JP2012501073A5 - - Google Patents
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- Publication number
- JP2012501073A5 JP2012501073A5 JP2011524215A JP2011524215A JP2012501073A5 JP 2012501073 A5 JP2012501073 A5 JP 2012501073A5 JP 2011524215 A JP2011524215 A JP 2011524215A JP 2011524215 A JP2011524215 A JP 2011524215A JP 2012501073 A5 JP2012501073 A5 JP 2012501073A5
- Authority
- JP
- Japan
- Prior art keywords
- spectral purity
- purity filter
- substrate
- infrared radiation
- antireflective coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003595 spectral effect Effects 0.000 claims 16
- 230000005855 radiation Effects 0.000 claims 10
- 239000006117 anti-reflective coating Substances 0.000 claims 8
- 239000000758 substrate Substances 0.000 claims 8
- 229910052799 carbon Inorganic materials 0.000 claims 4
- 239000000463 material Substances 0.000 claims 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 3
- 230000004888 barrier function Effects 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 2
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 claims 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13633108P | 2008-08-28 | 2008-08-28 | |
| US61/136,331 | 2008-08-28 | ||
| US19320208P | 2008-11-05 | 2008-11-05 | |
| US61/193,202 | 2008-11-05 | ||
| PCT/EP2009/005487 WO2010022839A2 (en) | 2008-08-28 | 2009-07-29 | Spectral purity filter and lithographic apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012501073A JP2012501073A (ja) | 2012-01-12 |
| JP2012501073A5 true JP2012501073A5 (https=) | 2012-09-13 |
| JP5439485B2 JP5439485B2 (ja) | 2014-03-12 |
Family
ID=41722000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011524215A Active JP5439485B2 (ja) | 2008-08-28 | 2009-07-29 | スペクトル純度フィルタ、リソグラフィ装置および放射源 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8665420B2 (https=) |
| JP (1) | JP5439485B2 (https=) |
| KR (1) | KR101668338B1 (https=) |
| CN (1) | CN102132214B (https=) |
| NL (1) | NL2003299A (https=) |
| WO (1) | WO2010022839A2 (https=) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10690823B2 (en) | 2007-08-12 | 2020-06-23 | Toyota Motor Corporation | Omnidirectional structural color made from metal and dielectric layers |
| US10870740B2 (en) | 2007-08-12 | 2020-12-22 | Toyota Jidosha Kabushiki Kaisha | Non-color shifting multilayer structures and protective coatings thereon |
| US10788608B2 (en) | 2007-08-12 | 2020-09-29 | Toyota Jidosha Kabushiki Kaisha | Non-color shifting multilayer structures |
| EP2550563A1 (en) | 2010-03-24 | 2013-01-30 | ASML Netherlands B.V. | Lithographic apparatus and spectral purity filter |
| DE102012202057B4 (de) * | 2012-02-10 | 2021-07-08 | Carl Zeiss Smt Gmbh | Projektionsobjektiv für EUV-Mikrolithographie, Folienelement und Verfahren zur Herstellung eines Projektionsobjektivs mit Folienelement |
| CN102798902A (zh) * | 2012-07-23 | 2012-11-28 | 中国科学院长春光学精密机械与物理研究所 | 一种提高极紫外光谱纯度的新型多层膜 |
| KR101812857B1 (ko) * | 2012-08-28 | 2017-12-27 | 가부시키가이샤 니콘 | 기판 지지 장치, 및 노광 장치 |
| DE102014204171A1 (de) * | 2014-03-06 | 2015-09-24 | Carl Zeiss Smt Gmbh | Optisches Element und optische Anordnung damit |
| DE102014204660A1 (de) * | 2014-03-13 | 2015-09-17 | Carl Zeiss Smt Gmbh | Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage |
| DE112015001639B4 (de) | 2014-04-01 | 2023-12-14 | Toyota Jidosha Kabushiki Kaisha | Nicht-farbverschiebende mehrschichtige strukturen |
| CN104020519A (zh) * | 2014-04-28 | 2014-09-03 | 中国科学院上海光学精密机械研究所 | 紫外薄膜滤光片 |
| CN104297820A (zh) * | 2014-09-26 | 2015-01-21 | 中国科学院长春光学精密机械与物理研究所 | 一种提高了极紫外光谱纯度及抗氧化性的多层膜 |
| CN104459835B (zh) * | 2014-12-24 | 2016-06-29 | 南京波长光电科技股份有限公司 | 一种红外玻璃gasir1增透膜及其制备方法 |
| DE102016110192A1 (de) * | 2015-07-07 | 2017-01-12 | Toyota Motor Engineering & Manufacturing North America, Inc. | Omnidirektionale rote strukturelle Farbe hoher Chroma mit Halbleiterabsorberschicht |
| DE102015213253A1 (de) | 2015-07-15 | 2017-01-19 | Carl Zeiss Smt Gmbh | Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage |
| WO2020083578A1 (en) * | 2018-10-22 | 2020-04-30 | Asml Netherlands B.V. | Radiation filter for a radiation sensor |
| TW202119136A (zh) * | 2019-10-18 | 2021-05-16 | 美商應用材料股份有限公司 | 多層反射器及其製造和圖案化之方法 |
| DE102022205302A1 (de) * | 2022-05-25 | 2023-11-30 | Carl Zeiss Smt Gmbh | Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage |
| US12442104B2 (en) | 2023-04-20 | 2025-10-14 | Applied Materials, Inc. | Nanocrystalline diamond with amorphous interfacial layer |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5086443A (en) * | 1990-08-03 | 1992-02-04 | The United States Of America As Represented By The United States Department Of Energy | Background-reducing x-ray multilayer mirror |
| JPH06174897A (ja) | 1992-12-10 | 1994-06-24 | Nippon Telegr & Teleph Corp <Ntt> | 多層膜ｘ線ミラーおよび多層膜ｘ線光学系 |
| US5962854A (en) * | 1996-06-12 | 1999-10-05 | Ishizuka Electronics Corporation | Infrared sensor and infrared detector |
| US7515336B2 (en) * | 2001-12-21 | 2009-04-07 | Bose Corporation | Selective reflecting |
| JP4458330B2 (ja) * | 2003-12-26 | 2010-04-28 | キヤノン株式会社 | 光源ユニットの多層膜ミラーを交換する方法 |
| US7262412B2 (en) * | 2004-12-10 | 2007-08-28 | L-3 Communications Corporation | Optically blocked reference pixels for focal plane arrays |
| JP2006173490A (ja) * | 2004-12-17 | 2006-06-29 | Nikon Corp | 光学素子及びこれを用いた投影露光装置 |
| US7196343B2 (en) | 2004-12-30 | 2007-03-27 | Asml Netherlands B.V. | Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby |
| JP4591686B2 (ja) * | 2005-02-03 | 2010-12-01 | 株式会社ニコン | 多層膜反射鏡 |
| US7372623B2 (en) * | 2005-03-29 | 2008-05-13 | Asml Netherlands B.V. | Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby |
| US7336416B2 (en) | 2005-04-27 | 2008-02-26 | Asml Netherlands B.V. | Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method |
| EP1744187A1 (en) * | 2005-07-15 | 2007-01-17 | Vrije Universiteit Brussel | Folded radial brewster polariser |
| JP2007088237A (ja) * | 2005-09-22 | 2007-04-05 | Nikon Corp | 多層膜反射鏡及びｅｕｖ露光装置 |
| US7736820B2 (en) * | 2006-05-05 | 2010-06-15 | Asml Netherlands B.V. | Anti-reflection coating for an EUV mask |
| NL1036469A1 (nl) * | 2008-02-27 | 2009-08-31 | Asml Netherlands Bv | Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby. |
| JP2010272677A (ja) * | 2009-05-21 | 2010-12-02 | Nikon Corp | 光学素子、露光装置及びデバイス製造方法 |
-
2009
- 2009-07-28 NL NL2003299A patent/NL2003299A/en not_active Application Discontinuation
- 2009-07-29 CN CN200980133185.0A patent/CN102132214B/zh active Active
- 2009-07-29 WO PCT/EP2009/005487 patent/WO2010022839A2/en not_active Ceased
- 2009-07-29 US US13/060,581 patent/US8665420B2/en not_active Expired - Fee Related
- 2009-07-29 KR KR1020117007168A patent/KR101668338B1/ko active Active
- 2009-07-29 JP JP2011524215A patent/JP5439485B2/ja active Active
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