JP2013012404A - 色素吸着装置 - Google Patents
色素吸着装置 Download PDFInfo
- Publication number
- JP2013012404A JP2013012404A JP2011144542A JP2011144542A JP2013012404A JP 2013012404 A JP2013012404 A JP 2013012404A JP 2011144542 A JP2011144542 A JP 2011144542A JP 2011144542 A JP2011144542 A JP 2011144542A JP 2013012404 A JP2013012404 A JP 2013012404A
- Authority
- JP
- Japan
- Prior art keywords
- dye
- substrate
- chamber
- semiconductor layer
- dye solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001179 sorption measurement Methods 0.000 title claims abstract description 50
- 239000000758 substrate Substances 0.000 claims abstract description 121
- 239000004065 semiconductor Substances 0.000 claims abstract description 80
- 239000002904 solvent Substances 0.000 claims abstract description 25
- 239000011248 coating agent Substances 0.000 claims abstract description 9
- 238000000576 coating method Methods 0.000 claims abstract description 9
- 238000005406 washing Methods 0.000 claims abstract description 6
- 238000010438 heat treatment Methods 0.000 claims description 19
- 238000010926 purge Methods 0.000 claims description 18
- 239000000049 pigment Substances 0.000 claims description 17
- 230000007723 transport mechanism Effects 0.000 claims description 17
- 230000007246 mechanism Effects 0.000 claims description 15
- 238000000935 solvent evaporation Methods 0.000 claims description 14
- 238000001704 evaporation Methods 0.000 claims description 9
- 238000012805 post-processing Methods 0.000 claims 1
- 238000012545 processing Methods 0.000 abstract description 14
- 230000008016 vaporization Effects 0.000 abstract 2
- 238000009834 vaporization Methods 0.000 abstract 1
- 239000000975 dye Substances 0.000 description 133
- 239000010410 layer Substances 0.000 description 71
- 238000000034 method Methods 0.000 description 21
- 230000008569 process Effects 0.000 description 19
- 238000012546 transfer Methods 0.000 description 17
- 238000011282 treatment Methods 0.000 description 15
- 239000007789 gas Substances 0.000 description 14
- 238000001035 drying Methods 0.000 description 12
- 238000007791 dehumidification Methods 0.000 description 7
- 230000001235 sensitizing effect Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000003792 electrolyte Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 238000009835 boiling Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- -1 TiO 2 Chemical class 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000001548 drop coating Methods 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 239000000981 basic dye Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 150000004696 coordination complex Chemical class 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- ANRHNWWPFJCPAZ-UHFFFAOYSA-M thionine Chemical compound [Cl-].C1=CC(N)=CC2=[S+]C3=CC(N)=CC=C3N=C21 ANRHNWWPFJCPAZ-UHFFFAOYSA-M 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/20—Light-sensitive devices
- H01G9/2059—Light-sensitive devices comprising an organic dye as the active light absorbing material, e.g. adsorbed on an electrode or dissolved in solution
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/0029—Processes of manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/20—Light-sensitive devices
- H01G9/2068—Panels or arrays of photoelectrochemical cells, e.g. photovoltaic modules based on photoelectrochemical cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M14/00—Electrochemical current or voltage generators not provided for in groups H01M6/00 - H01M12/00; Manufacture thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/20—Light-sensitive devices
- H01G9/2027—Light-sensitive devices comprising an oxide semiconductor electrode
- H01G9/2031—Light-sensitive devices comprising an oxide semiconductor electrode comprising titanium oxide, e.g. TiO2
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/542—Dye sensitized solar cells
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Photovoltaic Devices (AREA)
- Hybrid Cells (AREA)
- Coating Apparatus (AREA)
Abstract
【解決手段】色素溶液滴下塗布部12は、この色素吸着装置10に搬入された未処理の基板Gに対して、基板G上の多孔質半導体層に色素溶液を滴下塗布する第1の処理(色素溶液滴下塗布処理)を行う。溶媒蒸発除去部14は、基板G上の半導体層に塗布された色素溶液から溶媒を蒸発させて除去する第2の処理(溶媒除去処理)を行う。リンス部16は、基板G上の半導体層の表面に付いている不要または余分な色素を洗い落として除去する第3の処理(リンス処理)を行う。コントローラ20は、この色素吸着装置内の各部の動作を制御し、さらには色素吸着処理を実行するための装置全体のシーケンスを制御する。
【選択図】 図1
Description
[装置の基本構成]
[一実施形態における装置構成]
[色素溶液滴下塗布モジュールの構成および作用]
[溶媒蒸発除去部およびリンス部の構成および作用]
[他の実施形態または変形例]
12 色素溶液滴下塗布部
12(1)〜12(3),12(i) 色素溶液滴下塗布モジュール
14 溶媒蒸発除去部
14(1)〜14(12),12(j) 溶媒蒸発除去モジュール
16 リンス部
16(1)〜14(3),12(k) リンスモジュール
18 搬送機構
20 コントローラ
30 前置チャンバ
32 主チャンバ
34 後置チャンバ
40,68,98 ベルトコンベア
48,78,106 真空排気部
56,114 パージガス供給部
60,118 ヒータ
62,82,120 除湿乾燥機
64 ノズル
90 色素溶液供給部
Claims (17)
- 基板の被処理面に形成されている多孔質の半導体層に色素を吸着させる色素吸着装置であって、
色素を所定の溶媒に溶かした色素溶液を吐出するノズルを備え、前記基板上の前記半導体層に前記色素溶液を前記ノズルより滴下して塗布する色素溶液滴下塗布部と、
前記基板上の前記半導体層に塗布された前記色素溶液から溶媒を蒸発させて除去する溶媒蒸発除去部と、
前記基板上の前記半導体層の表面に付いている不要な色素を洗い落として除去するリンス部と
を有する色素吸着装置。 - 前記ノズルが、前記基板上に形成される前記半導体層のパターンに応じた口径およびピッチの吐出口を多数有する、請求項1に記載の色素吸着装置。
- 前記色素溶液滴下塗布部が、前記基板上で前記色素溶液の塗布膜が前記半導体層を隈なく覆うように、前記ノズルと前記基板との間で相対的な移動を行わせる走査機構を有する、請求項1または請求項2に記載の色素吸着装置。
- 前記色素溶液滴下塗布部が、大気から独立した雰囲気を形成できる第1のチャンバを有し、前記基板上の前記半導体層に対する前記色素溶液の滴下塗布を前記第1のチャンバの中で行う、請求項1〜3のいずれか一項に記載の色素吸着装置。
- 前記第1のチャンバの室内を減圧状態にするための第1の真空排気部を有する、請求項4に記載の色素吸着装置。
- 前記第1のチャンバの室内を除湿するための第1の除湿乾燥機を有する、請求項4または請求項5に記載の色素吸着装置。
- 前記第1のチャンバ内に前記基板を平流しで出し入れするための第1の搬送機構を有する、請求項4〜6のいずれか一項に記載の色素吸着装置。
- 前記色素溶液滴下塗布部が、大気から独立した雰囲気を形成できる第2のチャンバを有し、前記基板上の前記半導体層に対する前記色素溶液の滴下塗布に先立つ所定の前処理を前記第2のチャンバの中で行う、請求項1〜7のいずれか一項に記載の色素吸着装置。
- 前記第2のチャンバの室内を減圧状態にするための第2の真空排気部を有する、請求項8に記載の色素吸着装置。
- 前記第2のチャンバ内で前記基板上の前記半導体層の表面を加熱するための第1の加熱部を有する、請求項8または請求項9に記載の色素吸着装置。
- 前記第2のチャンバの室内を除湿するための第2の除湿乾燥機を有する、請求項8〜10のいずれか一項に記載の色素吸着装置。
- 前記第2のチャンバ内に前記基板を平流しで出し入れするための第2の搬送機構を有する、請求項8〜11のいずれか一項に記載の色素吸着装置。
- 前記色素溶液滴下塗布部が、大気から独立した雰囲気を形成できる第3のチャンバを有し、前記基板上の前記半導体層に対する前記色素溶液の滴下塗布に続く所定の後処理を前記第3のチャンバの中で行う、請求項4〜7のいずれか一項に記載の色素吸着装置。
- 前記第3のチャンバ内にパージガスを供給して室内を大気圧状態または正圧状態にするためのパージ機構を有する、請求項13に記載の色素吸着装置。
- 前記第3のチャンバ内で前記基板上の前記半導体層の表面を加熱するための第2の加熱部を有する、請求項13または請求項14に記載の色素吸着装置。
- 前記第3のチャンバの室内を除湿するための第3の除湿乾燥機を有する、請求項13〜15のいずれか一項に記載の色素吸着装置。
- 前記第3のチャンバ内に前記基板を平流しで出し入れするための第3の搬送機構を有する、請求項13〜16のいずれか一項に記載の色素吸着装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011144542A JP5520258B2 (ja) | 2011-06-29 | 2011-06-29 | 色素吸着装置及び色素吸着方法 |
US14/129,145 US20140134776A1 (en) | 2011-06-29 | 2012-04-24 | Dye adsorption device and dye adsorption method |
EP12805290.9A EP2728663A4 (en) | 2011-06-29 | 2012-04-24 | Dye adsorption device and dye adsorption method |
CN201280031621.5A CN103650233A (zh) | 2011-06-29 | 2012-04-24 | 染料吸附装置以及染料吸附方法 |
KR1020137034148A KR20140040759A (ko) | 2011-06-29 | 2012-04-24 | 색소 흡착 장치 및 색소 흡착 방법 |
PCT/JP2012/002809 WO2013001699A1 (ja) | 2011-06-29 | 2012-04-24 | 色素吸着装置および色素吸着方法 |
TW101123492A TW201316593A (zh) | 2011-06-29 | 2012-06-29 | 色素吸附裝置及色素吸附方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011144542A JP5520258B2 (ja) | 2011-06-29 | 2011-06-29 | 色素吸着装置及び色素吸着方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013012404A true JP2013012404A (ja) | 2013-01-17 |
JP5520258B2 JP5520258B2 (ja) | 2014-06-11 |
Family
ID=47423632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011144542A Expired - Fee Related JP5520258B2 (ja) | 2011-06-29 | 2011-06-29 | 色素吸着装置及び色素吸着方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20140134776A1 (ja) |
EP (1) | EP2728663A4 (ja) |
JP (1) | JP5520258B2 (ja) |
KR (1) | KR20140040759A (ja) |
CN (1) | CN103650233A (ja) |
TW (1) | TW201316593A (ja) |
WO (1) | WO2013001699A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11975546B2 (en) | 2008-06-13 | 2024-05-07 | Kateeva, Inc. | Gas enclosure assembly and system |
US12064979B2 (en) | 2008-06-13 | 2024-08-20 | Kateeva, Inc. | Low-particle gas enclosure systems and methods |
US12018857B2 (en) | 2008-06-13 | 2024-06-25 | Kateeva, Inc. | Gas enclosure assembly and system |
US10434804B2 (en) | 2008-06-13 | 2019-10-08 | Kateeva, Inc. | Low particle gas enclosure systems and methods |
EP3787016B1 (en) | 2013-12-26 | 2023-09-20 | Kateeva, Inc. | Apparatus and techniques for thermal treatment of electronic devices |
US9343678B2 (en) * | 2014-01-21 | 2016-05-17 | Kateeva, Inc. | Apparatus and techniques for electronic device encapsulation |
KR102307190B1 (ko) | 2014-01-21 | 2021-09-30 | 카티바, 인크. | 전자 장치 인캡슐레이션을 위한 기기 및 기술 |
KR102059313B1 (ko) | 2014-04-30 | 2019-12-24 | 카티바, 인크. | 가스 쿠션 장비 및 기판 코팅 기술 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002246076A (ja) * | 2001-02-15 | 2002-08-30 | Nec Corp | 色素増感湿式太陽電池の製造方法 |
JP2005347136A (ja) * | 2004-06-04 | 2005-12-15 | Sony Corp | 色素増感型光電変換装置の製造方法 |
JP2010218788A (ja) * | 2009-03-16 | 2010-09-30 | National Institute Of Advanced Industrial Science & Technology | 色素増感太陽電池 |
JP2011048938A (ja) * | 2009-08-25 | 2011-03-10 | Sony Corp | 色素増感型太陽電池モジュールの製造方法及びリンス装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1540680A1 (en) * | 2002-09-12 | 2005-06-15 | Agfa-Gevaert | N-type metal oxide semiconductor spectrally sensitized with a cationic spectral sensitizer |
JP4854971B2 (ja) | 2005-03-07 | 2012-01-18 | 藤森工業株式会社 | 色素増感型太陽電池モジュール |
KR101335190B1 (ko) * | 2010-02-25 | 2013-11-29 | 고쿠리츠 다이가쿠 호진 큐슈 코교 다이가쿠 | 색소 증감 태양 전지의 제조 장치 및 색소 증감 태양 전지의 제조 방법 |
JP5584653B2 (ja) * | 2010-11-25 | 2014-09-03 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
CN103597657A (zh) * | 2011-06-24 | 2014-02-19 | 索尼公司 | 光电转换装置、其制造方法、色素吸附装置、色素吸附装置用的液体保持工具以及制造光电转换元件的方法 |
-
2011
- 2011-06-29 JP JP2011144542A patent/JP5520258B2/ja not_active Expired - Fee Related
-
2012
- 2012-04-24 KR KR1020137034148A patent/KR20140040759A/ko not_active Application Discontinuation
- 2012-04-24 CN CN201280031621.5A patent/CN103650233A/zh active Pending
- 2012-04-24 EP EP12805290.9A patent/EP2728663A4/en not_active Withdrawn
- 2012-04-24 US US14/129,145 patent/US20140134776A1/en not_active Abandoned
- 2012-04-24 WO PCT/JP2012/002809 patent/WO2013001699A1/ja active Application Filing
- 2012-06-29 TW TW101123492A patent/TW201316593A/zh unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002246076A (ja) * | 2001-02-15 | 2002-08-30 | Nec Corp | 色素増感湿式太陽電池の製造方法 |
JP2005347136A (ja) * | 2004-06-04 | 2005-12-15 | Sony Corp | 色素増感型光電変換装置の製造方法 |
JP2010218788A (ja) * | 2009-03-16 | 2010-09-30 | National Institute Of Advanced Industrial Science & Technology | 色素増感太陽電池 |
JP2011048938A (ja) * | 2009-08-25 | 2011-03-10 | Sony Corp | 色素増感型太陽電池モジュールの製造方法及びリンス装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20140040759A (ko) | 2014-04-03 |
WO2013001699A1 (ja) | 2013-01-03 |
TW201316593A (zh) | 2013-04-16 |
EP2728663A4 (en) | 2014-12-10 |
EP2728663A1 (en) | 2014-05-07 |
CN103650233A (zh) | 2014-03-19 |
JP5520258B2 (ja) | 2014-06-11 |
US20140134776A1 (en) | 2014-05-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5520258B2 (ja) | 色素吸着装置及び色素吸着方法 | |
US10490427B2 (en) | Apparatus for treating substrate | |
US7418970B2 (en) | Substrate processing apparatus for drying substrate | |
JP5584653B2 (ja) | 基板処理装置及び基板処理方法 | |
JP5735809B2 (ja) | 基板処理装置 | |
JP5551625B2 (ja) | 基板処理装置及び基板処理方法 | |
CN108022860A (zh) | 用于处理基板的装置和方法 | |
KR19980081033A (ko) | 세정·건조처리장치, 기판의 처리장치 및 기판의 처리방법 | |
JP2013254904A (ja) | 基板処理装置及び基板処理方法 | |
KR20090013732A (ko) | 기판 지지 기구 및 감압 건조 장치 및 기판 처리 장치 | |
KR20190111100A (ko) | 기판 처리 장치 및 기판 처리 방법 | |
US9093222B2 (en) | Dye adsorption apparatus and dye adsorption method | |
US20050051195A1 (en) | Substrate processing system and substarate processing method | |
JP2001023907A (ja) | 成膜装置 | |
KR20120037744A (ko) | 기판처리시스템 | |
JP5597602B2 (ja) | 基板処理装置、基板処理方法及びその基板処理方法を実行させるためのプログラムを記録した記憶媒体 | |
JP2004111073A (ja) | 薄膜形成装置 | |
KR19990045297A (ko) | 기판처리장치 | |
KR102037921B1 (ko) | 기판처리장치 및 방법 | |
WO2011142193A1 (ja) | 金属膜形成システム、金属膜形成方法及びコンピュータ記憶媒体 | |
JP4044994B2 (ja) | 基板処理装置 | |
TWI850039B (zh) | 基板處理方法及基板處理裝置 | |
KR102193031B1 (ko) | 기판처리장치 및 방법 | |
JP2008109158A (ja) | 基板処理装置、基板処理方法、基板の製造方法及び電子機器 | |
JP2008166820A (ja) | 基板処理装置、基板処理方法、基板の製造方法及び電子機器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20121102 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131210 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140207 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140318 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140404 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5520258 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |