JP2012181908A - 積層体、および積層体を作製する方法 - Google Patents
積層体、および積層体を作製する方法 Download PDFInfo
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- 238000004544 sputter deposition Methods 0.000 claims description 80
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Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
- G11B5/82—Disk carriers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/676—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having magnetic layers separated by a nonmagnetic layer, e.g. antiferromagnetic layer, Cu layer or coupling layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7369—Two or more non-magnetic underlayers, e.g. seed layers or barrier layers
- G11B5/737—Physical structure of underlayer, e.g. texture
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
Abstract
【解決手段】磁気ゼロ層(140,240)は非磁性であるか、または飽和磁束密度(BS)が約100emu/cc未満である。磁気ゼロ層(140,240)および磁性層(150,242)は、非磁性分離体によって囲まれる粒子を含む。磁気ゼロ層(140,240)は、格子不整合が約4%未満である、中間層(130,238)と磁性層(150,242)との間のコヒーレントな界面を設ける。
【選択図】図2
Description
積層体は、結晶配向中間層と磁性層との間に介在する磁気ゼロ層を含む。磁気ゼロ層は、非磁性であるか、または飽和磁束密度が低い磁性層(たとえばBSが約100emu/cc未満の層)であり、かつ非磁性分離体によって分離される粒子を備える。磁性層は、非磁性分離体によって分離される強磁性粒子を含む。磁気ゼロ層にわたる、中間層と磁性層との間の格子不整合は約4%未満である。
一般的に、本開示は、結晶配向中間層と酸化物などの非磁性材料によって分離される磁性粒子を有する粒子磁性層との間に介在する(本明細書中では「磁気ゼロ」層と称される)層を含む積層体に関する。いくつかの場合、磁気ゼロ層は、非磁性層であるか、または磁気データ記憶装置に用いる垂直磁気記録媒体の一部を形成する飽和磁束密度(BS)が低い磁性層である。結晶配向中間層と磁気記録層との間に磁気ゼロ層を含むことにより、磁気記録媒体を形成する積層体の記録性および/もしくは信頼性を高めることができ、ならびに/または磁気記録媒体を製作するのに用いる工程を改良することができる。たとえば、そのような磁気ゼロ層を含まない実質的に同様の積層体と比較して、磁気ゼロ層を含むことにより、磁性層の磁気保磁力(Hc)を増大させたり、たとえば磁性層の磁気保磁力と核生成磁界との間の差(Hc−Hn)またはアルファパラメータの増大が示すように磁性層の磁気交換減結合を増大させたり、磁性層中の交換減結合の均一性を増大させたり、媒体のビットエラーレート(BER)を減少させたり、媒体の信号対ノイズ比(SNR)を増大させたり、媒体の面記録密度を増大させたり、および/または磁気記録媒体の他の性質を改良したりすることがある。
図2に示されるものと実質的に同様の層構成を有するさまざまな例示的な垂直磁気記録媒体を準備し、評価した。層間層と磁気記録層との間の磁気ゼロ層(「Mo層」)の影響を評価するため、磁気ゼロ層の厚みが、0(すなわち磁気ゼロ層なし)、約2オングストローム、約7オングストローム、約16オングストローム、約23オングストローム、および約33オングストロームの例を生成した。
中間層と磁気記録層との間に磁気ゼロ層を含むことの影響をさらに評価するため、3種類の例示的な磁気記録媒体を準備し、評価した。(タイプAと称する)第1の例示的な媒体は実施例1で用いたものと実質的に同じであったが、磁気ゼロ層を有しなかった。(タイプBと称する)第2の例示的な媒体および(タイプCと称する)第3の例は、実施例1で用いたものと実質的に同じ構成を有し、磁気ゼロ層の厚みは約7オングストロームであった。しかしながら、タイプBおよびタイプCの例を準備するのに用いた工程は異なった。タイプBは、タイプBの媒体における層間層と磁性層との間の磁性ゼロの挿入を除き、スパッタリング工程および円板状構造がタイプAと同じであった。タイプCの媒体は、第1の磁気記録層(図2の第1の磁性層246を参照)のために異なるスパッタリング工程を用いることを除き、スパッタリング工程および円板状構造がタイプBの媒体と同じであった。
さまざまな実施形態の以上の説明は、限定のためではなく図示および説明の目的のために提示された。開示する実施形態は、網羅的であったり、可能な実現例を開示する実施形態に限定したりすることを意図するものではない。多数の変形例および修正例が上記教示に照らして可能である。
Claims (10)
- 積層体であって、
結晶配向中間層と、
前記中間層上に配設される磁気ゼロ層とを備え、前記磁気ゼロ層は、非磁性であるか、または飽和磁束密度(BS)が約100emu/cc未満であり、かつ非磁性分離体によって分離される粒子を備え、さらに
前記磁気ゼロ層上に配設される磁性層を備え、前記磁性層は非磁性分離体によって分離される強磁性粒子を備え、前記中間層と前記磁性層との間の格子不整合は約4%未満である、積層体。 - 前記結晶配向中間層と前記磁性層との間の結晶ロッキングカーブの半値幅(FWHM)の差は約0.35度未満である、請求項1に記載の積層体。
- 前記磁気ゼロ層は、前記磁性層と同じ元素を異なる割合で備える、請求項1に記載の積層体。
- 前記磁気ゼロ層の厚みは約25Å未満である、請求項1に記載の積層体。
- 前記磁性層は、前記磁気ゼロ層に隣接する第1の磁性層と、交換遮断層によって前記第1の磁性層から離される第2の磁性層とを備える、請求項1に記載の積層体。
- 前記磁気ゼロ層の前記粒子は、HCP結晶構造および(0001)成長方向を有する柱状粒子である、請求項1に記載の積層体。
- 前記磁気ゼロ層はPtおよびRuのうち1つ以上を備える、請求項1に記載の積層体。
- 積層体を作製する方法であって、
結晶配向中間層を堆積するステップと、
前記結晶配向中間層の上に磁気ゼロ層を堆積するステップとを備え、前記磁気ゼロ層は、非磁性であるか、または飽和磁束密度(BS)が約100emu/cc未満であり、かつ非磁性分離体によって分離される粒子を備え、さらに
前記磁気ゼロ層の上に磁性層を堆積するステップを備え、前記磁性層は、非磁性分離体によって分離される強磁性粒子を備え、前記中間層と前記磁性層との間の格子不整合は約4%未満である、方法。 - 前記磁気ゼロ層を堆積するステップは、酸化物を備える分離体によって分離される、CoCrと、PtおよびRuのうち1つ以上とを備える粒子を堆積するステップを備え、
前記磁性層を堆積するステップは、前記酸化物を備える分離体によって分離される、Co合金を備える粒子を堆積するステップを備え、前記磁気ゼロ層は前記磁性層よりも高い堆積百分率の前記酸化物を含む、請求項8に記載の方法。 - 前記結晶配向中間層を堆積するステップは、約80mTorr未満の圧力でスパッタリングするステップを備える、請求項8に記載の方法。
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US13/037,288 US9093101B2 (en) | 2011-02-28 | 2011-02-28 | Stack including a magnetic zero layer |
US13/037,288 | 2011-02-28 |
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JP2012181908A true JP2012181908A (ja) | 2012-09-20 |
JP2012181908A5 JP2012181908A5 (ja) | 2015-03-05 |
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US (2) | US9093101B2 (ja) |
JP (1) | JP5923337B2 (ja) |
CN (1) | CN102682789A (ja) |
DE (1) | DE102012003821A1 (ja) |
MY (1) | MY180827A (ja) |
SG (2) | SG10201500452SA (ja) |
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Also Published As
Publication number | Publication date |
---|---|
DE102012003821A1 (de) | 2012-09-20 |
CN102682789A (zh) | 2012-09-19 |
TW201301276A (zh) | 2013-01-01 |
JP5923337B2 (ja) | 2016-05-24 |
US9093101B2 (en) | 2015-07-28 |
SG183646A1 (en) | 2012-09-27 |
US20120219827A1 (en) | 2012-08-30 |
TWI564886B (zh) | 2017-01-01 |
US9734857B2 (en) | 2017-08-15 |
SG10201500452SA (en) | 2015-03-30 |
US20150332721A1 (en) | 2015-11-19 |
MY180827A (en) | 2020-12-09 |
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