JP2012206020A - 塗布液塗布方法および塗布装置 - Google Patents

塗布液塗布方法および塗布装置 Download PDF

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Publication number
JP2012206020A
JP2012206020A JP2011073770A JP2011073770A JP2012206020A JP 2012206020 A JP2012206020 A JP 2012206020A JP 2011073770 A JP2011073770 A JP 2011073770A JP 2011073770 A JP2011073770 A JP 2011073770A JP 2012206020 A JP2012206020 A JP 2012206020A
Authority
JP
Japan
Prior art keywords
coating liquid
branch
flow rate
coating
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2011073770A
Other languages
English (en)
Japanese (ja)
Inventor
Satoshi Suzuki
聡 鈴木
Hiroshi Nishimuta
浩史 西牟田
Junshi Hashimoto
純志 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP2011073770A priority Critical patent/JP2012206020A/ja
Priority to KR1020110092926A priority patent/KR101252971B1/ko
Priority to TW101107278A priority patent/TWI458023B/zh
Publication of JP2012206020A publication Critical patent/JP2012206020A/ja
Abandoned legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP2011073770A 2011-03-30 2011-03-30 塗布液塗布方法および塗布装置 Abandoned JP2012206020A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011073770A JP2012206020A (ja) 2011-03-30 2011-03-30 塗布液塗布方法および塗布装置
KR1020110092926A KR101252971B1 (ko) 2011-03-30 2011-09-15 도포액 도포 방법 및 도포 장치
TW101107278A TWI458023B (zh) 2011-03-30 2012-03-05 Coating liquid coating method and coating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011073770A JP2012206020A (ja) 2011-03-30 2011-03-30 塗布液塗布方法および塗布装置

Publications (1)

Publication Number Publication Date
JP2012206020A true JP2012206020A (ja) 2012-10-25

Family

ID=47186297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011073770A Abandoned JP2012206020A (ja) 2011-03-30 2011-03-30 塗布液塗布方法および塗布装置

Country Status (3)

Country Link
JP (1) JP2012206020A (zh)
KR (1) KR101252971B1 (zh)
TW (1) TWI458023B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012206021A (ja) * 2011-03-30 2012-10-25 Dainippon Screen Mfg Co Ltd 塗布装置および塗布液塗布方法
TWI777287B (zh) * 2016-03-30 2022-09-11 日商東京威力科創股份有限公司 基板處理裝置及其調整方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0587532U (ja) * 1992-04-24 1993-11-26 石川島播磨重工業株式会社 流量校正用サンプリング装置
JP2002090189A (ja) * 2000-09-18 2002-03-27 Toshiba Corp バルブの流量特性測定装置および流量特性測定方法
JP2009045574A (ja) * 2007-08-21 2009-03-05 Dainippon Screen Mfg Co Ltd 流量設定方法および塗布装置
JP2010201318A (ja) * 2009-03-02 2010-09-16 Dainippon Screen Mfg Co Ltd 流量設定方法および塗布装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3374807B2 (ja) * 1999-10-19 2003-02-10 松下電器産業株式会社 ディスプレイパネル及びその製造方法
JP2002157958A (ja) 2001-09-04 2002-05-31 Matsushita Electric Ind Co Ltd ディスプレイパネル及びその製造方法
JP2007098348A (ja) 2005-10-07 2007-04-19 Toshiba Components Co Ltd 液体塗布装置用マルチノズル及び液体塗布装置
JP5069550B2 (ja) * 2007-05-17 2012-11-07 大日本スクリーン製造株式会社 塗布装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0587532U (ja) * 1992-04-24 1993-11-26 石川島播磨重工業株式会社 流量校正用サンプリング装置
JP2002090189A (ja) * 2000-09-18 2002-03-27 Toshiba Corp バルブの流量特性測定装置および流量特性測定方法
JP2009045574A (ja) * 2007-08-21 2009-03-05 Dainippon Screen Mfg Co Ltd 流量設定方法および塗布装置
JP2010201318A (ja) * 2009-03-02 2010-09-16 Dainippon Screen Mfg Co Ltd 流量設定方法および塗布装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012206021A (ja) * 2011-03-30 2012-10-25 Dainippon Screen Mfg Co Ltd 塗布装置および塗布液塗布方法
TWI777287B (zh) * 2016-03-30 2022-09-11 日商東京威力科創股份有限公司 基板處理裝置及其調整方法

Also Published As

Publication number Publication date
KR20120111879A (ko) 2012-10-11
TW201243963A (en) 2012-11-01
TWI458023B (zh) 2014-10-21
KR101252971B1 (ko) 2013-04-15

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