JP2013134153A - ミスト含有ガス分析装置 - Google Patents
ミスト含有ガス分析装置 Download PDFInfo
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- 239000003595 mist Substances 0.000 title claims abstract description 39
- 238000004868 gas analysis Methods 0.000 title abstract 3
- 239000007788 liquid Substances 0.000 claims abstract description 113
- 238000002485 combustion reaction Methods 0.000 claims abstract description 63
- 239000000126 substance Substances 0.000 claims abstract description 31
- 238000005070 sampling Methods 0.000 claims abstract description 22
- 238000005259 measurement Methods 0.000 claims abstract description 13
- 150000001412 amines Chemical class 0.000 claims description 35
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 24
- 239000001569 carbon dioxide Substances 0.000 claims description 12
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 12
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 10
- 229910021529 ammonia Inorganic materials 0.000 claims description 5
- 238000009530 blood pressure measurement Methods 0.000 claims description 2
- 238000009529 body temperature measurement Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 6
- 238000005194 fractionation Methods 0.000 abstract 2
- 239000007789 gas Substances 0.000 description 161
- 238000004140 cleaning Methods 0.000 description 29
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 17
- 229910001873 dinitrogen Inorganic materials 0.000 description 17
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 15
- 238000010790 dilution Methods 0.000 description 15
- 239000012895 dilution Substances 0.000 description 15
- 239000003546 flue gas Substances 0.000 description 15
- 239000000203 mixture Substances 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 6
- 238000011084 recovery Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004255 ion exchange chromatography Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
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- G—PHYSICS
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- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—Specially adapted to detect a particular component
- G01N33/0054—Specially adapted to detect a particular component for ammonia
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- G—PHYSICS
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
- G01N21/61—Non-dispersive gas analysers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0013—Sample conditioning by a chemical reaction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0014—Sample conditioning by eliminating a gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0016—Sample conditioning by regulating a physical variable, e.g. pressure, temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—Specially adapted to detect a particular component
- G01N33/004—Specially adapted to detect a particular component for CO, CO2
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N7/00—Analysing materials by measuring the pressure or volume of a gas or vapour
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2252/00—Absorbents, i.e. solvents and liquid materials for gas absorption
- B01D2252/10—Inorganic absorbents
- B01D2252/102—Ammonia
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2252/00—Absorbents, i.e. solvents and liquid materials for gas absorption
- B01D2252/20—Organic absorbents
- B01D2252/204—Amines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/50—Carbon oxides
- B01D2257/504—Carbon dioxide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0283—Flue gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/1456—Removing acid components
- B01D53/1475—Removing carbon dioxide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/62—Carbon oxides
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2247—Sampling from a flowing stream of gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2247—Sampling from a flowing stream of gas
- G01N1/2258—Sampling from a flowing stream of gas in a stack or chimney
- G01N2001/2261—Sampling from a flowing stream of gas in a stack or chimney preventing condensation (heating lines)
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2247—Sampling from a flowing stream of gas
- G01N2001/2267—Sampling from a flowing stream of gas separating gas from liquid, e.g. bubbles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/40—Concentrating samples
- G01N1/4055—Concentrating samples by solubility techniques
- G01N2001/4066—Concentrating samples by solubility techniques using difference of solubility between liquid and gas, e.g. bubbling, scrubbing or sparging
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N2015/0023—Investigating dispersion of liquids
- G01N2015/0026—Investigating dispersion of liquids in gas, e.g. fog
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3554—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content
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- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
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- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/40—Capture or disposal of greenhouse gases of CO2
Abstract
【解決手段】燃焼排ガス1の圧力、温度、流量、水分量を計測する計測器145,144,146,147と、捕集液2が入れられる捕集容器116と、燃焼排ガスを吸引ブロア122により吸引してサンプリングし捕集容器内の捕集液中に送給するサンプリング管111および案内管112と、吸引ブロアによる燃焼排ガスの吸引速度が前記計測値に基づき算出された燃焼排ガスのガス流速に対し所定の割合以内となるように吸引ブロアを制御する演算制御装置140と、捕集容器内の前記液を分取する液分取手段と、液分取手段で分取された前記液中の前記被測定物質の濃度を計測する計測装置130とを備えるようにした。
【選択図】図1
Description
本発明に係るミスト含有ガス分析装置の主な実施形態を図1〜3に基づいて説明する。
なお、前述した実施形態においては、ボイラ等からの燃焼排ガスをアミン類含有の吸収液に接触させて当該燃焼排ガス中の二酸化炭素を吸収液中に吸収して回収する二酸化炭素回収装置を備えた排ガス処理装置における当該燃焼排ガス1中の上記アミン類等の濃度を計測する場合について説明したが、本発明はこれに限らず、例えば、気液接触装置の出口ガス(例えば水分飽和ガス)中の液体成分濃度を計測する場合等のように、被測定物質のミストを含有する対象ガス中の当該被測定物質の濃度を計測するような場合であれば、前述した実施形態の場合と同様にして適用することができる。
2 捕集液
3 清浄液
4 窒素ガス
10 ダクト
100 ミスト含有ガス分析装置
101〜109,110a,110b バルブ
111 サンプリング管
112 案内管
113 電熱ヒータ
114 導入管
115 送給管
116 捕集容器
117 フィルタ
118 送出管
119 送給ポンプ
120 貯液タンク
121 排気管
122 吸引ブロア
123 ガス流量計
124 冷却器
125 気液分離器
126 バッファタンク
127 送液管
128 送給ポンプ
129 定容・希釈装置
130 計測装置
131 排液管
132 清浄液導入管
133 窒素ガス導入管
134 バイパス管
135,136 リーク管
140 演算制御装置
141 温度センサ
142 液量検出器
143 モニタ
144 温度センサ
145 圧力計
146 流量計測器
147 ガス組成計測器
Claims (3)
- ダクト内を流通する被測定物質のミストを含有する対象ガス中の当該被測定物質の濃度を計測するミスト含有ガス分析装置であって、
前記ダクト内を流通する前記対象ガスの圧力を計測する圧力計測手段と、
前記ダクト内を流通する前記対象ガスの温度を計測する温度計測手段と、
前記ダクト内を流通する前記対象ガスの流量を電波または超音波により計測する流量計測手段と、
前記ダクト内を流通する前記対象ガス中の水分量を赤外光により計測する水分量計測手段と、
前記被測定物質を溶解させる捕集液を内部に入れられる捕集容器と、
前記対象ガスを吸引手段により吸引してサンプリングする対象ガスサンプリング手段と、
前記対象ガスサンプリング手段でサンプリングされた前記対象ガスを前記捕集容器の内部の前記捕集液中に送給する対象ガス送給手段と、
前記吸引手段による前記対象ガスの吸引速度が、前記圧力計測手段で計測された前記対象ガスの圧力、前記温度計測手段で計測された前記対象ガスの温度、前記流量計測手段で計測された前記対象ガスの流量、前記水分量計測手段で計測された前記対象ガス中の水分量に基づき算出された前記対象ガスのガス流速に対して所定の割合以内となるように前記吸引手段を制御する吸引量制御手段と、
前記捕集容器内の前記液を分取する液分取手段と、
前記液分取手段で分取された前記液中の前記被測定物質の濃度を計測する計測手段と
を備えている
ことを特徴とするミスト含有ガス分析装置。 - 請求項1に記載されたミスト含有ガス分析装置であって、
前記被測定物質が、アミン類及びアンモニアである
ことを特徴とするミスト含有ガス分析装置。 - 請求項2に記載されたミスト含有ガス分析装置であって、
前記対象ガスが、アミン類を含有する吸収液により二酸化炭素を吸収除去された燃焼排ガスである
ことを特徴とするミスト含有ガス分析装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011284659A JP5762273B2 (ja) | 2011-12-27 | 2011-12-27 | ミスト含有ガス分析装置 |
PCT/JP2012/082883 WO2013099724A1 (ja) | 2011-12-27 | 2012-12-19 | ミスト含有ガス分析装置 |
EP12862677.7A EP2799836B1 (en) | 2011-12-27 | 2012-12-19 | Mist-containing gas analysis device |
US14/353,298 US9395342B2 (en) | 2011-12-27 | 2012-12-19 | Mist-containing gas analysis device |
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JP2011284659A JP5762273B2 (ja) | 2011-12-27 | 2011-12-27 | ミスト含有ガス分析装置 |
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JP2013134153A true JP2013134153A (ja) | 2013-07-08 |
JP5762273B2 JP5762273B2 (ja) | 2015-08-12 |
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US (1) | US9395342B2 (ja) |
EP (1) | EP2799836B1 (ja) |
JP (1) | JP5762273B2 (ja) |
WO (1) | WO2013099724A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016061648A (ja) * | 2014-09-17 | 2016-04-25 | 三菱重工業株式会社 | ガス採取装置及びガス分析方法 |
KR101851683B1 (ko) * | 2017-12-08 | 2018-04-24 | 한국가스안전공사 | 고발열량 연소실험 시스템 |
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US9322716B2 (en) * | 2014-01-07 | 2016-04-26 | Panasonic Intellectual Property Corporation Of America | Component measuring apparatus and moving body |
CA2863543C (en) * | 2014-09-11 | 2015-11-03 | Vitalaire Canada Inc. | On-site medical gas production plant and associated operating method |
CN105258983B (zh) * | 2015-10-22 | 2018-05-15 | 西北大学 | 一种捕集co2的简便装置及检测co2中 13c和 14c的测定方法 |
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Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5890144A (ja) * | 1981-11-26 | 1983-05-28 | Ishibashi Kagaku Kogyo Kk | 排ガス自動等速吸引装置 |
JPH0634499A (ja) * | 1992-07-20 | 1994-02-08 | Mitsubishi Heavy Ind Ltd | 自動ガス採取方法及び自動ガス分析方法 |
JPH07146227A (ja) * | 1993-09-09 | 1995-06-06 | Nkk Corp | 排ガス中のダスト濃度の自動測定装置 |
JPH1033938A (ja) * | 1996-07-26 | 1998-02-10 | Mitsubishi Heavy Ind Ltd | 脱炭酸塔排出ガス中の塩基性アミン化合物の回収方法 |
JPH10202053A (ja) * | 1997-01-27 | 1998-08-04 | Mitsubishi Heavy Ind Ltd | 脱炭酸塔内のアミンミストの減少方法 |
JP2000206133A (ja) * | 1998-11-10 | 2000-07-28 | Babcock Hitachi Kk | 音響式流速計測装置 |
JP2001349810A (ja) * | 2000-06-09 | 2001-12-21 | Miura Co Ltd | 塩素化有機化合物の採取器、塩素化有機化合物の採取方法および塩素化有機化合物の採取状況確認用チェッカー |
JP2003185478A (ja) * | 2001-12-18 | 2003-07-03 | Toshiba Corp | ゲート流量計 |
JP2010256075A (ja) * | 2009-04-22 | 2010-11-11 | Aichi Tokei Denki Co Ltd | 流量計及び流量計測方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4928015A (en) * | 1987-08-19 | 1990-05-22 | Ford Motor Company | Measuring multicomponent constituency of gas emission flow |
US5637809A (en) * | 1991-11-12 | 1997-06-10 | United Sciences, Inc. | Vacuum extraction sampling system |
US5187972A (en) | 1992-01-17 | 1993-02-23 | Clean Air Engineering, Inc. | Gas monitor |
US7091043B2 (en) * | 1999-12-10 | 2006-08-15 | Showa Denko K.K. | Method for measuring water concentration in ammonia |
US7771654B1 (en) * | 2006-09-07 | 2010-08-10 | Moore Randall P | Apparatus for monitoring gaseous components of a flue gas |
-
2011
- 2011-12-27 JP JP2011284659A patent/JP5762273B2/ja active Active
-
2012
- 2012-12-19 EP EP12862677.7A patent/EP2799836B1/en active Active
- 2012-12-19 US US14/353,298 patent/US9395342B2/en active Active
- 2012-12-19 WO PCT/JP2012/082883 patent/WO2013099724A1/ja active Application Filing
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5890144A (ja) * | 1981-11-26 | 1983-05-28 | Ishibashi Kagaku Kogyo Kk | 排ガス自動等速吸引装置 |
JPH0634499A (ja) * | 1992-07-20 | 1994-02-08 | Mitsubishi Heavy Ind Ltd | 自動ガス採取方法及び自動ガス分析方法 |
JPH07146227A (ja) * | 1993-09-09 | 1995-06-06 | Nkk Corp | 排ガス中のダスト濃度の自動測定装置 |
JPH1033938A (ja) * | 1996-07-26 | 1998-02-10 | Mitsubishi Heavy Ind Ltd | 脱炭酸塔排出ガス中の塩基性アミン化合物の回収方法 |
JPH10202053A (ja) * | 1997-01-27 | 1998-08-04 | Mitsubishi Heavy Ind Ltd | 脱炭酸塔内のアミンミストの減少方法 |
JP2000206133A (ja) * | 1998-11-10 | 2000-07-28 | Babcock Hitachi Kk | 音響式流速計測装置 |
JP2001349810A (ja) * | 2000-06-09 | 2001-12-21 | Miura Co Ltd | 塩素化有機化合物の採取器、塩素化有機化合物の採取方法および塩素化有機化合物の採取状況確認用チェッカー |
JP2003185478A (ja) * | 2001-12-18 | 2003-07-03 | Toshiba Corp | ゲート流量計 |
JP2010256075A (ja) * | 2009-04-22 | 2010-11-11 | Aichi Tokei Denki Co Ltd | 流量計及び流量計測方法 |
Non-Patent Citations (1)
Title |
---|
"排ガス中のダスト濃度の測定方法 Z 8808", 日本工業規格(JIS), vol. Z 8808−1995, JPN7013000678, 1995, JP, ISSN: 0002900014 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016061648A (ja) * | 2014-09-17 | 2016-04-25 | 三菱重工業株式会社 | ガス採取装置及びガス分析方法 |
KR101851683B1 (ko) * | 2017-12-08 | 2018-04-24 | 한국가스안전공사 | 고발열량 연소실험 시스템 |
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WO2013099724A1 (ja) | 2013-07-04 |
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JP5762273B2 (ja) | 2015-08-12 |
US9395342B2 (en) | 2016-07-19 |
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US20140305190A1 (en) | 2014-10-16 |
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