JP2013179284A5 - - Google Patents
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- Publication number
- JP2013179284A5 JP2013179284A5 JP2013016496A JP2013016496A JP2013179284A5 JP 2013179284 A5 JP2013179284 A5 JP 2013179284A5 JP 2013016496 A JP2013016496 A JP 2013016496A JP 2013016496 A JP2013016496 A JP 2013016496A JP 2013179284 A5 JP2013179284 A5 JP 2013179284A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- oxide semiconductor
- semiconductor film
- film
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 29
- 230000001681 protective effect Effects 0.000 claims 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 3
- 229910052760 oxygen Inorganic materials 0.000 claims 3
- 239000001301 oxygen Substances 0.000 claims 3
- 239000002019 doping agent Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013016496A JP6148024B2 (ja) | 2012-02-09 | 2013-01-31 | 半導体装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012026733 | 2012-02-09 | ||
| JP2012026733 | 2012-02-09 | ||
| JP2013016496A JP6148024B2 (ja) | 2012-02-09 | 2013-01-31 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013179284A JP2013179284A (ja) | 2013-09-09 |
| JP2013179284A5 true JP2013179284A5 (enExample) | 2016-03-17 |
| JP6148024B2 JP6148024B2 (ja) | 2017-06-14 |
Family
ID=49270624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013016496A Expired - Fee Related JP6148024B2 (ja) | 2012-02-09 | 2013-01-31 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6148024B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6506545B2 (ja) | 2013-12-27 | 2019-04-24 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP2015188062A (ja) * | 2014-02-07 | 2015-10-29 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| WO2017081579A1 (en) | 2015-11-13 | 2017-05-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| US10714633B2 (en) * | 2015-12-15 | 2020-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5128733A (en) * | 1991-05-17 | 1992-07-07 | United Technologies Corporation | Silicon mesa transistor structure |
| JP5111867B2 (ja) * | 2007-01-16 | 2013-01-09 | 株式会社ジャパンディスプレイイースト | 表示装置 |
| WO2011132591A1 (en) * | 2010-04-23 | 2011-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| DE112011101395B4 (de) * | 2010-04-23 | 2014-10-16 | Semiconductor Energy Laboratory Co., Ltd. | Verfahren zum Herstellen einer Halbleitervorrichtung |
| DE112011101969B4 (de) * | 2010-06-11 | 2018-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Halbleitervorrichtung und Verfahren zum Herstellen derselben |
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2013
- 2013-01-31 JP JP2013016496A patent/JP6148024B2/ja not_active Expired - Fee Related