JP2012533746A5 - - Google Patents

Download PDF

Info

Publication number
JP2012533746A5
JP2012533746A5 JP2012521094A JP2012521094A JP2012533746A5 JP 2012533746 A5 JP2012533746 A5 JP 2012533746A5 JP 2012521094 A JP2012521094 A JP 2012521094A JP 2012521094 A JP2012521094 A JP 2012521094A JP 2012533746 A5 JP2012533746 A5 JP 2012533746A5
Authority
JP
Japan
Prior art keywords
interferogram
dimensional
narrowband
light
broadband
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012521094A
Other languages
English (en)
Japanese (ja)
Other versions
JP5748753B2 (ja
JP2012533746A (ja
Filing date
Publication date
Priority claimed from GB0912799.4A external-priority patent/GB2472059B/en
Application filed filed Critical
Publication of JP2012533746A publication Critical patent/JP2012533746A/ja
Publication of JP2012533746A5 publication Critical patent/JP2012533746A5/ja
Application granted granted Critical
Publication of JP5748753B2 publication Critical patent/JP5748753B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012521094A 2009-07-23 2010-07-20 干渉法により二次元光路分布の絶対測定を行う装置 Expired - Fee Related JP5748753B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0912799.4A GB2472059B (en) 2009-07-23 2009-07-23 Apparatus for the absolute measurement of two dimensional optical path distributions using interferometry
GB0912799.4 2009-07-23
PCT/GB2010/001379 WO2011010092A1 (en) 2009-07-23 2010-07-20 Apparatus for the absolute measurement of two dimensional optical path distributions using interferometry

Publications (3)

Publication Number Publication Date
JP2012533746A JP2012533746A (ja) 2012-12-27
JP2012533746A5 true JP2012533746A5 (https=) 2013-08-15
JP5748753B2 JP5748753B2 (ja) 2015-07-15

Family

ID=41058410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012521094A Expired - Fee Related JP5748753B2 (ja) 2009-07-23 2010-07-20 干渉法により二次元光路分布の絶対測定を行う装置

Country Status (6)

Country Link
US (1) US8908186B2 (https=)
EP (1) EP2459958B1 (https=)
JP (1) JP5748753B2 (https=)
CN (1) CN102656420B (https=)
GB (1) GB2472059B (https=)
WO (1) WO2011010092A1 (https=)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010041556A1 (de) * 2010-09-28 2012-03-29 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Mikrolithographie und Verfahren zur mikrolithographischen Abbildung
DE102011078089A1 (de) * 2011-06-27 2012-12-27 Robert Bosch Gmbh Verfahren und Anordnung zur Abstandsmessung bei einer Laserbearbeitungsanlage
JP5954979B2 (ja) * 2011-12-15 2016-07-20 キヤノン株式会社 多波長干渉計を有する計測装置
WO2013098942A1 (ja) * 2011-12-27 2013-07-04 キヤノン株式会社 情報信号生成方法
EP2662661A1 (de) * 2012-05-07 2013-11-13 Leica Geosystems AG Messgerät mit einem Interferometer und einem ein dichtes Linienspektrum definierenden Absorptionsmedium
US9155465B2 (en) 2013-04-30 2015-10-13 IDx, LLC Snapshot spectral domain optical coherence tomographer
WO2014201504A1 (en) * 2013-06-20 2014-12-24 Cylite Pty Ltd Wavefront analyser
DE102013113773B4 (de) * 2013-12-10 2016-09-29 RUHR-UNIVERSITäT BOCHUM Methode zur mikroskopischen Vermessung von Proben mittels Kurzkohärenter Interferometrie
RU2557681C1 (ru) * 2014-03-04 2015-07-27 Вячеслав Васильевич Орлов Двусторонний интерферометр для измерения концевых мер длины
FR3022346B1 (fr) * 2014-06-16 2022-10-07 Commissariat Energie Atomique Dispositif et procede de caracterisation d'un faisceau de lumiere
CN109387155B (zh) * 2017-08-10 2020-09-22 上海微电子装备（集团）股份有限公司 形貌检测装置与形貌检测方法
WO2019059632A1 (ko) * 2017-09-25 2019-03-28 한국과학기술원 프리즘을 이용한 초분광 영상 재구성 방법 및 시스템
CN108459417B (zh) * 2018-02-05 2020-06-26 华侨大学 一种单目窄带多光谱立体视觉系统及其使用方法
CN108507596B (zh) * 2018-03-05 2020-06-30 中国科学院上海光学精密机械研究所 二维gold矩阵绝对位置编码方法及其解码方法
WO2019211910A1 (ja) * 2018-05-02 2019-11-07 オリンパス株式会社 データ取得装置
CN109343068A (zh) * 2018-12-13 2019-02-15 中国电子科技集团公司第三十四研究所 一种空间长度的测量装置及测量方法
US12399461B1 (en) * 2021-12-08 2025-08-26 Wavefront Analysis Systems Llc Totagraphy: coherent diffractive/digital information reconstruction by iterative phase recovery using reference wave
CN115040066B (zh) * 2022-08-12 2022-11-08 北京心联光电科技有限公司 一种多功能眼底扫描方法及系统
CN115980744B (zh) * 2022-11-10 2024-03-22 国家卫星海洋应用中心 一种星载sar影像数据无叠掩多峰海浪图像谱分离的方法
WO2025115430A1 (ja) * 2023-11-29 2025-06-05 タカノ株式会社 段差測定装置、画像処理装置、段差測定方法及びプログラム
CN118565381B (zh) * 2024-07-31 2024-10-11 宁波舜宇光电信息有限公司 反射镜面型测量系统、反射镜面型测量方法和电子设备

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5675513A (en) * 1996-02-16 1997-10-07 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method of calibrating an interferometer and reducing its systematic noise
JP3681608B2 (ja) * 2000-03-24 2005-08-10 独立行政法人科学技術振興機構 分光学的断面画像測定装置
CN1623085A (zh) * 2002-01-24 2005-06-01 通用医疗公司 使用光谱带并行检测的低相干干涉测量法(lci)和光学相干层析成像(oct)信号的测距和降噪的装置和方法
IL149016A0 (en) * 2002-04-07 2004-03-28 Green Vision Systems Ltd Green Method and device for real time high speed high resolution spectral imaging
US7067818B2 (en) * 2003-01-16 2006-06-27 Metrosol, Inc. Vacuum ultraviolet reflectometer system and method
US7643153B2 (en) * 2003-01-24 2010-01-05 The General Hospital Corporation Apparatus and method for ranging and noise reduction of low coherence interferometry LCI and optical coherence tomography OCT signals by parallel detection of spectral bands
JP2005099430A (ja) * 2003-09-25 2005-04-14 Olympus Corp 光学的観察装置、走査型顕微鏡及び経内視鏡的観察装置
WO2005086582A2 (en) * 2004-03-11 2005-09-22 Nano-Or Technologies (Israel) Ltd. Methods and apparatus for wavefront manipulations and improved 3-d measurements
EP1839012B1 (en) * 2005-01-20 2014-05-07 Duke University Methods, systems and computer program products for characterizing structures based on interferometric phase data
US7391520B2 (en) * 2005-07-01 2008-06-24 Carl Zeiss Meditec, Inc. Fourier domain optical coherence tomography employing a swept multi-wavelength laser and a multi-channel receiver
JP2007101249A (ja) * 2005-09-30 2007-04-19 Fujifilm Corp 光断層画像化方法および装置
US7564568B2 (en) * 2006-03-02 2009-07-21 Zygo Corporation Phase shifting interferometry with multiple accumulation
JP2007240453A (ja) * 2006-03-10 2007-09-20 Naohiro Tanno 分光コヒーレンストモグラフィー装置
JP4845607B2 (ja) * 2006-06-21 2011-12-28 オリンパス株式会社 ３次元形状測定方法及び装置
JP2008145429A (ja) * 2006-11-17 2008-06-26 Fujifilm Corp 光断層画像化装置
JP2009025245A (ja) * 2007-07-23 2009-02-05 Optical Comb Inc 光干渉観測装置
US8144331B2 (en) * 2009-06-18 2012-03-27 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Systems, computer-implemented methods, and tangible computer-readable storage media for wide-field interferometry

Similar Documents

Publication Publication Date Title
JP2012533746A5 (https=)
CN103743482B (zh) 一种光谱成像装置及光谱成像反演方法
JP4707653B2 (ja) 静的マルチモードマルチプレックス分光法のための方法及びシステム
CN110494723B (zh) 波前传感器及其使用方法
JP4237175B2 (ja) 白色光干渉計を用いた透明薄膜の厚さ及び形状の測定装置及び方法
CN104121990B (zh) 基于随机光栅的压缩感知宽波段高光谱成像系统
JP5748753B2 (ja) 干渉法により二次元光路分布の絶対測定を行う装置
CN103033265A (zh) 空间外差干涉超光谱成像装置及方法
CN103424190B (zh) 双楔板色散剪切干涉超光谱成像装置及方法
JP2012526269A (ja) 多波長偏光画像からシーンを識別するための方法
CN108603789A (zh) 用于超光谱成像计量的系统及方法
JP2016535288A5 (https=)
CN103063304A (zh) 色散剪切像面干涉超光谱成像装置及方法
WO2017149543A1 (en) System and method for interferometric based spectrometry and compact spectrometer using same
CN105157836A (zh) 一种偏振态同步获取的光谱成像装置及其方法
Toivonen et al. Snapshot hyperspectral imaging using wide dilation networks: ME Toivonen et al.
Kudenov et al. Faceted grating prism for a computed tomographic imaging spectrometer
KR101547459B1 (ko) 위상 축소 이미징 시스템 및 이를 이용한 이미징 방법
RU2601729C1 (ru) Метод и устройство для регистрации спектральных цифровых голографических изображений оптически прозрачных микрообъектов
Shumigai et al. Parallel multispectral ghost imaging data acquisition with supercontinuum
EP3209999A1 (en) Interferometric system and method of measurement of refractive index spatial distribution
US20200174425A1 (en) Systems and methods for simultaneous multi-channel off-axis holography
Bao et al. Optical surface profile measurement using phase retrieval by tuning the illumination wavelength
Millour Interferometry concepts
CN118732458B (zh) 基于三棱镜折射的单参考臂多波长离轴数字全息成像装置