JP2012108204A - 光学素子、光学素子の製造方法、及び電子機器 - Google Patents
光学素子、光学素子の製造方法、及び電子機器 Download PDFInfo
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- JP2012108204A JP2012108204A JP2010255124A JP2010255124A JP2012108204A JP 2012108204 A JP2012108204 A JP 2012108204A JP 2010255124 A JP2010255124 A JP 2010255124A JP 2010255124 A JP2010255124 A JP 2010255124A JP 2012108204 A JP2012108204 A JP 2012108204A
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- optical element
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- 230000003287 optical effect Effects 0.000 title claims abstract description 192
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 238000000034 method Methods 0.000 title abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 45
- 239000010410 layer Substances 0.000 claims description 289
- 239000010408 film Substances 0.000 claims description 131
- 238000003384 imaging method Methods 0.000 claims description 21
- 238000010030 laminating Methods 0.000 claims description 6
- 239000012788 optical film Substances 0.000 claims description 4
- 239000002344 surface layer Substances 0.000 claims description 4
- 239000000428 dust Substances 0.000 abstract description 25
- 230000000052 comparative effect Effects 0.000 description 25
- 238000002834 transmittance Methods 0.000 description 24
- 238000007740 vapor deposition Methods 0.000 description 19
- 239000011521 glass Substances 0.000 description 16
- 239000000843 powder Substances 0.000 description 15
- 229910010413 TiO 2 Inorganic materials 0.000 description 11
- -1 ditantalum pentoxide Chemical compound 0.000 description 10
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 239000004698 Polyethylene Substances 0.000 description 8
- 230000001133 acceleration Effects 0.000 description 8
- 229920000573 polyethylene Polymers 0.000 description 8
- 239000004973 liquid crystal related substance Substances 0.000 description 7
- 230000010287 polarization Effects 0.000 description 7
- 229920000742 Cotton Polymers 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 6
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 229910052731 fluorine Inorganic materials 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- 230000035699 permeability Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 4
- 150000003961 organosilicon compounds Chemical class 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 229910000420 cerium oxide Inorganic materials 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 3
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010410 dusting Methods 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 2
- 238000010191 image analysis Methods 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012806 monitoring device Methods 0.000 description 2
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 2
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 238000011056 performance test Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- DFUYAWQUODQGFF-UHFFFAOYSA-N 1-ethoxy-1,1,2,2,3,3,4,4,4-nonafluorobutane Chemical compound CCOC(F)(F)C(F)(F)C(F)(F)C(F)(F)F DFUYAWQUODQGFF-UHFFFAOYSA-N 0.000 description 1
- 241000257465 Echinoidea Species 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
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- Optical Filters (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Projection Apparatus (AREA)
- Laminated Bodies (AREA)
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010255124A JP2012108204A (ja) | 2010-11-15 | 2010-11-15 | 光学素子、光学素子の製造方法、及び電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010255124A JP2012108204A (ja) | 2010-11-15 | 2010-11-15 | 光学素子、光学素子の製造方法、及び電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012108204A true JP2012108204A (ja) | 2012-06-07 |
| JP2012108204A5 JP2012108204A5 (enrdf_load_stackoverflow) | 2013-12-26 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010255124A Withdrawn JP2012108204A (ja) | 2010-11-15 | 2010-11-15 | 光学素子、光学素子の製造方法、及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2012108204A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110716256A (zh) * | 2018-07-12 | 2020-01-21 | 采钰科技股份有限公司 | 光学元件及其制造方法 |
| CN111095048A (zh) * | 2017-09-21 | 2020-05-01 | 富士胶片株式会社 | 近红外线截止滤光片的制造方法、层叠体及套件 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63137301U (enrdf_load_stackoverflow) * | 1987-03-02 | 1988-09-09 | ||
| JPH10282307A (ja) * | 1997-04-04 | 1998-10-23 | Toppan Printing Co Ltd | 反射防止フィルム |
| JP2004126530A (ja) * | 2002-08-07 | 2004-04-22 | Hoya Corp | 反射防止膜付き基板の製造方法 |
| JP2007298951A (ja) * | 2006-04-04 | 2007-11-15 | Seiko Epson Corp | 光学多層膜フィルタ、光学多層膜フィルタの製造方法および電子機器装置 |
| JP2010231173A (ja) * | 2009-03-04 | 2010-10-14 | Seiko Epson Corp | 光学物品およびその製造方法 |
-
2010
- 2010-11-15 JP JP2010255124A patent/JP2012108204A/ja not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63137301U (enrdf_load_stackoverflow) * | 1987-03-02 | 1988-09-09 | ||
| JPH10282307A (ja) * | 1997-04-04 | 1998-10-23 | Toppan Printing Co Ltd | 反射防止フィルム |
| JP2004126530A (ja) * | 2002-08-07 | 2004-04-22 | Hoya Corp | 反射防止膜付き基板の製造方法 |
| JP2007298951A (ja) * | 2006-04-04 | 2007-11-15 | Seiko Epson Corp | 光学多層膜フィルタ、光学多層膜フィルタの製造方法および電子機器装置 |
| JP2010231173A (ja) * | 2009-03-04 | 2010-10-14 | Seiko Epson Corp | 光学物品およびその製造方法 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111095048A (zh) * | 2017-09-21 | 2020-05-01 | 富士胶片株式会社 | 近红外线截止滤光片的制造方法、层叠体及套件 |
| CN110716256A (zh) * | 2018-07-12 | 2020-01-21 | 采钰科技股份有限公司 | 光学元件及其制造方法 |
| JP2020013099A (ja) * | 2018-07-12 | 2020-01-23 | 采▲ぎょく▼科技股▲ふん▼有限公司ＶｉｓＥｒａ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｃｏｍｐａｎｙ Ｌｉｍｉｔｅｄ | 光学素子、および、その製造方法 |
| US11231533B2 (en) | 2018-07-12 | 2022-01-25 | Visera Technologies Company Limited | Optical element having dielectric layers formed by ion-assisted deposition and method for fabricating the same |
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