CN103185727B - 检查装置及检查方法 - Google Patents

检查装置及检查方法 Download PDF

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Publication number
CN103185727B
CN103185727B CN201210579419.8A CN201210579419A CN103185727B CN 103185727 B CN103185727 B CN 103185727B CN 201210579419 A CN201210579419 A CN 201210579419A CN 103185727 B CN103185727 B CN 103185727B
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CN
China
Prior art keywords
light quantity
lighting device
process information
inspection
light amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201210579419.8A
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English (en)
Chinese (zh)
Other versions
CN103185727A (zh
Inventor
林义典
井筒纪
若叶博之
小野洋子
关胜利
权藤隆德
泷泽明彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Engineering Works Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Engineering Works Co Ltd filed Critical Shibaura Engineering Works Co Ltd
Publication of CN103185727A publication Critical patent/CN103185727A/zh
Application granted granted Critical
Publication of CN103185727B publication Critical patent/CN103185727B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

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  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Textile Engineering (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Input (AREA)
  • Circuit Arrangement For Electric Light Sources In General (AREA)
CN201210579419.8A 2011-12-31 2012-12-27 检查装置及检查方法 Expired - Fee Related CN103185727B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2011-290497 2011-12-31
JP2011290497 2011-12-31
JP2012-052755 2012-03-09
JP2012052755A JP2013152207A (ja) 2011-12-31 2012-03-09 検査装置及び検査方法

Publications (2)

Publication Number Publication Date
CN103185727A CN103185727A (zh) 2013-07-03
CN103185727B true CN103185727B (zh) 2015-05-13

Family

ID=48677009

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210579419.8A Expired - Fee Related CN103185727B (zh) 2011-12-31 2012-12-27 检查装置及检查方法

Country Status (5)

Country Link
US (1) US20130169793A1 (https=)
JP (1) JP2013152207A (https=)
KR (1) KR101442346B1 (https=)
CN (1) CN103185727B (https=)
TW (1) TW201333453A (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140240489A1 (en) * 2013-02-26 2014-08-28 Corning Incorporated Optical inspection systems and methods for detecting surface discontinuity defects
US20140279600A1 (en) * 2013-03-15 2014-09-18 Mitchell Barry Chait Automated monitoring of pest traps in a distributed work environment
US10878551B2 (en) * 2014-01-27 2020-12-29 Baxter International Inc. Visual inspection system for automated detection of particulate matter in flexible medical containers
JP6204416B2 (ja) * 2015-07-17 2017-09-27 住友化学株式会社 フィルム検査装置、フィルム検査方法、およびフィルム製造方法
US10939518B2 (en) 2017-07-18 2021-03-02 Fuji Corporation Component-mounting machine and method for adjusting illumination light amount thereof
US10604514B2 (en) * 2017-10-19 2020-03-31 Samumed, Llc 6-(5-membered heteroaryl)isoquinolin-3-yl carboxamides and preparation and use thereof
CN107976449A (zh) * 2018-01-10 2018-05-01 南京火眼猴信息科技有限公司 用于隧道检测图像捕获装置的补光装置
JP7178541B2 (ja) * 2018-02-07 2022-11-28 パナソニックＩｐマネジメント株式会社 発光部品実装装置および発光部品実装方法
JP6746744B1 (ja) 2019-03-28 2020-08-26 浜松ホトニクス株式会社 検査装置及び検査方法
CN115265767B (zh) * 2022-07-29 2024-10-01 中国科学院光电技术研究所 照明场非均匀性检测系统的标定和校正方法及装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101271253A (zh) * 2007-03-20 2008-09-24 精工爱普生株式会社 图像检查方法及图像检查装置

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JPH07121685A (ja) * 1993-10-26 1995-05-12 Oki Electric Ind Co Ltd 照明光量異常検出回路
JP3657028B2 (ja) * 1995-06-29 2005-06-08 ジェネシス・テクノロジー株式会社 外観検査装置
JP2001141662A (ja) * 1999-11-18 2001-05-25 Central Glass Co Ltd 透明板状体の欠点検出方法および検出装置
JP2004150855A (ja) 2002-10-29 2004-05-27 Nikon Corp 測定機の光量補正方法及び光量補正装置
JP4444838B2 (ja) * 2002-11-14 2010-03-31 シーシーエス株式会社 光量調整システム
JP4485904B2 (ja) * 2004-10-18 2010-06-23 株式会社日立ハイテクノロジーズ 検査装置及び検査方法
JP2008102818A (ja) * 2006-10-20 2008-05-01 Seiko Epson Corp 撮像手段の出力値補正方法、シェーディング補正方法、欠陥検出方法、欠陥検出プログラムおよび欠陥検出装置
JP4311457B2 (ja) * 2007-02-15 2009-08-12 ソニー株式会社 動き検出装置、動き検出方法、撮像装置および監視システム
JP5088605B2 (ja) 2007-03-14 2012-12-05 岩崎電気株式会社 光量モニタとそれを用いた光源装置
JP4897593B2 (ja) * 2007-07-09 2012-03-14 富士フイルム株式会社 複眼撮影装置及びその調節方法
JP5298638B2 (ja) * 2008-02-14 2013-09-25 株式会社ニコン 画像処理装置、撮像装置、補正係数算出方法及び画像処理プログラム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101271253A (zh) * 2007-03-20 2008-09-24 精工爱普生株式会社 图像检查方法及图像检查装置

Also Published As

Publication number Publication date
CN103185727A (zh) 2013-07-03
KR20130079142A (ko) 2013-07-10
US20130169793A1 (en) 2013-07-04
KR101442346B1 (ko) 2014-09-17
JP2013152207A (ja) 2013-08-08
TW201333453A (zh) 2013-08-16

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Granted publication date: 20150513

Termination date: 20151227

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