JP2013147743A - 成膜装置および成膜方法 - Google Patents
成膜装置および成膜方法 Download PDFInfo
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- JP2013147743A JP2013147743A JP2012278030A JP2012278030A JP2013147743A JP 2013147743 A JP2013147743 A JP 2013147743A JP 2012278030 A JP2012278030 A JP 2012278030A JP 2012278030 A JP2012278030 A JP 2012278030A JP 2013147743 A JP2013147743 A JP 2013147743A
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018204106A (ja) * | 2017-06-02 | 2018-12-27 | キヤノントッキ株式会社 | 真空蒸着装置及びそれを用いたデバイス製造方法 |
| JP2021022423A (ja) * | 2019-07-24 | 2021-02-18 | スタンレー電気株式会社 | 発光装置の製造方法、及び、発光装置 |
| WO2022097286A1 (ja) * | 2020-11-06 | 2022-05-12 | 貴嗣 飯塚 | 成膜装置、成膜ユニット及び成膜方法 |
| JP2023102548A (ja) * | 2022-01-12 | 2023-07-25 | 株式会社ジャパンディスプレイ | 蒸着装置及び蒸着方法 |
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| DE102013109140B4 (de) * | 2013-08-23 | 2017-04-27 | Osram Oled Gmbh | Verfahren zum Herstellen von organischen Leuchtdioden und organische Leuchtdiode |
| DE102013111591A1 (de) * | 2013-10-21 | 2015-04-23 | Osram Oled Gmbh | Verfahren und Vorrichtung zum Ausbilden einer organischen funktionellen Schichtenstruktur und optoelektronisches Bauelement |
| KR102315659B1 (ko) | 2013-11-27 | 2021-10-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치 |
| CN103938161A (zh) * | 2014-04-29 | 2014-07-23 | 京东方科技集团股份有限公司 | 基板蒸镀装置和蒸镀方法 |
| KR20210149266A (ko) * | 2020-06-01 | 2021-12-09 | 삼성디스플레이 주식회사 | 기판 고정 장치, 이를 포함하는 성막 처리 설비 및 이를 이용한 성막 처리 방법 |
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- 2012-12-20 JP JP2012278030A patent/JP2013147743A/ja not_active Withdrawn
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| JP2018204106A (ja) * | 2017-06-02 | 2018-12-27 | キヤノントッキ株式会社 | 真空蒸着装置及びそれを用いたデバイス製造方法 |
| JP2021022423A (ja) * | 2019-07-24 | 2021-02-18 | スタンレー電気株式会社 | 発光装置の製造方法、及び、発光装置 |
| JP7323251B2 (ja) | 2019-07-24 | 2023-08-08 | スタンレー電気株式会社 | 発光装置の製造方法、及び、発光装置 |
| WO2022097286A1 (ja) * | 2020-11-06 | 2022-05-12 | 貴嗣 飯塚 | 成膜装置、成膜ユニット及び成膜方法 |
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Also Published As
| Publication number | Publication date |
|---|---|
| US20130164437A1 (en) | 2013-06-27 |
| US9055654B2 (en) | 2015-06-09 |
| JP2017082341A (ja) | 2017-05-18 |
| JP6339250B2 (ja) | 2018-06-06 |
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