JP2013143824A5 - - Google Patents

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Publication number
JP2013143824A5
JP2013143824A5 JP2012002641A JP2012002641A JP2013143824A5 JP 2013143824 A5 JP2013143824 A5 JP 2013143824A5 JP 2012002641 A JP2012002641 A JP 2012002641A JP 2012002641 A JP2012002641 A JP 2012002641A JP 2013143824 A5 JP2013143824 A5 JP 2013143824A5
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JP
Japan
Prior art keywords
connecting member
slide table
moves along
main body
seal band
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012002641A
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English (en)
Japanese (ja)
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JP2013143824A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012002641A priority Critical patent/JP2013143824A/ja
Priority claimed from JP2012002641A external-priority patent/JP2013143824A/ja
Priority to US13/688,587 priority patent/US8973452B2/en
Priority to TW101145422A priority patent/TWI583875B/zh
Priority to KR1020120147330A priority patent/KR101945789B1/ko
Priority to DE102013100047A priority patent/DE102013100047A1/de
Priority to CN201310011454.4A priority patent/CN103206500B/zh
Publication of JP2013143824A publication Critical patent/JP2013143824A/ja
Publication of JP2013143824A5 publication Critical patent/JP2013143824A5/ja
Pending legal-status Critical Current

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JP2012002641A 2012-01-11 2012-01-11 電動アクチュエータ Pending JP2013143824A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2012002641A JP2013143824A (ja) 2012-01-11 2012-01-11 電動アクチュエータ
US13/688,587 US8973452B2 (en) 2012-01-11 2012-11-29 Electric actuator
TW101145422A TWI583875B (zh) 2012-01-11 2012-12-04 電動致動器
KR1020120147330A KR101945789B1 (ko) 2012-01-11 2012-12-17 전동 액추에이터
DE102013100047A DE102013100047A1 (de) 2012-01-11 2013-01-04 Elektrisches Stellglied
CN201310011454.4A CN103206500B (zh) 2012-01-11 2013-01-11 电动执行机构

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012002641A JP2013143824A (ja) 2012-01-11 2012-01-11 電動アクチュエータ

Publications (2)

Publication Number Publication Date
JP2013143824A JP2013143824A (ja) 2013-07-22
JP2013143824A5 true JP2013143824A5 (enExample) 2015-01-22

Family

ID=48652722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012002641A Pending JP2013143824A (ja) 2012-01-11 2012-01-11 電動アクチュエータ

Country Status (6)

Country Link
US (1) US8973452B2 (enExample)
JP (1) JP2013143824A (enExample)
KR (1) KR101945789B1 (enExample)
CN (1) CN103206500B (enExample)
DE (1) DE102013100047A1 (enExample)
TW (1) TWI583875B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140093212A (ko) * 2011-11-22 2014-07-25 가부시기가이샤 아이 에이 아이 액추에이터
US20140326091A1 (en) * 2013-05-06 2014-11-06 Velmex, Inc. Miniature Linear Positioning System
CN104728379B (zh) * 2013-12-18 2017-05-10 上银科技股份有限公司 滚珠螺杆支撑装置
CN103982613B (zh) * 2014-05-12 2016-04-20 武汉电力设备厂 一种用于带电环境下的直线运动装置
JP6506508B2 (ja) * 2014-06-26 2019-04-24 日本トムソン株式会社 アクチュエータ
CN105549334B (zh) * 2016-01-28 2017-12-29 武汉华星光电技术有限公司 曝光机
DE102016211670A1 (de) * 2016-06-29 2018-01-04 MTU Aero Engines AG Vorrichtung zur Energieversorgung bewegter Maschinenkomponenten
US11280996B2 (en) 2016-10-19 2022-03-22 Sony Corporation Light source unit and projection display apparatus
CN106773551B (zh) * 2017-01-23 2018-11-09 武汉华星光电技术有限公司 曝光机
CN107882966A (zh) * 2017-12-27 2018-04-06 洛阳明创矿山冶金设备有限公司 一种可提高减速机效率的辅助装置
CN109139848A (zh) * 2018-08-31 2019-01-04 江门市天功自动化科技有限公司 一种新型滑座结构及其加工工艺
US20220074253A1 (en) * 2020-09-10 2022-03-10 Nick Ede Linear actuator
US11620868B2 (en) 2021-07-22 2023-04-04 Trinity Axis Inc. Techniques to dispense an item and release a jammed item from a dispensing system
CN113777891B (zh) * 2021-08-19 2022-08-26 杭州新诺微电子有限公司 可移动压板结构及具有该结构的曝光机及曝光机压板方法
CN114542677B (zh) * 2022-03-07 2025-10-24 奥特(南京)智能制造有限公司 一种用于直线传动机构中叠式抽拉防尘装置

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DE3620969A1 (de) * 1985-06-24 1987-01-02 Canon Kk Praezisionszufuehrmechanismus
JPH02106282A (ja) * 1988-10-11 1990-04-18 Mitsubishi Electric Corp 産業用ロボット
JPH058194A (ja) * 1991-07-02 1993-01-19 Sony Corp 直交型ロボツトの集塵構造
JPH0516092A (ja) * 1991-07-08 1993-01-26 Sony Corp 直交型ロボツトの集塵構造
US5799543A (en) * 1993-09-02 1998-09-01 Smc Kabushiki Kaisha Actuator structural body
JP3347844B2 (ja) * 1993-10-12 2002-11-20 エスエムシー株式会社 バランサ
EP0896855B1 (en) * 1993-10-12 2003-02-26 SMC Kabushiki Kaisha Actuator
US5637940A (en) * 1994-04-05 1997-06-10 Smc Kabushiki Kaisha Electric Actuator
JP2700621B2 (ja) * 1995-02-20 1998-01-21 セイコー精機株式会社 ロボット
JP3695784B2 (ja) * 1995-03-08 2005-09-14 Ｓｍｃ株式会社 電動アクチュエータ
JP3705641B2 (ja) * 1996-01-19 2005-10-12 Ｓｍｃ株式会社 アクチュエータ
DE19882072T1 (de) * 1997-02-05 2000-01-27 Smc Kk Stellglied und Steuervorrichtung hierfür
JPH11235690A (ja) * 1998-02-18 1999-08-31 Shibaura Mechatronics Corp 産業ロボットにおける排気構造、及びこれを備えた産業ロボット
JP2000088070A (ja) * 1998-09-09 2000-03-28 Smc Corp 電動アクチュエータ
JP3543065B2 (ja) * 1999-04-16 2004-07-14 Ｓｍｃ株式会社 直線作動装置
JP2002046039A (ja) * 2000-08-01 2002-02-12 Smc Corp 電動アクチュエーター
WO2002016073A1 (de) * 2000-08-18 2002-02-28 Rexroth Star Gmbh Linearführungseinheit
US6656133B2 (en) * 2000-10-13 2003-12-02 Ethicon Endo-Surgery, Inc. Transmission assembly for a surgical biopsy device
JP2003014070A (ja) * 2001-07-02 2003-01-15 Smc Corp 電動アクチュエータ
JP4221564B2 (ja) 2002-11-01 2009-02-12 日本精工株式会社 電動アクチュエータ
JP2005036899A (ja) * 2003-07-15 2005-02-10 Smc Corp 電動アクチュエータ
DE102004055306B4 (de) * 2003-11-21 2007-06-14 Smc K.K. Stellglied
JP4500102B2 (ja) * 2004-05-13 2010-07-14 日本トムソン株式会社 スライド装置
JP2007270860A (ja) * 2006-03-30 2007-10-18 Smc Corp 電動アクチュエータ
WO2009034804A1 (ja) * 2007-09-13 2009-03-19 Thk Co., Ltd. 防塵機構付きリニアアクチュエータ
TWI383276B (zh) * 2007-12-04 2013-01-21 Smc Kk 電動致動器
TWI426685B (zh) * 2008-04-17 2014-02-11 Smc Kk 電動致動器
US8196484B2 (en) * 2008-04-18 2012-06-12 Tol-O-Matic, Inc. Electric actuator
JP5306838B2 (ja) * 2008-12-26 2013-10-02 ナブテスコ株式会社 電動アクチュエータ
CN101931285B (zh) * 2009-06-19 2014-11-05 黑田精工株式会社 直动装置
JP5417132B2 (ja) * 2009-11-26 2014-02-12 Ｎｔｎ株式会社 電動アクチュエータ
JP5547563B2 (ja) * 2010-06-25 2014-07-16 Ｎｔｎ株式会社 電動アクチュエータ
JP2013008857A (ja) * 2011-06-24 2013-01-10 Panasonic Industrial Devices Sunx Co Ltd ファイバレーザ発振器及びファイバレーザ加工装置

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