JP2012510175A - クリーンルームにおけるスパッタコーティングシステムへの基板ウエハ供給を反転する装置及び方法 - Google Patents
クリーンルームにおけるスパッタコーティングシステムへの基板ウエハ供給を反転する装置及び方法 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
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- C23C14/542—Controlling the film thickness or evaporation rate
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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Abstract
【解決手段】本発明は、特に、クリーンルームにおいて光起電性モジュールをコーティングする際に、スパッタコーティングシステムへの基板ウエハ供給を反転する装置及び方法に関する。本装置及び方法は、a)光起電性モジュールの基板ウエハ(19)を保持する輸送フレーム(11)と、b)輸送フレーム(11)をマウントし、回転させ、輸送する手段を有する回転装置と、c)回転装置をスパッタコーティングシステムに対して正確に整列させる手段と、d)スパッタプロセスを検査する検知装置(18)と、上記ステップを遂行するためのプログラムコードを有するコンピュータプログラムと、を備える。
【選択図】図1
Description
a)コーティングする基板を供給するための供給口と、コーティングした基板を排出するための排出口を有する真空チャンバと、
b)基板表面をコーティングする物理的気相成長ユニットと、
c)少なくとも1つのレーザビームで目下コーティングしている少なくとも1つの基板表面部分を照らすレーザ結晶化システムと、
d)供給口から排出口へとフィードスルー方向に基板を輸送するため、及びコーティングしている間に基板をフィードスルー方向に連続的又は非連続的に移動させるための輸送ユニット。
2 回転ユニットのフレーム
3 回転ユニットの垂直支持体
4 ターンテーブル
5 回転ユニットのギア機構
6 前方位置センサ(ローラ)
7 輸送ローラ
8 輸送ローラキャリア
9 輸送ローラドライブ(サーボモータ)
10 後方位置センサ(ローラ)
11 輸送フレーム
12 ガイドレール
13 後方固定シリンダ
14 前方固定シリンダ
15 ガイド/固定ユニットのヘッドフレーム
16 回転角度/非常停止センサ
17 回転ユニットのドライブ(サーボモータ)
18 基板ウエハの検知ユニット
19 基板ウエハ
20 回転フレームキャリア
21 供給チューブ
22 接点接続
23 ガイドウェイの整列を検知するセンサ
24 熱変形を検知するセンサ
25 ガイドウェイ
26 スパッタシステム
27 外側に伸びるガイドウェイ
Claims (11)
- クリーンルームにおいて組成の異なるスパッタ物質又は同一組成のスパッタ物質を繰り返し塗布するスパッタコーティングシステムへの基板ウエハ供給を反転する装置であって、
a)前記基板ウエハ(19)を保持する矩形状の輸送フレーム(11)と、
b)前記輸送フレーム(11)を回転させる手段及び異なるガイドウェイ(25、27)を通って前記輸送フレーム(11)を輸送する手段を有する回転ユニットと、
c)前記回転ユニットを前記スパッタコーティングシステムに対して正確に整列させる手段と、
d)スパッタプロセスを検査する検知ユニット(18)と、
e)上方領域左右にある後方固定シリンダ(13)及び前方固定シリンダ(14)と下方領域左右における2つの輸送ローラ(7)上へのマウントから構成され、前記輸送ローラ(7)の各々は専用のサーボドライブを有し、機械的に動く部分は飛散粒子が出ないように隔離されると共に摩滅に耐性のある材料から構成された前記輸送フレーム(11)をマウントする手段と、を備えたことを特徴とする装置。 - 前記輸送フレーム(11)を回転させる手段は、回転角度を検知するセンサ(16)と連結されたサーボモータ(17)を有することを特徴とする請求項1に記載の装置。
- 前記輸送フレーム(11)を輸送する手段は、下方領域に等間隔に前記輸送ローラ(7)が設けられた前記ガイドウェイ(25、27)を有し、
前記輸送ローラ(7)によるガイダンスは、上方領域に等間隔に配設された前記固定シリンダ(13、14)により補助されることを特徴とする請求項1又は請求項2に記載の装置。 - 前記回転ユニットを前記ガイドウェイ(25、27)の各々に対して正確に整列させる手段は、センサ(23、24)の測定値を基に前記回転ユニットのドライブ(17)の微調整により制御され、
前記センサ(23、24)は、更に前記ガイドウェイ(25)の熱変形を検知することを特徴とする請求項1乃至請求項3のいずれか一項に記載の装置。 - 前記基板ウエハ(19)の配置は、更にレーザ及び/又は対応するセンサによりモニタされることを特徴とする請求項1乃至請求項4のいずれか一項に記載の装置。
- クリーンルームにおいて組成の異なるスパッタ物質又は同一組成のスパッタ物質を繰り返し塗布するスパッタコーティングシステムへの基板ウエハ供給を反転する方法であって、
a)コーティングする前記基板ウエハ(19)は、輸送装置により矩形状の輸送フレーム(11)に搬送された後、回転ユニットに搬送されるステップと、
b)前記輸送フレーム(11)は、上方領域左右それぞれにおいて2つの固定シリンダ(13、14)により、及び下方領域左右それぞれにおける輸送ローラ(7)上へのマウントにより前記回転ユニットにマウントされるステップと、
c)前記輸送フレーム(11)は、前記回転ユニットのフレームに組み込まれたドライブ(17)により回転されるステップと、
d)前記輸送フレーム(11)は、ガイドウェイ(25、27)上を異なる方向にガイドする輸送ローラドライブ(9)により輸送されるステップと、
e)前記回転ユニットは、前記回転ユニットの前記ドライブ(17)を介してセンサ(23、24)により前記ガイドウェイ(25、27)に対して正確に整列されるステップと、
f)スパッタプロセスは検知ユニット(18)により検査され、前記検知ユニット(18)は前記回転ユニットにおいて前記輸送フレーム(11)の各々のレセプタクルに少なくとも存在し、前記検知ユニット(18)のスペーサ要素はスキャナ様式で動作する又は光学技術的に前記基板ウエハ(19)の全体領域を検査するステップと、を備えたことを特徴とする方法。 - 前記基板ウエハ(19)の位置は、更にレーザ及び/又は対応するセンサによりモニタされることを特徴とする請求項6に記載の方法。
- 機械的に動く部分は、クリーンルーム環境を得るために飛散粒子が出ないように隔離されると共に摩滅に耐性のある材料から構成されることを特徴とする請求項6又は請求項7に記載の方法。
- 前記回転ユニットは、例えば、光起電性モジュールのコーティングといったより大きなシステムの一部として、多くの更なるプロセスに対する中継所として働くことを特徴とする請求項6乃至請求項8のいずれか一項に記載の方法。
- プログラムがコンピュータにより遂行される場合、請求項6乃至請求項9のいずれか一項に記載の方法を実行するプログラムコードを備えたコンピュータプログラム。
- プログラムがコンピュータにより遂行される場合、請求項6乃至請求項9のいずれか一項に記載の方法を実行するコンピュータプログラムのプログラムコードを備えた機械可読キャリア。
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DE102008059794A DE102008059794B3 (de) | 2008-12-01 | 2008-12-01 | Verfahren und Vorrichtung zur Umkehr der Beschickung von Sputter-Beschichtungsanlagen in Reinräumen, sowie Computerprogramm zur Durchführung des Verfahrens und maschinenlesbarer Träger mit dem Programmcode |
DE102008059794.5 | 2008-12-01 | ||
PCT/DE2009/001680 WO2010063264A1 (de) | 2008-12-01 | 2009-11-26 | Verfahren und vorrichtung zur umkehr der beschickung von sputter-beschichtungsanlagen in reinräumen |
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JP5657376B2 (ja) * | 2010-12-28 | 2015-01-21 | キヤノンアネルバ株式会社 | 基板搬送装置 |
CN104711532B (zh) * | 2013-12-16 | 2018-02-06 | 湘潭宏大真空技术股份有限公司 | 一种真空镀膜生产线用旋转平台机构 |
CN104404466A (zh) * | 2014-12-26 | 2015-03-11 | 合肥京东方光电科技有限公司 | 磁控溅射镀膜方法及系统 |
CN109957778A (zh) * | 2017-12-14 | 2019-07-02 | 湘潭宏大真空技术股份有限公司 | 用于双面玻璃镀膜的传送旋转装置 |
CN217050388U (zh) * | 2022-03-09 | 2022-07-26 | 康宁股份有限公司 | 一种卡匣物流系统 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07235486A (ja) * | 1994-11-21 | 1995-09-05 | Canon Inc | デバイス製造方法 |
JP2006191039A (ja) * | 2005-01-05 | 2006-07-20 | Samsung Sdi Co Ltd | トレイ移送装置 |
JP2007126703A (ja) * | 2005-11-02 | 2007-05-24 | Dainippon Printing Co Ltd | 成膜装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2748026A (en) * | 1953-03-26 | 1956-05-29 | Libbey Owens Ford Glass Co | Method and apparatus for thermal evaporation |
US5400317A (en) * | 1993-04-01 | 1995-03-21 | Balzers Aktiengesellschaft | Method of coating a workpiece of a plastic material by a metal layer |
KR100327716B1 (ko) * | 1994-01-11 | 2002-06-27 | 노만 에이취. 폰드 | 진공처리시스템및진공처리시스템내에서의기판조작방법 |
EP0870850B1 (de) * | 1997-04-11 | 2002-09-18 | Leybold Systems GmbH | Verfahren und Vorrichtung zum Be- und Entladen einer evakuierbaren Behandlungskammer |
DE19715151A1 (de) * | 1997-04-11 | 1998-10-15 | Leybold Systems Gmbh | Verfahren zum Be- und Entladen einer evakuierbaren Behandlungskammer und Handlingsvorrichtung zur Durchführung des Verfahrens |
JP4564121B2 (ja) | 1999-12-15 | 2010-10-20 | 富士機械製造株式会社 | 電気部品装着システム |
JP4856308B2 (ja) * | 2000-12-27 | 2012-01-18 | キヤノンアネルバ株式会社 | 基板処理装置及び経由チャンバー |
CN1198483C (zh) | 2002-02-27 | 2005-04-20 | 光磊科技股份有限公司 | 具有吸湿薄膜的发光元件及形成吸湿薄膜的制作方法 |
DE10348281B4 (de) * | 2003-10-17 | 2007-06-06 | Applied Materials Gmbh & Co. Kg | Vakuum-Behandlungsanlage für ebene rechteckige oder quadratische Substrate |
DE10357609A1 (de) | 2003-12-10 | 2005-07-21 | Kuka Roboter Gmbh | Handhabungsgerät wie Industrieroboter und Verfahren zum Beeinflussen einer Umgebungsbedingung in einem solchen |
EP1840242B1 (de) * | 2006-03-29 | 2011-06-29 | Applied Materials GmbH & Co. KG | Vakuumtransportvorrichtung mit beweglicher Führungsschiene |
DE102007009924A1 (de) | 2007-02-27 | 2008-08-28 | Carl Zeiss Laser Optics Gmbh | Durchlaufbeschichtungsanlage, Verfahren zur Herstellung kristalliner Dünnschichten und Solarzellen sowie Solarzelle |
DE202008004228U1 (de) * | 2008-03-27 | 2008-05-29 | Grenzebach Maschinenbau Gmbh | Vorrichtung zur Fixierung und den Weitertransport stoßempfindlicher Platten in Sputter-Beschichtungsanlagen |
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- 2009-11-26 WO PCT/DE2009/001680 patent/WO2010063264A1/de active Application Filing
- 2009-11-26 KR KR1020117014528A patent/KR101280110B1/ko active IP Right Grant
- 2009-11-26 US US13/131,167 patent/US8747627B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07235486A (ja) * | 1994-11-21 | 1995-09-05 | Canon Inc | デバイス製造方法 |
JP2006191039A (ja) * | 2005-01-05 | 2006-07-20 | Samsung Sdi Co Ltd | トレイ移送装置 |
JP2007126703A (ja) * | 2005-11-02 | 2007-05-24 | Dainippon Printing Co Ltd | 成膜装置 |
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US8747627B2 (en) | 2014-06-10 |
KR101280110B1 (ko) | 2013-06-28 |
JP5328926B2 (ja) | 2013-10-30 |
US20110226612A1 (en) | 2011-09-22 |
KR20110098924A (ko) | 2011-09-02 |
CN102232043A (zh) | 2011-11-02 |
WO2010063264A1 (de) | 2010-06-10 |
CN102232043B (zh) | 2013-11-13 |
DE102008059794B3 (de) | 2010-04-01 |
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