JP2012126967A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2012126967A5 JP2012126967A5 JP2010280396A JP2010280396A JP2012126967A5 JP 2012126967 A5 JP2012126967 A5 JP 2012126967A5 JP 2010280396 A JP2010280396 A JP 2010280396A JP 2010280396 A JP2010280396 A JP 2010280396A JP 2012126967 A5 JP2012126967 A5 JP 2012126967A5
- Authority
- JP
- Japan
- Prior art keywords
- plating
- nickel
- tank
- plating solution
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 230000005484 gravity Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 238000005273 aeration Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 1
- 230000009469 supplementation Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010280396A JP5386471B2 (ja) | 2010-12-16 | 2010-12-16 | 無電解めっき装置及び無電解めっき方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010280396A JP5386471B2 (ja) | 2010-12-16 | 2010-12-16 | 無電解めっき装置及び無電解めっき方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012126967A JP2012126967A (ja) | 2012-07-05 |
| JP2012126967A5 true JP2012126967A5 (enExample) | 2013-04-11 |
| JP5386471B2 JP5386471B2 (ja) | 2014-01-15 |
Family
ID=46644328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010280396A Expired - Fee Related JP5386471B2 (ja) | 2010-12-16 | 2010-12-16 | 無電解めっき装置及び無電解めっき方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5386471B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114516655B (zh) * | 2022-02-09 | 2023-07-04 | 广州科城环保科技有限公司 | 一种线路板废物生产氢氧化铜的方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0633254A (ja) * | 1992-07-17 | 1994-02-08 | Nec Corp | 無電解銅めっき装置 |
| JP2774905B2 (ja) * | 1992-09-03 | 1998-07-09 | 松下電工株式会社 | 無電解メッキ法 |
| JP3809608B2 (ja) * | 2002-04-26 | 2006-08-16 | 株式会社日立製作所 | 無電解銅めっき方法とその装置及びその銅補給液の作製方法とその装置 |
| JP3817645B2 (ja) * | 2002-05-14 | 2006-09-06 | 株式会社日立製作所 | 無電解銅めっき方法とその装置及びその銅補給装置並びにその無電解銅めっき補給液の作成方法とその装置 |
| JP2007302967A (ja) * | 2006-05-12 | 2007-11-22 | Mitsubishi Electric Corp | 無電解めっき方法 |
-
2010
- 2010-12-16 JP JP2010280396A patent/JP5386471B2/ja not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2013540893A5 (enExample) | ||
| JP2012517690A5 (enExample) | ||
| EP2535343A3 (en) | Organoaminosilane precursors and methods for making and using same | |
| JP2012251240A5 (enExample) | ||
| JP2016528378A5 (enExample) | ||
| JP2015510502A5 (enExample) | ||
| JP2015512936A5 (enExample) | ||
| JP2012009432A5 (ja) | 蓄電装置の作製方法 | |
| JP2013075773A5 (enExample) | ||
| JP2012183583A5 (enExample) | ||
| JP2012142543A5 (enExample) | ||
| JP2011525472A5 (enExample) | ||
| JP2011530002A5 (enExample) | ||
| JP2014504333A5 (enExample) | ||
| TWD155582S (zh) | 用於容置半導體基板之容器 | |
| JP2010047434A5 (enExample) | ||
| JP2014515311A5 (enExample) | ||
| JP2016013995A5 (enExample) | ||
| JP2012216765A5 (enExample) | ||
| WO2010107878A3 (en) | Method and composition for depositing ruthenium with assistive metal species | |
| JP2018509309A5 (enExample) | ||
| JP2012126967A5 (enExample) | ||
| WO2011005653A8 (en) | Solution based precursors | |
| JP2015163736A5 (enExample) | ||
| JP2009538982A5 (enExample) |