JP2013152207A - 検査装置及び検査方法 - Google Patents

検査装置及び検査方法 Download PDF

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Publication number
JP2013152207A
JP2013152207A JP2012052755A JP2012052755A JP2013152207A JP 2013152207 A JP2013152207 A JP 2013152207A JP 2012052755 A JP2012052755 A JP 2012052755A JP 2012052755 A JP2012052755 A JP 2012052755A JP 2013152207 A JP2013152207 A JP 2013152207A
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JP
Japan
Prior art keywords
light amount
inspection
illumination
illumination device
processing information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2012052755A
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English (en)
Japanese (ja)
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JP2013152207A5 (https=
Inventor
Yoshinori Hayashi
義典 林
Tadashi Izutsu
紀 井筒
Hiroyuki Wakaba
博之 若葉
Yoko Ono
洋子 小野
Katsutoshi Seki
勝利 関
Takanori Gondo
隆徳 権藤
Akihiko Takizawa
明彦 滝沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP2012052755A priority Critical patent/JP2013152207A/ja
Priority to KR1020120128707A priority patent/KR101442346B1/ko
Priority to TW101144466A priority patent/TW201333453A/zh
Priority to CN201210579419.8A priority patent/CN103185727B/zh
Priority to US13/729,441 priority patent/US20130169793A1/en
Publication of JP2013152207A publication Critical patent/JP2013152207A/ja
Publication of JP2013152207A5 publication Critical patent/JP2013152207A5/ja
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

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  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Textile Engineering (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Input (AREA)
  • Circuit Arrangement For Electric Light Sources In General (AREA)
JP2012052755A 2011-12-31 2012-03-09 検査装置及び検査方法 Withdrawn JP2013152207A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012052755A JP2013152207A (ja) 2011-12-31 2012-03-09 検査装置及び検査方法
KR1020120128707A KR101442346B1 (ko) 2011-12-31 2012-11-14 검사 장치 및 검사 방법
TW101144466A TW201333453A (zh) 2011-12-31 2012-11-28 檢查裝置及檢查方法
CN201210579419.8A CN103185727B (zh) 2011-12-31 2012-12-27 检查装置及检查方法
US13/729,441 US20130169793A1 (en) 2011-12-31 2012-12-28 Inspection system and inspection method

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011290497 2011-12-31
JP2011290497 2011-12-31
JP2012052755A JP2013152207A (ja) 2011-12-31 2012-03-09 検査装置及び検査方法

Publications (2)

Publication Number Publication Date
JP2013152207A true JP2013152207A (ja) 2013-08-08
JP2013152207A5 JP2013152207A5 (https=) 2014-12-04

Family

ID=48677009

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012052755A Withdrawn JP2013152207A (ja) 2011-12-31 2012-03-09 検査装置及び検査方法

Country Status (5)

Country Link
US (1) US20130169793A1 (https=)
JP (1) JP2013152207A (https=)
KR (1) KR101442346B1 (https=)
CN (1) CN103185727B (https=)
TW (1) TW201333453A (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140240489A1 (en) * 2013-02-26 2014-08-28 Corning Incorporated Optical inspection systems and methods for detecting surface discontinuity defects
US20140279600A1 (en) * 2013-03-15 2014-09-18 Mitchell Barry Chait Automated monitoring of pest traps in a distributed work environment
US10878551B2 (en) * 2014-01-27 2020-12-29 Baxter International Inc. Visual inspection system for automated detection of particulate matter in flexible medical containers
JP6204416B2 (ja) * 2015-07-17 2017-09-27 住友化学株式会社 フィルム検査装置、フィルム検査方法、およびフィルム製造方法
US10939518B2 (en) 2017-07-18 2021-03-02 Fuji Corporation Component-mounting machine and method for adjusting illumination light amount thereof
US10604514B2 (en) * 2017-10-19 2020-03-31 Samumed, Llc 6-(5-membered heteroaryl)isoquinolin-3-yl carboxamides and preparation and use thereof
CN107976449A (zh) * 2018-01-10 2018-05-01 南京火眼猴信息科技有限公司 用于隧道检测图像捕获装置的补光装置
JP7178541B2 (ja) * 2018-02-07 2022-11-28 パナソニックＩｐマネジメント株式会社 発光部品実装装置および発光部品実装方法
JP6746744B1 (ja) 2019-03-28 2020-08-26 浜松ホトニクス株式会社 検査装置及び検査方法
CN115265767B (zh) * 2022-07-29 2024-10-01 中国科学院光电技术研究所 照明场非均匀性检测系统的标定和校正方法及装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07121685A (ja) * 1993-10-26 1995-05-12 Oki Electric Ind Co Ltd 照明光量異常検出回路
JP3657028B2 (ja) * 1995-06-29 2005-06-08 ジェネシス・テクノロジー株式会社 外観検査装置
JP2001141662A (ja) * 1999-11-18 2001-05-25 Central Glass Co Ltd 透明板状体の欠点検出方法および検出装置
JP2004150855A (ja) 2002-10-29 2004-05-27 Nikon Corp 測定機の光量補正方法及び光量補正装置
JP4444838B2 (ja) * 2002-11-14 2010-03-31 シーシーエス株式会社 光量調整システム
JP4485904B2 (ja) * 2004-10-18 2010-06-23 株式会社日立ハイテクノロジーズ 検査装置及び検査方法
JP2008102818A (ja) * 2006-10-20 2008-05-01 Seiko Epson Corp 撮像手段の出力値補正方法、シェーディング補正方法、欠陥検出方法、欠陥検出プログラムおよび欠陥検出装置
JP4311457B2 (ja) * 2007-02-15 2009-08-12 ソニー株式会社 動き検出装置、動き検出方法、撮像装置および監視システム
JP5088605B2 (ja) 2007-03-14 2012-12-05 岩崎電気株式会社 光量モニタとそれを用いた光源装置
CN101271253A (zh) * 2007-03-20 2008-09-24 精工爱普生株式会社 图像检查方法及图像检查装置
JP4897593B2 (ja) * 2007-07-09 2012-03-14 富士フイルム株式会社 複眼撮影装置及びその調節方法
JP5298638B2 (ja) * 2008-02-14 2013-09-25 株式会社ニコン 画像処理装置、撮像装置、補正係数算出方法及び画像処理プログラム

Also Published As

Publication number Publication date
CN103185727A (zh) 2013-07-03
KR20130079142A (ko) 2013-07-10
US20130169793A1 (en) 2013-07-04
KR101442346B1 (ko) 2014-09-17
TW201333453A (zh) 2013-08-16
CN103185727B (zh) 2015-05-13

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