JP2012156179A5 - - Google Patents

Download PDF

Info

Publication number
JP2012156179A5
JP2012156179A5 JP2011011809A JP2011011809A JP2012156179A5 JP 2012156179 A5 JP2012156179 A5 JP 2012156179A5 JP 2011011809 A JP2011011809 A JP 2011011809A JP 2011011809 A JP2011011809 A JP 2011011809A JP 2012156179 A5 JP2012156179 A5 JP 2012156179A5
Authority
JP
Japan
Prior art keywords
squeegee
longitudinal direction
sensitive adhesive
pressure
adhesive sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011011809A
Other languages
English (en)
Japanese (ja)
Other versions
JP5780445B2 (ja
JP2012156179A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011011809A priority Critical patent/JP5780445B2/ja
Priority claimed from JP2011011809A external-priority patent/JP5780445B2/ja
Publication of JP2012156179A publication Critical patent/JP2012156179A/ja
Publication of JP2012156179A5 publication Critical patent/JP2012156179A5/ja
Application granted granted Critical
Publication of JP5780445B2 publication Critical patent/JP5780445B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011011809A 2011-01-24 2011-01-24 半導体ウエーハブレーキング装置及び方法 Expired - Fee Related JP5780445B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011011809A JP5780445B2 (ja) 2011-01-24 2011-01-24 半導体ウエーハブレーキング装置及び方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011011809A JP5780445B2 (ja) 2011-01-24 2011-01-24 半導体ウエーハブレーキング装置及び方法

Publications (3)

Publication Number Publication Date
JP2012156179A JP2012156179A (ja) 2012-08-16
JP2012156179A5 true JP2012156179A5 (enrdf_load_stackoverflow) 2014-02-27
JP5780445B2 JP5780445B2 (ja) 2015-09-16

Family

ID=46837651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011011809A Expired - Fee Related JP5780445B2 (ja) 2011-01-24 2011-01-24 半導体ウエーハブレーキング装置及び方法

Country Status (1)

Country Link
JP (1) JP5780445B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6506606B2 (ja) * 2015-04-27 2019-04-24 株式会社ディスコ ウエーハの分割方法
JP6663805B2 (ja) * 2016-06-28 2020-03-13 東レエンジニアリング株式会社 実装装置および実装方法
JP2018120915A (ja) * 2017-01-24 2018-08-02 株式会社ディスコ 板状物の加工方法
JP7214306B2 (ja) * 2018-04-27 2023-01-30 株式会社ディスコ 被加工物の加工方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2868820B2 (ja) * 1990-01-12 1999-03-10 株式会社東芝 ブレーキング装置及びこれを用いたブレーキング方法
JPH04263944A (ja) * 1991-02-19 1992-09-18 Hitachi Ltd 表面実装ic部品毎はんだペースト印刷方法
JPH11251408A (ja) * 1998-03-05 1999-09-17 Hitachi Ltd チップ分離方法および装置
JP2004243575A (ja) * 2003-02-12 2004-09-02 Fujitsu Ltd 印刷版及び印刷方法
JP2006024591A (ja) * 2004-07-06 2006-01-26 Hugle Electronics Inc ブレーキングエキスパンダ
JP2006066539A (ja) * 2004-08-25 2006-03-09 Canon Machinery Inc ウェーハ分割方法およびダイボンダー
JP5177992B2 (ja) * 2006-10-27 2013-04-10 浜松ホトニクス株式会社 加工対象物切断方法
JP5312970B2 (ja) * 2009-02-06 2013-10-09 株式会社ディスコ 半導体ウエーハの分割方法

Similar Documents

Publication Publication Date Title
JP2011100877A5 (enrdf_load_stackoverflow)
JP2012235098A5 (ja) 半導体装置
EP2733725A4 (en) dry etching
JP2017005051A5 (enrdf_load_stackoverflow)
JP2010149512A5 (enrdf_load_stackoverflow)
JP2013500200A5 (enrdf_load_stackoverflow)
JP2013083044A5 (enrdf_load_stackoverflow)
JP2013527039A5 (enrdf_load_stackoverflow)
JP2013215813A5 (enrdf_load_stackoverflow)
JP2013023736A5 (enrdf_load_stackoverflow)
JP2012156179A5 (enrdf_load_stackoverflow)
JP2013132155A5 (enrdf_load_stackoverflow)
JP2014104515A5 (enrdf_load_stackoverflow)
JP2014091849A5 (enrdf_load_stackoverflow)
JP2014062211A5 (enrdf_load_stackoverflow)
JP2014179473A5 (enrdf_load_stackoverflow)
JP2014048524A5 (enrdf_load_stackoverflow)
JP2016075054A5 (enrdf_load_stackoverflow)
JP2013249654A5 (enrdf_load_stackoverflow)
JP2012148874A5 (enrdf_load_stackoverflow)
CN302110908S (zh) 高压清洗机(abw—vag)
CN302053772S (zh) 缓速器(2)
CN302383245S (zh) 高压清洗机(abw—vai)
CN302199301S (zh) 工作台(yh-wb031)
CN302430823S (zh) 高压清洗机(ninja)