JP2013183212A - 圧電デバイス - Google Patents
圧電デバイス Download PDFInfo
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- JP2013183212A JP2013183212A JP2012044254A JP2012044254A JP2013183212A JP 2013183212 A JP2013183212 A JP 2013183212A JP 2012044254 A JP2012044254 A JP 2012044254A JP 2012044254 A JP2012044254 A JP 2012044254A JP 2013183212 A JP2013183212 A JP 2013183212A
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Abstract
【解決手段】本発明の実施形態における圧電デバイス100は、素子搭載用部材110と、素子搭載用部材110に搭載された圧電素子130と、素子搭載用部材110に搭載されており、圧電素子130に電気的に接続されており、互いに異なる位置に設けられた複数の温度センサ125a、125bを有するIC素子120とを備えている。
【選択図】図4
Description
110・・・素子搭載用部材
111・・・絶縁基体
111a・・・基板部
111b・・・第1の枠部
111c・・・第2の枠部
113・・・IC素子搭載パッド
116・・・外部端子
120・・・IC素子
121・・・電極
122・・・バンプ
124・・・発熱素子
125a・・・第1の温度センサ
125b・・・第2の温度センサ
130・・・圧電素子
140・・・蓋部材
Claims (2)
- 素子搭載用部材と、
前記素子搭載用部材に搭載された圧電素子と、
前記素子搭載用部材に搭載されており、前記圧電素子に電気的に接続されており、互いに異なる位置に設けられた複数の温度センサを有するIC素子と、
を備えたことを特徴とする圧電デバイス。 - 前記複数の温度センサのうちの1つが、前記IC素子の内部の発熱素子の近傍に配置されていることを特徴とする請求項1に記載の圧電デバイス。
Priority Applications (1)
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JP2012044254A JP5926578B2 (ja) | 2012-02-29 | 2012-02-29 | 圧電デバイス |
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JP2012044254A JP5926578B2 (ja) | 2012-02-29 | 2012-02-29 | 圧電デバイス |
Publications (2)
Publication Number | Publication Date |
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JP2013183212A true JP2013183212A (ja) | 2013-09-12 |
JP5926578B2 JP5926578B2 (ja) | 2016-05-25 |
Family
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JP2012044254A Active JP5926578B2 (ja) | 2012-02-29 | 2012-02-29 | 圧電デバイス |
Country Status (1)
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JP (1) | JP5926578B2 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9484926B2 (en) | 2015-01-22 | 2016-11-01 | Seiko Epson Corporation | Semiconductor circuit device, oscillator, electronic apparatus, and moving object |
US9634672B2 (en) | 2015-01-22 | 2017-04-25 | Seiko Epson Corporation | Semiconductor circuit device, oscillator, electronic apparatus, and moving object |
JP2019129487A (ja) * | 2018-01-26 | 2019-08-01 | セイコーエプソン株式会社 | 集積回路装置、発振器、電子機器及び移動体 |
US11025194B2 (en) | 2019-04-01 | 2021-06-01 | Seiko Epson Corporation | Integrated circuit device, oscillator, electronic apparatus, and vehicle |
US11038463B2 (en) | 2019-04-01 | 2021-06-15 | Seiko Epson Corporation | Integrated circuit device, oscillator, electronic apparatus, and vehicle |
US11509265B2 (en) | 2020-05-26 | 2022-11-22 | Seiko Epson Corporation | Integrated circuit, oscillator, electronic apparatus, and vehicle |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006191517A (ja) * | 2004-12-07 | 2006-07-20 | Seiko Epson Corp | 温度補償型圧電発振器 |
JP2009273087A (ja) * | 2008-05-12 | 2009-11-19 | Epson Toyocom Corp | 圧電発振器 |
JP2010193134A (ja) * | 2009-02-18 | 2010-09-02 | Epson Toyocom Corp | 温度補償型圧電発振器 |
JP2010219578A (ja) * | 2009-03-13 | 2010-09-30 | Nippon Dempa Kogyo Co Ltd | 恒温型の水晶発振器 |
-
2012
- 2012-02-29 JP JP2012044254A patent/JP5926578B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006191517A (ja) * | 2004-12-07 | 2006-07-20 | Seiko Epson Corp | 温度補償型圧電発振器 |
JP2009273087A (ja) * | 2008-05-12 | 2009-11-19 | Epson Toyocom Corp | 圧電発振器 |
JP2010193134A (ja) * | 2009-02-18 | 2010-09-02 | Epson Toyocom Corp | 温度補償型圧電発振器 |
JP2010219578A (ja) * | 2009-03-13 | 2010-09-30 | Nippon Dempa Kogyo Co Ltd | 恒温型の水晶発振器 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9484926B2 (en) | 2015-01-22 | 2016-11-01 | Seiko Epson Corporation | Semiconductor circuit device, oscillator, electronic apparatus, and moving object |
US9634672B2 (en) | 2015-01-22 | 2017-04-25 | Seiko Epson Corporation | Semiconductor circuit device, oscillator, electronic apparatus, and moving object |
JP2019129487A (ja) * | 2018-01-26 | 2019-08-01 | セイコーエプソン株式会社 | 集積回路装置、発振器、電子機器及び移動体 |
JP7040050B2 (ja) | 2018-01-26 | 2022-03-23 | セイコーエプソン株式会社 | 集積回路装置、発振器、電子機器及び移動体 |
US11025194B2 (en) | 2019-04-01 | 2021-06-01 | Seiko Epson Corporation | Integrated circuit device, oscillator, electronic apparatus, and vehicle |
US11038463B2 (en) | 2019-04-01 | 2021-06-15 | Seiko Epson Corporation | Integrated circuit device, oscillator, electronic apparatus, and vehicle |
US11509265B2 (en) | 2020-05-26 | 2022-11-22 | Seiko Epson Corporation | Integrated circuit, oscillator, electronic apparatus, and vehicle |
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JP5926578B2 (ja) | 2016-05-25 |
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