007-07-05 Formfactor, Inc. A probe array structure and a method of making a probe array structure
JP5038808B2 (ja) * 2007-08-02 2012-10-03 株式会社東芝 超音波トランスデューサおよび超音波トランスデューサを備えた超音波プローブ
JP5611830B2 (ja) * 2007-12-03 2014-10-22 コロ テクノロジーズ インコーポレイテッド 静電型変換器アレイのパッケージングおよび接続
KR100967024B1 (ko) 2008-04-14 2010-06-30 삼성전기주식회사 프로브 기판 제조 방법
KR100996150B1 (ko) 2008-05-23 2010-11-24 주식회사 엠아이티 프로브핀의 정열판과 통전판 및 그의 기판 제조방법
JP2010022931A (ja) 2008-07-18 2010-02-04 Fujifilm Corp 接着剤はみ出し防止構造を有する超音波探触子
KR101137262B1 (ko) 2009-03-18 2012-04-20 삼성메디슨 주식회사 초음파 진단장치용 프로브 및 그 제조방법
US8345508B2 (en) 2009-09-20 2013-01-01 General Electric Company Large area modular sensor array assembly and method for making the same
JP5462735B2 (ja) 2010-07-01 2014-04-02 日立アロカメディカル株式会社 超音波探触子の製造方法、および、超音波探触子
US20120029393A1 (en) * 2010-07-30 2012-02-02 General Electric Company Compact ultrasound transducer assembly and methods of making and using the same
US8776335B2 (en) 2010-11-17 2014-07-15 General Electric Company Methods of fabricating ultrasonic transducer assemblies
KR101354603B1 (ko) 2012-01-02 2014-01-23 삼성메디슨 주식회사 초음파 프로브 및 그 제조방법

Also Published As

Publication number Publication date
US20130242705A1 (en) 2013-09-19
KR101378012B1 (ko) 2014-03-24
JP5666640B2 (ja) 2015-02-12
US9071893B2 (en) 2015-06-30
EP2639789A3 (en) 2014-02-26
KR20130104531A (ko) 2013-09-25
EP2639789A2 (en) 2013-09-18
CN103300882A (zh) 2013-09-18
EP2639789B1 (en) 2016-06-08
JP2013192228A (ja) 2013-09-26

Similar Documents

Publication Publication Date Title
CN103300882B (zh) 多阵列超声波探头设备及其制造方法和装置
EP1838462B1 (en) Redistribution interconnect for microbeamformer(s) and a medical ultrasound system
JP4786679B2 (ja) プローブカード及びその製造方法
US8776335B2 (en) Methods of fabricating ultrasonic transducer assemblies
US8614491B2 (en) Package interface plate for package isolation structures
EP2860990A1 (en) Method of improving mems microphone mechanical stability
KR20130012500A (ko) 칩 패키지 구조물 및 그 제조 방법
JP2019502306A (ja) 高周波超音波トランスデューサ及び製造方法
US11891298B2 (en) Process for manufacturing microelectromechanical devices, in particular electroacoustic modules
CN110349912B (zh) 一种用于通过转印将半导体组件耦合到目标衬底的方法
US20060130582A1 (en) Semiconductor device and manufacturing method thereof
US9136139B2 (en) Jig, manufacturing method thereof, and flip chip bonding method for chips of ultrasound probe using jig
CN101545920A (zh) 加速度传感器装置
TW202305964A (zh) 接合工具及其接合方法
US11437564B2 (en) Ultrasonic device and ultrasonic apparatus
US20130020907A1 (en) Wire bond free connection of high frequency piezoelectric ultrasound transducer arrays
JP2019096991A (ja) イメージセンサー、センサーチップの製造方法
US8814326B2 (en) Reduced mechanical coupling with structured flex circuits
CN119050081A (zh) 裸芯片及其制造方法、半导体结构以及测试系统
KR20150041928A (ko) 멤스 모듈 패키지 및 이의 제조방법

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant