JP2013171925A5 - - Google Patents

Download PDF

Info

Publication number
JP2013171925A5
JP2013171925A5 JP2012034066A JP2012034066A JP2013171925A5 JP 2013171925 A5 JP2013171925 A5 JP 2013171925A5 JP 2012034066 A JP2012034066 A JP 2012034066A JP 2012034066 A JP2012034066 A JP 2012034066A JP 2013171925 A5 JP2013171925 A5 JP 2013171925A5
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
ionizing radiation
beam apparatus
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2012034066A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013171925A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012034066A priority Critical patent/JP2013171925A/ja
Priority claimed from JP2012034066A external-priority patent/JP2013171925A/ja
Priority to US13/771,388 priority patent/US8981323B2/en
Publication of JP2013171925A publication Critical patent/JP2013171925A/ja
Publication of JP2013171925A5 publication Critical patent/JP2013171925A5/ja
Abandoned legal-status Critical Current

Links

JP2012034066A 2012-02-20 2012-02-20 荷電粒子線装置、それを用いた物品の製造方法 Abandoned JP2013171925A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012034066A JP2013171925A (ja) 2012-02-20 2012-02-20 荷電粒子線装置、それを用いた物品の製造方法
US13/771,388 US8981323B2 (en) 2012-02-20 2013-02-20 Charged particle beam apparatus, and article manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012034066A JP2013171925A (ja) 2012-02-20 2012-02-20 荷電粒子線装置、それを用いた物品の製造方法

Publications (2)

Publication Number Publication Date
JP2013171925A JP2013171925A (ja) 2013-09-02
JP2013171925A5 true JP2013171925A5 (enExample) 2015-04-09

Family

ID=48982524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012034066A Abandoned JP2013171925A (ja) 2012-02-20 2012-02-20 荷電粒子線装置、それを用いた物品の製造方法

Country Status (2)

Country Link
US (1) US8981323B2 (enExample)
JP (1) JP2013171925A (enExample)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2231352B1 (en) 2008-01-03 2013-10-16 Arcam Ab Method and apparatus for producing three-dimensional objects
WO2011008143A1 (en) 2009-07-15 2011-01-20 Arcam Ab Method and apparatus for producing three-dimensional objects
WO2013098135A1 (en) 2011-12-28 2013-07-04 Arcam Ab Method and apparatus for manufacturing porous three-dimensional articles
WO2013098054A1 (en) 2011-12-28 2013-07-04 Arcam Ab Method and apparatus for detecting defects in freeform fabrication
CN104428866A (zh) 2012-05-14 2015-03-18 迈普尔平版印刷Ip有限公司 带电粒子光刻系统和射束产生器
US11348756B2 (en) 2012-05-14 2022-05-31 Asml Netherlands B.V. Aberration correction in charged particle system
US10586625B2 (en) 2012-05-14 2020-03-10 Asml Netherlands B.V. Vacuum chamber arrangement for charged particle beam generator
GB2522388B (en) 2012-12-17 2017-08-23 Arcam Ab Additive manufacturing method and apparatus
US9550207B2 (en) 2013-04-18 2017-01-24 Arcam Ab Method and apparatus for additive manufacturing
US9676031B2 (en) 2013-04-23 2017-06-13 Arcam Ab Method and apparatus for forming a three-dimensional article
US9676033B2 (en) 2013-09-20 2017-06-13 Arcam Ab Method for additive manufacturing
US10434572B2 (en) 2013-12-19 2019-10-08 Arcam Ab Method for additive manufacturing
US9802253B2 (en) 2013-12-16 2017-10-31 Arcam Ab Additive manufacturing of three-dimensional articles
US10130993B2 (en) 2013-12-18 2018-11-20 Arcam Ab Additive manufacturing of three-dimensional articles
US9789563B2 (en) 2013-12-20 2017-10-17 Arcam Ab Method for additive manufacturing
US9789541B2 (en) 2014-03-07 2017-10-17 Arcam Ab Method for additive manufacturing of three-dimensional articles
US20150283613A1 (en) 2014-04-02 2015-10-08 Arcam Ab Method for fusing a workpiece
US9837254B2 (en) 2014-08-12 2017-12-05 Lam Research Corporation Differentially pumped reactive gas injector
US9341467B2 (en) 2014-08-20 2016-05-17 Arcam Ab Energy beam position verification
US20160052056A1 (en) * 2014-08-22 2016-02-25 Arcam Ab Enhanced electron beam generation
US20160052079A1 (en) * 2014-08-22 2016-02-25 Arcam Ab Enhanced additive manufacturing
US9406535B2 (en) * 2014-08-29 2016-08-02 Lam Research Corporation Ion injector and lens system for ion beam milling
US10825652B2 (en) 2014-08-29 2020-11-03 Lam Research Corporation Ion beam etch without need for wafer tilt or rotation
US9536748B2 (en) 2014-10-21 2017-01-03 Lam Research Corporation Use of ion beam etching to generate gate-all-around structure
US20160167303A1 (en) 2014-12-15 2016-06-16 Arcam Ab Slicing method
US9721755B2 (en) 2015-01-21 2017-08-01 Arcam Ab Method and device for characterizing an electron beam
US11014161B2 (en) 2015-04-21 2021-05-25 Arcam Ab Method for additive manufacturing
US10807187B2 (en) 2015-09-24 2020-10-20 Arcam Ab X-ray calibration standard object
US10583483B2 (en) 2015-10-15 2020-03-10 Arcam Ab Method and apparatus for producing a three-dimensional article
US10525531B2 (en) 2015-11-17 2020-01-07 Arcam Ab Additive manufacturing of three-dimensional articles
US10610930B2 (en) 2015-11-18 2020-04-07 Arcam Ab Additive manufacturing of three-dimensional articles
US9779955B2 (en) 2016-02-25 2017-10-03 Lam Research Corporation Ion beam etching utilizing cryogenic wafer temperatures
US11247274B2 (en) 2016-03-11 2022-02-15 Arcam Ab Method and apparatus for forming a three-dimensional article
US11325191B2 (en) 2016-05-24 2022-05-10 Arcam Ab Method for additive manufacturing
US10549348B2 (en) 2016-05-24 2020-02-04 Arcam Ab Method for additive manufacturing
US10525547B2 (en) 2016-06-01 2020-01-07 Arcam Ab Additive manufacturing of three-dimensional articles
US10792757B2 (en) 2016-10-25 2020-10-06 Arcam Ab Method and apparatus for additive manufacturing
US10987752B2 (en) 2016-12-21 2021-04-27 Arcam Ab Additive manufacturing of three-dimensional articles
US11059123B2 (en) 2017-04-28 2021-07-13 Arcam Ab Additive manufacturing of three-dimensional articles
US11292062B2 (en) 2017-05-30 2022-04-05 Arcam Ab Method and device for producing three-dimensional objects
US20190099809A1 (en) 2017-09-29 2019-04-04 Arcam Ab Method and apparatus for additive manufacturing
US10847374B2 (en) 2017-10-31 2020-11-24 Lam Research Corporation Method for etching features in a stack
US10529070B2 (en) 2017-11-10 2020-01-07 Arcam Ab Method and apparatus for detecting electron beam source filament wear
US11072117B2 (en) 2017-11-27 2021-07-27 Arcam Ab Platform device
US10821721B2 (en) 2017-11-27 2020-11-03 Arcam Ab Method for analysing a build layer
US11517975B2 (en) 2017-12-22 2022-12-06 Arcam Ab Enhanced electron beam generation
US12350754B2 (en) 2017-12-22 2025-07-08 Arcam Ab Electron beam source and the use of the same
US10361092B1 (en) 2018-02-23 2019-07-23 Lam Research Corporation Etching features using metal passivation
US11267051B2 (en) 2018-02-27 2022-03-08 Arcam Ab Build tank for an additive manufacturing apparatus
US10800101B2 (en) 2018-02-27 2020-10-13 Arcam Ab Compact build tank for an additive manufacturing apparatus
US11400519B2 (en) 2018-03-29 2022-08-02 Arcam Ab Method and device for distributing powder material
CN113519071B (zh) 2019-02-28 2025-04-22 朗姆研究公司 利用侧壁清洁的离子束蚀刻
US11177114B1 (en) * 2020-09-15 2021-11-16 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Electrode arrangement, contact assembly for an electrode arrangement, charged particle beam device, and method of reducing an electrical field strength in an electrode arrangement
WO2025201803A1 (en) * 2024-03-28 2025-10-02 Asml Netherlands B.V. Charged particle-optical module
DE102024204310A1 (de) * 2024-05-08 2025-11-13 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren zur Strahlbearbeitung einer optischen Komponente

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003211559A1 (en) * 2002-03-01 2003-09-16 Nikon Corporation Projection optical system adjustment method, prediction method, evaluation method, adjustment method, exposure method, exposure device, program, and device manufacturing method
JP3834271B2 (ja) 2002-07-16 2006-10-18 キヤノン株式会社 マルチ荷電ビームレンズ及びこれを用いた荷電粒子線露光装置ならびにデバイス製造方法
JP2010155367A (ja) 2008-12-26 2010-07-15 Yamaha Motor Co Ltd 真空成形機および真空成形品の製造方法

Similar Documents

Publication Publication Date Title
JP2013171925A5 (enExample)
Bulanov et al. On the design of experiments for the study of extreme field limits in the interaction of laser with ultrarelativistic electron beam
JP6438265B2 (ja) 飲料用容器の殺菌装置
JP2016081929A5 (enExample)
KR101689987B1 (ko) 광조사 장치
WO2012112894A3 (en) Focusing a charged particle imaging system
WO2016049143A3 (en) Room decontamination apparatus and method
JP2017510823A5 (enExample)
MX392046B (es) Dispositivo y procedimiento de marcado laser de una lentilla oftalmica con un pulso laser de longitud de onda y energia por pulsos seleccionados
JP2013051157A5 (enExample)
JP2014510404A5 (enExample)
JP2015058180A5 (enExample)
JP2014054670A5 (enExample)
WO2018086816A3 (en) LIGHTING SOURCE FOR INSPECTION APPARATUS, INSPECTION APPARATUS, AND INSPECTION METHOD
WO2013107686A3 (en) Source-collector device, lithographic apparatus, and device manufacturing method
JPWO2022107629A5 (enExample)
HUE063139T2 (hu) Neutronforrás nyalábformázó készülékkel radiográfiához
JP2016070801A5 (ja) 測定装置
TW201612582A (en) Illumination method, exposure method, device manufacturing method, illumination optical system, and exposure apparatus
JP2012146731A5 (enExample)
AR109058A1 (es) Sistema de inspección de rayos y método de inspección de rayos
JP2015052626A5 (enExample)
JP2013073081A5 (enExample)
JP2014083169A5 (enExample)
PL2283508T3 (pl) Źródło promieniowania i sposób wytwarzania promieniowania rentgenowskiego