JP2012527766A5 - - Google Patents

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JP2012527766A5
JP2012527766A5 JP2012511393A JP2012511393A JP2012527766A5 JP 2012527766 A5 JP2012527766 A5 JP 2012527766A5 JP 2012511393 A JP2012511393 A JP 2012511393A JP 2012511393 A JP2012511393 A JP 2012511393A JP 2012527766 A5 JP2012527766 A5 JP 2012527766A5
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beamlet
beamlets
wafer
control data
data
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Priority claimed from PCT/IB2010/052217 external-priority patent/WO2010134026A2/en
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JP2012511393A 2009-05-20 2010-05-19 デュアルパス走査 Withdrawn JP2012527766A (ja)

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US17976209P 2009-05-20 2009-05-20
US61/179,762 2009-05-20
PCT/IB2010/052217 WO2010134026A2 (en) 2009-05-20 2010-05-19 Dual pass scanning

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JP2015097621A Division JP6125562B2 (ja) 2009-05-20 2015-05-12 デュアルパス走査

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JP2012527766A JP2012527766A (ja) 2012-11-08
JP2012527766A5 true JP2012527766A5 (https=) 2013-07-04

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JP2012511393A Withdrawn JP2012527766A (ja) 2009-05-20 2010-05-19 デュアルパス走査
JP2015097621A Active JP6125562B2 (ja) 2009-05-20 2015-05-12 デュアルパス走査
JP2017075328A Ceased JP2017168848A (ja) 2009-05-20 2017-04-05 デュアルパス走査

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JP2017075328A Ceased JP2017168848A (ja) 2009-05-20 2017-04-05 デュアルパス走査

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US (4) US9691589B2 (https=)
EP (2) EP3144955A1 (https=)
JP (3) JP2012527766A (https=)
KR (3) KR101757837B1 (https=)
CN (3) CN104795303B (https=)
TW (1) TWI528411B (https=)
WO (1) WO2010134026A2 (https=)

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