GB2472059B - Apparatus for the absolute measurement of two dimensional optical path distributions using interferometry - Google Patents

Apparatus for the absolute measurement of two dimensional optical path distributions using interferometry

Info

Publication number
GB2472059B
GB2472059B GB0912799.4A GB0912799A GB2472059B GB 2472059 B GB2472059 B GB 2472059B GB 0912799 A GB0912799 A GB 0912799A GB 2472059 B GB2472059 B GB 2472059B
Authority
GB
United Kingdom
Prior art keywords
interferometry
optical path
dimensional optical
absolute measurement
path distributions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0912799.4A
Other languages
English (en)
Other versions
GB0912799D0 (en
GB2472059A (en
Inventor
Jonathan Mark Huntley
Pablo Daniel Ruiz
Taufiq Widjanarko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Loughborough University
Original Assignee
Loughborough University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Loughborough University filed Critical Loughborough University
Priority to GB0912799.4A priority Critical patent/GB2472059B/en
Publication of GB0912799D0 publication Critical patent/GB0912799D0/en
Priority to JP2012521094A priority patent/JP5748753B2/ja
Priority to US13/386,485 priority patent/US8908186B2/en
Priority to EP10749891.7A priority patent/EP2459958B1/en
Priority to CN201080042357.6A priority patent/CN102656420B/zh
Priority to PCT/GB2010/001379 priority patent/WO2011010092A1/en
Publication of GB2472059A publication Critical patent/GB2472059A/en
Application granted granted Critical
Publication of GB2472059B publication Critical patent/GB2472059B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0073—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence by tomography, i.e. reconstruction of 3D images from 2D projections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G01B9/02008—Two or more frequencies or sources used for interferometric measurement by using a frequency comb
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/021—Interferometers using holographic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/021—Interferometers using holographic techniques
    • G01B9/023—Interferometers using holographic techniques for contour producing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G01N21/453—Holographic interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4795—Scattering, i.e. diffuse reflection spatially resolved investigating of object in scattering medium
    • G06T7/0057—
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/12—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for looking at the eye fundus, e.g. ophthalmoscopes
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/12—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for looking at the eye fundus, e.g. ophthalmoscopes
    • A61B3/1225—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for looking at the eye fundus, e.g. ophthalmoscopes using coherent radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Biophysics (AREA)
  • Surgery (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
GB0912799.4A 2009-07-23 2009-07-23 Apparatus for the absolute measurement of two dimensional optical path distributions using interferometry Expired - Fee Related GB2472059B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB0912799.4A GB2472059B (en) 2009-07-23 2009-07-23 Apparatus for the absolute measurement of two dimensional optical path distributions using interferometry
CN201080042357.6A CN102656420B (zh) 2009-07-23 2010-07-20 使用干涉法的用于二维光程分布的绝对测量的装置
US13/386,485 US8908186B2 (en) 2009-07-23 2010-07-20 Apparatus for the absolute measurement of two dimensional optical path distributions using interferometry
EP10749891.7A EP2459958B1 (en) 2009-07-23 2010-07-20 Apparatus for the absolute measurement of two dimensional optical path distributions using interferometry
JP2012521094A JP5748753B2 (ja) 2009-07-23 2010-07-20 干渉法により二次元光路分布の絶対測定を行う装置
PCT/GB2010/001379 WO2011010092A1 (en) 2009-07-23 2010-07-20 Apparatus for the absolute measurement of two dimensional optical path distributions using interferometry

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0912799.4A GB2472059B (en) 2009-07-23 2009-07-23 Apparatus for the absolute measurement of two dimensional optical path distributions using interferometry

Publications (3)

Publication Number Publication Date
GB0912799D0 GB0912799D0 (en) 2009-08-26
GB2472059A GB2472059A (en) 2011-01-26
GB2472059B true GB2472059B (en) 2012-09-19

Family

ID=41058410

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0912799.4A Expired - Fee Related GB2472059B (en) 2009-07-23 2009-07-23 Apparatus for the absolute measurement of two dimensional optical path distributions using interferometry

Country Status (6)

Country Link
US (1) US8908186B2 (https=)
EP (1) EP2459958B1 (https=)
JP (1) JP5748753B2 (https=)
CN (1) CN102656420B (https=)
GB (1) GB2472059B (https=)
WO (1) WO2011010092A1 (https=)

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DE102010041556A1 (de) * 2010-09-28 2012-03-29 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Mikrolithographie und Verfahren zur mikrolithographischen Abbildung
DE102011078089A1 (de) * 2011-06-27 2012-12-27 Robert Bosch Gmbh Verfahren und Anordnung zur Abstandsmessung bei einer Laserbearbeitungsanlage
JP5954979B2 (ja) * 2011-12-15 2016-07-20 キヤノン株式会社 多波長干渉計を有する計測装置
WO2013098942A1 (ja) * 2011-12-27 2013-07-04 キヤノン株式会社 情報信号生成方法
EP2662661A1 (de) * 2012-05-07 2013-11-13 Leica Geosystems AG Messgerät mit einem Interferometer und einem ein dichtes Linienspektrum definierenden Absorptionsmedium
US9155465B2 (en) 2013-04-30 2015-10-13 IDx, LLC Snapshot spectral domain optical coherence tomographer
WO2014201504A1 (en) * 2013-06-20 2014-12-24 Cylite Pty Ltd Wavefront analyser
DE102013113773B4 (de) * 2013-12-10 2016-09-29 RUHR-UNIVERSITäT BOCHUM Methode zur mikroskopischen Vermessung von Proben mittels Kurzkohärenter Interferometrie
RU2557681C1 (ru) * 2014-03-04 2015-07-27 Вячеслав Васильевич Орлов Двусторонний интерферометр для измерения концевых мер длины
FR3022346B1 (fr) * 2014-06-16 2022-10-07 Commissariat Energie Atomique Dispositif et procede de caracterisation d'un faisceau de lumiere
CN109387155B (zh) * 2017-08-10 2020-09-22 上海微电子装备（集团）股份有限公司 形貌检测装置与形貌检测方法
WO2019059632A1 (ko) * 2017-09-25 2019-03-28 한국과학기술원 프리즘을 이용한 초분광 영상 재구성 방법 및 시스템
CN108459417B (zh) * 2018-02-05 2020-06-26 华侨大学 一种单目窄带多光谱立体视觉系统及其使用方法
CN108507596B (zh) * 2018-03-05 2020-06-30 中国科学院上海光学精密机械研究所 二维gold矩阵绝对位置编码方法及其解码方法
WO2019211910A1 (ja) * 2018-05-02 2019-11-07 オリンパス株式会社 データ取得装置
CN109343068A (zh) * 2018-12-13 2019-02-15 中国电子科技集团公司第三十四研究所 一种空间长度的测量装置及测量方法
US12399461B1 (en) * 2021-12-08 2025-08-26 Wavefront Analysis Systems Llc Totagraphy: coherent diffractive/digital information reconstruction by iterative phase recovery using reference wave
CN115040066B (zh) * 2022-08-12 2022-11-08 北京心联光电科技有限公司 一种多功能眼底扫描方法及系统
CN115980744B (zh) * 2022-11-10 2024-03-22 国家卫星海洋应用中心 一种星载sar影像数据无叠掩多峰海浪图像谱分离的方法
WO2025115430A1 (ja) * 2023-11-29 2025-06-05 タカノ株式会社 段差測定装置、画像処理装置、段差測定方法及びプログラム
CN118565381B (zh) * 2024-07-31 2024-10-11 宁波舜宇光电信息有限公司 反射镜面型测量系统、反射镜面型测量方法和电子设备

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US20080094613A1 (en) * 2003-01-24 2008-04-24 The General Hospital Corporation Apparatus and method for ranging and noise reduction of low coherence interferometry lci and optical coherence tomography oct signals by parallel detection of spectral bands
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Also Published As

Publication number Publication date
US8908186B2 (en) 2014-12-09
JP5748753B2 (ja) 2015-07-15
EP2459958B1 (en) 2016-01-13
JP2012533746A (ja) 2012-12-27
EP2459958A1 (en) 2012-06-06
GB0912799D0 (en) 2009-08-26
US20120176625A1 (en) 2012-07-12
GB2472059A (en) 2011-01-26
WO2011010092A1 (en) 2011-01-27
CN102656420A (zh) 2012-09-05
CN102656420B (zh) 2015-06-03

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PCNP Patent ceased through non-payment of renewal fee

Effective date: 20170723