KR101442346B1 - 검사 장치 및 검사 방법 - Google Patents

검사 장치 및 검사 방법 Download PDF

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Publication number
KR101442346B1
KR101442346B1 KR1020120128707A KR20120128707A KR101442346B1 KR 101442346 B1 KR101442346 B1 KR 101442346B1 KR 1020120128707 A KR1020120128707 A KR 1020120128707A KR 20120128707 A KR20120128707 A KR 20120128707A KR 101442346 B1 KR101442346 B1 KR 101442346B1
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KR
South Korea
Prior art keywords
light amount
illumination
information
inspection
illumination device
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Expired - Fee Related
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KR1020120128707A
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English (en)
Korean (ko)
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KR20130079142A (ko
Inventor
요시노리 하야시
오사무 이즈츠
히로시 와카바
요코 오노
가츠토시 세키
다카노리 곤도
아키히코 다키자와
Original Assignee
시바우라 메카트로닉스 가부시끼가이샤
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Publication of KR20130079142A publication Critical patent/KR20130079142A/ko
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Publication of KR101442346B1 publication Critical patent/KR101442346B1/ko
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

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  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Textile Engineering (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Input (AREA)
  • Circuit Arrangement For Electric Light Sources In General (AREA)
KR1020120128707A 2011-12-31 2012-11-14 검사 장치 및 검사 방법 Expired - Fee Related KR101442346B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2011-290497 2011-12-31
JP2011290497 2011-12-31
JPJP-P-2012-052755 2012-03-09
JP2012052755A JP2013152207A (ja) 2011-12-31 2012-03-09 検査装置及び検査方法

Publications (2)

Publication Number Publication Date
KR20130079142A KR20130079142A (ko) 2013-07-10
KR101442346B1 true KR101442346B1 (ko) 2014-09-17

Family

ID=48677009

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120128707A Expired - Fee Related KR101442346B1 (ko) 2011-12-31 2012-11-14 검사 장치 및 검사 방법

Country Status (5)

Country Link
US (1) US20130169793A1 (https=)
JP (1) JP2013152207A (https=)
KR (1) KR101442346B1 (https=)
CN (1) CN103185727B (https=)
TW (1) TW201333453A (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140240489A1 (en) * 2013-02-26 2014-08-28 Corning Incorporated Optical inspection systems and methods for detecting surface discontinuity defects
US20140279600A1 (en) * 2013-03-15 2014-09-18 Mitchell Barry Chait Automated monitoring of pest traps in a distributed work environment
US10878551B2 (en) * 2014-01-27 2020-12-29 Baxter International Inc. Visual inspection system for automated detection of particulate matter in flexible medical containers
JP6204416B2 (ja) * 2015-07-17 2017-09-27 住友化学株式会社 フィルム検査装置、フィルム検査方法、およびフィルム製造方法
US10939518B2 (en) 2017-07-18 2021-03-02 Fuji Corporation Component-mounting machine and method for adjusting illumination light amount thereof
US10604514B2 (en) * 2017-10-19 2020-03-31 Samumed, Llc 6-(5-membered heteroaryl)isoquinolin-3-yl carboxamides and preparation and use thereof
CN107976449A (zh) * 2018-01-10 2018-05-01 南京火眼猴信息科技有限公司 用于隧道检测图像捕获装置的补光装置
JP7178541B2 (ja) * 2018-02-07 2022-11-28 パナソニックＩｐマネジメント株式会社 発光部品実装装置および発光部品実装方法
JP6746744B1 (ja) 2019-03-28 2020-08-26 浜松ホトニクス株式会社 検査装置及び検査方法
CN115265767B (zh) * 2022-07-29 2024-10-01 中国科学院光电技术研究所 照明场非均匀性检测系统的标定和校正方法及装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07121685A (ja) * 1993-10-26 1995-05-12 Oki Electric Ind Co Ltd 照明光量異常検出回路
JPH0914934A (ja) * 1995-06-29 1997-01-17 Jieneshisu Technol Kk 外観検査装置
JP2004150855A (ja) 2002-10-29 2004-05-27 Nikon Corp 測定機の光量補正方法及び光量補正装置
JP2008224478A (ja) 2007-03-14 2008-09-25 Iwasaki Electric Co Ltd 光量モニタとそれを用いた光源装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001141662A (ja) * 1999-11-18 2001-05-25 Central Glass Co Ltd 透明板状体の欠点検出方法および検出装置
JP4444838B2 (ja) * 2002-11-14 2010-03-31 シーシーエス株式会社 光量調整システム
JP4485904B2 (ja) * 2004-10-18 2010-06-23 株式会社日立ハイテクノロジーズ 検査装置及び検査方法
JP2008102818A (ja) * 2006-10-20 2008-05-01 Seiko Epson Corp 撮像手段の出力値補正方法、シェーディング補正方法、欠陥検出方法、欠陥検出プログラムおよび欠陥検出装置
JP4311457B2 (ja) * 2007-02-15 2009-08-12 ソニー株式会社 動き検出装置、動き検出方法、撮像装置および監視システム
CN101271253A (zh) * 2007-03-20 2008-09-24 精工爱普生株式会社 图像检查方法及图像检查装置
JP4897593B2 (ja) * 2007-07-09 2012-03-14 富士フイルム株式会社 複眼撮影装置及びその調節方法
JP5298638B2 (ja) * 2008-02-14 2013-09-25 株式会社ニコン 画像処理装置、撮像装置、補正係数算出方法及び画像処理プログラム

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07121685A (ja) * 1993-10-26 1995-05-12 Oki Electric Ind Co Ltd 照明光量異常検出回路
JPH0914934A (ja) * 1995-06-29 1997-01-17 Jieneshisu Technol Kk 外観検査装置
JP2004150855A (ja) 2002-10-29 2004-05-27 Nikon Corp 測定機の光量補正方法及び光量補正装置
JP2008224478A (ja) 2007-03-14 2008-09-25 Iwasaki Electric Co Ltd 光量モニタとそれを用いた光源装置

Also Published As

Publication number Publication date
CN103185727A (zh) 2013-07-03
KR20130079142A (ko) 2013-07-10
US20130169793A1 (en) 2013-07-04
JP2013152207A (ja) 2013-08-08
TW201333453A (zh) 2013-08-16
CN103185727B (zh) 2015-05-13

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