JP2013122955A - 化合物半導体層およびその製造方法、ならびに化合物薄膜太陽電池およびその製造方法 - Google Patents
化合物半導体層およびその製造方法、ならびに化合物薄膜太陽電池およびその製造方法 Download PDFInfo
- Publication number
- JP2013122955A JP2013122955A JP2011270109A JP2011270109A JP2013122955A JP 2013122955 A JP2013122955 A JP 2013122955A JP 2011270109 A JP2011270109 A JP 2011270109A JP 2011270109 A JP2011270109 A JP 2011270109A JP 2013122955 A JP2013122955 A JP 2013122955A
- Authority
- JP
- Japan
- Prior art keywords
- compound semiconductor
- semiconductor layer
- organic polymer
- compound
- solar cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000001875 compounds Chemical class 0.000 title claims abstract description 214
- 239000004065 semiconductor Substances 0.000 title claims abstract description 181
- 238000004519 manufacturing process Methods 0.000 title claims description 42
- 239000010409 thin film Substances 0.000 title claims description 40
- 229920000620 organic polymer Polymers 0.000 claims abstract description 61
- 239000000463 material Substances 0.000 claims abstract description 56
- 239000002105 nanoparticle Substances 0.000 claims abstract description 46
- 239000002861 polymer material Substances 0.000 claims abstract description 46
- 239000013078 crystal Substances 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims description 36
- 239000003446 ligand Substances 0.000 claims description 35
- 238000010304 firing Methods 0.000 claims description 22
- 229910052802 copper Inorganic materials 0.000 claims description 12
- 229910052711 selenium Inorganic materials 0.000 claims description 9
- 229910052717 sulfur Inorganic materials 0.000 claims description 9
- 229910052738 indium Inorganic materials 0.000 claims description 7
- 229910052733 gallium Inorganic materials 0.000 claims description 6
- 229910052718 tin Inorganic materials 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
- 230000006866 deterioration Effects 0.000 abstract 1
- 238000005245 sintering Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 76
- 239000000243 solution Substances 0.000 description 38
- 239000010408 film Substances 0.000 description 23
- 239000002904 solvent Substances 0.000 description 23
- 238000000576 coating method Methods 0.000 description 21
- 239000011669 selenium Substances 0.000 description 20
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 19
- 238000001035 drying Methods 0.000 description 14
- 238000002360 preparation method Methods 0.000 description 14
- 239000011521 glass Substances 0.000 description 13
- 239000011248 coating agent Substances 0.000 description 11
- 239000010949 copper Substances 0.000 description 10
- -1 polyethylene Polymers 0.000 description 10
- 238000002156 mixing Methods 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 7
- 239000011259 mixed solution Substances 0.000 description 6
- 229920000301 poly(3-hexylthiophene-2,5-diyl) polymer Polymers 0.000 description 6
- 239000012298 atmosphere Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- 239000011800 void material Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910018565 CuAl Inorganic materials 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000008030 elimination Effects 0.000 description 4
- 238000003379 elimination reaction Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- VLKZOEOYAKHREP-UHFFFAOYSA-N methyl pentane Natural products CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 230000005355 Hall effect Effects 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000000224 chemical solution deposition Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 3
- TVMXDCGIABBOFY-UHFFFAOYSA-N n-Octanol Natural products CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 3
- DIOQZVSQGTUSAI-UHFFFAOYSA-N n-butylhexane Natural products CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 239000013110 organic ligand Substances 0.000 description 3
- ABLZXFCXXLZCGV-UHFFFAOYSA-N phosphonic acid group Chemical group P(O)(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- YBNMDCCMCLUHBL-UHFFFAOYSA-N (2,5-dioxopyrrolidin-1-yl) 4-pyren-1-ylbutanoate Chemical compound C=1C=C(C2=C34)C=CC3=CC=CC4=CC=C2C=1CCCC(=O)ON1C(=O)CCC1=O YBNMDCCMCLUHBL-UHFFFAOYSA-N 0.000 description 2
- PMBXCGGQNSVESQ-UHFFFAOYSA-N 1-Hexanethiol Chemical compound CCCCCCS PMBXCGGQNSVESQ-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910004613 CdTe Inorganic materials 0.000 description 2
- 229910004611 CdZnTe Inorganic materials 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910004262 HgTe Inorganic materials 0.000 description 2
- 229910000673 Indium arsenide Inorganic materials 0.000 description 2
- 241000764773 Inna Species 0.000 description 2
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910007709 ZnTe Inorganic materials 0.000 description 2
- 125000005370 alkoxysilyl group Chemical group 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- DQXBYHZEEUGOBF-UHFFFAOYSA-N but-3-enoic acid;ethene Chemical compound C=C.OC(=O)CC=C DQXBYHZEEUGOBF-UHFFFAOYSA-N 0.000 description 2
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 2
- 229920001940 conductive polymer Polymers 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- SNRUBQQJIBEYMU-UHFFFAOYSA-N dodecane Chemical compound CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 2
- 239000005038 ethylene vinyl acetate Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 125000003396 thiol group Chemical group [H]S* 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- GGPZWVLYZOHZNX-UHFFFAOYSA-N 1-$l^{1}-selanyldodecane Chemical compound CCCCCCCCCCCC[Se] GGPZWVLYZOHZNX-UHFFFAOYSA-N 0.000 description 1
- QZVHYFUVMQIGGM-UHFFFAOYSA-N 2-Hexylthiophene Chemical compound CCCCCCC1=CC=CS1 QZVHYFUVMQIGGM-UHFFFAOYSA-N 0.000 description 1
- LXUNZSDDXMPKLP-UHFFFAOYSA-N 2-Methylbenzenethiol Chemical compound CC1=CC=CC=C1S LXUNZSDDXMPKLP-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920002292 Nylon 6 Polymers 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 229910003363 ZnMgO Inorganic materials 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003125 aqueous solvent Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000003849 aromatic solvent Substances 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- VTXVGVNLYGSIAR-UHFFFAOYSA-N decane-1-thiol Chemical compound CCCCCCCCCCS VTXVGVNLYGSIAR-UHFFFAOYSA-N 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- WNAHIZMDSQCWRP-UHFFFAOYSA-N dodecane-1-thiol Chemical compound CCCCCCCCCCCCS WNAHIZMDSQCWRP-UHFFFAOYSA-N 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- KZCOBXFFBQJQHH-UHFFFAOYSA-N octane-1-thiol Chemical compound CCCCCCCCS KZCOBXFFBQJQHH-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000553 poly(phenylenevinylene) Polymers 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 125000002327 selenol group Chemical group [H][Se]* 0.000 description 1
- 125000005372 silanol group Chemical group 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- DOEHJNBEOVLHGL-UHFFFAOYSA-N trichloro(propyl)silane Chemical compound CCC[Si](Cl)(Cl)Cl DOEHJNBEOVLHGL-UHFFFAOYSA-N 0.000 description 1
- NBXZNTLFQLUFES-UHFFFAOYSA-N triethoxy(propyl)silane Chemical compound CCC[Si](OCC)(OCC)OCC NBXZNTLFQLUFES-UHFFFAOYSA-N 0.000 description 1
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02568—Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02587—Structure
- H01L21/0259—Microstructure
- H01L21/02601—Nanoparticles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02628—Liquid deposition using solutions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0326—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising AIBIICIVDVI kesterite compounds, e.g. Cu2ZnSnSe4, Cu2ZnSnS4
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0384—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including other non-monocrystalline materials, e.g. semiconductor particles embedded in an insulating material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0749—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type including a AIBIIICVI compound, e.g. CdS/CulnSe2 [CIS] heterojunction solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Inorganic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Energy (AREA)
- Nanotechnology (AREA)
- Photovoltaic Devices (AREA)
Abstract
【解決手段】化合物半導体層は、化合物半導体材料からなる化合物半導体部分と、有機高分子材料からなる有機高分子部分とから構成されている。化合物半導体部分は化合物半導体材料からなる複数の結晶粒からなることが好ましく、有機高分子部分は隣り合う結晶粒の間に充填されていることが好ましい。有機高分子部分の化合物半導体部分に対する質量比は、0.1以上0.3以下であることが好ましい。
【選択図】図1
Description
化合物半導体材料は、Cuと、InおよびGaの少なくとも一方と、SeおよびSの少なくとも一方とを含んでも良く、またはCuと、Znと、Snと、SeおよびSの少なくとも一方とを含んでも良い。
図1を参照して本発明に係る化合物半導体層を説明する。図1は、本発明の一実施形態に係る化合物半導体層100の概略断面図である。
図2および図3を参照して、本発明に係る化合物半導体層の製造方法(以下、「本発明に係る製造方法」という。)を説明する。図2は、本発明に係る製造方法の概略フロー図である。図3は、本発明に係る製造方法における溶液調製プロセスS1および塗布プロセスS2で用いる溶液200の模式図である。
溶液調製プロセスS1では、ナノ粒子21および有機高分子材料22を溶媒23に分散または溶解させて、溶液200を調製する。具体的には、必要量のナノ粒子21および有機高分子材料22を溶媒23中に加えて攪拌または加熱を行って、ナノ粒子21および有機高分子材料22を溶媒23中に分散または溶解させる。得られる化合物半導体層100において有機高分子部分12の化合物半導体部分11に対する質量比が0.1以上0.3以下となるように、ナノ粒子21および有機高分子材料22の各配合量を設定することが好ましい。
続いて、溶液200を基板に塗布する。塗布前に基板上の不純物を除去することが好ましく、たとえば基板に対して超音波洗浄またはUVオゾンアッシング等の洗浄処理を行うことが好ましい。溶液200の塗布方法には、スクリーン印刷法、キャスト法、ドクターブレードコート法、ディップ法、またはスピンコート法など様々な手法があるが、このいずれの手法を用いても良く、目的に応じた塗布手法を選択すればよい。塗布プロセスS2の後、乾燥プロセスS3に移る。
乾燥プロセスS3は、基板上の塗布膜から溶媒を除去することを目的とする。乾燥プロセスS3を経ずに次の焼成プロセスS4を行った場合、溶媒の突沸等により、得られた化合物半導体層に多数のボイドが生じてしまう恐れがある。
最後に、焼成プロセスS4を行う。焼成プロセスS4では、配位子部分25の脱離、配位子部分25の脱離に伴う膜内での空隙の形成、核部分24の結晶成長、および有機高分子材料22の軟化による空隙の埋め込みが起こる。
図4は、本発明の化合物半導体層を用いた、化合物薄膜太陽電池300の概略断面図である。
第1電極32、および第2電極36は、太陽電池内で生成したキャリアを取り出す役割を担っている。これらの電極の材料は、キャリア輸送損失をできるだけ防ぐ目的から、抵抗率が低いものが好ましい。また、同様の理由から、第1電極32に接する化合物半導体層33と、第2電極36に接する窓層35との間では、良好なオーミック接触を形成するものが好ましい。第1電極32、および第2電極36に用いる材料としては、特に制限はない。第1電極32、および第2電極36は、例えば、Mo、Au、Ag、Cu、またはAl等の金属電極であっても良いし、ITO、またはZnO等の酸化物電極であっても良い。これらの電極は、抵抗加熱または電子ビームなどの真空蒸着法、スパッタリング法、MOCVD法、またはMBE法等によって形成される。
図6は、実施例1に係る化合物半導体層の製造方法における溶液の調製方法を示す模式図である。図7(a)、図7(c)および図7(d)は、実施例1に係る化合物半導体層の製造方法を工程順に示す概略図であり、図7(b)は、図7(a)に示すVIIB−VIIB線における概略断面図である。
このようにして作製した化合物半導体層504を透過型の顕微鏡で観察すると、図10(a)に示すようにクラックのない良好な膜が形成されていることが確認できた。化合物半導体層504の膜厚は約2μmであった。また、化合物半導体層504についてホール効果測定による電気的評価を行うと、キャリア密度が4.5×1014個/cm3であり、移動度が1.25×101cm2/V・sであり、良好な特性を示した。
ナノ粒子51の核部分54と有機高分子材料52との質量混合比が1:0.5である混合溶液を調製したこと以外は実施例1と同様にして、化合物半導体部分と有機高分子部分とからなる化合物半導体層をガラス基板上に形成した。
溶液調製プロセスにおいて溶液をナノ粒子100%で調整したこと以外は実施例1と同様にして、化合物半導体層をガラス基板上に形成した。
実施例3では、本発明の化合物半導体層を化合物薄膜太陽電池の光吸収層に用いた例を示す。
化合物半導体層を形成するための溶液をナノ粒子100%で調製したこと以外は実施例3と同様にして、化合物薄膜太陽電池を形成した。
Claims (15)
- 化合物半導体材料からなる化合物半導体部分と、
有機高分子材料からなる有機高分子部分とから構成されている化合物半導体層。 - 前記化合物半導体部分は、前記化合物半導体材料からなる複数の結晶粒からなり、
前記有機高分子部分は、隣り合う前記結晶粒の間に充填されている請求項1に記載の化合物半導体層。 - 前記有機高分子部分の前記化合物半導体部分に対する質量比が0.1以上である請求項1または2に記載の化合物半導体層。
- 前記有機高分子材料は、導電性有機高分子材料である請求項1〜3のいずれかに記載の化合物半導体層。
- 前記有機高分子部分の前記化合物半導体部分に対する質量比が0.3以下である請求項1〜4のいずれかに記載の化合物半導体層。
- 前記化合物半導体材料は、Cuと、InおよびGaの少なくとも一方と、SeおよびSの少なくとも一方とを含む、またはCuと、Znと、Snと、SeおよびSの少なくとも一方とを含む請求項1〜5のいずれかに記載の化合物半導体層。
- 基板と、前記基板上に設けられた第1電極、化合物半導体層、および第2電極とを備えた化合物薄膜太陽電池であって、
前記化合物半導体層は、請求項1〜6のいずれかに記載の化合物半導体層である化合物薄膜太陽電池。 - 化合物半導体材料からなる核部分と前記核部分の周囲を取り囲む配位子部分とを含むナノ粒子と、有機高分子材料とが分散された溶液を調製する工程と、
前記溶液を基板上に塗布してから焼成する工程とを備えた化合物半導体層の製造方法。 - 前記焼成工程は、前記核部分と前記配位子部分との間に働く結合力が解離する温度以上の温度で行われる請求項8に記載の化合物半導体層の製造方法。
- 前記有機高分子材料の前記化合物半導体材料に対する質量比が0.1以上である請求項8または9のいずれかに記載の化合物半導体層の製造方法。
- 前記有機高分子材料は、導電性有機高分子材料である請求項8〜10のいずれかに記載の化合物半導体層の製造方法。
- 前記有機高分子材料の前記化合物半導体材料に対する質量比が0.3以下である請求項8〜11のいずれかに記載の化合物半導体層の製造方法。
- 前記ナノ粒子の直径が1nm以上100nm以下である請求項8〜12のいずれかに記載の化合物半導体層の製造方法。
- 前記化合物半導体材料は、Cuと、InおよびGaの少なくとも一方と、SeおよびSの少なくとも一方とを含む、またはCuと、Znと、Snと、SeおよびSの少なくとも一方とを含む請求項8〜13のいずれかに記載の化合物半導体層の製造方法。
- 基板上に第1電極、化合物半導体層、および第2電極を形成して化合物薄膜太陽電池を製造する方法であって、
前記化合物半導体層は、請求項8〜14のいずれかに記載の化合物半導体層の製造方法によって形成される化合物薄膜太陽電池の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011270109A JP6027738B2 (ja) | 2011-12-09 | 2011-12-09 | 化合物半導体層およびその製造方法、ならびに化合物薄膜太陽電池およびその製造方法 |
PCT/JP2012/080413 WO2013084732A1 (ja) | 2011-12-09 | 2012-11-26 | 化合物半導体層およびその製造方法、ならびに化合物薄膜太陽電池およびその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011270109A JP6027738B2 (ja) | 2011-12-09 | 2011-12-09 | 化合物半導体層およびその製造方法、ならびに化合物薄膜太陽電池およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013122955A true JP2013122955A (ja) | 2013-06-20 |
JP6027738B2 JP6027738B2 (ja) | 2016-11-16 |
Family
ID=48574106
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011270109A Expired - Fee Related JP6027738B2 (ja) | 2011-12-09 | 2011-12-09 | 化合物半導体層およびその製造方法、ならびに化合物薄膜太陽電池およびその製造方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6027738B2 (ja) |
WO (1) | WO2013084732A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013222762A (ja) * | 2012-04-13 | 2013-10-28 | Sharp Corp | 化合物半導体層およびその製造方法、ならびに化合物薄膜太陽電池およびその製造方法 |
JP2015528218A (ja) * | 2013-07-19 | 2015-09-24 | エルジー・ケム・リミテッド | 金属ナノ粒子を含む光吸収層製造用インク組成物及びそれを用いた薄膜の製造方法 |
JP2018093199A (ja) * | 2016-12-06 | 2018-06-14 | 旭化成株式会社 | 半導体膜、及びそれを用いた半導体素子、並びに半導体膜の製造方法 |
WO2021012242A1 (en) * | 2019-07-25 | 2021-01-28 | China Triumph International Engineering Co., Ltd. | Method to manufacture an inorganic thin film solar cell device and an inorganic thin film solar cell device |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009059796A (ja) * | 2007-08-30 | 2009-03-19 | Mitsubishi Chemicals Corp | 光電変換素子及びその製造方法 |
JP2009137832A (ja) * | 2002-03-19 | 2009-06-25 | Regents Of The Univ Of California | 半導体‐ナノ結晶/複合ポリマー薄膜の製造方法 |
JP2009541975A (ja) * | 2006-06-22 | 2009-11-26 | イソボルタ・アクチエンゲゼルシヤフト | 光活性層を製造する方法及び該層を含んでなる構成要素 |
JP2010232256A (ja) * | 2009-03-26 | 2010-10-14 | Kyocera Corp | 薄膜太陽電池の製法 |
JP2010258194A (ja) * | 2009-04-24 | 2010-11-11 | Seiko Epson Corp | 光電変換装置の製造方法 |
-
2011
- 2011-12-09 JP JP2011270109A patent/JP6027738B2/ja not_active Expired - Fee Related
-
2012
- 2012-11-26 WO PCT/JP2012/080413 patent/WO2013084732A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009137832A (ja) * | 2002-03-19 | 2009-06-25 | Regents Of The Univ Of California | 半導体‐ナノ結晶/複合ポリマー薄膜の製造方法 |
JP2009541975A (ja) * | 2006-06-22 | 2009-11-26 | イソボルタ・アクチエンゲゼルシヤフト | 光活性層を製造する方法及び該層を含んでなる構成要素 |
JP2009059796A (ja) * | 2007-08-30 | 2009-03-19 | Mitsubishi Chemicals Corp | 光電変換素子及びその製造方法 |
JP2010232256A (ja) * | 2009-03-26 | 2010-10-14 | Kyocera Corp | 薄膜太陽電池の製法 |
JP2010258194A (ja) * | 2009-04-24 | 2010-11-11 | Seiko Epson Corp | 光電変換装置の製造方法 |
Non-Patent Citations (2)
Title |
---|
JPN6013007977; Yang-Yen Yu: 'Preparation and characterization of regioregular poly(3-octylthiophene-2,5-diyl)/copper indium disen' Thin Solid Films 519巻, 15号, 20110531, pp. 4721-4730 * |
JPN6013007979; Elif Arici: 'Hybrid Solar Cells Based on Nanoparticles of CuInS2 in Organic Matrices' Advanced Functional Materials 13巻, 2号, 20030213, pp. 165-171 * |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013222762A (ja) * | 2012-04-13 | 2013-10-28 | Sharp Corp | 化合物半導体層およびその製造方法、ならびに化合物薄膜太陽電池およびその製造方法 |
JP2015528218A (ja) * | 2013-07-19 | 2015-09-24 | エルジー・ケム・リミテッド | 金属ナノ粒子を含む光吸収層製造用インク組成物及びそれを用いた薄膜の製造方法 |
US9559243B2 (en) | 2013-07-19 | 2017-01-31 | Lg Chem, Ltd. | Ink composition for manufacturing light absorption layer including metal nano particles and method of manufacturing thin film using the same |
JP2018093199A (ja) * | 2016-12-06 | 2018-06-14 | 旭化成株式会社 | 半導体膜、及びそれを用いた半導体素子、並びに半導体膜の製造方法 |
WO2021012242A1 (en) * | 2019-07-25 | 2021-01-28 | China Triumph International Engineering Co., Ltd. | Method to manufacture an inorganic thin film solar cell device and an inorganic thin film solar cell device |
CN114207842A (zh) * | 2019-07-25 | 2022-03-18 | 中国建材国际工程集团有限公司 | 用于制造无机薄膜太阳能电池装置的方法和无机薄膜太阳能电池装置 |
CN114207842B (zh) * | 2019-07-25 | 2024-01-30 | 中国建材国际工程集团有限公司 | 用于制造无机薄膜太阳能电池装置的方法和无机薄膜太阳能电池装置 |
Also Published As
Publication number | Publication date |
---|---|
JP6027738B2 (ja) | 2016-11-16 |
WO2013084732A1 (ja) | 2013-06-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8043942B2 (en) | Method for producing core-shell nanowires, nanowires produced by the method and nanowire device comprising the nanowires | |
JP2017511969A (ja) | 量子ドット薄膜形成方法 | |
KR101719574B1 (ko) | 패시베이션된 양자점 및 그 제조방법 | |
US11618853B2 (en) | QLED and method for manufacturing quantum dot | |
US11638381B2 (en) | Thin-film light-emitting device including charge generating junction layer and method of fabricating thin-film light-emitting device | |
JP6027738B2 (ja) | 化合物半導体層およびその製造方法、ならびに化合物薄膜太陽電池およびその製造方法 | |
CN113130775B (zh) | 氧化锌纳米粒子及改性方法,量子点发光二极管及制备法 | |
KR101489776B1 (ko) | 양자점 태양전지의 제조방법 | |
KR20210014792A (ko) | 하이브리드 파장변환체, 이의 제조방법 및 이를 포함하는 발광장치 | |
CN113023767B (zh) | 改性氧化锌纳米颗粒及其改性方法,及量子点发光二极管 | |
KR101489777B1 (ko) | 양자점 태양전지의 제조방법 | |
KR101710659B1 (ko) | 그래핀 발광 소자 및 그 제조 방법 | |
JP6140977B2 (ja) | 化合物薄膜太陽電池およびその製造方法 | |
JP2013222762A (ja) | 化合物半導体層およびその製造方法、ならびに化合物薄膜太陽電池およびその製造方法 | |
JP2014003129A (ja) | 化合物薄膜太陽電池およびその製造方法 | |
JP2014003131A (ja) | 化合物薄膜太陽電池およびその製造方法 | |
KR102420429B1 (ko) | 양자점이 내장된 산화물 반도체 기반의 광 검출기 | |
WO2024061105A1 (zh) | 功能膜及其制备方法及发光器件 | |
KR101525469B1 (ko) | 양자점 태양전지 제조장치 | |
WO2024093747A1 (zh) | 复合材料、复合材料的制备方法与包含复合材料的光电器件 | |
US20210126159A1 (en) | Optoelectric device | |
CN117979731A (zh) | 复合材料、量子点发光二极管及其制备方法 | |
JP2014236181A (ja) | 光電変換素子 | |
KR20240072580A (ko) | 우수한 성능의 양자점 발광 다이오드 및 그의 제조방법 | |
CN117015290A (zh) | 复合材料及其制备方法、发光器件及其制方法、显示装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140918 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150901 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20151026 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160405 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160518 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20161004 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20161017 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6027738 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |