JP2012138542A5 - - Google Patents

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Publication number
JP2012138542A5
JP2012138542A5 JP2010291542A JP2010291542A JP2012138542A5 JP 2012138542 A5 JP2012138542 A5 JP 2012138542A5 JP 2010291542 A JP2010291542 A JP 2010291542A JP 2010291542 A JP2010291542 A JP 2010291542A JP 2012138542 A5 JP2012138542 A5 JP 2012138542A5
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JP
Japan
Prior art keywords
vacuum
chamber
container
valve
vacuum transfer
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Granted
Application number
JP2010291542A
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English (en)
Japanese (ja)
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JP2012138542A (ja
JP5785712B2 (ja
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Priority claimed from JP2010291542A external-priority patent/JP5785712B2/ja
Priority to JP2010291542A priority Critical patent/JP5785712B2/ja
Priority to TW100101804A priority patent/TWI445121B/zh
Priority to US13/022,313 priority patent/US8747046B2/en
Priority to KR1020110011081A priority patent/KR101238768B1/ko
Priority to CN201110036139.8A priority patent/CN102569016B/zh
Publication of JP2012138542A publication Critical patent/JP2012138542A/ja
Publication of JP2012138542A5 publication Critical patent/JP2012138542A5/ja
Publication of JP5785712B2 publication Critical patent/JP5785712B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010291542A 2010-12-28 2010-12-28 真空処理装置 Active JP5785712B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2010291542A JP5785712B2 (ja) 2010-12-28 2010-12-28 真空処理装置
TW100101804A TWI445121B (zh) 2010-12-28 2011-01-18 Vacuum processing device
US13/022,313 US8747046B2 (en) 2010-12-28 2011-02-07 Vacuum processing apparatus
KR1020110011081A KR101238768B1 (ko) 2010-12-28 2011-02-08 진공처리장치
CN201110036139.8A CN102569016B (zh) 2010-12-28 2011-02-09 真空处理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010291542A JP5785712B2 (ja) 2010-12-28 2010-12-28 真空処理装置

Publications (3)

Publication Number Publication Date
JP2012138542A JP2012138542A (ja) 2012-07-19
JP2012138542A5 true JP2012138542A5 (enExample) 2014-02-13
JP5785712B2 JP5785712B2 (ja) 2015-09-30

Family

ID=46317003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010291542A Active JP5785712B2 (ja) 2010-12-28 2010-12-28 真空処理装置

Country Status (5)

Country Link
US (1) US8747046B2 (enExample)
JP (1) JP5785712B2 (enExample)
KR (1) KR101238768B1 (enExample)
CN (1) CN102569016B (enExample)
TW (1) TWI445121B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101685752B1 (ko) * 2011-02-08 2016-12-12 도쿄엘렉트론가부시키가이샤 기판 중계 장치, 기판 중계 방법, 기판 처리 장치
JP2014036025A (ja) * 2012-08-07 2014-02-24 Hitachi High-Technologies Corp 真空処理装置または真空処理装置の運転方法
JP6059934B2 (ja) * 2012-09-28 2017-01-11 株式会社日立ハイテクノロジーズ 試料搬送装置のティーチング方法
JP6120621B2 (ja) * 2013-03-14 2017-04-26 株式会社日立ハイテクノロジーズ 真空処理装置及びその運転方法
JP6293499B2 (ja) * 2014-01-27 2018-03-14 株式会社日立ハイテクノロジーズ 真空処理装置
CN106449466A (zh) * 2015-08-11 2017-02-22 中微半导体设备(上海)有限公司 一种基片处理系统
JP6625098B2 (ja) * 2017-07-20 2019-12-25 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理システム、半導体装置の製造方法およびプログラム
TWI778102B (zh) * 2017-08-09 2022-09-21 荷蘭商Ａｓｍ智慧財產控股公司 用於儲存基板用之卡匣的儲存設備及備有其之處理設備
US11769682B2 (en) 2017-08-09 2023-09-26 Asm Ip Holding B.V. Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
JP7115879B2 (ja) 2018-03-23 2022-08-09 株式会社日立ハイテク 真空処理装置の運転方法
US10483142B1 (en) * 2018-09-14 2019-11-19 Lam Research Corporation Vacuum robot positioning system with reduced sensitivity to chamber pressure
CN110467151A (zh) * 2019-09-04 2019-11-19 烟台睿创微纳技术股份有限公司 一种mems晶圆封装设备及方法
CN113728422B (zh) 2020-03-24 2024-01-09 株式会社日立高新技术 真空处理装置
CN115910886B (zh) * 2022-12-28 2024-04-16 深圳市纳设智能装备股份有限公司 传输腔、半导体设备及晶圆传输方法
CN119890085B (zh) * 2024-12-31 2025-11-25 东方晶源微电子科技(北京)股份有限公司 前道检测设备及其控制方法

Family Cites Families (22)

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JPH07519B2 (ja) 1987-06-15 1995-01-11 日新電機株式会社 分子線エピタキシ−装置
US5067218A (en) * 1990-05-21 1991-11-26 Motorola, Inc. Vacuum wafer transport and processing system and method using a plurality of wafer transport arms
US5286296A (en) * 1991-01-10 1994-02-15 Sony Corporation Multi-chamber wafer process equipment having plural, physically communicating transfer means
US5766360A (en) * 1992-03-27 1998-06-16 Kabushiki Kaisha Toshiba Substrate processing apparatus and substrate processing method
TW295677B (enExample) * 1994-08-19 1997-01-11 Tokyo Electron Co Ltd
JPH08340034A (ja) * 1995-06-09 1996-12-24 Mitsui Toatsu Chem Inc 薄膜形成装置
TW442891B (en) * 1998-11-17 2001-06-23 Tokyo Electron Ltd Vacuum processing system
JP2003045947A (ja) * 2001-07-27 2003-02-14 Canon Inc 基板処理装置及び露光装置
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KR101050275B1 (ko) * 2002-05-21 2011-07-19 에이에스엠 아메리카, 인코포레이티드 반도체 프로세싱 도구 내 챔버 간의 상호 오염 감소 방법
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CN1902031A (zh) * 2003-11-10 2007-01-24 布卢希弗特科技公司 用于处理基于真空的半导体处理系统中的工件的方法和系统
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US7458763B2 (en) * 2003-11-10 2008-12-02 Blueshift Technologies, Inc. Mid-entry load lock for semiconductor handling system
JP2007186757A (ja) * 2006-01-13 2007-07-26 Tokyo Electron Ltd 真空処理装置及び真空処理方法
KR100847888B1 (ko) * 2006-12-12 2008-07-23 세메스 주식회사 반도체 소자 제조 장치
JP2009062604A (ja) * 2007-09-10 2009-03-26 Tokyo Electron Ltd 真空処理システムおよび基板搬送方法
CN101842890A (zh) * 2007-11-09 2010-09-22 佳能安内华股份有限公司 在线型晶圆输送装置
JP5586271B2 (ja) * 2010-03-02 2014-09-10 株式会社日立ハイテクノロジーズ 真空処理装置及びプログラム
JP2012028659A (ja) * 2010-07-27 2012-02-09 Hitachi High-Technologies Corp 真空処理装置
JP2013143513A (ja) * 2012-01-12 2013-07-22 Hitachi High-Technologies Corp 真空処理装置

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