JP2012512426A5 - - Google Patents
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- JP2012512426A5 JP2012512426A5 JP2011540316A JP2011540316A JP2012512426A5 JP 2012512426 A5 JP2012512426 A5 JP 2012512426A5 JP 2011540316 A JP2011540316 A JP 2011540316A JP 2011540316 A JP2011540316 A JP 2011540316A JP 2012512426 A5 JP2012512426 A5 JP 2012512426A5
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- Prior art keywords
- scanning microscope
- stage
- controller
- sample
- area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000523 sample Substances 0.000 claims description 84
- 230000003287 optical effect Effects 0.000 claims description 37
- 230000007246 mechanism Effects 0.000 claims description 9
- 238000013519 translation Methods 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 2
- 238000003384 imaging method Methods 0.000 description 13
- 238000001514 detection method Methods 0.000 description 11
- 238000005259 measurement Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000003796 beauty Effects 0.000 description 5
- 201000009310 astigmatism Diseases 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- UNPLRYRWJLTVAE-UHFFFAOYSA-N Cloperastine hydrochloride Chemical compound Cl.C1=CC(Cl)=CC=C1C(C=1C=CC=CC=1)OCCN1CCCCC1 UNPLRYRWJLTVAE-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000747 cardiac effect Effects 0.000 description 2
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- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002906 microbiologic effect Effects 0.000 description 1
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- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP08305943.6 | 2008-12-15 | ||
| EP08305943 | 2008-12-15 | ||
| PCT/IB2009/055659 WO2010070553A1 (en) | 2008-12-15 | 2009-12-10 | Scanning microscope. |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012512426A JP2012512426A (ja) | 2012-05-31 |
| JP2012512426A5 true JP2012512426A5 (enExample) | 2015-01-29 |
| JP5722787B2 JP5722787B2 (ja) | 2015-05-27 |
Family
ID=41615824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011540316A Active JP5722787B2 (ja) | 2008-12-15 | 2009-12-10 | 走査型顕微鏡 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9684159B2 (enExample) |
| EP (1) | EP2376965B1 (enExample) |
| JP (1) | JP5722787B2 (enExample) |
| CN (1) | CN102246081B (enExample) |
| BR (1) | BRPI0917740A2 (enExample) |
| WO (1) | WO2010070553A1 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010027720A1 (de) * | 2010-04-14 | 2011-10-20 | Carl Zeiss Microlmaging Gmbh | Verfahren und Vorrichtungen zur Positions- und Kraftdetektion |
| US9488823B2 (en) * | 2012-06-07 | 2016-11-08 | Complete Genomics, Inc. | Techniques for scanned illumination |
| US9628676B2 (en) | 2012-06-07 | 2017-04-18 | Complete Genomics, Inc. | Imaging systems with movable scan mirrors |
| CN106770690B (zh) * | 2016-12-16 | 2023-05-16 | 贵州航天计量测试技术研究所 | 一种超声扫描显微镜成像分辨力特性校准装置及校准方法 |
| CN110582715B (zh) * | 2017-03-03 | 2022-04-29 | 雅普顿生物系统公司 | 具有加速跟踪的高速扫描系统 |
| CN111527438B (zh) * | 2017-11-30 | 2023-02-21 | 徕卡生物系统成像股份有限公司 | 冲击重新扫描系统 |
| DE102020108514A1 (de) * | 2019-03-28 | 2020-10-01 | Carl Zeiss Microscopy Gmbh | Verfahren zum Bestimmen eines Bildaufnahmefehlers |
| DE102020111786B4 (de) * | 2020-04-30 | 2023-08-31 | Till I.D. Gmbh | Verfahren und Mikroskopvorrichtung für die beschleunigte Mikroskopie großer Proben sowie Datenträger |
| CN115265624B (zh) * | 2022-08-12 | 2024-08-16 | 上海乂义实业有限公司 | 曲面探测器微扫超分辨系统 |
Family Cites Families (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6030409A (ja) | 1983-07-28 | 1985-02-16 | Honda Motor Co Ltd | 内燃機関の速度制限機構 |
| US4577940A (en) * | 1984-12-19 | 1986-03-25 | Allied Corporation | Moire microscope |
| US4948971A (en) | 1988-11-14 | 1990-08-14 | Amray Inc. | Vibration cancellation system for scanning electron microscopes |
| US5075562A (en) * | 1990-09-20 | 1991-12-24 | Eastman Kodak Company | Method and apparatus for absolute Moire distance measurements using a grating printed on or attached to a surface |
| US5075560A (en) * | 1990-09-20 | 1991-12-24 | Eastman Kodak Company | Moire distance measurements using a grating printed on or attached to a surface |
| US5307203A (en) | 1990-12-06 | 1994-04-26 | Tandem Scanning Corporation | Confocal tandem scanning reflected light microscope |
| US5677903A (en) | 1991-03-25 | 1997-10-14 | U.S. Phillips Corporation | Multi-layer information storage system with improved aberration correction |
| JP3053449B2 (ja) * | 1991-03-28 | 2000-06-19 | 株式会社ニデック | 表面検査装置 |
| US5448399A (en) * | 1992-03-13 | 1995-09-05 | Park Scientific Instruments | Optical system for scanning microscope |
| US5636025A (en) * | 1992-04-23 | 1997-06-03 | Medar, Inc. | System for optically measuring the surface contour of a part using more fringe techniques |
| USRE38113E1 (en) | 1993-04-02 | 2003-05-06 | Nikon Corporation | Method of driving mask stage and method of mask alignment |
| US6272235B1 (en) * | 1997-03-03 | 2001-08-07 | Bacus Research Laboratories, Inc. | Method and apparatus for creating a virtual microscope slide |
| DE19653413C2 (de) * | 1996-12-22 | 2002-02-07 | Stefan Hell | Rastermikroskop, bei dem eine Probe in mehreren Probenpunkten gleichzeitig optisch angeregt wird |
| DE19702752C2 (de) | 1997-01-27 | 2001-12-13 | Zeiss Carl Jena Gmbh | Ansteuersystem für einen Scannerantrieb |
| US6072625A (en) | 1997-02-03 | 2000-06-06 | Olympus Optical Co., Ltd. | Optical microscope apparatus |
| JPH11211732A (ja) * | 1998-01-27 | 1999-08-06 | Hitachi Constr Mach Co Ltd | 走査型プローブ顕微鏡 |
| US6185030B1 (en) | 1998-03-20 | 2001-02-06 | James W. Overbeck | Wide field of view and high speed scanning microscopy |
| US6426501B1 (en) * | 1998-05-27 | 2002-07-30 | Jeol Ltd. | Defect-review SEM, reference sample for adjustment thereof, method for adjustment thereof, and method of inspecting contact holes |
| JP3946899B2 (ja) * | 1999-03-26 | 2007-07-18 | 株式会社東芝 | エネルギービーム装置における光学系の調整方法 |
| US6320174B1 (en) * | 1999-11-16 | 2001-11-20 | Ikonisys Inc. | Composing microscope |
| US6711283B1 (en) * | 2000-05-03 | 2004-03-23 | Aperio Technologies, Inc. | Fully automatic rapid microscope slide scanner |
| GB2365994B (en) * | 2000-08-18 | 2002-10-30 | Marconi Comm Ltd | Tunable optical filter |
| TW498152B (en) | 2000-09-11 | 2002-08-11 | Olympus Optical Co | Confocal microscope |
| WO2002075370A2 (en) | 2001-03-19 | 2002-09-26 | Weinstein Ronald S | Miniaturized microscope array digital slide scanner |
| US7864369B2 (en) * | 2001-03-19 | 2011-01-04 | Dmetrix, Inc. | Large-area imaging by concatenation with array microscope |
| US6535280B1 (en) * | 2001-08-31 | 2003-03-18 | Advanced Micro Devices, Inc. | Phase-shift-moiré focus monitor |
| US6639201B2 (en) | 2001-11-07 | 2003-10-28 | Applied Materials, Inc. | Spot grid array imaging system |
| DE10156235A1 (de) * | 2001-11-15 | 2003-06-05 | Leica Microsystems | Verfahren zum Betreiben einer Stellvorrichtung und Scanmikroskop |
| US6958819B1 (en) * | 2002-04-04 | 2005-10-25 | Nanometrics Incorporated | Encoder with an alignment target |
| JP2004343222A (ja) * | 2003-05-13 | 2004-12-02 | Olympus Corp | 画像処理装置 |
| US7079256B2 (en) | 2003-08-09 | 2006-07-18 | Chian Chiu Li | Interferometric optical apparatus and method for measurements |
| JP4551071B2 (ja) | 2003-09-19 | 2010-09-22 | オリンパス株式会社 | 顕微鏡用電動ステージ制御システム、該制御装置、及び該制御方法 |
| WO2005057249A2 (en) * | 2003-12-02 | 2005-06-23 | The Arizona Board Of Regents On Behalf Of The University Of Arizona | Sub-diffraction limit resolution in microscopy |
| US7433256B2 (en) | 2004-04-28 | 2008-10-07 | Koninklijke Philips Electronics N.V. | Information carrier, and system for positioning such an information carrier in a reading and/or writing apparatus |
| US20060133657A1 (en) | 2004-08-18 | 2006-06-22 | Tripath Imaging, Inc. | Microscopy system having automatic and interactive modes for forming a magnified mosaic image and associated method |
| DE102004042913A1 (de) * | 2004-09-02 | 2006-03-30 | Westfälische-Wilhelms Universität Münster | Scanneranordnung und Verfahren zum optischen Abtasten eines Objektes |
| JP2006126145A (ja) * | 2004-11-01 | 2006-05-18 | Olympus Corp | 走査型プローブ顕微鏡用走査機構および走査型プローブ顕微鏡 |
| KR100628321B1 (ko) * | 2004-12-16 | 2006-09-27 | 한국전자통신연구원 | 마이크로 칼럼 전자빔 장치 |
| US20080279441A1 (en) * | 2005-03-29 | 2008-11-13 | Yuichiro Matsuo | Cell-Image Analysis Method, Cell-Image Analysis Program, Cell-Image Analysis Apparatus, Screening Method, and Screening Apparatus |
| DE102005018896A1 (de) * | 2005-04-22 | 2006-10-26 | Leica Microsystems Cms Gmbh | Verfahren zur Bestimmung des Lateralversatzes eines XYZ-Tisches |
| US7298495B2 (en) * | 2005-06-23 | 2007-11-20 | Lewis George C | System and method for positioning an object through use of a rotating laser metrology system |
| EP1949372A2 (en) | 2005-11-11 | 2008-07-30 | Koninklijke Philips Electronics N.V. | System and method for positioning an information carrier in a scanning apparatus |
| JP5562243B2 (ja) * | 2007-09-25 | 2014-07-30 | サントル ナショナル ドゥ ラ ルシェルシュ シアンティフィク | ナノスケール変形を測定する方法、デバイス及びシステム |
| JP5188846B2 (ja) * | 2008-03-10 | 2013-04-24 | 日本電子株式会社 | 走査型透過電子顕微鏡の収差補正装置及び収差補正方法 |
| WO2010033100A1 (en) * | 2008-09-18 | 2010-03-25 | Afshari Ali R | Probe alignment tool for the scanning probe microscope |
| WO2010111649A1 (en) * | 2009-03-26 | 2010-09-30 | Guy Kennedy | Low numerical aperture exclusion imaging |
-
2009
- 2009-12-10 US US13/139,551 patent/US9684159B2/en active Active
- 2009-12-10 EP EP09795564.5A patent/EP2376965B1/en active Active
- 2009-12-10 CN CN200980150194.0A patent/CN102246081B/zh active Active
- 2009-12-10 WO PCT/IB2009/055659 patent/WO2010070553A1/en not_active Ceased
- 2009-12-10 JP JP2011540316A patent/JP5722787B2/ja active Active
- 2009-12-10 BR BRPI0917740A patent/BRPI0917740A2/pt not_active Application Discontinuation
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