JP2013084550A - 電界放出型電子源 - Google Patents
電界放出型電子源 Download PDFInfo
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- JP2013084550A JP2013084550A JP2012061395A JP2012061395A JP2013084550A JP 2013084550 A JP2013084550 A JP 2013084550A JP 2012061395 A JP2012061395 A JP 2012061395A JP 2012061395 A JP2012061395 A JP 2012061395A JP 2013084550 A JP2013084550 A JP 2013084550A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/15—Cathodes heated directly by an electric current
- H01J1/16—Cathodes heated directly by an electric current characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
- H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
- H01J1/3044—Point emitters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06308—Thermionic sources
- H01J2237/06316—Schottky emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06325—Cold-cathode sources
- H01J2237/06341—Field emission
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electron Sources, Ion Sources (AREA)
- Cold Cathode And The Manufacture (AREA)
Abstract
【解決手段】 拡散補給源の欠けや割れがなく、少量の拡散補給源の増量で寿命を延長可能な電界放出型電子源を提供し、8,000時間を越える実用的な寿命を安定して得ることを明らかにした。
【選択図】 図1
Description
Claims (10)
- 棒状単結晶タングステンの先端の一端を尖らせ、該先端の一端を結晶面(100)とし、その側周部には拡散補給源として所定の厚さおよび長さにジルコニアを成形した針と、該針の加熱手段と、サプレッサ電極とを備え、
該針を加熱して該針の先端に電場を与えて電子を放出させる電界放出型電子源において、前記拡散補給源の長さをLとし、前記拡散補給源の最大厚さをtとしたときに、t/L<3/50で、且つ前記拡散補給源の長さは、前記拡散補給源の厚さが10μm以上の範囲としたことを特徴とする電界放出型電子源。 - 請求項1に記載の電界放出型電子源において、前記拡散補給源の長さLを500μm以上とした前記拡散補給源を1つまたは複数備えることを特徴とする電界放出型電子源。
- 請求項1に記載の電界放出型電子源において、前記拡散補給源の最大厚さtを40μm以下とすることを特徴とする電界放出型電子源。
- 請求項1に記載の電界放出型電子源において、前記拡散補給源を前記針先端から300μm離れた位置から前記針の他端に向かう方向に成形することを特徴とする電界放出型電子源。
- 請求項1に記載の電界放出型電子源において、前記拡散補給源の断面形状の最大厚さtが40μm以下の凸状の形状であり、かつ前記拡散補給源の長さが500μm未満である複数の前記拡散補給源を連結し、前記連結した拡散補給源の間の隙間を50μm以下としたことを特徴とする電界放出型電子源。
- 請求項1に記載の電界放出型電子源において、前記拡散補給源の断面形状最大厚さtが40μm以下の凸状である複数の前記拡散補給源を連結し、前記連結部の拡散補給源の最小厚さを10μm以上としたことを特徴とする電界放出型電子源。
- 請求項1に記載の電界放出型電子源において、前記拡散補給源の断面形状の最大厚さtが40μm以下の凸状である複数の前記拡散補給源を前記針側周部に螺旋状に巻きつけ、前記巻きつけた拡散補給源の隣り合う隙間を50μm以下としたことを特徴とする電界放出型電子源。
- 請求項1に記載の電界放出型電子源において、前記拡散補給源の断面形状の最大厚さが40μm以下の凸状で、長さ500μm以上の直線形状であり、前記針の側周部に複数配置しており、隣り合う前記拡散補給源の隙間を50μm以下としたことを特徴とする電界放出型電子源。
- 請求項1に記載の電界放出型電子源において、前記拡散補給源の断面形状の最大厚さが40μm以下の凸状で、長さ500μm以上の直線形状であり、前記針の側周部に複数配置しており、隣り合う前記拡散補給源の最小厚さを10μm以上としたことを特徴とする電界放出型電子源。
- 請求項1に記載の電界放出型電子源において、前記拡散補給源の断面形状の最大厚さが40μm以下の凸状かつ山型の拡散補給源を前記針側周部に複数配置しており、複数の密集した前記拡散補給源の各々の隙間を50μm以下としたことを特徴とする電界放出型電子源。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012061395A JP5919049B2 (ja) | 2011-09-26 | 2012-03-19 | 電界放出型電子源 |
US14/239,144 US8866371B2 (en) | 2011-09-26 | 2012-09-24 | Electric field discharge-type electron source |
CN201280041417.1A CN103765544B (zh) | 2011-09-26 | 2012-09-24 | 场致发射型电子源 |
KR1020147004471A KR101603022B1 (ko) | 2011-09-26 | 2012-09-24 | 전계 방출형 전자원 |
PCT/JP2012/074319 WO2013047397A1 (ja) | 2011-09-26 | 2012-09-24 | 電界放出型電子源 |
DE112012003268.3T DE112012003268B4 (de) | 2011-09-26 | 2012-09-24 | Elektronenquelle vom elektrischen Feldentladungstyp |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011208402 | 2011-09-26 | ||
JP2011208402 | 2011-09-26 | ||
JP2012061395A JP5919049B2 (ja) | 2011-09-26 | 2012-03-19 | 電界放出型電子源 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013084550A true JP2013084550A (ja) | 2013-05-09 |
JP5919049B2 JP5919049B2 (ja) | 2016-05-18 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2012061395A Active JP5919049B2 (ja) | 2011-09-26 | 2012-03-19 | 電界放出型電子源 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8866371B2 (ja) |
JP (1) | JP5919049B2 (ja) |
KR (1) | KR101603022B1 (ja) |
CN (1) | CN103765544B (ja) |
DE (1) | DE112012003268B4 (ja) |
WO (1) | WO2013047397A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019008738A1 (ja) * | 2017-07-07 | 2019-01-10 | 株式会社日立ハイテクノロジーズ | 電界放出型電子源および荷電粒子線装置 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103956312A (zh) * | 2014-04-18 | 2014-07-30 | 北京大学 | 一种场发射电子源发射体表面涂层处理装置及其处理方法 |
DE102015118805A1 (de) | 2015-11-03 | 2017-05-04 | Gottfried Wilhelm Leibniz Universität Hannover | Elektronenemissionselektrode und Verfahren zu deren Herstellung |
CN117133616A (zh) | 2016-08-08 | 2023-11-28 | Asml荷兰有限公司 | 电子发射器及其制造方法 |
WO2019224872A1 (ja) * | 2018-05-21 | 2019-11-28 | 株式会社日立ハイテクノロジーズ | 電子線応用装置 |
WO2020065703A1 (ja) * | 2018-09-25 | 2020-04-02 | 株式会社日立ハイテクノロジーズ | 熱電界放出電子源および電子ビーム応用装置 |
KR102357962B1 (ko) | 2020-03-18 | 2022-02-03 | 주식회사 모듈싸이 | 냉전계 전자원 |
CN112786415A (zh) * | 2021-03-03 | 2021-05-11 | 大束科技(北京)有限责任公司 | 发射针结构、热场发射电子源及电子显微镜 |
CN114927396B (zh) * | 2022-04-24 | 2023-05-12 | 电子科技大学 | 一种实时控制NEA GaN电子源扩散长度的方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS5949065A (ja) * | 1982-09-13 | 1984-03-21 | Hitachi Ltd | 拡散補給形電子線源 |
JPH0676731A (ja) * | 1992-06-24 | 1994-03-18 | Denki Kagaku Kogyo Kk | 熱電界放射陰極 |
JP2003507872A (ja) * | 1999-08-20 | 2003-02-25 | フェイ カンパニ | 寿命が延長されたショットキーエミッター |
JP2008004411A (ja) * | 2006-06-23 | 2008-01-10 | Denki Kagaku Kogyo Kk | 電子源 |
JP2009205800A (ja) * | 2006-06-19 | 2009-09-10 | Denki Kagaku Kogyo Kk | 電子源 |
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US4325000A (en) * | 1980-04-20 | 1982-04-13 | Burroughs Corporation | Low work function cathode |
US4324999A (en) * | 1980-04-30 | 1982-04-13 | Burroughs Corporation | Electron-beam cathode having a uniform emission pattern |
JPS5838906B2 (ja) * | 1981-09-03 | 1983-08-26 | 日本電子株式会社 | 金属イオン源 |
US4629931A (en) * | 1984-11-20 | 1986-12-16 | Hughes Aircraft Company | Liquid metal ion source |
US4994711A (en) * | 1989-12-22 | 1991-02-19 | Hughes Aircraft Company | High brightness solid electrolyte ion source |
JPH0684451A (ja) * | 1992-03-27 | 1994-03-25 | Denki Kagaku Kogyo Kk | 熱電界放射陰極 |
JPH0684452A (ja) * | 1992-03-27 | 1994-03-25 | Denki Kagaku Kogyo Kk | 熱電界放射陰極 |
US5449968A (en) | 1992-06-24 | 1995-09-12 | Denki Kagaku Kogyo Kabushiki Kaisha | Thermal field emission cathode |
JP2003031170A (ja) | 2001-07-18 | 2003-01-31 | Denki Kagaku Kogyo Kk | 電子放射陰極とその製造方法 |
WO2008120341A1 (ja) * | 2007-03-29 | 2008-10-09 | Advantest Corporation | 電子銃及び電子ビーム露光装置 |
US8022609B2 (en) | 2008-06-24 | 2011-09-20 | Hermes-Microvision, Inc. | Thermal field emission cathode |
-
2012
- 2012-03-19 JP JP2012061395A patent/JP5919049B2/ja active Active
- 2012-09-24 DE DE112012003268.3T patent/DE112012003268B4/de active Active
- 2012-09-24 CN CN201280041417.1A patent/CN103765544B/zh active Active
- 2012-09-24 KR KR1020147004471A patent/KR101603022B1/ko active IP Right Grant
- 2012-09-24 WO PCT/JP2012/074319 patent/WO2013047397A1/ja active Application Filing
- 2012-09-24 US US14/239,144 patent/US8866371B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5949065A (ja) * | 1982-09-13 | 1984-03-21 | Hitachi Ltd | 拡散補給形電子線源 |
JPH0676731A (ja) * | 1992-06-24 | 1994-03-18 | Denki Kagaku Kogyo Kk | 熱電界放射陰極 |
JP2003507872A (ja) * | 1999-08-20 | 2003-02-25 | フェイ カンパニ | 寿命が延長されたショットキーエミッター |
JP2009205800A (ja) * | 2006-06-19 | 2009-09-10 | Denki Kagaku Kogyo Kk | 電子源 |
JP2008004411A (ja) * | 2006-06-23 | 2008-01-10 | Denki Kagaku Kogyo Kk | 電子源 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019008738A1 (ja) * | 2017-07-07 | 2019-01-10 | 株式会社日立ハイテクノロジーズ | 電界放出型電子源および荷電粒子線装置 |
Also Published As
Publication number | Publication date |
---|---|
DE112012003268T5 (de) | 2014-06-05 |
CN103765544B (zh) | 2016-05-11 |
KR20140049006A (ko) | 2014-04-24 |
DE112012003268B4 (de) | 2023-03-23 |
CN103765544A (zh) | 2014-04-30 |
JP5919049B2 (ja) | 2016-05-18 |
KR101603022B1 (ko) | 2016-03-11 |
US8866371B2 (en) | 2014-10-21 |
US20140197725A1 (en) | 2014-07-17 |
WO2013047397A1 (ja) | 2013-04-04 |
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