JP2013110176A5 - - Google Patents

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Publication number
JP2013110176A5
JP2013110176A5 JP2011252177A JP2011252177A JP2013110176A5 JP 2013110176 A5 JP2013110176 A5 JP 2013110176A5 JP 2011252177 A JP2011252177 A JP 2011252177A JP 2011252177 A JP2011252177 A JP 2011252177A JP 2013110176 A5 JP2013110176 A5 JP 2013110176A5
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JP
Japan
Prior art keywords
film
metal
oxide
forming
metal element
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JP2011252177A
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English (en)
Japanese (ja)
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JP5912444B2 (ja
JP2013110176A (ja
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Priority to JP2011252177A priority Critical patent/JP5912444B2/ja
Priority claimed from JP2011252177A external-priority patent/JP5912444B2/ja
Publication of JP2013110176A publication Critical patent/JP2013110176A/ja
Publication of JP2013110176A5 publication Critical patent/JP2013110176A5/ja
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Publication of JP5912444B2 publication Critical patent/JP5912444B2/ja
Expired - Fee Related legal-status Critical Current
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JP2011252177A 2011-11-18 2011-11-18 半導体装置の作製方法 Expired - Fee Related JP5912444B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011252177A JP5912444B2 (ja) 2011-11-18 2011-11-18 半導体装置の作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011252177A JP5912444B2 (ja) 2011-11-18 2011-11-18 半導体装置の作製方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015160928A Division JP6039150B2 (ja) 2015-08-18 2015-08-18 半導体装置の作製方法及び半導体装置

Publications (3)

Publication Number Publication Date
JP2013110176A JP2013110176A (ja) 2013-06-06
JP2013110176A5 true JP2013110176A5 (enrdf_load_stackoverflow) 2014-10-09
JP5912444B2 JP5912444B2 (ja) 2016-04-27

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ID=48706672

Family Applications (1)

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JP2011252177A Expired - Fee Related JP5912444B2 (ja) 2011-11-18 2011-11-18 半導体装置の作製方法

Country Status (1)

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JP (1) JP5912444B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016001712A (ja) * 2013-11-29 2016-01-07 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP2018067672A (ja) * 2016-10-21 2018-04-26 株式会社ブイ・テクノロジー 酸化物半導体装置及びその製造方法
US11374117B2 (en) * 2018-03-01 2022-06-28 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP7534083B2 (ja) * 2019-11-26 2024-08-14 株式会社ジャパンディスプレイ 薄膜トランジスタの製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0621088A (ja) * 1992-06-29 1994-01-28 Kawasaki Steel Corp 半導体装置の製造方法
JPH08306698A (ja) * 1995-05-10 1996-11-22 Casio Comput Co Ltd パターン形成方法
JPH11330486A (ja) * 1998-05-16 1999-11-30 Semiconductor Energy Lab Co Ltd 半導体装置
JP2000150898A (ja) * 1998-11-17 2000-05-30 Matsushita Electric Ind Co Ltd 薄膜トランジスターとその製造方法。
WO2003098699A1 (fr) * 2002-05-22 2003-11-27 Sharp Kabushiki Kaisha Dispositif semiconducteur et afficheur comprenant ce dispositif
JP2004022690A (ja) * 2002-06-14 2004-01-22 Seiko Epson Corp 半導体装置及びその製造方法
JP5608347B2 (ja) * 2008-08-08 2014-10-15 株式会社半導体エネルギー研究所 半導体装置及び半導体装置の作製方法

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