JP2012227432A - 半導体装置 - Google Patents
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Abstract
【解決手段】GaNを用いたHEMTが形成されたチップ30と、前記チップを搭載する導電性のステージ11と、前記ステージと前記HEMTのソースとに電気的に接続されたソースリード12と、前記HEMTのゲートに電気的に接続されたゲートリード14と、前記HEMTのドレインに電気的に接続されたドレインリード13と、を具備し、前記ソースリード、前記ドレインリードおよび前記ゲートリードの順に配列されている半導体装置。
【選択図】図6
Description
付記1:
GaNを用いたHEMTが形成されたチップと、前記チップを搭載する導電性のステージと、前記ステージと前記HEMTのソースとに電気的に接続されたソースリードと、前記HEMTのゲートに電気的に接続されたゲートリードと、前記HEMTのドレインに電気的に接続されたドレインリードと、を具備し、前記ソースリード、前記ドレインリードおよび前記ゲートリードの順に配列されていることを特徴とする半導体装置。
付記2:
前記ソースリード、前記ゲートリードおよび前記ドレインリードは、前記ステージに対し同じ方向に引き出されていることを特徴とする付記1記載の半導体装置。
付記3:
前記チップは、基板上に形成された半導体層と、前記半導体層上に形成された前記ソース、前記ゲートおよび前記ドレインと、を備え、前記ステージ上に前記基板が搭載されていることを特徴とする付記1または2記載の半導体装置。
付記4:
前記ソースリードと前記ステージとは、一体に形成されていることを特徴とする付記1から3のいずれか一項記載の半導体装置。
付記5:
前記チップは、前記チップの表面に形成された複数のソースパッドを備え、前記複数のソースパッドは、前記ソースリードに電気的に接続されていることを特徴とする付記1から4のいずれか一項記載の半導体装置。
付記6:前記チップは、ダイ付け材を用い前記ステージに搭載され、前記複数のソースパッドの少なくとも一つは、ボンディングワイヤを用い前記ステージに電気的に接続されており、前記ボンディングワイヤが接続された前記ステージの領域と、前記チップが搭載された前記ステージの領域との間の前記ステージの上面には、凸部または凹部が形成されていることを特徴とする付記5記載の半導体装置。
付記7:
前記複数のソースパッドのうち少なくとも1つは、ボンディングワイヤを用い前記ソースリードに電気的に接続され、前記複数のソースパッドのうち他のソースパッドはボンディングワイヤを用い前記ステージに電気的に接続されていることを特徴とする付記5記載の半導体装置。
付記8:
前記チップおよびステージを封止する樹脂を具備することを特徴とする付記1から7のいずれか一項記載の半導体装置。
11 ステージ
12 ソースリード
13 ドレインリード
14 ゲートリード
18 樹脂
30 チップ
31 基板
32 バッファ層
33 GaN層
34 AlGaN層
35 ソース電極
36 ゲート電極
37 ドレイン電極
38 ソースパッド
39 ゲートパッド
40 ドレインパッド
22、23 ボンディングワイヤ
60 ダイ付け材
70、72 領域
Claims (6)
- GaNを用いたHEMTが形成されたチップと、
前記チップを搭載する導電性のステージと、
前記ステージと前記HEMTのソースとに電気的に接続されたソースリードと、
前記HEMTのゲートに電気的に接続されたゲートリードと、
前記HEMTのドレインに電気的に接続されたドレインリードと、
を具備し、
前記ソースリード、前記ドレインリードおよび前記ゲートリードの順に配列されていることを特徴とする半導体装置。 - 前記ソースリード、前記ゲートリードおよび前記ドレインリードは、前記ステージに対し同じ方向に引き出されていることを特徴とする請求項1記載の半導体装置。
- 前記チップは、基板上に形成された半導体層と、前記半導体層上に形成された前記ソース、前記ゲートおよび前記ドレインと、を備え、
前記ステージ上に前記基板が搭載されていることを特徴とする請求項1または2記載の半導体装置。 - 前記ソースリードと前記ステージとは、一体に形成されていることを特徴とする請求項1から3のいずれか一項記載の半導体装置。
- 前記チップは、前記チップの表面に形成された複数のソースパッドを備え、
前記複数のソースパッドは、前記ソースリードに電気的に接続されていることを特徴とする請求項1から4のいずれか一項記載の半導体装置。 - 前記チップは、ダイ付け材を用い前記ステージに搭載され、
前記複数のソースパッドの少なくとも一つは、ボンディングワイヤを用い前記ステージに電気的に接続されており、
前記ボンディングワイヤが接続された前記ステージの領域と、前記チップが搭載された前記ステージの領域との間の前記ステージの上面には、凸部または凹部が形成されていることを特徴とする請求項5記載の半導体装置。
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JP2011095292A JP5815976B2 (ja) | 2011-04-21 | 2011-04-21 | 半導体装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104347579A (zh) * | 2013-07-31 | 2015-02-11 | 瑞萨电子株式会社 | 半导体装置 |
WO2023237064A1 (zh) * | 2022-06-09 | 2023-12-14 | 珠海镓未来科技有限公司 | 用于功率氮化镓hemt器件的4引脚to-247封装结构 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS604246A (ja) * | 1983-06-23 | 1985-01-10 | Toshiba Corp | リ−ドフレ−ム |
JP2002261187A (ja) * | 2000-12-28 | 2002-09-13 | Hitachi Ltd | 半導体装置 |
JP2003258179A (ja) * | 2002-02-28 | 2003-09-12 | Sanyo Electric Co Ltd | 半導体装置およびその製造方法 |
JP2008177588A (ja) * | 2008-02-12 | 2008-07-31 | Renesas Technology Corp | 半導体装置 |
JP2012109344A (ja) * | 2010-11-16 | 2012-06-07 | Rohm Co Ltd | 窒化物半導体素子および窒化物半導体パッケージ |
JP2012109345A (ja) * | 2010-11-16 | 2012-06-07 | Rohm Co Ltd | 窒化物半導体素子および窒化物半導体パッケージ |
JP2012190936A (ja) * | 2011-03-09 | 2012-10-04 | Sharp Corp | 半導体装置のデバイス実装構造 |
-
2011
- 2011-04-21 JP JP2011095292A patent/JP5815976B2/ja not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS604246A (ja) * | 1983-06-23 | 1985-01-10 | Toshiba Corp | リ−ドフレ−ム |
JP2002261187A (ja) * | 2000-12-28 | 2002-09-13 | Hitachi Ltd | 半導体装置 |
JP2003258179A (ja) * | 2002-02-28 | 2003-09-12 | Sanyo Electric Co Ltd | 半導体装置およびその製造方法 |
JP2008177588A (ja) * | 2008-02-12 | 2008-07-31 | Renesas Technology Corp | 半導体装置 |
JP2012109344A (ja) * | 2010-11-16 | 2012-06-07 | Rohm Co Ltd | 窒化物半導体素子および窒化物半導体パッケージ |
JP2012109345A (ja) * | 2010-11-16 | 2012-06-07 | Rohm Co Ltd | 窒化物半導体素子および窒化物半導体パッケージ |
JP2012190936A (ja) * | 2011-03-09 | 2012-10-04 | Sharp Corp | 半導体装置のデバイス実装構造 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104347579A (zh) * | 2013-07-31 | 2015-02-11 | 瑞萨电子株式会社 | 半导体装置 |
JP2015032600A (ja) * | 2013-07-31 | 2015-02-16 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
US9793196B2 (en) | 2013-07-31 | 2017-10-17 | Renesas Electronics Corporation | Semiconductor device |
WO2023237064A1 (zh) * | 2022-06-09 | 2023-12-14 | 珠海镓未来科技有限公司 | 用于功率氮化镓hemt器件的4引脚to-247封装结构 |
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