JP2012521565A - 垂直に集積されたmems加速度トランスデューサ - Google Patents
垂直に集積されたmems加速度トランスデューサ Download PDFInfo
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B81B7/0074—3D packaging, i.e. encapsulation containing one or several MEMS devices arranged in planes non-parallel to the mounting board
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
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- B81B2201/00—Specific applications of microelectromechanical systems
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- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass
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- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0837—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being suspended so as to only allow movement perpendicular to the plane of the substrate, i.e. z-axis sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0848—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a plurality of mechanically coupled spring-mass systems, the sensitive direction of each system being different
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0851—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a plurality of spring-mass systems, each system having a different range of sensitivity to acceleration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0871—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using stopper structures for limiting the travel of the seismic mass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/088—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing wafer-level encapsulation
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Abstract
Description
(発明の概要)
したがって、上述の当該技術分野における問題を克服する改善されたMEMS加速度トランスデューサおよび組立方法が必要とされている。
区分70と72の質量差のおかげで、Z方向26の加速度に応答して試験質量58が回転軸68の周りを旋回し、したがって、固定電極素子62に対する試験質量58の位置が変化する。この位置変化が、1セットのキャパシタを生じ、該キャパシタの差、すなわち、差動容量が基板56の表面60に垂直なZ方向26の加速度を示す。
Claims (20)
- 加速度を感知するように適合されたトランスデューサであって、
第1表面を有する第1基板と、
前記第1表面に可動に接続され、前記第1基板の第1表面から離間された第1試験質量と、
第2表面を有する第2基板であって、該第2表面が前記第1表面に向き合うように前記第1基板に接続された第2基板と、
前記第2表面に可動に接続され、前記第2基板の前記第2表面から離間された第2試験質量と、
前記第2試験質量は、第1試験質量に向き合って配置されることと、
を備えたトランスデューサ。 - 前記トランスデューサが、
前記第1基板の前記表面に形成され前記第1試験質量に接続されるアンカーシステムをさらに備え、
前記アンカーシステムは、第1方向の加速度に応答して、前記第1試験質量が前記第1基板の前記第1表面と実質的に平行に移動することを可能にする、
請求項1記載のトランスデューサ。 - 前記トランスデューサが、
前記第1試験質量に形成され、前記第1方向と垂直に配置される複数の可動フィンガーと、
前記第1基板に非可動に接続され、前記可動フィンガーと実質的に平行に配置される複数の固定感知フィンガーと、
をさらに備え、
差動容量構造を形成するために、各前記可動フィンガーは一対の前記固定感知フィンガーの間に配置される、
請求項2記載のトランスデューサ。 - 前記アンカーシステムはさらに、
前記第1方向と直交する第2方向の加速度に応答して、前記第1試験質量が前記第1基板の前記第1表面と実質的に平行移動することを可能にする、
請求項2記載のトランスデューサ。 - 前記アンカーシステムは第1アンカーシステムであって、
前記トランスデューサは、前記第2基板の前記第2表面に形成され、前記第1方向の前記加速度に応答して、前記第2試験質量が前記第2基板の前記第2表面と実質的に平行移動可能なように前記第2試験質量に接続された第2アンカーシステムをさらに含む、
請求項2記載のトランスデューサ。 - 前記トランスデューサが、
第1感知範囲に亘って前記第1方向の前記加速度を検出するように適合された第1センサと、
前記第1試験質量が前記第1センサの一部分を形成することと、
第1感知範囲と異なる第2感知範囲に亘って前記第1方向の前記加速度を検出するように適合された第2センサと、
前記第2試験質量が前記第2センサの一部分を形成することと
をさらに備えた請求項5記載のトランスデューサ。 - 前記第2試験質量は、回転軸に対して移動するように適合され、
前記トランスデューサがさらに、
前記第2基板の前記第2表面に形成され、前記第2試験質量に回転可能に接続されるアンカーシステムであって、
前記アンカーシステムは、前記第2基板の前記第2表面と垂直な方向の前記加速度に応答して、前記第2試験質量が前記回転軸の周囲を回転することを可能にする、
請求項1記載のトランスデューサ。 - 前記第2試験質量が第1端部、第2端部、前記回転軸および前記第1端部との間に形成された第1区分、前記回転軸および前記第2端部との間に形成された第2区分を含み、前記第1区分が前記第2区分より大きな質量を示し、
前記トランスデューサが、
前記第2基板の前記第2表面に形成された第1電極素子および第2電極素子を含み、前記第1電極素子は前記第1区分に向き合い、前記第2電極素子は前記第2区分に向き合い、前記第1電極素子および前記第2電極素子はそれぞれ、前記第2表面と垂直方向の前記加速度を感知するように適合される、
請求項7記載のトランスデューサ。 - 請求項7記載のトランスデューサにおいて、前記トランスデューサが、
前記第1基板の前記第1表面に形成された固定感知フィンガーであって、
第2試験質量が前記固定感知フィンガーの第1部分と反対の関係に配置されることと、
前記第2表面に接続され、前記第2基板の前記第2表面から離間配置された第3試験質量と、前記第3試験質量は前記固定感知フィンガーの第2部分と反対の関係にあることと、
前記第2基板の前記第2表面に形成され、第2回転軸において前記第3試験質量に回転可能に接続される第3アンカーシステムであって、
前記第3アンカーシステムは、前記第2表面と垂直な方向の前記加速度に応答して前記第3試験質量が前記回転軸周囲を回転可能にすることと、
をさらに含むトランスデューサ。 - 前記第1試験質量と前記第2試験質量との間に配置されたオーバートラベルをさらに含み、
前記過移動停止部材は前記第1表面および前記第2表面の1つに非可動に接続され、
前記過移動停止部材は、前記第1基板および前記第2基板の前記第1表面および前記第2表面と垂直な方向に、少なくとも1つの前記第1試験質量または前記第2試験質量の移動を制限するように適合される、
請求項1記載のトランスデューサ。 - 前記過移動停止部材は、前記第1表面に非可動に接続された第1過移動停止部材であり、前記方向に前記第2試験質量の移動を制限するように適合され、
前記トランスデューサはさらに、前記第1試験質量と前記第2試験質量との間に配置された第2過移動停止部材を含み、
前記第2過移動停止部材は、前記第2表面に非可動に接続され、前記方向に前記第1試験質量の移動を制限するように適合される、
請求項10記載のトランスデューサ。 - 前記第2試験質量は前記第1基板の前記第1表面に形成された固定感知フィンガーと反対の関係に配置され、前記第2試験質量は、前記第2試験質量と前記固定感知フィンガーとの間のクロストーク容量を制限するのに十分な幅を有するギャップによって前記固定感知フィンガーから離間される、
請求項1記載のトランスデューサ。 - 前記第1試験質量および前記第2試験質量の両者が中に配置される密封チャンバを形成するために、前記第2基板が前記第1基板に接続される、
請求項1記載のトランスデューサ。 - 加速度を感知するように適合された微小電子機械システム(MEMS)トランスデューサを製造する方法において、
前記加速度を感知するように適合された第1センサを形成するステップであって、
前記第1センサが第1表面、前記第1表面に可動に接続され、前記第1基板上に離間された状態で配置された第1試験質量、および前記第1表面に形成された第1固定電極を有するステップと、
前記加速度を感知するように適合された第2センサを形成するステップであって、
前記第2センサが、第2表面、前記第2表面に可動に接続され、前記第1表面上に離間された状態で配置された第2試験質量、および前記第2表面に形成された第2固定電極を有するステップと、
前記第1センサおよび前記第2センサを形成した後、前記第2表面が前記第1表面に向き合うように、かつ前記第2試験質量が第1試験質量に対面して配置されるように前記第2基板を前記第1基板に接続するステップと、
を含む方法。 - 前記第1センサを形成するステップが、前記第1基板の前記第1表面に第1アンカーシステムを形成するステップを含み、
前記第1アンカーシステムは前記試験質量に接続され、前記アンカーシステムは、第1方向の加速度に応答して、前記第1試験質量が前記第1基板の前記第1表面と実質的に平行移動することを可能にし、
前記第2センサを形成するステップが、前記第2基板の前記第2表面の第2アンカーシステムを形成するステップを含み、
第2方向の前記加速度に応答して、前記第2試験質量が前記回転軸周囲を回転することを可能にするために、前記第2アンカーシステムは、回転軸において前記第2試験質量に回転可能に接続され、前記第2方向は前記第2基板の前記第2表面と垂直である、
請求項14記載の方法。 - 前記第1センサを形成するステップが、前記第1基板の前記第1表面に第1アンカーシステムを形成するステップを含み、
前記第1アンカーシステムは前記第1試験質量に接続され、
前記第1アンカーシステムは、前記第1方向の前記加速度に応答して、前記第1試験質量が前記第1基板の前記第1表面と実質的に平行移動することを可能にし、
前記第1センサは第1感知範囲に亘って前記第1方向の前記加速度を検知するように適合され、
前記第2センサを形成するステップが、前記第2基板の前記第2表面に第2アンカーシステムを形成するステップを含み、
前記第2アンカーシステムは前記第2試験質量に接続され、
前記第2アンカーシステムは、前記第1方向の前記加速度に応答して、前記第2試験質量が前記第2基板の前記第2表面と実質的に平行に移動することを可能にし、
前記第2センサは、前記第1感知範囲と異なる第2感知範囲に亘って前記第1方向の加速度を検知するように適合される、
請求項14記載の方法。 - 前記第1試験質量および前記第2試験質量が配置された密封チャンバを形成するために、前記接続ステップが前記第2基板を前記第1基板に接続する、
請求項14記載の方法。 - 加速度を感知するように適合されたトランスデューサであって、
第1表面を有する第1基板と、
前記第1基板の前記第1表面から離間された第1試験質量と、
前記第1基板の前記第1表面に形成され、第1方向の前記加速度に応答して、前記第1試験質量が前記第1基板の第1表面と実質的に平行移動可能とするために、前記第1試験質量に接続された第1アンカーシステムと、
第2表面を有する第2基板と、
前記第2表面が前記第1表面に対面するように前記第2基板が前記第1基板に接続されることと、
前記第2基板の前記第2表面から離間された第2試験質量であって、前記第1試験質量に対面して配置された前記第2試験質量と、
第2基板の前記第2表面と垂直な第2方向の前記加速度に応答して、前記第2試験質量が回転軸周囲を回転することを可能にする第2試験質量に回転可能に接続される第2アンカーシステムと、
を備えたトランスデューサ。 - 前記第1アンカーシステムはさらに、前記第1方向および前記第2方向と直交な第3方向の加速度に応答して、前記第1試験質量が前記第1基板の前記第1表面と実質的に平行に移動することを可能にする、
請求項18記載のトランスデューサ。 - 前記トランスデューサはさらに、
前記第1試験質量と前記第2試験質量との間に配置された過移動停止部材を備え、
前記過移動停止部材は前記第1表面および前記第2表面の1つに非可動に接続され、
前記過移動停止部材は、前記第2方向における前記第1試験質量および前記第2試験質量の少なくとも1つの移動を制限するように適合される、
請求項18記載のトランスデューサ。
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US12/409,920 US8186221B2 (en) | 2009-03-24 | 2009-03-24 | Vertically integrated MEMS acceleration transducer |
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PCT/US2010/025579 WO2010110989A2 (en) | 2009-03-24 | 2010-02-26 | Vertically integrated mems acceleration transducer |
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CN102356324B (zh) | 2014-12-24 |
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US20100242600A1 (en) | 2010-09-30 |
US8186221B2 (en) | 2012-05-29 |
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