JP2012135782A - レーザー光照射装置およびレーザー光照射方法 - Google Patents

レーザー光照射装置およびレーザー光照射方法 Download PDF

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Publication number
JP2012135782A
JP2012135782A JP2010288671A JP2010288671A JP2012135782A JP 2012135782 A JP2012135782 A JP 2012135782A JP 2010288671 A JP2010288671 A JP 2010288671A JP 2010288671 A JP2010288671 A JP 2010288671A JP 2012135782 A JP2012135782 A JP 2012135782A
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Japan
Prior art keywords
laser beam
laser
film
oscillator
output value
Prior art date
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Withdrawn
Application number
JP2010288671A
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English (en)
Japanese (ja)
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JP2012135782A5 (enExample
Inventor
Shin Oikawa
伸 及川
Rikiya Matsumoto
力也 松本
Sung Wook Min
晟旭 閔
Jae Hyoung Cho
在亨 趙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HARDRAM CO Ltd
Sumitomo Chemical Co Ltd
Original Assignee
HARDRAM CO Ltd
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HARDRAM CO Ltd, Sumitomo Chemical Co Ltd filed Critical HARDRAM CO Ltd
Priority to JP2010288671A priority Critical patent/JP2012135782A/ja
Priority to TW100147292A priority patent/TW201233482A/zh
Priority to CN2011800616215A priority patent/CN103260816A/zh
Priority to KR1020137018981A priority patent/KR20140019313A/ko
Priority to PCT/JP2011/079832 priority patent/WO2012086764A1/ja
Publication of JP2012135782A publication Critical patent/JP2012135782A/ja
Publication of JP2012135782A5 publication Critical patent/JP2012135782A5/ja
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
    • B29D11/00788—Producing optical films
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic material
    • B23K2103/42—Plastics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Laser Beam Processing (AREA)
  • Polarising Elements (AREA)
JP2010288671A 2010-12-24 2010-12-24 レーザー光照射装置およびレーザー光照射方法 Withdrawn JP2012135782A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2010288671A JP2012135782A (ja) 2010-12-24 2010-12-24 レーザー光照射装置およびレーザー光照射方法
TW100147292A TW201233482A (en) 2010-12-24 2011-12-20 Laser beam irradiation device and laser beam irradiation method
CN2011800616215A CN103260816A (zh) 2010-12-24 2011-12-22 激光照射装置及激光照射方法
KR1020137018981A KR20140019313A (ko) 2010-12-24 2011-12-22 레이저광 조사 장치 및 레이저광 조사 방법
PCT/JP2011/079832 WO2012086764A1 (ja) 2010-12-24 2011-12-22 レーザー光照射装置およびレーザー光照射方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010288671A JP2012135782A (ja) 2010-12-24 2010-12-24 レーザー光照射装置およびレーザー光照射方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014055553A Division JP2014121736A (ja) 2014-03-18 2014-03-18 レーザー光照射装置およびレーザー光照射方法

Publications (2)

Publication Number Publication Date
JP2012135782A true JP2012135782A (ja) 2012-07-19
JP2012135782A5 JP2012135782A5 (enExample) 2012-08-30

Family

ID=46314031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010288671A Withdrawn JP2012135782A (ja) 2010-12-24 2010-12-24 レーザー光照射装置およびレーザー光照射方法

Country Status (5)

Country Link
JP (1) JP2012135782A (enExample)
KR (1) KR20140019313A (enExample)
CN (1) CN103260816A (enExample)
TW (1) TW201233482A (enExample)
WO (1) WO2012086764A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013094758A1 (ja) * 2011-12-22 2013-06-27 住友化学株式会社 レーザー光照射システム、レーザー光照射方法及び記録媒体

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6342949B2 (ja) 2016-05-17 2018-06-13 ファナック株式会社 反射光を抑制しながらレーザ加工を行うレーザ加工装置及びレーザ加工方法
JP7475220B2 (ja) * 2020-07-03 2024-04-26 住友重機械工業株式会社 レーザパワー計測装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6478694A (en) * 1987-09-19 1989-03-24 Hitachi Maxell Method and device for cutting raw film consisting of plastic film as base material
JPH09122946A (ja) * 1995-10-31 1997-05-13 Hitachi Cable Ltd 炭酸ガスレーザ光を用いた基板の加工方法およびその加工装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000357835A (ja) * 1999-06-15 2000-12-26 Amada Eng Center Co Ltd レーザ発振器
JP4274251B2 (ja) * 2007-01-24 2009-06-03 ソニー株式会社 レーザ描画方法及びレーザ描画装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6478694A (en) * 1987-09-19 1989-03-24 Hitachi Maxell Method and device for cutting raw film consisting of plastic film as base material
JPH09122946A (ja) * 1995-10-31 1997-05-13 Hitachi Cable Ltd 炭酸ガスレーザ光を用いた基板の加工方法およびその加工装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013094758A1 (ja) * 2011-12-22 2013-06-27 住友化学株式会社 レーザー光照射システム、レーザー光照射方法及び記録媒体

Also Published As

Publication number Publication date
TW201233482A (en) 2012-08-16
WO2012086764A1 (ja) 2012-06-28
CN103260816A (zh) 2013-08-21
KR20140019313A (ko) 2014-02-14

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