JP2012046814A5 - - Google Patents
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- Publication number
- JP2012046814A5 JP2012046814A5 JP2010192886A JP2010192886A JP2012046814A5 JP 2012046814 A5 JP2012046814 A5 JP 2012046814A5 JP 2010192886 A JP2010192886 A JP 2010192886A JP 2010192886 A JP2010192886 A JP 2010192886A JP 2012046814 A5 JP2012046814 A5 JP 2012046814A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film material
- deposition apparatus
- heat generating
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000463 material Substances 0.000 claims description 281
- 239000010409 thin film Substances 0.000 claims description 217
- 238000010438 heat treatment Methods 0.000 claims description 58
- 238000001704 evaporation Methods 0.000 claims description 38
- 230000008020 evaporation Effects 0.000 claims description 33
- 238000007740 vapor deposition Methods 0.000 claims description 27
- 238000001125 extrusion Methods 0.000 claims description 26
- 230000006837 decompression Effects 0.000 claims description 17
- 239000010408 film Substances 0.000 claims description 15
- 238000001816 cooling Methods 0.000 claims description 14
- 238000001771 vacuum deposition Methods 0.000 claims description 13
- 238000000151 deposition Methods 0.000 claims description 12
- 230000008021 deposition Effects 0.000 claims description 7
- 238000005192 partition Methods 0.000 claims description 5
- 238000011144 upstream manufacturing Methods 0.000 claims description 4
- 230000006698 induction Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 64
- 239000011521 glass Substances 0.000 description 33
- 238000000034 method Methods 0.000 description 20
- 239000010410 layer Substances 0.000 description 19
- 238000007738 vacuum evaporation Methods 0.000 description 14
- 239000007921 spray Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 7
- 230000006866 deterioration Effects 0.000 description 6
- 239000007787 solid Substances 0.000 description 5
- 238000005507 spraying Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000002346 layers by function Substances 0.000 description 4
- 238000010030 laminating Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 150000002894 organic compounds Chemical class 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000005019 vapor deposition process Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009835 boiling Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012769 display material Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010192886A JP2012046814A (ja) | 2010-08-30 | 2010-08-30 | 蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010192886A JP2012046814A (ja) | 2010-08-30 | 2010-08-30 | 蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012046814A JP2012046814A (ja) | 2012-03-08 |
| JP2012046814A5 true JP2012046814A5 (https=) | 2013-08-15 |
Family
ID=45901989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010192886A Pending JP2012046814A (ja) | 2010-08-30 | 2010-08-30 | 蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2012046814A (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014038761A (ja) * | 2012-08-16 | 2014-02-27 | Nitto Denko Corp | 有機ｅｌ素子の製造方法及び蒸着装置 |
| KR102152147B1 (ko) * | 2013-07-26 | 2020-09-04 | 주식회사 선익시스템 | 증발유닛 및 이를 구비한 증착장치 |
| KR101543953B1 (ko) | 2014-03-18 | 2015-08-11 | 주식회사 포스코 | 고상금속 공급장치와 이를 포함한 진공 증착장치 및 고상금속 공급방법 |
| CN106947941B (zh) * | 2017-04-13 | 2019-12-06 | 合肥鑫晟光电科技有限公司 | 蒸镀系统 |
| CN113564534B (zh) * | 2020-04-28 | 2023-05-09 | 宝山钢铁股份有限公司 | 一种真空镀机组镀液连续供给装置及其供给方法 |
| CN115404442B (zh) * | 2022-09-23 | 2023-09-12 | 研博智创任丘科技有限公司 | 一种管道内表面镀膜装置及其使用方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63243264A (ja) * | 1987-03-31 | 1988-10-11 | Matsushita Electric Ind Co Ltd | 薄膜製造装置 |
| JP3189038B2 (ja) * | 1997-01-14 | 2001-07-16 | 住友重機械工業株式会社 | 真空成膜装置の材料供給装置 |
| JP3995038B2 (ja) * | 2001-12-17 | 2007-10-24 | 富士フイルム株式会社 | 蛍光体シート製造装置 |
| US7638168B2 (en) * | 2005-11-10 | 2009-12-29 | Eastman Kodak Company | Deposition system using sealed replenishment container |
| JP4974877B2 (ja) * | 2007-12-28 | 2012-07-11 | 株式会社アルバック | 成膜源、成膜装置 |
| KR101172275B1 (ko) * | 2009-12-31 | 2012-08-08 | 에스엔유 프리시젼 주식회사 | 기화 장치 및 이의 제어 방법 |
-
2010
- 2010-08-30 JP JP2010192886A patent/JP2012046814A/ja active Pending
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