JP2012182172A - 記憶素子および記憶装置 - Google Patents

記憶素子および記憶装置 Download PDF

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Publication number
JP2012182172A
JP2012182172A JP2011042174A JP2011042174A JP2012182172A JP 2012182172 A JP2012182172 A JP 2012182172A JP 2011042174 A JP2011042174 A JP 2011042174A JP 2011042174 A JP2011042174 A JP 2011042174A JP 2012182172 A JP2012182172 A JP 2012182172A
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JP
Japan
Prior art keywords
layer
memory
ion source
electrode
resistance
Prior art date
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Ceased
Application number
JP2011042174A
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English (en)
Japanese (ja)
Other versions
JP2012182172A5 (enExample
Inventor
Shuichiro Yasuda
周一郎 保田
Tetsuya Mizuguchi
徹也 水口
Masayuki Shimuta
雅之 紫牟田
Katsuhisa Araya
勝久 荒谷
Kazuhiro Oba
和博 大場
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2011042174A priority Critical patent/JP2012182172A/ja
Priority to US13/370,428 priority patent/US8796657B2/en
Priority to CN2012100413429A priority patent/CN102683348A/zh
Publication of JP2012182172A publication Critical patent/JP2012182172A/ja
Publication of JP2012182172A5 publication Critical patent/JP2012182172A5/ja
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0007—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising metal oxide memory material, e.g. perovskites
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
    • H10B63/82—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays the switching components having a common active material layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/20—Multistable switching devices, e.g. memristors
    • H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
    • H10N70/245—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies the species being metal cations, e.g. programmable metallization cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/821—Device geometry
    • H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/841—Electrodes
    • H10N70/8416—Electrodes adapted for supplying ionic species
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/881—Switching materials
    • H10N70/883—Oxides or nitrides
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
    • G11C2213/50—Resistive cell structure aspects
    • G11C2213/55—Structure including two electrodes, a memory active layer and at least two other layers which can be a passive or source or reservoir layer or a less doped memory active layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
    • G11C2213/50—Resistive cell structure aspects
    • G11C2213/56—Structure including two electrodes, a memory active layer and a so called passive or source or reservoir layer which is NOT an electrode, wherein the passive or source or reservoir layer is a source of ions which migrate afterwards in the memory active layer to be only trapped there, to form conductive filaments there or to react with the material of the memory active layer in redox way

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Semiconductor Memories (AREA)
JP2011042174A 2011-02-28 2011-02-28 記憶素子および記憶装置 Ceased JP2012182172A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011042174A JP2012182172A (ja) 2011-02-28 2011-02-28 記憶素子および記憶装置
US13/370,428 US8796657B2 (en) 2011-02-28 2012-02-10 Memory element and memory device
CN2012100413429A CN102683348A (zh) 2011-02-28 2012-02-21 存储器元件和存储器设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011042174A JP2012182172A (ja) 2011-02-28 2011-02-28 記憶素子および記憶装置

Publications (2)

Publication Number Publication Date
JP2012182172A true JP2012182172A (ja) 2012-09-20
JP2012182172A5 JP2012182172A5 (enExample) 2014-03-20

Family

ID=46718902

Family Applications (1)

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JP2011042174A Ceased JP2012182172A (ja) 2011-02-28 2011-02-28 記憶素子および記憶装置

Country Status (3)

Country Link
US (1) US8796657B2 (enExample)
JP (1) JP2012182172A (enExample)
CN (1) CN102683348A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014087784A1 (ja) * 2012-12-03 2014-06-12 ソニー株式会社 記憶素子および記憶装置
WO2014103691A1 (ja) * 2012-12-25 2014-07-03 ソニー株式会社 記憶素子および記憶装置
JP2016517634A (ja) * 2013-03-15 2016-06-16 アデスト テクノロジー コーポレーション 半金属及び／又は半導体の電極を備える不揮発性メモリ

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6162931B2 (ja) * 2012-06-19 2017-07-12 ソニーセミコンダクタソリューションズ株式会社 記憶素子および記憶装置
US20140264224A1 (en) * 2013-03-14 2014-09-18 Intermolecular, Inc. Performance Enhancement of Forming-Free ReRAM Devices Using 3D Nanoparticles
US9111941B2 (en) * 2013-03-15 2015-08-18 Globalfoundries Singapore Pte. Ltd. Non-volatile memory device with TSI/TSV application
WO2014193371A1 (en) 2013-05-29 2014-12-04 Hewlett-Packard Development Company, L.P. Writable device based on alternating current
CN108091760B (zh) 2016-11-23 2019-11-22 清华大学 调控含氢过渡金属氧化物相变的方法
CN108091870B (zh) 2016-11-23 2021-02-26 清华大学 含氢过渡金属氧化物、制备方法及原电池
CN108091759B (zh) 2016-11-23 2019-07-09 清华大学 相变电子器件
CN108091913B (zh) 2016-11-23 2020-01-21 清华大学 固态燃料电池及固态电解质的制备方法
US10553646B2 (en) * 2018-06-28 2020-02-04 Microsemi Soc Corp. Circuit and layout for resistive random-access memory arrays

Citations (9)

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Publication number Priority date Publication date Assignee Title
US20090039332A1 (en) * 2007-08-09 2009-02-12 Taiwan Semiconductor Manufacturing Company, Ltd. Resistive non-volatile memory device
JP2009049322A (ja) * 2007-08-22 2009-03-05 Sony Corp 記憶素子および記憶装置
JP2009135370A (ja) * 2007-12-03 2009-06-18 Panasonic Corp 不揮発性記憶素子およびその製造方法、並びにその不揮発性記憶素子を用いた不揮発性半導体装置
US20090194764A1 (en) * 2008-01-07 2009-08-06 Lee Jung-Hyun Multi-layer storage node, resistive random access memory device including a multi-layer storage node and methods of manufacturing the same
JP2010015662A (ja) * 2008-07-07 2010-01-21 Panasonic Corp 抵抗変化型不揮発性記憶装置
JP2010062247A (ja) * 2008-09-02 2010-03-18 Sony Corp 記憶素子および記憶装置
WO2010029634A1 (ja) * 2008-09-11 2010-03-18 株式会社 東芝 抵抗変化素子及び情報記録再生装置
WO2010038423A1 (ja) * 2008-10-01 2010-04-08 パナソニック株式会社 不揮発性記憶素子並びにそれを用いた不揮発性記憶装置
WO2010064446A1 (ja) * 2008-12-04 2010-06-10 パナソニック株式会社 不揮発性記憶素子及び不揮発性記憶装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4815804B2 (ja) 2005-01-11 2011-11-16 ソニー株式会社 記憶素子及び記憶装置
FR2895531B1 (fr) * 2005-12-23 2008-05-09 Commissariat Energie Atomique Procede ameliore de realisation de cellules memoires de type pmc
JP5088036B2 (ja) 2007-08-06 2012-12-05 ソニー株式会社 記憶素子および記憶装置
JP4466738B2 (ja) * 2008-01-09 2010-05-26 ソニー株式会社 記憶素子および記憶装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090039332A1 (en) * 2007-08-09 2009-02-12 Taiwan Semiconductor Manufacturing Company, Ltd. Resistive non-volatile memory device
JP2009049322A (ja) * 2007-08-22 2009-03-05 Sony Corp 記憶素子および記憶装置
JP2009135370A (ja) * 2007-12-03 2009-06-18 Panasonic Corp 不揮発性記憶素子およびその製造方法、並びにその不揮発性記憶素子を用いた不揮発性半導体装置
US20090194764A1 (en) * 2008-01-07 2009-08-06 Lee Jung-Hyun Multi-layer storage node, resistive random access memory device including a multi-layer storage node and methods of manufacturing the same
JP2010015662A (ja) * 2008-07-07 2010-01-21 Panasonic Corp 抵抗変化型不揮発性記憶装置
JP2010062247A (ja) * 2008-09-02 2010-03-18 Sony Corp 記憶素子および記憶装置
WO2010029634A1 (ja) * 2008-09-11 2010-03-18 株式会社 東芝 抵抗変化素子及び情報記録再生装置
WO2010038423A1 (ja) * 2008-10-01 2010-04-08 パナソニック株式会社 不揮発性記憶素子並びにそれを用いた不揮発性記憶装置
WO2010064446A1 (ja) * 2008-12-04 2010-06-10 パナソニック株式会社 不揮発性記憶素子及び不揮発性記憶装置

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014087784A1 (ja) * 2012-12-03 2014-06-12 ソニー株式会社 記憶素子および記憶装置
KR20150093149A (ko) * 2012-12-03 2015-08-17 소니 주식회사 기억 소자 및 기억 장치
JPWO2014087784A1 (ja) * 2012-12-03 2017-01-05 ソニー株式会社 記憶素子および記憶装置
US9761796B2 (en) 2012-12-03 2017-09-12 Sony Corporation Storage device and storage unit with ion source layer and resistance change layer
KR102133615B1 (ko) * 2012-12-03 2020-07-13 소니 세미컨덕터 솔루션즈 가부시키가이샤 기억 소자 및 기억 장치
WO2014103691A1 (ja) * 2012-12-25 2014-07-03 ソニー株式会社 記憶素子および記憶装置
JPWO2014103691A1 (ja) * 2012-12-25 2017-01-12 ソニー株式会社 記憶素子および記憶装置
US10418416B2 (en) 2012-12-25 2019-09-17 Sony Semiconductor Solutions Corporation Memory device and memory unit
US10879312B2 (en) 2012-12-25 2020-12-29 Sony Corporation Memory device and memory unit
JP2016517634A (ja) * 2013-03-15 2016-06-16 アデスト テクノロジー コーポレーション 半金属及び／又は半導体の電極を備える不揮発性メモリ

Also Published As

Publication number Publication date
US8796657B2 (en) 2014-08-05
CN102683348A (zh) 2012-09-19
US20120218808A1 (en) 2012-08-30

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