JP2013125788A5 - - Google Patents

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Publication number
JP2013125788A5
JP2013125788A5 JP2011272476A JP2011272476A JP2013125788A5 JP 2013125788 A5 JP2013125788 A5 JP 2013125788A5 JP 2011272476 A JP2011272476 A JP 2011272476A JP 2011272476 A JP2011272476 A JP 2011272476A JP 2013125788 A5 JP2013125788 A5 JP 2013125788A5
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JP
Japan
Prior art keywords
processing
transport
processed
energy consumption
path
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JP2011272476A
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English (en)
Japanese (ja)
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JP2013125788A (ja
JP6017134B2 (ja
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Priority claimed from JP2011272476A external-priority patent/JP6017134B2/ja
Priority to JP2011272476A priority Critical patent/JP6017134B2/ja
Application filed filed Critical
Priority to KR1020147016031A priority patent/KR101953423B1/ko
Priority to PCT/JP2012/078923 priority patent/WO2013088865A1/ja
Priority to TW101146792A priority patent/TWI557655B/zh
Publication of JP2013125788A publication Critical patent/JP2013125788A/ja
Priority to US14/303,059 priority patent/US10012980B2/en
Publication of JP2013125788A5 publication Critical patent/JP2013125788A5/ja
Publication of JP6017134B2 publication Critical patent/JP6017134B2/ja
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Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011272476A 2011-12-13 2011-12-13 生産効率化システム、生産効率化装置および生産効率化方法 Expired - Fee Related JP6017134B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2011272476A JP6017134B2 (ja) 2011-12-13 2011-12-13 生産効率化システム、生産効率化装置および生産効率化方法
KR1020147016031A KR101953423B1 (ko) 2011-12-13 2012-11-08 생산 효율화 시스템, 생산 효율화 장치 및 생산 효율화 방법
PCT/JP2012/078923 WO2013088865A1 (ja) 2011-12-13 2012-11-08 生産効率化システム、生産効率化装置および生産効率化方法
TW101146792A TWI557655B (zh) 2011-12-13 2012-12-12 Production efficiency system, production efficiency of the device and production efficiency of the method
US14/303,059 US10012980B2 (en) 2011-12-13 2014-06-12 Modifying operational efficiency by repositioning process apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011272476A JP6017134B2 (ja) 2011-12-13 2011-12-13 生産効率化システム、生産効率化装置および生産効率化方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2016194348A Division JP6294427B2 (ja) 2016-09-30 2016-09-30 生産処理システムおよび生産効率化方法

Publications (3)

Publication Number Publication Date
JP2013125788A JP2013125788A (ja) 2013-06-24
JP2013125788A5 true JP2013125788A5 (https=) 2015-01-29
JP6017134B2 JP6017134B2 (ja) 2016-10-26

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ID=48612320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011272476A Expired - Fee Related JP6017134B2 (ja) 2011-12-13 2011-12-13 生産効率化システム、生産効率化装置および生産効率化方法

Country Status (5)

Country Link
US (1) US10012980B2 (https=)
JP (1) JP6017134B2 (https=)
KR (1) KR101953423B1 (https=)
TW (1) TWI557655B (https=)
WO (1) WO2013088865A1 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6172022B2 (ja) * 2014-03-28 2017-08-02 株式会社デンソー 搬送システム
JP6330596B2 (ja) * 2014-09-16 2018-05-30 株式会社デンソー 搬送システム
DE102015211941A1 (de) * 2015-06-26 2016-12-29 Zf Friedrichshafen Ag Verfahren und Vorrichtung zur Reduzierung eines Energiebedarfs einer Werkzeugmaschine und Werkzeugmaschinensystem
NL2017837A (en) * 2015-11-25 2017-06-02 Asml Netherlands Bv A Measurement Substrate and a Measurement Method
US10571927B2 (en) * 2015-12-09 2020-02-25 Murata Machinery, Ltd. Transport system and transport method
JP6605951B2 (ja) * 2015-12-25 2019-11-13 株式会社東芝 シミュレーション装置及びシミュレーション方法
CN106909129B (zh) * 2017-02-23 2019-10-18 惠科股份有限公司 一种搬运管理的方法及系统
CN107024867B (zh) * 2017-06-01 2019-10-25 合肥工业大学 一种考虑前视距离的相容工件族的优化控制方法
JP6792098B1 (ja) * 2019-02-07 2020-11-25 株式会社日立ハイテク 真空処理装置の運転方法
KR102876296B1 (ko) * 2021-10-07 2025-10-23 주식회사 엘지에너지솔루션 자동 안내 차량을 이용한 자동 운반 제어 방법 및 자동 운반 시스템
TWI905459B (zh) * 2022-10-07 2025-11-21 日商山葉發動機股份有限公司 工廠管理系統

Family Cites Families (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4687980A (en) * 1980-10-20 1987-08-18 Eaton Corporation X-Y addressable workpiece positioner and mask aligner using same
US4977361A (en) * 1978-06-26 1990-12-11 Eaton Corporation X-Y addressable workpiece positioner and mask aligner using same
US4425537A (en) * 1978-06-26 1984-01-10 Optimetrix Corporation X-Y Addressable workpiece positioner and mask aligner using same
US4442388A (en) * 1980-04-02 1984-04-10 Optimetrix Corporation X-Y Addressable workpiece positioner having an improved X-Y address indicia sensor
US5399531A (en) 1990-12-17 1995-03-21 United Micrpelectronics Corporation Single semiconductor wafer transfer method and plural processing station manufacturing system
FR2676018B1 (fr) * 1991-05-02 1997-06-06 Prodel Jacques Installation pour la circulation de palettes motorisees porte-pieces.
DE4418206C2 (de) * 1994-05-25 1999-01-14 Siemens Ag CMOS-kompatibler Bipolartransistor und Herstellungsverfahren desselben
US6991012B2 (en) * 1996-03-21 2006-01-31 Coe Newnes/Mcgehee Inc. Apparatus for sawing a workpiece
USRE39579E1 (en) * 1997-04-04 2007-04-17 Renesas Technology Corp. Semiconductor integrated circuit device comprising RAM with command decode system and logic circuit integrated into a single chip and testing method of the RAM with command decode system
US6269279B1 (en) * 1997-06-20 2001-07-31 Tokyo Electron Limited Control system
JP2000099557A (ja) * 1998-09-25 2000-04-07 Hitachi Ltd 半導体集積回路装置、及びその製造方法、及び記憶媒体
JP3662150B2 (ja) * 1998-10-30 2005-06-22 東京エレクトロン株式会社 処理システム
TW425598B (en) * 1998-10-30 2001-03-11 Tokyo Electron Ltd Processing system
JP3487774B2 (ja) 1998-11-19 2004-01-19 沖電気工業株式会社 半導体装置製造工程の搬送方法
US6952020B1 (en) * 1999-07-06 2005-10-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
JP4666723B2 (ja) * 1999-07-06 2011-04-06 株式会社半導体エネルギー研究所 半導体装置の作製方法
EP1258915A1 (en) * 2001-05-17 2002-11-20 Infineon Technologies SC300 GmbH & Co. KG Method of detecting defects on a semiconductor device in a processing tool and an arrangement therefore
JP2002359272A (ja) * 2001-05-31 2002-12-13 Hirata Corp 処理システム
US6601227B1 (en) * 2001-06-27 2003-07-29 Xilinx, Inc. Method for making large-scale ASIC using pre-engineered long distance routing structure
US6944842B1 (en) * 2001-06-27 2005-09-13 Xilinx, Inc. Method for making large-scale ASIC using pre-engineered long distance routing structure
WO2003010614A1 (en) * 2001-07-24 2003-02-06 Honda Giken Kogyo Kabushiki Kaisha Work transfer method and system
JP4073186B2 (ja) 2001-09-20 2008-04-09 大日本スクリーン製造株式会社 基板処理装置のスケジュール作成方法及びそのプログラム
US6615093B1 (en) * 2002-01-04 2003-09-02 Taiwan Semiconductor Manufacturing Company Adaptive control algorithm for improving AMHS push lot accuracy
US8621786B2 (en) * 2003-02-13 2014-01-07 Wei Chak Joseph Lam Efficient layout and design of production facility
US7269925B2 (en) * 2002-06-14 2007-09-18 Wei Chak Joseph Lam Layout of production facility
CA2486426A1 (en) * 2002-06-14 2003-12-24 Joseph Wei Chak Lam Layout and design of production facility
US6871115B2 (en) * 2002-10-11 2005-03-22 Taiwan Semiconductor Manufacturing Co., Ltd Method and apparatus for monitoring the operation of a wafer handling robot
JP3999649B2 (ja) 2002-12-19 2007-10-31 大日本スクリーン製造株式会社 基板処理装置とその動作方法、およびプログラム
JP4143828B2 (ja) 2003-03-14 2008-09-03 村田機械株式会社 搬送台車システム
JP4449319B2 (ja) * 2003-03-25 2010-04-14 株式会社デンソー 製造管理方法
US7861228B2 (en) * 2003-12-03 2010-12-28 Hewlett-Packard Development Company, L.P. Variable delay instruction for implementation of temporal redundancy
TW200525601A (en) * 2004-01-07 2005-08-01 Trecenti Technologies Inc Semiconductor manufacturing system, work manufacturing system, and conveyance system
US7512455B2 (en) * 2004-03-29 2009-03-31 Palo Alto Research Center Incorporated Method for self-synchronization of modular production systems
US7203563B2 (en) * 2004-04-08 2007-04-10 Taiwan Semiconductor Manufacturing Company, Ltd. Automatic N2 purge system for 300 mm full automation fab
US7966714B2 (en) * 2004-10-12 2011-06-28 Precision Automation, Inc. Multi-step systems for processing workpieces
CN101258581B (zh) * 2005-09-09 2011-05-11 株式会社尼康 曝光装置及曝光方法以及设备制造方法
KR100714274B1 (ko) * 2005-10-24 2007-05-02 삼성전자주식회사 반도체 제조설비의 관리시스템
TW200719423A (en) * 2005-11-04 2007-05-16 Powerchip Semiconductor Corp A method for material handling analysis
JP5091413B2 (ja) 2006-03-08 2012-12-05 東京エレクトロン株式会社 基板処理装置および基板処理装置の制御方法
JP5032048B2 (ja) * 2006-03-31 2012-09-26 東京エレクトロン株式会社 基板処理装置の制御装置，制御方法および制御プログラムを記憶した記録媒体
JP2008124194A (ja) * 2006-11-10 2008-05-29 Canon Inc 液浸露光方法および液浸露光装置
KR20100033527A (ko) 2007-07-11 2010-03-30 히다치 가세고교 가부시끼가이샤 회로 부재 접속용 접착제
EP2225632A4 (en) * 2007-12-17 2012-10-24 Landmark Graphics Corp SYSTEMS AND METHOD FOR OPTIMIZING REAL-TIME PRODUCTION PROCESSES
US8170861B2 (en) * 2008-07-29 2012-05-01 GM Global Technology Operations LLC Method for distributed hybrid emulation of manufacturing systems
US8781882B1 (en) * 2008-08-07 2014-07-15 Accenture Global Services Limited Automotive industry high performance capability assessment
JP5274339B2 (ja) * 2009-03-30 2013-08-28 大日本スクリーン製造株式会社 基板処理装置および基板搬送方法
JP5119506B2 (ja) * 2009-05-20 2013-01-16 日本電気株式会社 半導体集積回路の設計装置、そのデータ処理方法、およびその制御プログラム
EP2264529A3 (en) * 2009-06-16 2011-02-09 ASML Netherlands B.V. A lithographic apparatus, a method of controlling the apparatus and a method of manufacturing a device using a lithographic apparatus
KR101930981B1 (ko) * 2011-11-25 2018-12-19 도쿄엘렉트론가부시키가이샤 처리 장치군 컨트롤러, 생산 처리 시스템, 처리 장치군 제어 방법, 생산 효율화 시스템, 생산 효율화 장치 및 생산 효율화 방법

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