JP2012197467A5 - - Google Patents
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- Publication number
- JP2012197467A5 JP2012197467A5 JP2011060963A JP2011060963A JP2012197467A5 JP 2012197467 A5 JP2012197467 A5 JP 2012197467A5 JP 2011060963 A JP2011060963 A JP 2011060963A JP 2011060963 A JP2011060963 A JP 2011060963A JP 2012197467 A5 JP2012197467 A5 JP 2012197467A5
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- substrate
- evaporation source
- evaporation
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 claims description 192
- 230000008020 evaporation Effects 0.000 claims description 188
- 238000007740 vapor deposition Methods 0.000 claims description 150
- 238000009792 diffusion process Methods 0.000 claims description 129
- 239000000758 substrate Substances 0.000 claims description 114
- 239000000463 material Substances 0.000 claims description 58
- 239000002245 particle Substances 0.000 claims description 39
- 230000015572 biosynthetic process Effects 0.000 claims description 30
- 238000000151 deposition Methods 0.000 claims description 26
- 230000008021 deposition Effects 0.000 claims description 25
- 238000009434 installation Methods 0.000 claims description 14
- 230000007246 mechanism Effects 0.000 claims description 14
- 229910001220 stainless steel Inorganic materials 0.000 claims description 11
- 239000010935 stainless steel Substances 0.000 claims description 11
- 230000000903 blocking effect Effects 0.000 claims description 8
- 239000012212 insulator Substances 0.000 claims description 7
- 230000007480 spreading Effects 0.000 claims description 5
- 238000003892 spreading Methods 0.000 claims description 5
- 239000011368 organic material Substances 0.000 claims description 4
- 229910001374 Invar Inorganic materials 0.000 claims description 3
- 238000010276 construction Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 230000008859 change Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 9
- 238000006073 displacement reaction Methods 0.000 description 7
- 239000010410 layer Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 230000008646 thermal stress Effects 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 239000002826 coolant Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 1
- 238000009125 cardiac resynchronization therapy Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011060963A JP5745895B2 (ja) | 2011-03-18 | 2011-03-18 | 蒸着装置並びに蒸着方法 |
| PCT/JP2012/053940 WO2012127957A1 (ja) | 2011-03-18 | 2012-02-20 | 蒸着装置並びに蒸着方法 |
| TW101108129A TW201250026A (en) | 2011-03-18 | 2012-03-09 | Vapor-deposition device and vapor-deposition method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011060963A JP5745895B2 (ja) | 2011-03-18 | 2011-03-18 | 蒸着装置並びに蒸着方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012197467A JP2012197467A (ja) | 2012-10-18 |
| JP2012197467A5 true JP2012197467A5 (https=) | 2014-05-01 |
| JP5745895B2 JP5745895B2 (ja) | 2015-07-08 |
Family
ID=46879120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011060963A Active JP5745895B2 (ja) | 2011-03-18 | 2011-03-18 | 蒸着装置並びに蒸着方法 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5745895B2 (https=) |
| TW (1) | TW201250026A (https=) |
| WO (1) | WO2012127957A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5827965B2 (ja) * | 2013-02-05 | 2015-12-02 | シャープ株式会社 | 表示装置の製造方法 |
| WO2014203632A1 (ja) * | 2013-06-21 | 2014-12-24 | シャープ株式会社 | 有機エレクトロルミネッセンス素子の製造方法及び有機エレクトロルミネッセンス表示装置 |
| JP7188973B2 (ja) * | 2018-10-15 | 2022-12-13 | キヤノントッキ株式会社 | 成膜装置、製造システム、有機ｅｌパネルの製造システム、成膜方法、及び有機ｅｌ素子の製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004353084A (ja) * | 2003-05-08 | 2004-12-16 | Sanyo Electric Co Ltd | 蒸発装置の固定部材 |
| JP5328726B2 (ja) * | 2009-08-25 | 2013-10-30 | 三星ディスプレイ株式會社 | 薄膜蒸着装置及びこれを利用した有機発光ディスプレイ装置の製造方法 |
| US8894458B2 (en) * | 2010-04-28 | 2014-11-25 | Samsung Display Co., Ltd. | Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method |
| KR101483354B1 (ko) * | 2010-05-18 | 2015-01-15 | 샤프 가부시키가이샤 | 유기 el 소자의 제조 방법 및 제조 장치 |
-
2011
- 2011-03-18 JP JP2011060963A patent/JP5745895B2/ja active Active
-
2012
- 2012-02-20 WO PCT/JP2012/053940 patent/WO2012127957A1/ja not_active Ceased
- 2012-03-09 TW TW101108129A patent/TW201250026A/zh unknown
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