CN102656420B - 使用干涉法的用于二维光程分布的绝对测量的装置 - Google Patents

使用干涉法的用于二维光程分布的绝对测量的装置 Download PDF

Info

Publication number
CN102656420B
CN102656420B CN201080042357.6A CN201080042357A CN102656420B CN 102656420 B CN102656420 B CN 102656420B CN 201080042357 A CN201080042357 A CN 201080042357A CN 102656420 B CN102656420 B CN 102656420B
Authority
CN
China
Prior art keywords
dimensional
interferogram
light
narrowband
interferograms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201080042357.6A
Other languages
English (en)
Chinese (zh)
Other versions
CN102656420A (zh
Inventor
J·M·亨特利
P·D·鲁伊兹
T·威查纳尔科
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DEFORMABLE GRANULE PRODUCTION
Original Assignee
DEFORMABLE GRANULE PRODUCTION
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DEFORMABLE GRANULE PRODUCTION filed Critical DEFORMABLE GRANULE PRODUCTION
Publication of CN102656420A publication Critical patent/CN102656420A/zh
Application granted granted Critical
Publication of CN102656420B publication Critical patent/CN102656420B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0073—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence by tomography, i.e. reconstruction of 3D images from 2D projections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G01B9/02008—Two or more frequencies or sources used for interferometric measurement by using a frequency comb
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/021—Interferometers using holographic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/021—Interferometers using holographic techniques
    • G01B9/023—Interferometers using holographic techniques for contour producing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G01N21/453—Holographic interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4795—Scattering, i.e. diffuse reflection spatially resolved investigating of object in scattering medium
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/12—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for looking at the eye fundus, e.g. ophthalmoscopes
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/12—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for looking at the eye fundus, e.g. ophthalmoscopes
    • A61B3/1225—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for looking at the eye fundus, e.g. ophthalmoscopes using coherent radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Biophysics (AREA)
  • Surgery (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN201080042357.6A 2009-07-23 2010-07-20 使用干涉法的用于二维光程分布的绝对测量的装置 Expired - Fee Related CN102656420B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0912799.4A GB2472059B (en) 2009-07-23 2009-07-23 Apparatus for the absolute measurement of two dimensional optical path distributions using interferometry
GB0912799.4 2009-07-23
PCT/GB2010/001379 WO2011010092A1 (en) 2009-07-23 2010-07-20 Apparatus for the absolute measurement of two dimensional optical path distributions using interferometry

Publications (2)

Publication Number Publication Date
CN102656420A CN102656420A (zh) 2012-09-05
CN102656420B true CN102656420B (zh) 2015-06-03

Family

ID=41058410

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080042357.6A Expired - Fee Related CN102656420B (zh) 2009-07-23 2010-07-20 使用干涉法的用于二维光程分布的绝对测量的装置

Country Status (6)

Country Link
US (1) US8908186B2 (https=)
EP (1) EP2459958B1 (https=)
JP (1) JP5748753B2 (https=)
CN (1) CN102656420B (https=)
GB (1) GB2472059B (https=)
WO (1) WO2011010092A1 (https=)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010041556A1 (de) * 2010-09-28 2012-03-29 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Mikrolithographie und Verfahren zur mikrolithographischen Abbildung
DE102011078089A1 (de) * 2011-06-27 2012-12-27 Robert Bosch Gmbh Verfahren und Anordnung zur Abstandsmessung bei einer Laserbearbeitungsanlage
JP5954979B2 (ja) * 2011-12-15 2016-07-20 キヤノン株式会社 多波長干渉計を有する計測装置
WO2013098942A1 (ja) * 2011-12-27 2013-07-04 キヤノン株式会社 情報信号生成方法
EP2662661A1 (de) * 2012-05-07 2013-11-13 Leica Geosystems AG Messgerät mit einem Interferometer und einem ein dichtes Linienspektrum definierenden Absorptionsmedium
US9155465B2 (en) 2013-04-30 2015-10-13 IDx, LLC Snapshot spectral domain optical coherence tomographer
WO2014201504A1 (en) * 2013-06-20 2014-12-24 Cylite Pty Ltd Wavefront analyser
DE102013113773B4 (de) * 2013-12-10 2016-09-29 RUHR-UNIVERSITäT BOCHUM Methode zur mikroskopischen Vermessung von Proben mittels Kurzkohärenter Interferometrie
RU2557681C1 (ru) * 2014-03-04 2015-07-27 Вячеслав Васильевич Орлов Двусторонний интерферометр для измерения концевых мер длины
FR3022346B1 (fr) * 2014-06-16 2022-10-07 Commissariat Energie Atomique Dispositif et procede de caracterisation d'un faisceau de lumiere
CN109387155B (zh) * 2017-08-10 2020-09-22 上海微电子装备（集团）股份有限公司 形貌检测装置与形貌检测方法
WO2019059632A1 (ko) * 2017-09-25 2019-03-28 한국과학기술원 프리즘을 이용한 초분광 영상 재구성 방법 및 시스템
CN108459417B (zh) * 2018-02-05 2020-06-26 华侨大学 一种单目窄带多光谱立体视觉系统及其使用方法
CN108507596B (zh) * 2018-03-05 2020-06-30 中国科学院上海光学精密机械研究所 二维gold矩阵绝对位置编码方法及其解码方法
WO2019211910A1 (ja) * 2018-05-02 2019-11-07 オリンパス株式会社 データ取得装置
CN109343068A (zh) * 2018-12-13 2019-02-15 中国电子科技集团公司第三十四研究所 一种空间长度的测量装置及测量方法
US12399461B1 (en) * 2021-12-08 2025-08-26 Wavefront Analysis Systems Llc Totagraphy: coherent diffractive/digital information reconstruction by iterative phase recovery using reference wave
CN115040066B (zh) * 2022-08-12 2022-11-08 北京心联光电科技有限公司 一种多功能眼底扫描方法及系统
CN115980744B (zh) * 2022-11-10 2024-03-22 国家卫星海洋应用中心 一种星载sar影像数据无叠掩多峰海浪图像谱分离的方法
WO2025115430A1 (ja) * 2023-11-29 2025-06-05 タカノ株式会社 段差測定装置、画像処理装置、段差測定方法及びプログラム
CN118565381B (zh) * 2024-07-31 2024-10-11 宁波舜宇光电信息有限公司 反射镜面型测量系统、反射镜面型测量方法和电子设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050001172A1 (en) * 2003-01-16 2005-01-06 Harrison Dale A. Vacuum ultraviolet reflectometer system and method
CN1623085A (zh) * 2002-01-24 2005-06-01 通用医疗公司 使用光谱带并行检测的低相干干涉测量法(lci)和光学相干层析成像(oct)信号的测距和降噪的装置和方法
US20070002327A1 (en) * 2005-07-01 2007-01-04 Yan Zhou Fourier domain optical coherence tomography employing a swept multi-wavelength laser and a multi-channel receiver
CN101076705A (zh) * 2004-03-11 2007-11-21 Icos视检系统有限公司 用于波前控制和改进的3d测量的方法和装置
US20080123103A1 (en) * 2006-06-21 2008-05-29 Olympus Corporation Three-dimensional shape measurement method and three-dimensional shape measurement apparatus

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5675513A (en) * 1996-02-16 1997-10-07 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method of calibrating an interferometer and reducing its systematic noise
JP3681608B2 (ja) * 2000-03-24 2005-08-10 独立行政法人科学技術振興機構 分光学的断面画像測定装置
IL149016A0 (en) * 2002-04-07 2004-03-28 Green Vision Systems Ltd Green Method and device for real time high speed high resolution spectral imaging
US7643153B2 (en) * 2003-01-24 2010-01-05 The General Hospital Corporation Apparatus and method for ranging and noise reduction of low coherence interferometry LCI and optical coherence tomography OCT signals by parallel detection of spectral bands
JP2005099430A (ja) * 2003-09-25 2005-04-14 Olympus Corp 光学的観察装置、走査型顕微鏡及び経内視鏡的観察装置
EP1839012B1 (en) * 2005-01-20 2014-05-07 Duke University Methods, systems and computer program products for characterizing structures based on interferometric phase data
JP2007101249A (ja) * 2005-09-30 2007-04-19 Fujifilm Corp 光断層画像化方法および装置
US7564568B2 (en) * 2006-03-02 2009-07-21 Zygo Corporation Phase shifting interferometry with multiple accumulation
JP2007240453A (ja) * 2006-03-10 2007-09-20 Naohiro Tanno 分光コヒーレンストモグラフィー装置
JP2008145429A (ja) * 2006-11-17 2008-06-26 Fujifilm Corp 光断層画像化装置
JP2009025245A (ja) * 2007-07-23 2009-02-05 Optical Comb Inc 光干渉観測装置
US8144331B2 (en) * 2009-06-18 2012-03-27 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Systems, computer-implemented methods, and tangible computer-readable storage media for wide-field interferometry

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1623085A (zh) * 2002-01-24 2005-06-01 通用医疗公司 使用光谱带并行检测的低相干干涉测量法(lci)和光学相干层析成像(oct)信号的测距和降噪的装置和方法
US20050001172A1 (en) * 2003-01-16 2005-01-06 Harrison Dale A. Vacuum ultraviolet reflectometer system and method
CN101076705A (zh) * 2004-03-11 2007-11-21 Icos视检系统有限公司 用于波前控制和改进的3d测量的方法和装置
US20070002327A1 (en) * 2005-07-01 2007-01-04 Yan Zhou Fourier domain optical coherence tomography employing a swept multi-wavelength laser and a multi-channel receiver
US20080123103A1 (en) * 2006-06-21 2008-05-29 Olympus Corporation Three-dimensional shape measurement method and three-dimensional shape measurement apparatus

Also Published As

Publication number Publication date
US8908186B2 (en) 2014-12-09
JP5748753B2 (ja) 2015-07-15
EP2459958B1 (en) 2016-01-13
GB2472059B (en) 2012-09-19
JP2012533746A (ja) 2012-12-27
EP2459958A1 (en) 2012-06-06
GB0912799D0 (en) 2009-08-26
US20120176625A1 (en) 2012-07-12
GB2472059A (en) 2011-01-26
WO2011010092A1 (en) 2011-01-27
CN102656420A (zh) 2012-09-05

Similar Documents

Publication Publication Date Title
CN102656420B (zh) 使用干涉法的用于二维光程分布的绝对测量的装置
Zhou et al. A review of the dual-wavelength technique for phase imaging and 3D topography
US8605289B2 (en) Method and apparatus for interferometry
US8565499B2 (en) Methods, systems, and computer readable media for synthetic wavelength-based phase unwrapping in optical coherence tomography and spectral domain phase microscopy
US10054429B2 (en) System for tomography and/or topography measurements of a layered objects
CN104534979B (zh) 一种多波长相移显微成像系统及方法
KR101858082B1 (ko) 개선된 홀로그래픽 복원 장치 및 방법
CN103630086B (zh) 一种基于单色ccd的双波长同时相移干涉测量方法
KR102426103B1 (ko) 개선된 홀로그래픽 복원 장치 및 방법
KR20170120462A (ko) 개선된 홀로그래픽 복원 장치 및 방법
CN109211415A (zh) 一种基于光源光谱特征波长的波长标定方法
US10415954B2 (en) Method for analyzing an object
CN209085560U (zh) 一种彩色共焦三维形貌光学测量机构
CN204388780U (zh) 一种多波长相移显微成像系统
KR101547459B1 (ko) 위상 축소 이미징 시스템 및 이를 이용한 이미징 방법
US7304745B2 (en) Phase measuring method and apparatus for multi-frequency interferometry
JP2005537475A6 (ja) 位相測定法及び多周波干渉装置
Huntley et al. Hyperspectral interferometry for single-shot absolute measurement of two-dimensional optical path distributions
CN110763686A (zh) 一种透明样品的缺陷检测装置和检测方法
Palacios et al. Controlled Phase Shifting in Reflective Digital Holographic
Watanabe et al. Refractive index & physical thickness distributions measurement and consideration of dependence of measurement accuracy on scanning interval using low-coherence digital holography
Huntley et al. Hyperspectral interferometry for single-shot absolute measurement of 3-D shape and displacement fields
Towers et al. Extended range metrology: an age old problem
Ruiz et al. Single-shot profilometry of rough surfaces using hyperspectral interferometry
Khodadad et al. Shape Measurement Based on Combined Reduced Phase Dual-Directional Illumination Digital Holography and Speckle Displacements

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150603

Termination date: 20170720