TW201333453A - 檢查裝置及檢查方法 - Google Patents
檢查裝置及檢查方法 Download PDFInfo
- Publication number
- TW201333453A TW201333453A TW101144466A TW101144466A TW201333453A TW 201333453 A TW201333453 A TW 201333453A TW 101144466 A TW101144466 A TW 101144466A TW 101144466 A TW101144466 A TW 101144466A TW 201333453 A TW201333453 A TW 201333453A
- Authority
- TW
- Taiwan
- Prior art keywords
- light amount
- amount
- processing information
- inspection
- illumination
- Prior art date
Links
- 238000007689 inspection Methods 0.000 title claims abstract description 134
- 238000000034 method Methods 0.000 title claims abstract description 43
- 238000005286 illumination Methods 0.000 claims abstract description 206
- 230000008569 process Effects 0.000 claims abstract description 32
- 230000008859 change Effects 0.000 claims abstract description 29
- 238000003705 background correction Methods 0.000 claims description 14
- 230000035945 sensitivity Effects 0.000 claims description 5
- 238000003384 imaging method Methods 0.000 claims description 4
- 230000004044 response Effects 0.000 claims description 4
- 230000006870 function Effects 0.000 claims description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 12
- 239000000853 adhesive Substances 0.000 description 10
- 230000001070 adhesive effect Effects 0.000 description 10
- 239000006059 cover glass Substances 0.000 description 8
- 230000002123 temporal effect Effects 0.000 description 8
- 230000007547 defect Effects 0.000 description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 238000001816 cooling Methods 0.000 description 3
- 230000004043 responsiveness Effects 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N7/00—Television systems
- H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
Landscapes
- Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- Textile Engineering (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Input (AREA)
- Circuit Arrangement For Electric Light Sources In General (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011290497 | 2011-12-31 | ||
| JP2012052755A JP2013152207A (ja) | 2011-12-31 | 2012-03-09 | 検査装置及び検査方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201333453A true TW201333453A (zh) | 2013-08-16 |
Family
ID=48677009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101144466A TW201333453A (zh) | 2011-12-31 | 2012-11-28 | 檢查裝置及檢查方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20130169793A1 (https=) |
| JP (1) | JP2013152207A (https=) |
| KR (1) | KR101442346B1 (https=) |
| CN (1) | CN103185727B (https=) |
| TW (1) | TW201333453A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI834843B (zh) * | 2019-03-28 | 2024-03-11 | 日商濱松赫德尼古斯股份有限公司 | 檢查裝置及檢查方法 |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140240489A1 (en) * | 2013-02-26 | 2014-08-28 | Corning Incorporated | Optical inspection systems and methods for detecting surface discontinuity defects |
| US20140279600A1 (en) * | 2013-03-15 | 2014-09-18 | Mitchell Barry Chait | Automated monitoring of pest traps in a distributed work environment |
| US10878551B2 (en) * | 2014-01-27 | 2020-12-29 | Baxter International Inc. | Visual inspection system for automated detection of particulate matter in flexible medical containers |
| JP6204416B2 (ja) * | 2015-07-17 | 2017-09-27 | 住友化学株式会社 | フィルム検査装置、フィルム検査方法、およびフィルム製造方法 |
| US10939518B2 (en) | 2017-07-18 | 2021-03-02 | Fuji Corporation | Component-mounting machine and method for adjusting illumination light amount thereof |
| US10604514B2 (en) * | 2017-10-19 | 2020-03-31 | Samumed, Llc | 6-(5-membered heteroaryl)isoquinolin-3-yl carboxamides and preparation and use thereof |
| CN107976449A (zh) * | 2018-01-10 | 2018-05-01 | 南京火眼猴信息科技有限公司 | 用于隧道检测图像捕获装置的补光装置 |
| JP7178541B2 (ja) * | 2018-02-07 | 2022-11-28 | パナソニックＩｐマネジメント株式会社 | 発光部品実装装置および発光部品実装方法 |
| CN115265767B (zh) * | 2022-07-29 | 2024-10-01 | 中国科学院光电技术研究所 | 照明场非均匀性检测系统的标定和校正方法及装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07121685A (ja) * | 1993-10-26 | 1995-05-12 | Oki Electric Ind Co Ltd | 照明光量異常検出回路 |
| JP3657028B2 (ja) * | 1995-06-29 | 2005-06-08 | ジェネシス・テクノロジー株式会社 | 外観検査装置 |
| JP2001141662A (ja) * | 1999-11-18 | 2001-05-25 | Central Glass Co Ltd | 透明板状体の欠点検出方法および検出装置 |
| JP2004150855A (ja) | 2002-10-29 | 2004-05-27 | Nikon Corp | 測定機の光量補正方法及び光量補正装置 |
| JP4444838B2 (ja) * | 2002-11-14 | 2010-03-31 | シーシーエス株式会社 | 光量調整システム |
| JP4485904B2 (ja) * | 2004-10-18 | 2010-06-23 | 株式会社日立ハイテクノロジーズ | 検査装置及び検査方法 |
| JP2008102818A (ja) * | 2006-10-20 | 2008-05-01 | Seiko Epson Corp | 撮像手段の出力値補正方法、シェーディング補正方法、欠陥検出方法、欠陥検出プログラムおよび欠陥検出装置 |
| JP4311457B2 (ja) * | 2007-02-15 | 2009-08-12 | ソニー株式会社 | 動き検出装置、動き検出方法、撮像装置および監視システム |
| JP5088605B2 (ja) | 2007-03-14 | 2012-12-05 | 岩崎電気株式会社 | 光量モニタとそれを用いた光源装置 |
| CN101271253A (zh) * | 2007-03-20 | 2008-09-24 | 精工爱普生株式会社 | 图像检查方法及图像检查装置 |
| JP4897593B2 (ja) * | 2007-07-09 | 2012-03-14 | 富士フイルム株式会社 | 複眼撮影装置及びその調節方法 |
| JP5298638B2 (ja) * | 2008-02-14 | 2013-09-25 | 株式会社ニコン | 画像処理装置、撮像装置、補正係数算出方法及び画像処理プログラム |
-
2012
- 2012-03-09 JP JP2012052755A patent/JP2013152207A/ja not_active Withdrawn
- 2012-11-14 KR KR1020120128707A patent/KR101442346B1/ko not_active Expired - Fee Related
- 2012-11-28 TW TW101144466A patent/TW201333453A/zh unknown
- 2012-12-27 CN CN201210579419.8A patent/CN103185727B/zh not_active Expired - Fee Related
- 2012-12-28 US US13/729,441 patent/US20130169793A1/en not_active Abandoned
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI834843B (zh) * | 2019-03-28 | 2024-03-11 | 日商濱松赫德尼古斯股份有限公司 | 檢查裝置及檢查方法 |
| US12228515B2 (en) | 2019-03-28 | 2025-02-18 | Hamamatsu Photonics K.K. | Inspection apparatus and inspection method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103185727A (zh) | 2013-07-03 |
| KR20130079142A (ko) | 2013-07-10 |
| US20130169793A1 (en) | 2013-07-04 |
| KR101442346B1 (ko) | 2014-09-17 |
| JP2013152207A (ja) | 2013-08-08 |
| CN103185727B (zh) | 2015-05-13 |
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